Closed filtering device suitable for chlorosilane
By designing a closed filtration device separated by partitions in the chlorosilane recovery device, the alternating use and purge and desorption of activated carbon filter elements are achieved, and the problem of filtration interruption after activated carbon saturation is solved, which improves working efficiency and meets temperature requirements.
Patent Information
- Application Number
- CN202421172731.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-28
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-05-28
AI Technical Summary
The existing chlorosilane recovery device needs to stop feeding and remove after the activated carbon filter element is adsorbed and saturated, resulting in filtration interruption and affecting working efficiency.
Design a closed filter device, using a middle partition plate to separate the exhaust gas filter cartridge into the left cavity and the right cavity, and the two groups of activated carbon filter elements are alternately filtered, and the chlorosilane is purged through the purge tube to maintain continuous filtration. No interruption.
It realizes that the filtration work is maintained without stopping feeding, significantly improves the working efficiency, and meets the temperature differential requirements through independent heat exchange shells.
Smart Images
Figure CN222151460U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a chlorosilane recovery device, in particular to a closed filtering device suitable for chlorosilane. Background Art
[0002] At present, hydrogen-containing waste gas containing chlorosilane is generated in some chemical production processes. The treatment process is generally to hydrolyze the hydrogen-containing waste gas into hydrogen chloride and silicon dioxide, neutralize the hydrochloric acid with alkali solution, and then absorb it in a water-sealed tank before discharging it into the atmosphere at a high point. However, this treatment method consumes a lot of water and alkali solution, increases solid waste, and makes subsequent treatment difficult. In addition, chlorosilane is treated as waste and cannot be recycled.
[0003] CN 220802430 U discloses a back-blowing type waste gas filter device, which includes a waste gas filter cartridge, multiple activated carbon filter elements, a back-blowing assembly, multiple venturi tubes, a first end cap and a second end cap, multiple activated carbon filter elements are arranged in the waste gas filter cartridge at intervals, the back-blowing assembly is arranged through the side wall of the waste gas filter cartridge, multiple venturi tubes and multiple activated carbon filter elements are arranged one by one, the first end cap is sealed at the bottom of the waste gas filter cartridge, the activated carbon filter element is used to filter the hydrogen-containing waste gas delivered through the feed port on the waste gas filter cartridge to obtain target chlorosilane, the second end cap is arranged on the top of the waste gas filter cartridge, and a discharge port is opened on the second end cap, and the target chlorosilane is output through the discharge port. The device recycles chlorosilane in hydrogen-containing waste gas and reduces the amount of solid waste emissions. However, the following problems still exist during use: when the activated carbon filter element is saturated with chlorosilane, it is necessary to stop feeding and purge to remove the chlorosilane, which causes filtration interruption and affects work efficiency. Utility Model Content
[0004] The purpose of the utility model is to provide a closed filtering device suitable for chlorosilane with reasonable structure and reliable use to solve the above problems, which is convenient for continuous filtering work, conducive to production continuity and significantly improves work efficiency.
[0005] The technical solution of the utility model is:
[0006] A closed filtering device suitable for chlorosilane, comprising an exhaust gas filter cartridge and an activated carbon filter core group, wherein the top of the exhaust gas filter cartridge is provided with a total outlet for separated gas, and the technical key points are as follows: a middle partition is provided in the exhaust gas filter cartridge and is divided into a left cavity and a right cavity by the middle partition, a left feed inlet and a right feed inlet are provided on the bottom plate of the exhaust gas filter cartridge and are respectively connected to the left and right cavities, the outer ends of the left feed inlet and the right feed inlet are respectively connected to the main pipe, the lower parts of the left cavity and the right cavity respectively support the heat exchange shell, and the number of the activated carbon filter core groups is two groups , respectively supported above the heat exchange shells in the left cavity and the right cavity, the heat exchange shells are provided with through hole groups connected to each pair of activated carbon filter elements of the activated carbon filter core group, the tops of the left cavity and the right cavity are respectively provided with hollow sealing covers, the centers of the hollow sealing covers are provided with gas outlets, the bottom surfaces of the hollow sealing covers are provided with a plurality of purge pipes connected with the inner cavities thereof, the outer peripheral surfaces of the hollow sealing covers are provided with purge gas inlet pipelines passing through the exhaust gas filter cartridges, the outer peripheral surfaces of the left cavity and the right cavity are provided with separation liquid outlet pipelines passing through the exhaust gas filter cartridges.
[0007] The above-mentioned closed filtering device suitable for chlorosilane is provided with an exhaust valve at the gas outlet on the hollow sealing cover, a purge valve is provided at the end of the purge pipe of the hollow sealing cover, a first switching valve is provided at the left feed port and the right feed port respectively, and a second switching valve is provided on the separation liquid outlet pipeline of the left cavity and the right cavity respectively.
