Furnace tube, mounting flange and furnace body

Abstract

The utility model provides a furnace tube, a mounting flange and a furnace body, a sealing section of the furnace tube and the mounting flange are respectively provided with a wave-shaped heat dissipation skirt edge, the skirt edge comprises a first area which is far away from the thickness of the furnace tube, and the first area comprises a plane section which is used for being contacted with a sealing piece; the wavy heat dissipation skirt increases the line length of the high-temperature transition section and the low-temperature transition section, so that heat of the heating section is slowly dissipated after being conducted to the sealing section, namely, the heat dissipation rate of the high-temperature transition section and the low-temperature transition section is reduced, and the situation that equipment cracks due to the too high cooling rate of the high-temperature transition section and the low-temperature transition section is effectively avoided; and the tolerance, the safety and the stability of the furnace tube and the flange are improved.

Description

Technical Field

[0001] The present application relates to the technical field of heating furnace tubes, and in particular to a furnace tube, a mounting flange and a furnace body. Background Art

[0002] High temperature reaction furnace tubes or other heating reaction equipment used for processing battery cells generally include a heating section and a connection sealing section. In some heating reaction equipment, the temperature difference between the heating section and the connection sealing section is large because the temperature of the heating section is high, while the temperature of the sealing section in contact with the seal is low. The large temperature difference may cause cracks in the high and low temperature transition section, or may cause breakage after long-term use.

[0003] For example, the operating temperature required for the reactor body for processing silicon wafers is about 1000°C, while the maximum temperature resistance of the sealing ring in the sealing section of the furnace body is only 300°C, so a water cooling structure needs to be designed in the sealing section to take away the heat conducted by the heating section to ensure the sealing performance of the sealing ring. The general cooling temperature is about 40°C. Under the large temperature difference between 1000°C and 40°C, the furnace tube in the transition area between the heating section and the sealing section will crack, seriously affecting the safety and stability of the equipment. Utility Model Content

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: The embodiment of the utility model provides a furnace tube, a mounting flange and a furnace body to solve the problem of equipment cracking due to excessive temperature difference in heating reaction equipment.

[0005] In a first aspect, the utility model provides a furnace tube, comprising a heating section and a sealing section, wherein the sealing section comprises a wavy heat dissipation skirt, wherein the skirt comprises a first area arranged away from the thickness of the furnace tube, wherein the first area comprises a planar section used to contact with a seal.

[0006] Optionally, the heating section of the furnace tube includes an integrally formed arched dome.

[0007] Optionally, the furnace tube is formed by integrally processing silicon carbide material, the bottom opening of the furnace tube is arranged close to the skirt, and the top of the furnace tube is sealed.

[0008] Optionally, the furnace tube includes an inner furnace tube and an outer furnace tube, and an air inlet pipe arranged on the top of the outer furnace tube, the top of the outer furnace tube is connected to the outer wall of the inner furnace tube; the outer wall of the inner furnace tube and the inner wall of the outer furnace tube form a reaction chamber, one end of the reaction chamber is closed and the other end is open, and the skirt is arranged on the outside of the open end of the reaction chamber.

[0009] Optionally, a thermocouple tube attached to the inner tube wall of the outer furnace tube is provided in the reaction chamber.

[0010] In a second aspect, the utility model provides a mounting flange, which is applied to the above-mentioned furnace tube, and includes a first mounting surface and a second mounting surface. The first mounting surface and / or the second mounting surface are also provided with the wavy heat dissipation skirt.

[0011] In a third aspect, the utility model provides a furnace body, which includes any of the aforementioned furnace tubes, and also includes a furnace body heating element, a furnace body flange, a furnace body mounting seat and a furnace mouth flange, wherein the furnace body flange is used to be connected to the sealing section, and the furnace body mounting seat is used to install the furnace body flange and the furnace mouth flange; the furnace body heating element is respectively arranged on the outside or inside of the furnace tube to heat the furnace tube.

[0012] Optionally, the top of the furnace tube further includes an air inlet pipe, a heat sink is provided around the air inlet pipe, and an inner cavity of the heat sink is communicated with the cavity of the air inlet pipe.

[0013] Optionally, the furnace body flange includes a plurality of circumferentially arranged air inlets, and a thermal insulation pad is arranged on the surface connected to the sealing section, and wind passes through the gap between the furnace tube and the heating element and flows out from the top of the furnace body, and the thermal insulation pad is used to contact the innermost bottom surface of the skirt.

