Master etching alignment jig

Abstract

The utility model provides a mother board etching alignment jig. The mother board etching alignment jig comprises a fixed base, a fixed groove is formed in the top surface of the fixed base, and the outline and the size of the inner side wall of the fixed groove correspond to the outline and the size of a mother set; the fixing groove extends inwards at a first position of the inner side wall to form a first supporting part, and the first supporting part has a fitting alignment function; and the fixing groove extends inwards at a second position of the inner side wall to form a second supporting part. The first supporting part and the second supporting part are used for limiting and supporting the fitting alignment operation of the mother set and the etching baffle plate, and the first supporting part is used for fitting alignment operation of the mother set and the etching baffle plate, so that the fitting alignment efficiency and precision are greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ion etching, in particular to a master plate etching alignment fixture. Background Art

[0002] The production process of holographic grating is generally as follows:

[0003] 1. Prepare a grating mask on a master: spin-coat a layer of photoresist of a certain thickness on the surface of the master to obtain a master with a photoresist mask; place the master with the photoresist mask in a holographic exposure system for exposure, the photoresist mask on the master is modulated by the periodic light and dark stripes of the exposure light field, the properties of the photoresist mask change, and thus a photoresist mask with changed properties is obtained on the master; develop the photoresist mask with changed properties on the master to obtain a grating mask on the master.

[0004] 2. Use the grating mask to make a grating on the master: Use an ion beam etcher to etch the master, copy the morphology distribution of the grating mask to the master, and complete the grating production.

[0005] In the above-mentioned process of etching the master using an ion beam etcher, in order to etch the desired grating morphology on the master, it is necessary to use an etching baffle to perform partition etching or multiple etchings on the master, and in order to etch a precise structure of the grating morphology on the master, the etching baffle needs to be accurately aligned with the master.

[0006] The conventional alignment operation between the etching baffle and the master is generally as follows:

[0007] 1. Use both hands to pick up the etching baffle and the master for alignment.

[0008] 2. Select a horizontally placed experimental table, use human hands to take the etching baffle and the master in the bonded state and place them vertically on the experimental table to achieve the bonding and alignment of the etching baffle and the master.

[0009] The existing bonding and alignment operation method of the etching baffle and the master has the technical defects of low bonding efficiency and poor bonding and alignment accuracy. Utility Model Content

[0010] In order to overcome the defects of the prior art, the utility model provides a master plate etching alignment fixture.

[0011] The utility model is realized by the following technical solutions:

[0012] The utility model provides a master plate etching alignment fixture, comprising a fixed base;

[0013] A fixing groove is formed on the top surface of the fixing base, and the contour and size of the inner side wall of the fixing groove correspond to the outer contour and size of the motherboard;

[0014] The fixing groove extends inwardly at a first position of the inner side wall to form a first supporting portion, and the first supporting portion has a fitting and alignment function;

[0015] The fixing groove extends inwardly at a second position of the inner side wall to form a second supporting portion.

[0016] Furthermore, the first position of the fixing groove on the inner side wall corresponds to a corner area of ​​the master.

[0017] Furthermore, the second position of the fixing groove on the inner side wall corresponds to a diagonal area of ​​the certain corner area of ​​the master.

[0018] Further, the fixing groove extends inwardly at a third position of the inner side wall to form a third supporting portion;

[0019] The third position is different from the first position and the second position.

[0020] Furthermore, the top surface height of the first supporting portion is flush with the top surface height of the second supporting portion;

[0021] A top surface height of the first supporting portion and a top surface height of the second supporting portion are lower than a top surface height of the fixing groove.

[0022] Furthermore, the side area of ​​the first supporting portion has the same side profile shape as the certain corner area of ​​the master;

[0023] The bottom surface area of ​​the first supporting portion contacts the bottom surface of the master.

[0024] Furthermore, a first notch is formed in a partial area of ​​the second position of the inner side wall of the fixing groove toward the bottom surface of the fixing groove.

[0025] Furthermore, the fixing groove is provided with a second notch at a fourth position of the inner side wall toward the bottom surface of the fixing groove;

[0026] The fourth position is different from the first position, the second position and the third position.