[0008] The above-mentioned closed filtering device suitable for chlorosilane, the inner wall of the exhaust gas filter cartridge is provided with a support member corresponding to the heat exchange shell.
[0009] The above-mentioned closed filtering device suitable for chlorosilane, the activated carbon filter core group includes a support frame with multiple longitudinal support grooves, an activated carbon filter element arranged in the longitudinal support grooves, and the bottom of the support frame is provided with an expansion hole group corresponding to the through hole group on the heat exchange shell.
[0010] The beneficial effects of the utility model are:
[0011] 1. Use the activated carbon filter core groups in the left and right chambers to perform filtering work alternately. When the activated carbon filter core group in the left chamber is saturated with adsorption, switch the activated carbon filter core group in the right chamber to perform filtering work, and at the same time purge the activated carbon filter core group in the left chamber to separate the adsorbed chlorosilane from the activated carbon filter core group, collect it in the lower part of the left chamber and discharge it to the separation liquid outlet pipeline. Conversely, when the activated carbon filter core group in the right chamber is saturated with adsorption, switch the activated carbon filter core group in the left chamber to perform filtering work, and at the same time purge the activated carbon filter core group in the right chamber to separate the adsorbed chlorosilane from the activated carbon filter core group, collect it in the lower part of the right chamber and discharge it to the separation liquid outlet pipeline. In this way, there is no need to stop feeding, maintain the continuity of filtering work, and thus significantly improve work efficiency.
[0012] 2. Independent heat exchange shells are provided in the left cavity and the right cavity respectively, thereby ensuring the temperature difference requirements of the filtration process and the desorption of chlorosilane in the left and right cavities at the same time. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 It is a structural schematic diagram of the utility model;
[0014] Figure 2 yes Figure 1 Enlarged view of part A in the middle.
[0015] In the figure: 1. separation gas main outlet, 2. exhaust gas filter cartridge, 3. gas outlet, 4. hollow sealing cover, 5. purge gas inlet pipeline, 6. purge pipe, 7. activated carbon filter core group, 701. support frame, 702. activated carbon filter element, 703. expansion group, 8. heat exchange shell, 801. through hole group, 9. separation liquid outlet pipeline, 10. second switching valve, 11. main pipe, 12. left feed port, 13. right feed port, 14. support, 15. first switching valve, 16. purge valve, 17. exhaust valve, 18. middle partition, 19. left cavity, 20. right cavity. DETAILED DESCRIPTION
[0016] The utility model is described in detail according to the accompanying drawings of the specification.
[0017] like Figure 1 , Figure 2 As shown, the closed filter device suitable for chlorosilane includes an exhaust gas filter cartridge 2 and an activated carbon filter core group 7. The top of the exhaust gas filter cartridge 2 is provided with a separation gas total outlet 1.
[0018] The waste gas filter cartridge 2 is provided with a middle partition 18 and is divided into a left cavity 19 and a right cavity 20 by the middle partition 18. The bottom plate of the waste gas filter cartridge 2 is provided with a left feed port 12 and a right feed port 13 respectively connected to the left and right cavities, and the outer ends of the left feed port 12 and the right feed port 13 are respectively connected to the main pipe 11. The left feed port 12 and the right feed port 13 are respectively provided with a first switching valve 15.
[0019] The lower parts of the left cavity 19 and the right cavity 20 support the heat exchange housing 8 respectively. The number of the activated carbon filter core groups 7 is two, which are supported above the heat exchange housing 8 in the left cavity 19 and the right cavity 20 respectively. The heat exchange housing 8 is provided with a through hole group 801 connected with each pair of activated carbon filter cores 702 of the activated carbon filter core group 7. The activated carbon filter core group 7 includes a support frame 701 with a plurality of longitudinal support grooves and an activated carbon filter core 702 arranged in the longitudinal support groove. The bottom of the support frame 701 is provided with an expansion hole group 703 corresponding to the through hole group 801 on the heat exchange housing. The inner wall of the exhaust gas filter cartridge 2 is provided with a support member 14 corresponding to the heat exchange housing 8.
[0020] The tops of the left cavity 19 and the right cavity 20 are respectively provided with hollow isolation covers 4, the center of the hollow isolation covers 4 is provided with a gas outlet 3, the bottom surface of the hollow isolation covers 4 is provided with a plurality of purge pipes 6 connected with the inner cavity thereof, and the outer peripheral surface of the hollow isolation covers 4 is provided with a purge gas inlet pipeline 5 passing through the exhaust gas filter cartridge 2. An exhaust valve 17 is provided at the gas outlet 3 on the hollow isolation covers 4, and a purge valve 16 is provided at the end of the purge pipe 6 of the hollow isolation covers 4.