[0014] Among them, the beneficial effects of the aforementioned furnace tube, mounting flange and furnace body are:

[0015] In the furnace tube provided by the utility model, the position for sealing is set as a wavy heat dissipation skirt, which increases the line length of the high-temperature and low-temperature transition sections, so that the heat of the heating section is slowly dissipated after being conducted to the sealing section, that is, the heat dissipation rate of the high-temperature and low-temperature transition sections is reduced, and the high-temperature and low-temperature transition sections are effectively prevented from cracking due to excessive cooling rate, thereby improving the tolerance, safety and stability of the equipment and increasing the life of the equipment.

[0016] In addition, based on the same principle, a wavy heat dissipation skirt is provided in the mounting flange provided by the utility model, so that one mounting surface of the flange includes multiple concentric circular surfaces, and the seal is attached to the outermost circular surface, which not only increases the line length of the high-temperature and low-temperature transition sections, but also allows the heat in the heating section to be slowly dissipated after being transferred to the sealing section, thereby reducing the heat dissipation rate of the high-temperature and low-temperature transition sections, effectively avoiding the high-temperature and low-temperature transition sections from cracking the flange due to excessive cooling rate, thereby improving the tolerance, safety and stability of the flange; in addition, the seal is protected from high temperature, the service life of the seal is extended, and the sealing of the flange is increased.

[0017] Finally, the utility model provides a furnace body based on the aforementioned furnace tube, which includes the aforementioned furnace tube and installation and heating components. The use of the furnace tube effectively avoids furnace tube cracking, improves the tolerance, safety and stability of the furnace body, and increases the service life of the furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A front view and a partial enlarged schematic diagram of a furnace tube provided by the utility model are shown;

[0019] Figure 2 A three-dimensional axial schematic diagram showing the furnace tube provided by the utility model;

[0020] Figure 3 The front and partial enlarged schematic diagrams of the flange provided by the utility model are shown;

[0021] Figure 4 A schematic cross-sectional view showing another flange provided by the utility model;

[0022] Figure 5 It shows the axial schematic diagram of the furnace body provided by the utility model;

[0023] Figure 6 A cross-sectional view showing a first air inlet pipe structure in a furnace body provided by the utility model;

[0024] Figure 7 A cross-sectional view showing a second air inlet pipe structure in a furnace body provided by the utility model.

[0025] Reference numerals:

[0026] 1: heating section; 2: sealing section; 3: inner furnace tube; 4: outer furnace tube; 5: air inlet pipe; 6: thermocouple tube; 7: sealing element; 10: first mounting surface; 11: second mounting surface; 31: furnace body mounting seat; 100: air inlet. DETAILED DESCRIPTION

[0027] The technical solutions in the application embodiments will be described clearly and completely below in conjunction with the accompanying drawings in the application embodiments. In addition, the phrases "in one embodiment" or "in an embodiment" appearing in various places throughout the specification do not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics may be combined in one or more embodiments in any suitable manner.

[0028] It should also be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity from another entity, and do not necessarily require or imply any such actual relationship or order between these entities. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that an article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such articles. In the absence of further restrictions, the elements defined by the sentence "including a ..." do not exclude the existence of other identical elements in the article including the elements.

[0029] As described in the previous background technology, in some high-temperature sealed processing equipment, the transition section between the high-temperature and low-temperature areas may crack or break due to the large temperature difference. In this regard, this embodiment provides a furnace tube, a mounting flange and a furnace body.

[0030] In the first aspect, the utility model provides a furnace tube, comprising a heating section 1 and a sealing section 2, the sealing section 2 comprising a wavy heat dissipation skirt, the skirt comprising a first area A arranged away from the thickness of the furnace tube, the first area A comprising a planar section used to contact the seal 7.

[0031] In the furnace tube provided by the utility model, the position for sealing is set as a wavy heat dissipation skirt, which increases the line length of the high-temperature and low-temperature transition sections, so that the heat of the heating section 1 is slowly dissipated after being transferred to the sealing section 2, that is, the heat dissipation rate of the high-temperature and low-temperature transition sections is reduced, and the high-temperature and low-temperature transition sections are effectively prevented from cracking due to excessive cooling rates, thereby improving the tolerance, safety and stability of the equipment and increasing the life of the seals.

