Detection device applied to carbon-carbon supporting rod

Abstract

The utility model relates to the technical field of carbon-carbon supporting rod production, in particular to a detection device applied to a carbon-carbon supporting rod. The detection device comprises a base; the rotary driving mechanism, the mounting table and the lifting driving mechanism are arranged on the base, the mounting table can be fixedly connected with the carbon-carbon supporting rod, the rotary driving mechanism is in transmission connection with the mounting table, the lifting driving mechanism can drive the mounting table to ascend and descend, and the rotary driving mechanism, the mounting table and the carbon-carbon supporting rod are coaxially arranged under the condition that the carbon-carbon supporting rod is mounted on the mounting table; the perpendicularity detector can be in contact with the surface, away from the rod body, of the chassis; and the concentricity detector can be in contact with the side wall of the rod body. The detection device can detect the perpendicularity of the supporting rod head and the base plate and can also detect the concentricity of the supporting rod head and the whole rod body, the detection process is simple and rapid, different detection devices do not need to be used for detecting the concentricity and the perpendicularity respectively, and the detection efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of carbon-carbon support rod production, and in particular to a detection device applied to carbon-carbon support rods. Background Art

[0002] The crucible support rod is a major load-bearing component in a single crystal silicon furnace. One end of the crucible supports the crucible of the single crystal furnace, which is filled with silicon material for pulling crystals. The other end is connected to a driving device, and is driven by the driving device to rotate or move up and down in the furnace chamber. Influenced by the market and crystal pulling technology, single crystal silicon wafers are gradually developing towards larger specifications, and the loading capacity of a single furnace is also increasing. This puts higher requirements on the internal load-bearing components of the single crystal furnace. The performance of traditional graphite support rods is difficult to meet the use requirements, and is gradually replaced by carbon-carbon support rods.

[0003] The carbon-carbon support rods on the market are mainly split support rods, which are composed of a support rod head, a rod body and a chassis. Due to the use characteristics of the carbon-carbon support rod that it has to rotate while being subjected to force, the requirements for the verticality of the support rod head and the chassis, and the concentricity between the support rod head and the rod body are relatively high. Excessive deviations in verticality and concentricity will not only reduce the service life of the carbon-carbon support rod, but also damage the components connected to it in the furnace. Therefore, the verticality of the support rod head and the chassis, and the concentricity of the support rod head and the rod body as a whole must be tested and qualified before they can be used. In the related art, different detection devices are required to respectively detect the verticality and concentricity of the carbon-carbon support rod, and the detection efficiency is low. Utility Model Content

[0004] In order to solve the above technical problems, the purpose of the utility model is to provide a detection device applied to a carbon-carbon support rod, which can use one device to detect the concentricity and verticality of the carbon-carbon support rod, thereby improving the detection efficiency.

[0005] The utility model is realized by the following technical solutions:

[0006] A detection device for a carbon-carbon support rod, the carbon-carbon support rod comprising a support rod head, a rod body and a chassis, the rod body being arranged between the support rod head and the chassis, comprising:

[0007] Base;

[0008] A rotating drive mechanism, a mounting platform and a lifting drive mechanism are arranged on the base, the mounting platform can be fixedly connected to the carbon-carbon support rod, the rotating drive mechanism is in transmission connection with the mounting platform, the lifting drive mechanism can drive the mounting platform to rise and fall, and when the carbon-carbon support rod is installed on the mounting platform, the rotating drive mechanism, the mounting platform and the carbon-carbon support rod are coaxially arranged;

[0009] a verticality detector, the verticality detector being capable of contacting a surface of the chassis away from the rod body;

[0010] A concentricity detector, wherein the concentricity detector is capable of contacting a side wall of the rod body;

[0011] When the rotating drive mechanism drives the mounting platform to rotate, the chassis can rotate relative to the verticality detector; when the rotating drive mechanism drives the mounting platform to rotate and the lifting drive mechanism drives the mounting platform to rise and fall, the rod body of the carbon-carbon support rod can rotate and rise and fall relative to the concentricity detector.

[0012] In an embodiment of the utility model, the verticality detector is a dial indicator or a micrometer, and the verticality detector includes a contact, which is arranged along the axial direction of the rod body and can contact the surface of the chassis away from the rod body.

[0013] In an embodiment of the utility model, the concentricity detector is a dial indicator or a micrometer, and the concentricity detector includes a contact, which is arranged along the radial direction of the rod body and can contact the side wall of the rod body.

[0014] In an embodiment of the utility model, a mounting opening corresponding to the support rod head is provided on the mounting platform, and the support rod head can be inserted into the mounting opening and fixedly connected to the mounting platform.