[0021] A separation liquid outlet pipeline 9 passing through the exhaust gas filter cartridge 2 is provided on the outer circumferential surface of the left cavity 19 and the right cavity 20 , and a second switching valve 10 is provided on the separation liquid outlet pipeline 9 of the left cavity and the right cavity, respectively.
[0022] Working principle:
[0023] 1. First, use the activated carbon filter core group 7 in the left cavity 19 to perform filtering. Open the first switching valve 15 of the left feed port 12, and the material to be separated enters the left cavity 19 through the main pipe 11 and the first switching valve 15 of the left feed port 12. The heat exchange medium is pre-introduced into the heat exchange shell 8 in the left cavity 19 to reach the required heat exchange temperature. The material rises through the through hole group 801 on the heat exchange shell 8 and the expansion hole group 703 of the support frame to enter the activated carbon filter core group 7. After the activated carbon filter core group 7 adsorbs and removes chlorosilane, it is discharged to the separation gas total outlet 1 through the exhaust valve 3 of the left cavity 19.
[0024] 2. When the activated carbon filter core group 7 in the left cavity 19 is saturated with adsorption, the activated carbon filter core group 7 in the right cavity 20 is switched to perform filtering. That is, the first switching valve 15 of the left feed inlet 12 and the exhaust valve 17 of the left cavity 19 are closed, and the first switching valve 15 of the right feed inlet 13 and the exhaust valve 17 of the right cavity 20 are opened. The adsorption and exhaust operations are the same as above.
[0025] 3. At the same time, the compressed purge gas is filled into the hollow sealing cover 4 in the left cavity 19, and the purge gas is blown to the activated carbon filter core group 7 in the left cavity 19 through each purge pipe 6. At this time, the temperature of the heat exchange medium is adjusted in the heat exchange shell 8 to make the adsorbed chlorosilane separate from the activated carbon filter core group 7, and then collected in the lower part of the left cavity 19 and discharged to the separation liquid outlet pipeline 9, and discharged to the next separation process through the second switching valve 10.
[0026] The above is a detailed description of the embodiments of the utility model, but the above contents are only preferred embodiments of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of the invention of the utility model should still fall within the scope of this patent.
Claims
1. A closed filtering device suitable for chlorosilane, comprising an exhaust gas filter cartridge and an activated carbon filter core assembly, wherein the top of the exhaust gas filter cartridge is provided with a total outlet for separation gas. Features: A middle partition is provided in the exhaust gas filter cartridge and is divided into a left cavity and a right cavity by the middle partition. A left feed port and a right feed port connected to the left and right cavities respectively are provided on the bottom plate of the exhaust gas filter cartridge, and the outer ends of the left feed port and the right feed port are connected to the main pipe respectively. The lower parts of the left cavity and the right cavity respectively support heat exchange shells. There are two groups of activated carbon filter core groups, which are supported above the heat exchange shells in the left cavity and the right cavity respectively. A through hole group connected to each pair of activated carbon filter elements of the activated carbon filter core groups is provided on the heat exchange shell. A hollow sealing cover is provided on the top of the left cavity and the right cavity respectively. A gas outlet is provided in the center of the hollow sealing cover. A plurality of purge pipes connected to the inner cavity thereof are provided on the bottom surface of the hollow sealing cover. A purge gas inlet pipeline passing through the exhaust gas filter cartridge is provided on the outer peripheral surface of the hollow sealing cover, and a separation liquid outlet pipeline passing through the exhaust gas filter cartridge is provided on the outer peripheral surface of the left cavity and the right cavity.
2. The closed filter device for chlorosilane according to claim 1, Features: An exhaust valve is provided at the gas outlet on the hollow isolation cover, a purge valve is provided at the end of the purge pipe of the hollow isolation cover, a first switching valve is provided at the left feed port and the right feed port respectively, and a second switching valve is provided on the separation liquid outlet pipeline of the left cavity and the right cavity respectively.
3. The closed filter device for chlorosilane according to claim 1, Features: A support member corresponding to the heat exchange shell is arranged on the inner wall of the exhaust gas filter cartridge.
4. The closed filter device for chlorosilane according to claim 1, Features: The activated carbon filter core group comprises a support frame with a plurality of longitudinal support grooves and an activated carbon filter element arranged in the longitudinal support grooves. The bottom of the support frame is provided with an expansion hole group corresponding to the through hole group on the heat exchange shell.