[0032] like Figure 1 and Figure 2 As shown, the top of the furnace tube is an overall closed structure, and the reactants enter from the bottom opening of the furnace tube. The heating section 1 is the area from the top of the furnace tube to the bottom skirt, and the sealing section 2 is the area where the bottom skirt is located.

[0033] The thickness of the skirt may be consistent with the thickness of the furnace tube, or the thickness of a portion of the load-bearing or mounting surface may be greater than the thickness of the furnace tube itself.

[0034] In addition, in the furnace tube of the present invention, the first area of ​​the skirt used for contact with the seal 7 is arranged away from the thick area of ​​the furnace tube. Figure 1 As shown, the first area is farthest from the inner wall of the furnace tube, the heat of the furnace tube is conducted to this area through the longest linear distance, and the temperature is relatively low, so this part of the plane section is in contact with the sealing ring to seal the furnace tube.

[0035] In some embodiments, the height direction of the first region further includes a vertical windward surface or an inclined windward surface; the heating section 1 of the furnace tube includes an integrally formed arched dome.

[0036] In this embodiment, in order to increase the heat dissipation effect of the first area, it is set to blow air toward the skirt of the wave to accelerate the heat dissipation in the first area. The windward surface of the blowing air can be a vertical surface or an inclined surface with a certain inclination angle, wherein the inclined surface is not only convenient for processing but also has the function of airflow guidance. The arched dome can reduce the stress and thermal stress concentration at the top.

[0037] In some embodiments, the furnace tube is formed by one-piece processing of silicon carbide material, the bottom opening of the furnace tube is arranged near the skirt, and the top of the furnace tube is sealed. The dome of the top seal of the furnace tube and the tube body of the furnace tube and the skirt structure of the bottom of the tube can be directly made by silicon carbide printing.

[0038] like Figure 2 As shown, in some embodiments, the furnace tube can be configured as a double-layer furnace tube, that is, it includes an inner furnace tube 3 and an outer furnace tube 4, and an air inlet pipe 5 arranged on the top of the outer furnace tube 4, and the top of the outer furnace tube 4 is connected to the outer wall of the inner furnace tube 3; the outer wall of the inner furnace tube 3 and the inner wall of the outer furnace tube 4 form a reaction cavity, one end of the reaction cavity is closed and the other end is open, and the skirt is arranged on the outside of the open end of the reaction cavity.

[0039] In this embodiment, the annular reaction chamber is used to place the parts to be processed, the inside of the inner furnace tube 3 and the outside of the outer furnace tube 4 are used to set the heating elements of the heating furnace tubes, the gas required for the reaction is introduced from the air inlet pipe 5 at the top of the outer furnace tube 4, and the skirt is used to connect with other sealing structures to seal the reaction chamber.

[0040] In addition, a thermocouple tube 6 for installing an internal temperature detection device is also provided on the inner wall of the outer furnace tube 4 , and the thermocouple tube 6 is attached to the inner tube wall of the outer furnace tube 4 .

[0041] In a second aspect, the utility model provides a mounting flange, including a first mounting surface 10 and a second mounting surface 11, wherein the first mounting surface 10 and / or the second mounting surface 11 are provided with a wavy heat dissipation skirt, the skirt including a first area A arranged away from the thick area of ​​the furnace tube, and the plane section of the first area A is used to contact with the sealing member 7. Figure 2 As shown, the skirt makes the second mounting surface 11 include at least two concentric annular surfaces, and the outermost annular surface is used to contact with the sealing member 7.

[0042] In addition, based on the same principle, a wavy heat dissipation skirt is provided in the mounting flange provided by the utility model, so that one mounting surface of the flange includes multiple concentric annular surfaces, and the seal 7 is attached to the outermost annular surface, which not only increases the line length of the high-temperature and low-temperature transition sections, but also allows the heat of the heating section 1 to be slowly dissipated after being transferred to the sealing section 2, that is, the heat dissipation rate of the high and low temperature transition sections is reduced, and the high and low temperature transition sections are effectively prevented from cracking the flange due to excessive cooling rate, thereby improving the tolerance, safety and stability of the flange; in addition, the seal 7 is protected from high temperature, the service life of the seal 7 is extended, and the sealing of the flange is increased.