[0015] In an embodiment of the utility model, the rotation drive mechanism includes a drive motor, the lifting drive mechanism includes a lifting screw, the drive shaft of the drive motor is transmission-connected to the mounting platform, and the lifting screw is transmission-connected to the drive motor.

[0016] In an embodiment of the utility model, a column is also provided on the base, a verticality detection beam and a concentricity detection beam are provided on the column, the verticality detector is connected to the verticality detection beam, and the concentricity detector is connected to the concentricity detection beam.

[0017] In the embodiment of the utility model, the verticality detector is slidably connected to the verticality detection beam, and the verticality detector can reciprocate along the verticality detection beam.

[0018] In the embodiment of the utility model, the verticality detector can at least move the contact from the edge of the chassis to the center of the chassis along the sliding stroke on the verticality detection beam.

[0019] In the embodiment of the utility model, the concentricity detector is slidably connected to the concentricity detection beam, and the concentricity detector can reciprocate along the concentricity detection beam.

[0020] In the embodiment of the utility model, the detection device applied to the carbon-carbon support rod meets at least one of the following characteristics:

[0021] The verticality detection beam can reciprocate along the column;

[0022] The verticality detection beam can rotate around the column;

[0023] The concentricity detection beam can reciprocate along the column;

[0024] The concentricity detection beam is capable of rotating around the column.

[0025] The utility model provides a detection device for carbon-carbon support rods, which has the following beneficial effects:

[0026] The detection device applied to the carbon-carbon support rod provided in this embodiment can detect the verticality between the support rod head and the chassis, and the concentricity between the support rod head and the entire rod body by simulating the real working environment of the carbon-carbon support rod. During the detection process, it is only necessary to adjust the relative position between the verticality detector and the concentricity detector and the carbon-carbon support rod to detect the verticality between the support rod head and the chassis, and the concentricity between the support rod head and the entire rod body, without the need to replace the detection device. The detection process is convenient and fast, and the detection efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solution of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 The utility model is a structural schematic diagram of a detection device applied to a carbon-carbon support rod.

[0029] Reference numerals in the figures:

[0030] 1. Base; 2. Column; 3. Lifting drive mechanism; 4. Upper connecting block; 5. Lower connecting block; 6. Verticality detection beam; 7. Verticality detector; 8. Concentricity detection beam; 9. Rotation drive mechanism; 10. Mounting table; 11. Rod body; 12. Concentricity detector; 13. Support rod head; 14. Chassis. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] Reference Manual Attached Figure 1 In an embodiment of the utility model, a detection device applied to a carbon-carbon support rod is provided, the detection device includes a base 1, a rotating drive mechanism 9, a mounting platform 10 and a lifting drive mechanism 3 arranged on the base 1, the mounting platform 10 can be fixedly connected to the carbon-carbon support rod, the rotating drive mechanism 9 is in transmission connection with the mounting platform 10, the lifting drive mechanism 3 can drive the mounting platform 10 to rise and fall, and when the carbon-carbon support rod is installed on the mounting platform 10, the rotating drive mechanism 9, the mounting platform 10 and the carbon-carbon support rod are coaxially arranged. The detection device also includes a verticality detector 7 and a concentricity detector 12, the verticality detector 7 and the concentricity detector 12 can be a dial indicator or a micrometer, the verticality detector 7 and the concentricity detector 12 include contacts, the contacts of the verticality detector 7 can contact the surface of the chassis 14 away from the rod body 11, and the contacts of the concentricity detector 12 can contact the side wall of the rod body 11. When the rotating drive mechanism 9 drives the mounting platform 10 to rotate, the chassis 14 can rotate relative to the verticality detector 7; when the rotating drive mechanism 9 drives the mounting platform 10 to rotate and the lifting drive mechanism 3 drives the mounting platform 10 to be lifted and lowered, the rod body 11 of the carbon-carbon support rod can rotate and be lifted and lowered relative to the concentricity detector 12.