[0027] Compared with the prior art, the technical solution of the utility model has the following beneficial effects:

[0028] The utility model provides a master plate etching alignment jig, wherein a fixed groove is provided on the top surface of a fixed base, and the contour and size of the inner side wall of the fixed groove correspond to the outer contour and size of the master plate. The fixed groove extends inwardly at a first position of the inner side wall to form a first support portion, and the first support portion has a fitting alignment function. The fixed groove extends inwardly at a second position of the inner side wall to form a second support portion, and the fitting alignment operation of the master plate and the etching baffle is limitedly supported by the first support portion and the second support portion. The fitting alignment operation of the master plate and the etching baffle is performed by the first support portion, which greatly improves the efficiency and accuracy of the fitting alignment. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0030] Figure 1 A schematic diagram of the structure of a master etching alignment fixture corresponding to a rectangular master is shown as an example;

[0031] Figure 2 is a schematic diagram of the structure of an etched baffle as an example;

[0032] Figure 3 The figure is a schematic diagram of the alignment of a rectangular master and an etching baffle on a master etching alignment jig.

[0033] Among them, 1-rectangular base, 2-first supporting part, 2-1-side area, 2-2-bottom area, 3-first area, 4-second supporting part, 5-second area, 6-third supporting part, 7-third area, 8-fourth area, 9-first notch, 10-second notch, 11-fifth area, 12-sixth area, 13-seventh area, 14-etching baffle. DETAILED DESCRIPTION

[0034] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solution of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In this article, the terms "first", "second" and other similar words are not intended to imply any order, quantity and importance, but are only used to distinguish different elements. In this article, the terms "one", "an" and other similar words are not intended to indicate that there is only one of the things described, but rather indicate that the relevant description is only for one of the things described, and the things described may have one or more. In this article, the terms "comprise", "include" and other similar words are intended to indicate logical mutual relationships, and cannot be regarded as indicating spatial structural relationships. For example, "A includes B" is intended to indicate that B belongs to A logically, but does not indicate that B is located inside A spatially. In addition, the meanings of the terms "comprise", "include" and other similar words should be regarded as open, rather than closed. For example, "A includes B" is intended to indicate that B belongs to A, but B does not necessarily constitute the whole of A, and A may also include other elements such as C, D, and E.

[0036] In this document, the terms "embodiment", "present embodiment", "preferred embodiment" and "one embodiment" do not mean that the relevant description is only applicable to a specific embodiment, but rather that the description may also be applicable to one or more other embodiments. Those skilled in the art should understand that in this document, any description of a certain embodiment can be replaced, combined, or combined in other ways with the relevant description in one or more other embodiments, and the new embodiment generated by the replacement, combination, or combination in other ways is easily conceivable by those skilled in the art and belongs to the protection scope of the present utility model.

[0037] In the description herein, “plurality” means at least two, for example, two, three, etc., unless otherwise clearly and specifically defined.

[0038] The utility model provides a mother plate etching alignment fixture, which comprises a fixed base.

[0039] The top surface of the fixed base is provided with a fixing groove, and the contour and size of the inner side wall of the fixing groove correspond to the outer contour and size of the master. Exemplarily, the contour of the inner side wall of the fixing groove is close to the outer contour of the master, and the area size formed by the inner side wall of the fixing groove is slightly larger than the size of the master.

[0040] The fixed groove extends inward at the first position of the inner side wall to form a first support portion, and the first support portion has a fitting and alignment function. There is no specific limitation requirement for the first position here, and the preferred first position is the outer edge contour position of the master plate for easy fitting and alignment with the etching baffle. Exemplarily, the first position of the fixed groove at the inner side wall corresponds to a corner area of ​​the master plate. In this case, the side area of ​​the first support portion is consistent with the side contour shape of a corner area of ​​the master plate, and the bottom area of ​​the first support portion contacts the bottom surface of the master plate, so that the first support portion provides limited support for the fitting and alignment operation of the master plate and the etching baffle plate, and the fitting and alignment operation of the master plate and the etching baffle plate is realized through the first support portion.

[0041] The fixing groove extends inward at the second position of the inner side wall to form a second support portion. The second support portion and the first support portion together provide limited support for the alignment operation of the master and the etching baffle. There is no specific requirement for the second position here, and those skilled in the art can set it according to the outer edge contour of the master and the first position. Exemplarily, the second position of the fixing groove at the inner side wall corresponds to the diagonal area of ​​a corner area of ​​the above-mentioned master.

