Detector self-checking device and gas detection system

Abstract

The utility model provides a detector self-checking device which comprises a detector for detecting gas and further comprises a self-checking pipeline unit, a sampling pipeline unit, a pipeline switching control unit and a control module, the self-checking pipeline unit and the sampling pipeline unit are connected to a gas inlet of the detector, the self-checking pipeline unit is used for self-checking of the working state of the detector, and the sampling pipeline unit is used for sampling the working state of the detector. The sampling pipeline unit is used for detecting environment gas, the pipeline switching control unit is connected with the self-checking pipeline unit and the sampling pipeline unit and used for switching connection and disconnection between the self-checking pipeline unit and the sampling pipeline unit and the gas inlet, and the control module is connected with the detector and the pipeline switching control unit and used for controlling the detection of the environment gas. The method is used for controlling and switching detection and self-detection. The utility model further provides a gas detection system which comprises the detector self-checking device. According to the invention, remote control self-inspection can be realized, false alarms can be safely, rapidly and efficiently eliminated, people are prevented from being exposed to dangerous environments, and manpower and material resource costs are greatly saved.

Description

Technical Field

[0001] The present application relates to the technical field of gas detection, and in particular to a detector self-test device and a gas detection system. Background Art

[0002] Usually, a large number of detectors are used in production plants (e.g., semiconductor wafer production plants) to detect the leakage of special gases. When a gas leaks, the detector will sound an alarm. Since the gas may be toxic, emergency response personnel are required to wear personal protective equipment and go to the scene to check the leakage.

[0003] An important step in the emergency response process after the detector alarm is to perform a self-test on the detector body to confirm the working status of the detector and thus determine the reliability of the alarm.

[0004] The process of personnel going to the site to check the working status of the detector takes a long time, and there are the following problems and risks: when there is indeed a gas leak, during the on-site self-inspection of the detector, even with protective measures, the leaked gas may still cause harm to the human body; when the staff arrives at the scene, the gas that caused the alarm may have been discharged through the exhaust pipe, resulting in the inability to find the cause of the abnormal event; the detector is easily affected by the working environment and causes false alarms. When handling the alarm, the emergency response team needs to be dispatched, which will waste a lot of manpower and material resources.

[0005] Therefore, a device for determining the working condition of the detector body more safely and quickly is needed to solve the above problems. Utility Model Content

[0006] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide a detector self-test device and a gas detection system to solve the problems in the prior art that the detector self-test process is time-consuming, has a high risk factor, and wastes a lot of manpower and material resources.

[0007] An embodiment of the present application provides a detector self-test device, including a detector for detecting gas, characterized in that it also includes a self-test pipeline unit, a sampling pipeline unit, a pipeline switching control unit and a control module, the self-test pipeline unit and the sampling pipeline unit are respectively connected to the air inlet of the detector, the self-test pipeline unit is used for self-testing the working state of the detector, the sampling pipeline unit is used for detecting environmental gas, the pipeline switching control unit is respectively connected to the self-test pipeline unit and the sampling pipeline unit, and is used to switch the connection between the self-test pipeline unit and the sampling pipeline unit and the air inlet, and the control module is respectively connected to the detector and the pipeline switching control unit, and is used to control and switch the detection and the self-test.

[0008] In some embodiments, the sampling pipeline unit includes a first pipeline and a first valve element, the first valve element is arranged on the first pipeline, the first end of the first pipeline is connected to the air inlet of the detector, and the second end of the first pipeline is connected to the detection environment of the detector; the self-test pipeline unit includes a second pipeline, a second valve element and a self-test gas source, the second valve element is arranged on the second pipeline, the first end of the second pipeline is connected to the air inlet of the detector, and the second end of the second pipeline is connected to the self-test gas source; the detector includes an air outlet, and the gas entering from the air inlet is discharged from the air outlet of the detector after the detection or the self-test.

[0009] In some embodiments, the gas of the self-test gas source is nitrogen.

[0010] In some embodiments, the first valve element and the second valve element are pneumatic valves, and the opening and closing of the valve element are controlled by the pipeline switching control unit.

[0011] In some embodiments, the pipeline switching control unit includes a solenoid valve, which is respectively connected to the first valve element and the second valve element to control the on and off of the first valve element and the second valve element.

[0012] In some embodiments, the solenoid valve is a two-position three-way structure, wherein one channel is connected to the pneumatic valve air source, and the other two channels are respectively connected to the pneumatic valve control airways of the first valve element and the second valve element.

[0013] In some embodiments, the solenoid valve is connected to the control module for controlling the solenoid valve.

[0014] In some embodiments, the control module includes SCADA and PLC.