[0033] The working process of the detection device applied to the carbon-carbon support rod provided in the embodiment of the utility model is as follows: the carbon-carbon support rod is fixedly connected to the mounting platform 10, wherein the support rod head 13 of the carbon-carbon support rod is close to the mounting platform 10, and the chassis 14 of the carbon-carbon support rod is far away from the mounting platform 10. The position of the verticality detector 7 is adjusted so that the contact of the verticality detector 7 contacts the surface of the chassis 14 away from the rod body 11. Start the rotary drive mechanism 9, which drives the mounting platform 10 and the carbon-carbon support rod to rotate around the central axis of the carbon-carbon support rod, observe the fluctuation range of the pointer of the verticality detector 7, and continuously adjust the contact position between the contact of the verticality detector 7 and the surface of the chassis 14, and then observe the fluctuation range of the pointer of the verticality detector 7. If the fluctuation range of the pointer of the above-mentioned verticality detector 7 is within the allowable error range, it indicates that the verticality between the chassis 14 and the support rod head 13 is qualified. After the verticality detection work is completed, move the verticality detector 7 to a position that does not affect the lifting and lowering of the carbon-carbon support rod, and adjust the position of the concentricity detector 12 so that the contact of the concentricity detector 12 contacts the side wall of the rod body 11 of the carbon-carbon support rod. At the same time, the rotating drive mechanism 9 and the lifting drive mechanism 3 are started. The rotating drive mechanism 9 and the lifting drive mechanism 3 drive the mounting platform 10 and the carbon-carbon support rod to rotate and lift at the same time. During this process, the fluctuation range of the pointer of the concentricity detector 12 is observed. If the fluctuation range of the pointer of the concentricity detector 12 is within the allowable error range, it indicates that the concentricity between the rod body 11 and the support rod head 13 is qualified.

[0034] The detection device applied to the carbon-carbon support rod provided in this embodiment can detect the verticality of the support rod head 13 and the chassis 14, and the concentricity between the support rod head 13 and the rod body 11 as a whole, by simulating the real working environment of the carbon-carbon support rod. In the related prior art, different detection devices need to be used to detect the verticality and concentricity of the carbon-carbon support rod respectively. For example, when performing the verticality detection first and then the concentricity detection, the following steps need to be performed: first connect the carbon-carbon support rod with the verticality detection device, and perform the verticality detection. After the verticality detection is completed, the carbon-carbon support rod needs to be separated from the verticality detection device, and then connected to the concentricity detection device, and then the concentricity detection is performed. The detection device provided in this embodiment for the carbon-carbon support rod only needs to connect the carbon-carbon support rod to the detection device once when performing verticality detection first and then concentricity detection. The verticality detection is first performed using the verticality detector 7. After the verticality detection, only the positions of the verticality detector 7 and the concentricity detector 12 need to be adjusted to perform the concentricity detection. There is no need to separate the carbon-carbon support rod from the verticality detection device and then install it on the concentricity detection device, thereby improving the detection efficiency.

[0035] In one embodiment, the contact of the verticality detector 7 is arranged along the axial direction of the rod body 11 and can contact the surface of the chassis 14 away from the rod body 11; the contact of the concentricity detector 12 is arranged along the radial direction of the rod body 11 and can contact the side wall of the rod body 11. In this way, the contact of the verticality detector 7 is kept as perpendicular as possible to the surface of the chassis 14 away from the rod body 11, thereby improving the detection accuracy of the verticality detector 7 and protecting the contact of the verticality detector 7; similarly, the contact of the concentricity detector 12 is kept as perpendicular as possible to the side wall of the rod body 11, thereby improving the detection accuracy of the concentricity detector 12 and protecting the contact of the concentricity detector 12.

[0036] In one embodiment, a mounting hole (not shown in the figure) corresponding to the support rod head 13 of the carbon-carbon support rod is provided on the mounting platform 10, and the support rod head 13 is inserted into the mounting hole, and the shape of the mounting hole matches the top of the support rod head 13, so that the carbon-carbon support rod is stably connected to the mounting platform 10, and the carbon-carbon support rod can be stably rotated and lifted during the detection process, thereby ensuring the accuracy of the detection result. Threaded holes are provided around the mounting platform 10, and the support rod head 13 of the carbon-carbon support rod can be fixed to the mounting platform 10 by bolts. Of course, in other embodiments, the carbon-carbon support rod can be connected to the mounting platform 10 in other ways, as long as the two maintain a stable connection.

[0037] In one embodiment, the rotary drive mechanism 9 includes a drive motor, the lifting drive mechanism 3 includes a lifting screw, the drive shaft of the drive motor is transmission-connected to the mounting platform 10, and the lifting screw is transmission-connected to the drive motor. Of course, in other embodiments, the rotary drive mechanism 9 and the lifting drive mechanism 3 can be of other types.