[0043] like Figure 3 and Figure 4 As shown, a wavy skirt is provided on one of the mounting surfaces of the flange, so that one mounting surface of the flange is a plurality of concentric annular surfaces. The wavy structure makes the temperature of the flange itself gradually decrease from the innermost side to the outermost side. The temperature of the outermost annular surface is relatively low, which is suitable for installing the sealing ring, and can ensure that the sealing ring works at a suitable ambient temperature for a long time. In order to increase the heat dissipation effect, a blowing device can be provided on the outer side of the flange to blow air toward the position of the wavy skirt to accelerate the heat dissipation at the skirt.

[0044] Of course, in some embodiments, the flange can also be designed to have wavy skirts on both the first mounting surface 10 and the second mounting surface 11, such as Figure 4 As shown, the first mounting surface 10 and the second mounting surface 11 both include a plurality of concentric annular surfaces, and the sealing ring is disposed in the outermost annular surface area of ​​the first mounting surface 10 and the second mounting surface 11 to protect the sealing ring from being damaged by the mechanism docking with the flange due to high temperature. In addition, the flange structure can be adjusted based on the actual installation environment conditions of the flange, and this embodiment does not make specific limitations on this.

[0045] In some embodiments, the height of the wave crest in the skirt of the flange gradually decreases from the inside to the outside of the mounting flange. The height of the wave crest affects the rate of heat dissipation. The wave crest on the inside of the flange is set higher than the wave crest on the outermost side of the flange. The smaller the wave crest, the smaller the accumulated heat, and the faster the rate of heat dissipation by air blowing.

[0046] In the third aspect, the utility model provides a furnace body, which includes any of the aforementioned furnace tubes, and also includes a furnace body heating element, a furnace body flange, a furnace body mounting seat and a furnace mouth flange, the furnace body flange is used to connect with the sealing section 2, and the furnace body mounting seat is used to install the furnace body flange and the furnace mouth flange; the furnace body heating element is respectively arranged on the outside and inside of the furnace tube to heat the furnace tube.

[0047] The utility model provides a furnace body based on the above-mentioned furnace tube, which includes the above-mentioned furnace tube and installation and heating components. The use of the furnace tube can effectively avoid furnace tube cracking, improve the tolerance, safety and stability of the furnace body, and increase the service life of the furnace body.

[0048] In this embodiment, on the basis of the above-mentioned furnace tube, a heating element is arranged on the outside of the outer furnace tube 4, a heating element is arranged inside the inner furnace tube 3, a heat preservation structure is arranged on the top of the outer furnace tube 4, a furnace body mounting seat for fixing the furnace body is arranged, and a furnace body flange connected to the furnace body and a furnace mouth flange connected to the furnace door are arranged on two opposite surfaces of the furnace body mounting seat. During installation, the wavy skirt of the furnace tube is sealed and connected to the furnace body flange.

[0049] In some embodiments, in order to accelerate the heat dissipation of the skirt, multiple air inlets 100 can be arranged on the outer side of the furnace flange in the circumferential direction, and the heat dissipation of the skirt can be accelerated by blowing air to the inner skirt. The air inlet 100 can be a pipe leading to the skirt of the furnace tube, or multiple through holes in the circumferential direction of the furnace flange, which is not specifically limited in this embodiment. In addition, a heat insulation pad is arranged on the surface connected to the sealing section 2, and the wind passes through the gap between the furnace tube and the heating element and flows out from the top of the furnace body; the heat insulation pad is used to contact the innermost bottom surface of the skirt.

[0050] In addition, when the furnace body provided in this embodiment heats the workpiece to be processed, the required reaction gas needs to be introduced from the top of the furnace body, and the reaction gas is introduced into the vacuum reaction chamber through the air inlet pipe 5. The air inlet pipe 5 can be set at the top of the outer furnace tube, because the reaction temperature in the furnace tube is about 1000°C, so that the air inlet pipe 5 at the top of the furnace body is deformed or the stability of its connection is affected by heat conduction. Therefore, the top of the furnace tube in this embodiment also includes an air inlet pipe 5, and a heat sink is provided around the air inlet pipe 5, and the inner cavity of the heat sink is connected to the cavity of the air inlet pipe 5.