[0015] The embodiment of the present application further provides a gas detection system, comprising the detector self-test device described in the above embodiment.

[0016] In some embodiments, there are multiple detector self-test devices, which share a control module.

[0017] As described above, a detector self-test device and a gas detection system of the present application have the following beneficial effects: when the detector alarms, it can safely, quickly and efficiently eliminate the problem of false alarms, avoid unnecessary exposure of personnel to dangerous environments, and save a lot of manpower and material costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0019] in:

[0020] Figure 1 is a schematic diagram of a detector shown in some embodiments;

[0021] Figure 2 is a schematic diagram of the structure of a detector self-test device according to some embodiments of the present application;

[0022] Figure 3 It is a schematic diagram of components of a sampling pipeline unit, a self-test pipeline unit and a pipeline switching control unit according to some embodiments of the present application;

[0023] Figure 4 is a schematic diagram of a gas detection system according to some embodiments of the present application. DETAILED DESCRIPTION

[0024] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0025] The embodiment of the present application provides a detector self-test device, which, in addition to a detector for detecting gas, also includes a self-test pipeline unit, a sampling pipeline unit, a pipeline switching control unit and a control module. Among them, the self-test pipeline unit and the sampling pipeline unit are respectively connected to the air inlet of the detector, the self-test pipeline unit is used to detect the self-test of the working state of the detector, and the sampling pipeline unit is used to detect the detection of environmental gases. The pipeline switching control unit is respectively connected to the self-test pipeline unit and the sampling pipeline unit, and is used to switch the connection between the self-test pipeline unit and the sampling pipeline unit and the air inlet. The control module is respectively connected to the detector and the pipeline switching control unit, and is used to control and switch the detection and the self-test.

[0026] The technical solution of the present invention is described in detail below in conjunction with the embodiments and drawings.

[0027] Figure 11 is a schematic diagram of a detector shown in some embodiments. From the outside, the detector 100 for detecting gas includes an air inlet 102, an air outlet 103, a sampling tube 104, an exhaust pipe 105 and a control panel 101. The detector also includes an air pump and a sensor (not shown) inside. The detector 100 absorbs gas in the detection environment from the sampling tube 104 connected to the air inlet 102 through the air pump. The inhaled gas obtains characteristic data of the gas through the sensor and transmits it to the remote control module 110 for analysis. If the composition of the inhaled gas or the proportion of each component is abnormal, the control module 110 determines that there is a gas leak in the detection environment and sends an alarm signal. The inhaled gas is detected by the sensor, and the detected gas is discharged from the exhaust pipe 105 connected to the air outlet 103. The control panel 101 displays the working status of the detector 100 on the one hand, and provides a simple control method for the detector 100 on the other hand. The connection between the control module 110 and the detector 100 can be a wired electrical connection or a wireless connection. The control module 110 analyzes the detected environmental gas data transmitted by the detector 100 to obtain the real-time environmental conditions of the monitoring point. Furthermore, the detector 100 is set at the important monitoring point location of a specific factory area to form a monitoring network. Once an alarm occurs, emergency response personnel can immediately go to deal with it.

[0028] During the emergency response process, it is necessary to determine the working condition of the detector 100 itself to exclude false alarms caused by the detector 100 itself, that is, to determine the reliability of the alarm. Usually, emergency response personnel carry a self-test gas cylinder or gas bag and connect the self-test gas to the sampling tube 102. The self-test gas (for example, pure nitrogen) is different from the monitored gas. Therefore, after the self-test gas is connected, if the alarm signal disappears, it means that the detector 100 is normal and there is an abnormal gas leak; if the alarm signal still exists, it can be determined that the detector 100 is damaged and needs to be repaired or replaced.

[0029] However, this self-inspection step takes a long time and has the following problems and risks: there may indeed be a gas leak, and during the on-site self-inspection of the detector 100, although there are protective measures, the leaked gas may still cause harm to the human body; when the staff arrives at the scene, the gas that caused the alarm may have been discharged by the exhaust equipment, resulting in the inability to find the cause of the abnormal event; the detector 100 is easily affected by the working environment and causes false alarms. When handling the alarm, an emergency response team needs to be dispatched, which will waste a lot of manpower and material resources.

[0030] Therefore, in some embodiments, the detector self-test device increases the number of detector sampling tubes, changing from environmental sampling to environmental sampling plus self-test gas sampling, and the sampling process is remotely controlled by the control module, making the self-test process safe, fast and efficient.