[0038] In one embodiment, a column 2 is provided on the base 1, and a verticality detection beam 6 and a concentricity detection beam 8 are provided on the column 2. The verticality detection beam 6 can reciprocate along the column 2 and can also rotate around the column 2; the concentricity detection beam 8 can reciprocate along the column 2 and can also rotate around the column 2. The verticality detector 7 is slidably connected to the verticality detection beam 6, and the verticality detector 7 can reciprocate along the verticality detection beam 6; the concentricity detector 12 is slidably connected to the concentricity detection beam 8, and the concentricity detector 12 can reciprocate along the concentricity detection beam 8. In this way, the positions of the verticality detector 7 and the concentricity detector 12 can be adjusted according to the different sizes of the carbon-carbon support rod, so that the verticality and concentricity of carbon-carbon support rods of different sizes can be detected, thereby expanding the scope of use of the detection device of this embodiment. Of course, in other ways, the verticality detector 7 and the concentricity detector 12 can contact the carbon-carbon support rod in other ways. Furthermore, the sliding stroke of the verticality detector 7 along the verticality detection beam 6 can at least move the contact of the verticality detector 7 from the edge of the chassis 14 to the center of the chassis 14. In this way, the contact of the verticality detector 7 can fully contact the surface of the chassis 14 away from the rod body 11, and the surface of the chassis 14 away from the rod body 11 can be fully detected, thereby improving the credibility of the verticality detection result.

[0039] The following introduces a preferred embodiment of the present application in combination with the above-mentioned specific implementation methods. The preferred embodiment of the present application provides a detection device applied to a carbon-carbon support rod.

[0040] Example 1

[0041] A detection device for carbon-carbon support rod, referring to Figure 1 The detection device includes a base 1, a driving motor and a lifting screw arranged on the base 1, a mounting platform 10 is connected to the driving shaft of the driving motor, a mounting port matching the shape of the supporting rod head 13 of the carbon-carbon supporting rod is provided on the mounting platform 10, and the supporting rod head 13 of the carbon-carbon supporting rod can be inserted into the mounting port, and threaded holes (not shown in the figure) are provided around the mounting platform 10, and bolts (not shown in the figure) are passed through the threaded holes, and the bolts can fix the carbon-carbon supporting rod to the mounting platform 10. A mounting hole for the lifting screw to pass through is provided on the base 1, and the lifting screw passes through the mounting hole and is connected to the driving motor. When the carbon-carbon supporting rod is installed on the mounting platform 10, the driving motor, the mounting platform 10, and the carbon-carbon supporting rod are coaxially arranged, and the central axis of the carbon-carbon supporting rod is arranged vertically with the base 1. The driving motor can drive the mounting platform 10 to drive the carbon-carbon supporting rod to rotate around the central axis of the carbon-carbon supporting rod; the lifting screw can drive the driving motor to drive the mounting platform 10 and the carbon-carbon supporting rod to rise and fall.

[0042] The detection device also includes a column 2 vertically arranged on the base 1, and an upper connecting block 4 and a lower connecting block 5 are sleeved on the column 2, and the upper connecting block 4 and the lower connecting block 5 can reciprocate along the column 2 or rotate around the column 2. A verticality detection beam 6 is fixedly connected to the upper connecting block 4, and a concentricity detection beam 8 is fixedly connected to the lower connecting block 5, and the verticality detection beam 6 and the concentricity detection beam 8 are both arranged vertically to the column 2. The upper connecting block 4 can drive the verticality detection beam 6 to reciprocate along the column 2 or rotate around the column 2; similarly, the lower connecting block 5 can drive the concentricity detection beam 8 to reciprocate along the column 2 or rotate around the column 2.

[0043] A verticality detector 7 and a concentricity detector 12 are slidably connected to the verticality detection beam 6 and the concentricity detection beam 8 respectively. The verticality detector 7 can reciprocate along the verticality detection beam 6, and the concentricity detector 12 can reciprocate along the concentricity detection beam 8. In this embodiment, the verticality detector 7 and the concentricity detector 12 are both dial indicators, and both of them include contacts. The contacts of the verticality detector 7 are arranged along the axial direction of the rod body 11 of the carbon-carbon support rod and contact the surface of the chassis 14 away from the rod body 11, so that the contacts of the verticality detector 7 and the surface of the chassis 14 of the carbon-carbon support rod are kept as vertical as possible, ensuring the accuracy of the test results while protecting the contacts; similarly, the contacts of the concentricity detector 12 are arranged along the radial direction of the rod body 11 of the carbon-carbon support rod and contact the side wall of the rod body 11 of the carbon-carbon support rod, so that the contacts of the concentricity detector 12 and the side wall of the rod body 11 of the carbon-carbon support rod are kept as vertical as possible, ensuring the accuracy of the test results while protecting the contacts. In addition, the sliding stroke of the verticality detector 7 along the verticality detection beam 6 can at least move the contacts of the verticality detector 7 from the edge of the chassis 14 to the center of the chassis 14. In this way, the contact of the verticality detector 7 can fully contact the surface of the chassis 14 away from the rod body 11, and the surface of the chassis 14 away from the rod body 11 can be fully detected, thereby improving the credibility of the verticality detection result.