[0042] Preferably, the top surface height of the first support portion is flush with the top surface height of the second support portion, and the top surface height of the first support portion and the top surface height of the second support portion are lower than the top surface height of the fixing groove.

[0043] The first support part and the second support part are used to provide limited support for the alignment operation of the master plate and the etching baffle. The master plate and the etching baffle are aligned by the first support part, which greatly improves the efficiency and accuracy of the alignment.

[0044] As a preferred embodiment, the fixing groove extends inward at the third position of the inner side wall to form a third support portion. There is no specific limitation requirement for the third position here, as long as it is different from the first position and the second position mentioned above, and those skilled in the art can set it according to the outer edge contour of the master and the first position and the second position. The third support portion, together with the first support portion and the second support portion, provides limited support for the alignment operation of the master and the etching baffle, thereby improving the support stability. It should be noted that the third position here may not be limited to one position. For example, multiple third positions may be selected to form multiple third support portions respectively.

[0045] As a preferred embodiment, the fixing groove may have a first notch formed in a partial area of ​​the second position of the inner side wall toward the bottom surface of the fixing groove. By providing the first notch, it is convenient to take out or place the master and / or etching baffle in the fixing groove during the operation of fitting and aligning the master and the etching baffle. There is no specific requirement for the size and depth of the first notch, and those skilled in the art may design it according to actual conditions.

[0046] As a further preferred embodiment, a second notch is provided at a fourth position of the inner side wall of the fixing groove toward the bottom surface of the fixing groove. After the master and the etching baffle are fitted and aligned, the second notch can be used to connect and fix the overall structure of the master and the etching baffle that have completed the fitting and alignment, so as to facilitate placing the overall structure of the master and the etching baffle into the corresponding position of the ion beam etcher to perform etching operations on the master. There is no specific limitation requirement for the fourth position here, but the fourth position needs to be different from the first position, the second position and the third position. The fourth position here may not be limited to one position. For example, multiple fourth positions may be selected to form multiple second notches respectively. There is no specific limitation requirement for the size and depth of the second notch here, and those skilled in the art can design it according to actual conditions.

[0047] Take the rectangular master as an example. Figure 1 As shown, exemplarily, the fixed base of the motherboard etching alignment fixture adopts a rectangular base.

[0048] A rectangular fixing groove is provided inside the rectangular base 1 , and the contour of the inner side wall of the rectangular fixing groove is close to the outer contour of the rectangular motherboard, and the size of the inner side wall of the rectangular fixing groove is slightly larger than the size of the rectangular motherboard.

[0049] The rectangular fixing groove extends inward at the first position of the inner side wall to form a first support portion 2, the first support portion 2 includes a side area 2-1 and a bottom area 2-2, and the first support portion 2-1 has a fitting and alignment function. The first position here corresponds to one of the right-angle areas of the rectangular motherboard, that is, the first area 3 shown in the figure.

[0050] The rectangular fixing groove extends inward at the second position of the inner side wall to form a second support portion 4, and the second support portion 4 and the first support portion 2 together provide limited support for the mating and alignment operation of the master and the etching baffle. The second position here corresponds to the diagonal area of ​​a right-angle area of ​​the above-mentioned master, that is, the second area 5 shown in the figure. The rectangular fixing groove is provided with a first notch 9 in a partial area of ​​the second area shown in the figure toward the bottom surface of the fixing groove, and the depth of the first notch 9 directly reaches the bottom surface of the fixing groove.

[0051] The rectangular fixing groove extends inward at the third position of the inner side wall to form a third support portion 6, which together with the first support portion 2 and the second support portion 4 provide limited support for the alignment operation of the master and the etching baffle. The third position in the figure is schematically located in the third area 7 and the fourth area 8.

[0052] The rectangular fixing groove has a second notch 10 at the fourth position of the inner side wall toward the bottom of the fixing groove. The depth of the second notch 10 directly reaches the bottom of the fixing groove. The fourth position in the figure is schematically located in the fifth area 11, the sixth area 12 and the seventh area 13.