[0031] refer to Figure 2 The schematic diagram of the detector self-test device architecture is shown in the figure. The present application proposes a detector self-test device 200, which includes a detector 100, a control module 210, a self-test pipeline unit 207, a sampling pipeline unit 206 and a pipeline switching control unit 208. The self-test pipeline unit 207 and the sampling pipeline unit 206 are respectively connected to the air inlet 102 of the detector 100, the self-test pipeline unit 207 is used to detect the working state of the detector 100, and the sampling pipeline unit 206 is used to detect the gas in the detection environment. The pipeline switching control unit 208 is respectively connected to the self-test pipeline unit 207 and the sampling pipeline unit 206, and is used to switch the connection between the self-test pipeline unit 207 and the sampling pipeline unit 206 and the air inlet 102. The control module 210 is respectively connected to the detector 100 and the pipeline switching control unit 208, and is used for switching control of environmental gas detection or self-test state. In the environmental gas detection state, the sampling pipeline unit 206 is connected, the self-test pipeline unit 207 is turned off, and the detector 100 inhales the gas in the detection environment to detect the gas composition and concentration in the detection environment in real time. In the self-test state, the sampling pipeline unit 206 is turned off, the self-test pipeline unit 207 is connected, and the detector 100 inhales the self-test gas provided by the self-test pipeline unit 207. The control module 210 determines whether the state of the detector 100 is normal in the following ways: In some embodiments, it is checked whether the alarm signal disappears after the self-test pipeline unit 207 is turned on. The self-test gas is different from the gas that may leak and needs to be monitored. If the alarm signal disappears during the self-test, it means that the detector 100 is normal and there is indeed a gas leak in the detection environment; if the alarm signal does not disappear during the self-test, that is, the results obtained by different inhaled gases are the same, which is obviously impossible, so it can be determined that the detector 100 is damaged and needs to be repaired or replaced. In some embodiments, the judgment is made directly through the self-test gas characteristic information obtained by the detector 100. Since the self-test gas is a known gas, the expected gas characteristic information obtained by the detector 100 is also known. If the deviation between the self-test gas characteristic information output by the detector 100 and the expected value exceeds the judgment threshold, the detector 100 is judged to be damaged and unreliable.

[0032] Further references Figure 3As shown, in some embodiments, the sampling pipeline unit 206 includes a first pipeline 301 and a first valve element 303. The first valve element 303 is arranged on the first pipeline 301, the first end of the first pipeline 301 is connected to the air inlet pipe 104 of the detector 100, and the second end of the first pipeline 301 is connected to the detection environment where the detector 100 is located. The self-test pipeline unit 207 includes a second pipeline 302, a second valve element 304 and a self-test gas source 305. The second valve element 304 is arranged on the second pipeline 302, the first end of the second pipeline 302 is connected to the air inlet pipe 104 of the detector 100, and the second end of the second pipeline 302 is connected to the self-test gas source 305. The gas entering from the air inlet 102 is discharged from the air outlet 103 of the detector 100. In some embodiments, the gas discharged from the air outlet 103 enters the exhaust pipe (not shown) of the machine through the exhaust pipe 105.

[0033] In some embodiments, the self-test gas source 305 is nitrogen, such as clean nitrogen (PN2). On the one hand, nitrogen is cheap and easy to obtain. On the other hand, the nitrogen content in the atmosphere is 78%, and the amount of nitrogen discharged by the self-test will not cause damage to the environment.

[0034] In some embodiments, the first valve element 303 and the second valve element 304 are pneumatic valves, which are controlled to open or close by the pipeline switching control unit 208. The pneumatic valve is a valve that controls the opening or closing of the channel by compressed air through the control airway. The opening and closing of the pneumatic valve is controlled by ventilating or cutting off the control airway.

[0035] In some embodiments, a solenoid valve is used as a pipeline switching control unit, and two output channels of the solenoid valve 306 with mutually exclusive open and closed states are respectively connected to the control airways of two pneumatic valves (this is a known technology, so no further description will be given). Figure 3 As shown, the pipeline switching control unit 208 includes a solenoid valve 306. The solenoid valve 306 is connected to the first valve element 303 and the second valve element 304 respectively, and is used to control the on and off of the first valve element 303 and the second valve element 304.

[0036] In some embodiments, a two-position three-way solenoid valve 306 is preferably used, wherein one channel is connected to the air source 307 of the pneumatic valve, and the other two channels are connected to the pneumatic valve control airways of the first valve element 303 and the second valve element 304 respectively.

[0037] In some embodiments, the first valve element 303 and the second valve element 304 may also be electric valves, and the pipeline switching control unit 208 uses electric control components to control the on and off of the electric valves.