[0044] The above description shows and describes the preferred embodiments of the utility model. As before, it should be understood that the utility model is not limited to the form disclosed herein, and should not be regarded as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be modified within the scope of the utility model concept of this article through the above teachings or the technology or knowledge of the relevant field. The changes and modifications made by those skilled in the art do not deviate from the spirit and scope of the utility model, and should be within the scope of protection of the claims attached to the utility model.

Claims

1. A detection device for a carbon-carbon support rod, the carbon-carbon support rod comprising a support rod head (13), a rod body (11) and a chassis (14), wherein the rod body (11) is arranged between the support rod head (13) and the chassis (14), characterized in that: include: Base (1); A rotation drive mechanism (9), a mounting platform (10) and a lifting drive mechanism (3) are arranged on the base (1); the mounting platform (10) can be fixedly connected to the carbon-carbon support rod; the rotation drive mechanism (9) is transmission-connected to the mounting platform (10); the lifting drive mechanism (3) can drive the mounting platform (10) to rise and fall; when the carbon-carbon support rod is mounted on the mounting platform (10), the rotation drive mechanism (9), the mounting platform (10) and the carbon-carbon support rod are coaxially arranged; A verticality detector (7), wherein the verticality detector (7) is capable of contacting a surface of the chassis (14) away from the rod body (11); A concentricity detector (12), wherein the concentricity detector (12) is capable of contacting a side wall of the rod body (11); When the rotating drive mechanism (9) drives the mounting platform (10) to rotate, the chassis (14) can rotate relative to the verticality detector (7); when the rotating drive mechanism (9) drives the mounting platform (10) to rotate and the lifting drive mechanism (3) drives the mounting platform (10) to rise and fall, the rod body (11) of the carbon-carbon support rod can rotate and rise and fall relative to the concentricity detector (12).

2. A detection device for carbon-carbon support rod according to claim 1, characterized in that: The verticality detector (7) is a dial gauge or a micrometer, and comprises a contact, which is arranged along the axial direction of the rod body (11) and can contact the surface of the chassis (14) away from the rod body (11).

3. A detection device for carbon-carbon support rod according to claim 1, characterized in that: The concentricity detector (12) is a dial gauge or a micrometer, and comprises a contact, wherein the contact is arranged along the radial direction of the rod body (11) and can contact the side wall of the rod body (11).

4. A detection device for carbon-carbon support rod according to claim 1, characterized in that: The mounting platform (10) is provided with a mounting opening corresponding to the support rod head (13); the support rod head (13) can be inserted into the mounting opening and fixedly connected to the mounting platform (10).

5. The detection device for carbon-carbon support rod according to claim 1, characterized in that: The rotary drive mechanism (9) comprises a drive motor, the lifting drive mechanism (3) comprises a lifting screw, the drive shaft of the drive motor is in transmission connection with the mounting platform (10), and the lifting screw is in transmission connection with the drive motor.

6. A detection device for carbon-carbon support rod according to any one of claims 1 to 5, characterized in that: The base (1) is also provided with a column (2), the column (2) is provided with a verticality detection beam (6) and a concentricity detection beam (8), the verticality detector (7) is connected to the verticality detection beam (6), and the concentricity detector (12) is connected to the concentricity detection beam (8).

7. A detection device for carbon-carbon support rod according to claim 6, characterized in that: The verticality detector (7) is slidably connected to the verticality detection beam (6), and the verticality detector (7) can reciprocate along the verticality detection beam (6).

8. A detection device for carbon-carbon support rod according to claim 7, characterized in that: The sliding stroke of the verticality detector (7) along the verticality detection beam (6) can at least enable the contact of the verticality detector (7) to move from the edge of the chassis to the center of the chassis.

9. A detection device for carbon-carbon support rod according to claim 6, characterized in that: The concentricity detector (12) is slidably connected to the concentricity detection beam (8), and the concentricity detector (12) can reciprocate along the concentricity detection beam (8).

10. The detection device for carbon-carbon support rod according to claim 6, characterized in that: The detection device applied to the carbon-carbon support rod meets at least one of the following characteristics: The verticality detection beam (6) is capable of reciprocating along the column (2); The verticality detection beam (6) is capable of rotating around the column (2); The concentricity detection beam (8) is capable of reciprocating along the column (2); The concentricity detection beam (8) is capable of rotating around the column (2).

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