[0053] Below Figure 1 Taking the master etching alignment fixture shown as an example, the alignment operation of the master and the etching baffle by using the master etching alignment fixture of the utility model is illustrated:

[0054] 1. Prepare a rectangular master and an etching baffle. The shape and size of the etching baffle need to be the same as those of the rectangular master. For example, Figure 2 The etched stopper 14 is shown.

[0055] 2. Place the bottom surface of the rectangular master into the rectangular fixing groove. During the placement process, first place the right-angle area to be aligned in the rectangular master close to the side area of ​​the first support part in the first area of ​​the rectangular fixing groove, and support it through the bottom area of ​​the first support part. Then slowly lower the rectangular master, and the other corner areas of the rectangular master are auxiliary supported by the second support part in the second area, the third support part in the third area, and the third support part in the fourth area of ​​the rectangular fixing groove.

[0056] 3. Align the bottom surface of the etching baffle with the top surface of the rectangular master. During the alignment process, first align the right angle position of the right angle area to be aligned in the etching baffle with the right angle position of the right angle area to be aligned in the rectangular master placed in the rectangular fixing groove, and then slowly lower the etching baffle so that the bottom surface of the etching baffle is aligned with the top surface of the rectangular master (such as Figure 3 example).

[0057] 4. The overall structure of the master plate and the etching baffle that have been fitted and aligned is connected and fixed through the second notches located in the fifth area, the sixth area and the seventh area in the rectangular fixing groove.

[0058] 5. The overall structure of the master and the etching baffle is taken out from the master etching alignment fixture through the first notch of the rectangular fixing groove located in the second area, and then the subsequent etching operation is started.

[0059] It should be noted that

[0060] The above-mentioned order of placing the master and the etching baffle in the master etching alignment jig is only an example, and the etching baffle may be placed first in the master etching alignment jig, and then the master.

[0061] And for a master with a double-sided imprinting structure, two etching baffles (a first etching baffle and a second etching baffle) will be used. At this time, the placement order of the master and the etching baffles in the master etching alignment fixture is exemplified as: first etching baffle, master, second etching baffle.

[0062] The above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in the relevant field can still modify or replace the specific implementation methods of the present invention. Any modifications or equivalent replacements that do not depart from the spirit and scope of the present invention are within the scope of protection of the claims of the present invention to be approved.

Claims

1. A master plate etching alignment fixture, characterized in that: Includes fixed base; A fixing groove is formed on the top surface of the fixing base, and the contour and size of the inner side wall of the fixing groove correspond to the outer contour and size of the motherboard; The fixing groove extends inwardly at a first position of the inner side wall to form a first supporting portion, and the first supporting portion has a fitting and alignment function; The fixing groove extends inwardly at a second position of the inner side wall to form a second supporting portion.

2. The master plate etching alignment fixture according to claim 1, characterized in that: The fixing groove corresponds to a corner area of ​​the master plate at a first position of the inner side wall.

3. The master plate etching alignment jig according to claim 2, characterized in that: The second position of the fixing groove on the inner side wall corresponds to the diagonal area of ​​the certain corner area of ​​the master.

4. The master plate etching alignment jig according to claim 3, characterized in that: The fixing groove extends inwardly at a third position of the inner side wall to form a third supporting portion; The third position is different from the first position and the second position.

5. The master plate etching alignment jig according to claim 1, characterized in that: The top surface height of the first supporting portion is flush with the top surface height of the second supporting portion; The top surface height of the first supporting portion and the top surface height of the second supporting portion are lower than the top surface height of the fixing groove.

6. The master plate etching alignment jig according to claim 2, characterized in that: The side area of ​​the first supporting portion has the same side profile shape as the certain corner area of ​​the master; The bottom surface area of ​​the first supporting portion contacts the bottom surface of the master.

7. The master plate etching alignment jig according to claim 3, characterized in that: A first notch is formed in a partial area of ​​the second position of the inner side wall of the fixing groove toward the bottom surface of the fixing groove.

8. The master plate etching alignment jig according to claim 4, characterized in that: The fixing groove has a second notch formed at a fourth position of the inner side wall thereof toward the bottom surface of the fixing groove; The fourth position is different from the first position, the second position and the third position.

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