[0051] like Figure 6 and Figure 7 As shown in the figure, there are two cross-sectional views of the structure of the air inlet pipe 5, and the installation position of the seal 7 under the corresponding structure is shown in the figure; the first heat sink is arranged below the surface that is connected to the seal 7, and the multi-layer heat sink increases the contact area between the cold air outside the furnace body and the air inlet pipe 5, improves the heat dissipation efficiency of the air inlet pipe 5, and effectively prevents the sealing ring on the sealing surface from being damaged by high temperature. The structure of the second heat sink is as shown in Figure 7 As shown, similar to the skirt structure at the bottom of the furnace tube, the heat sink extends in a direction perpendicular to the length of the air inlet pipe 5. The extended section dissipates the temperature of the air inlet pipe 5, so that the temperature of the installation plane of the seal 7 farthest from the central axis of the tube body is lower, effectively preventing the sealing ring on the sealing surface from being damaged by high temperature.

[0052] The two aforementioned heat sinks include cavities therein, and the cavities are communicated with the ventilation cavity of the air inlet pipe 5, so that the gas can fully contact the heat sink during the circulation process, thereby improving the heat dissipation effect.

[0053] Finally, the utility model provides a furnace tube, a mounting flange and a furnace body, wherein the sealing section 2 and the mounting flange of the furnace tube are both provided with a wavy heat dissipation skirt, the skirt includes a first area away from the thickness of the furnace tube, and the flat section of the first area is used to contact with the seal; the wavy heat dissipation skirt increases the line length of the high-temperature and low-temperature transition sections, so that the heat of the heating section 1 is slowly dissipated after being conducted to the sealing section 2, that is, the heat dissipation rate of the high and low temperature transition sections is reduced, and the high-temperature and low-temperature transition sections are effectively avoided from cracking due to excessive cooling rate, thereby improving the tolerance, safety and stability of the furnace tube and flange.

[0054] It should also be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

Claims

1. A furnace tube, comprising a heating section (1) and a sealing section (2), It is characterized in that The sealing section (2) comprises a corrugated heat dissipating skirt; the skirt comprises a first area (A) arranged away from the thickness of the furnace tube, and the first area (A) comprises a flat section used to contact with the sealing member (7).

2. The furnace tube according to claim 1, It is characterized in that The heating section (1) of the furnace tube comprises an integrally formed arched dome.

3. The furnace tube according to claim 1, It is characterized in that The furnace tube is formed by integrally processing silicon carbide material, the bottom opening of the furnace tube is arranged close to the skirt, and the top of the furnace tube is sealed.

4. The furnace tube according to claim 1, It is characterized in that The furnace tube comprises an inner furnace tube (3) and an outer furnace tube (4), and an air inlet pipe (5) arranged at the top of the outer furnace tube (4), the top end of the outer furnace tube (4) is connected to the outer wall of the inner furnace tube (3); the outer wall of the inner furnace tube (3) and the inner wall of the outer furnace tube (4) form a reaction cavity, one end of the reaction cavity is closed and the other end is open, and the skirt is arranged outside the open end of the reaction cavity.

5. The furnace tube according to claim 4, It is characterized in that A thermocouple tube (6) attached to the inner tube wall of the outer furnace tube is arranged in the reaction chamber.

6. A mounting flange, applied to the furnace tube according to any one of claims 1 to 5, comprising a first mounting surface (10) and a second mounting surface (11), It is characterized in that The first mounting surface (10) and / or the second mounting surface (11) are also provided with the wavy heat dissipation skirt.

7. A furnace body, It is characterized in that The furnace body comprises the furnace tube according to any one of claims 1 to 5, and also comprises a furnace body heating element, a furnace body flange, a furnace body mounting seat (31) and a furnace mouth flange, wherein the furnace body flange is used to be connected to the sealing section (2), and the furnace body mounting seat (31) is used to mount the furnace body flange and the furnace mouth flange; the furnace body heating element is respectively arranged on the outside or inside of the furnace tube to heat the furnace tube.

8. The furnace body according to claim 7, It is characterized in that The top of the furnace tube also includes an air inlet pipe (5), and a heat sink is provided in the circumference of the air inlet pipe (5), and the inner cavity of the heat sink is communicated with the cavity of the air inlet pipe (5).

9. The furnace body according to claim 7, It is characterized in that The furnace body flange includes a plurality of air inlets (100) arranged circumferentially, and a heat insulating pad is arranged on the surface connected to the sealing section (2). Wind passes through the gap between the furnace tube and the heating element and flows out from the top of the furnace body. The heat insulating pad is used to contact the innermost bottom surface of the skirt.

Images