[0038] In some embodiments, the solenoid valve 306 is connected to the control module 210, which is used to control the solenoid valve 306, thereby controlling the opening and closing states of the first valve element 303 and the second valve element 304. The control module 210 can determine whether the sampling pipeline unit 206 or the self-test pipeline unit 207 works according to actual needs. For example, according to the safety production regulations, the detector is self-tested regularly, and the unqualified detector is repaired or replaced; or when an alarm occurs, the detector is self-tested in time to quickly determine whether it is a false alarm to avoid unnecessary emergency processing losses.

[0039] like Figure 4 As shown, in some embodiments, the control module 210 includes SCADA (Supervisory Control And Data Acquisition) and PLC (Programmable Logic Controller). PLC is the hardware basis for implementing control, and SCADA is the control software located on PLC, which is the core of the entire monitoring system. In some embodiments, SCADA controls the solenoid valve through PLC, and then controls the electric valve.

[0040] The present application also provides a gas detection system, including the detector self-test device in the above embodiment. Any suction-type gas detector can be equipped with the detector self-test device, and the self-test gas source can be taken from existing resources in the factory, such as connecting a nitrogen pipeline. The gas source of the pneumatic valve can come from the factory's compressed air pipeline.

[0041] In some embodiments, the number of detector self-test devices in the gas detection system is multiple, and they share a control module. Taking the combination of solenoid valves and pneumatic valves as an example, a production area is configured with a control module and several solenoid valve islands, wherein each solenoid valve island can be installed with several solenoid valves, and a detector self-test device needs to be configured with two pneumatic valves and one solenoid valve, and installing N detector self-test devices requires 2N pneumatic valves and N solenoid valves. In this way, a gas detection system composed of N detector self-test devices (sharing a control module) can realize real-time gas leakage monitoring in a specific area.

[0042] The beneficial effects that may be brought about by the embodiments of the present application include but are not limited to: a detector self-test device provided by the present application includes a gas detector and a sampling pipeline, and a self-test pipeline is added, and the sampling pipeline and the self-test pipeline are switched on and off with the detector air inlet as needed by switching the control unit, so as to realize remote self-test. When the detector alarms, the false alarm problem can be eliminated safely, quickly and efficiently, avoiding unnecessary exposure of personnel to dangerous environments, and greatly saving manpower and material costs.

[0043] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects.

[0044] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0045] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0046] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0047] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0048] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0049] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0050] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. A detector self-test device, comprising a detector for detecting gas, characterized in that: It also includes a self-test pipeline unit, a sampling pipeline unit, a pipeline switching control unit and a control module. The self-test pipeline unit and the sampling pipeline unit are respectively connected to the air inlet of the detector. The self-test pipeline unit is used for self-testing the working state of the detector. The sampling pipeline unit is used for detecting the ambient gas. The pipeline switching control unit is respectively connected to the self-test pipeline unit and the sampling pipeline unit, and is used to switch the connection between the self-test pipeline unit and the sampling pipeline unit and the air inlet. The control module is respectively connected to the detector and the pipeline switching control unit, and is used to control and switch the detection and the self-test.

2. The detector self-test device according to claim 1, characterized in that: The sampling pipeline unit includes a first pipeline and a first valve element, the first valve element is arranged on the first pipeline, the first end of the first pipeline is connected to the air inlet of the detector, and the second end of the first pipeline is connected to the detection environment of the detector; the self-test pipeline unit includes a second pipeline, a second valve element and a self-test gas source, the second valve element is arranged on the second pipeline, the first end of the second pipeline is connected to the air inlet of the detector, and the second end of the second pipeline is connected to the self-test gas source; the detector includes an air outlet, and the gas entering from the air inlet is discharged from the air outlet of the detector after the detection or the self-test.

3. The detector self-test device according to claim 2, characterized in that: The gas of the self-test gas source is nitrogen.

4. The detector self-test device according to claim 2, characterized in that: The first valve element and the second valve element are pneumatic valves, and the opening and closing are controlled by the pipeline switching control unit.

5. The detector self-test device according to claim 4, characterized in that: The pipeline switching control unit includes a solenoid valve, which is respectively connected to the first valve element and the second valve element and is used to control the on and off of the first valve element and the second valve element.

6. The detector self-test device according to claim 5, characterized in that: The solenoid valve is a two-position three-way structure, wherein one channel is connected to the pneumatic valve air source, and the other two channels are respectively connected to the pneumatic valve control airways of the first valve element and the second valve element.

7. The detector self-test device according to claim 6, characterized in that: The solenoid valve is connected to the control module and is used to control the solenoid valve.

8. The detector self-test device according to claim 1, characterized in that: The control module includes SCADA and PLC.

9. A gas detection system, characterized in that: A detector self-test device comprising the detector self-test device according to any one of claims 1 to 8.

10. The gas detection system according to claim 9, characterized in that: The number of the detector self-checking devices is multiple and they share a control module.

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