Ion beam energy homogenizing and purifying device

Abstract

The utility model relates to the technical field of ion implantation, in particular to an ion beam energy homogenizing and purifying device, which comprises an ion screening mechanism used for screening and purifying ion beams and an electric control mechanism used for dynamically controlling voltage difference in the ion screening mechanism. The ion screening mechanism comprises an insulation shielding shell, an electrode rod assembly arranged in the insulation shielding shell and a first wiring ring fixed to one end of the electrode rod assembly. The insulation shielding shell is provided with a wiring hole used for electrically connecting the first wiring ring and the electric control mechanism. According to the utility model, ions with relatively wide energy distribution or unmatched energy are screened through the quadrupole rod assembly, and ion beams for ion implantation are purified and focused; the internal electric field distribution is dynamically adjusted by additionally arranging the controller, and the focusing degree and energy distribution of the ion beam in the space are changed, so that the ion beam obtains more uniform energy density distribution at the emergent end, and uniform purification is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of ion implantation, in particular to an ion beam energy homogenization purification device, aiming to solve the problem of insufficient homogenization of purification. Background Art

[0002] Ion implantation is a technology that dopes semiconductor materials with specific elements to change their electrical properties. The required ions are ionized and extracted through an ion source, and then focused into an ion beam to be doped into the semiconductor. In the semiconductor manufacturing process, there are strict requirements on the type and concentration of the doping elements. After the ion source forms the ion beam output, it needs to be purified.

[0003] Most of the devices that commonly perform ion beam purification use ion beams to pass through a magnetic field or electric field to screen and focus them, to ensure that only ions of the target element are injected into the semiconductor material, to avoid the presence of non-target elements or impurity ions, to achieve ion beam purification and improve device performance and yield. However, it is found that the ion beam after screening and purification has a certain energy dispersion, that is, it is not uniform, so that the depth of the ion beam doped in the semiconductor is inconsistent, thus affecting the quality of the finished product. Now there is an urgent need for a device that can perform uniform purification of ion beams. Utility Model Content

[0004] In order to solve the problems of the prior art, the utility model provides an ion beam energy homogenization purification device, which aims to solve the problem of energy non-uniformity after ion beam screening and purification.

[0005] The solution adopted by the utility model to solve its technical problems is: an ion beam energy homogenization purification device, including an ion screening mechanism for screening and purifying ion beams and an electric control mechanism for dynamically controlling the voltage difference in the ion screening mechanism, the ion screening mechanism including an insulating shielding shell, an electrode rod assembly arranged in the insulating shielding shell and a first wiring ring fixed to one end of the electrode rod assembly, the insulating shielding shell is provided with a wiring hole for electrically connecting the first wiring ring to the electric control mechanism.

[0006] By adopting the above technical solution, after the ion beam generated by the ion source enters the device, the ions with wide energy distribution or mismatched energy are screened out by the quadrupole assembly, and the ion beam for ion injection is purified and focused; and the electric control mechanism can dynamically adjust the internal electric field distribution, change the focusing degree and energy distribution of the ion beam in space, so that the ion beam obtains a more uniform energy density distribution at the exit end, achieving uniform purification. The shell has electromagnetic shielding performance, which can prevent external electromagnetic interference from affecting the internal electrode electric field, ensuring the accuracy and stability of voltage control; the wiring holes on the insulating shielding shell are convenient for the wiring ring to connect the power supply.

[0007] Furthermore, the electrode rod assembly includes four electrode rods symmetrically distributed around a central axis, and the voltages on adjacent electrode rods are opposite.

[0008] By adopting the above technical solution, an orderly electric field environment will be formed between the electrode rods to screen ions of specific mass and purify the ion beam.

[0009] Furthermore, four electrode terminals for transmitting electricity to the electrode rods are provided in the first wiring ring.

[0010] By adopting the above technical solution, each electrode terminal corresponds to an electrode rod, the voltage on each electrode rod can be independently and accurately controlled, and subsequent maintenance is convenient.

[0011] Furthermore, the electric control mechanism includes a power supply unit electrically connected to the electrode terminal and a controller for controlling the output voltage of the power supply unit.

[0012] By adopting the above technical solution, the controller can dynamically and accurately adjust the power supply to each electrode rod, thereby uniformly purifying the ion beam energy.

[0013] Furthermore, a second wiring ring is provided at the other end of the electrode rod assembly, and a plurality of voltage sensors attached to each electrode rod are provided in the second wiring ring, and the voltage sensors are electrically connected to the controller.

[0014] By adopting the above technical solution, the first wiring ring and the second wiring ring are precisely fixed at the head and tail ends of the electrode rod assembly to ensure that the four electrode rods are strictly arranged into an electrode rod assembly according to the preset position. A voltage sensor is embedded in the second wiring ring to monitor the actual voltage value on each electrode rod in real time and continuously, and transmit this data back to the controller in real time. Precise control of ion beam energy can be achieved, and the accuracy and stability of ion beam energy control can be ensured through real-time feedback and precise regulation of voltage distribution on each electrode rod.

[0015] Furthermore, the controller includes an analog-to-digital converter for converting an analog signal of the voltage sensor into a digital control signal.

[0016] By adopting the above technical solution, the analog signal detected by the voltage sensor can be converted into a digital control signal, and then the power supply can be precisely controlled after being processed by the controller.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] 1. The utility model adds a controller to dynamically control the power supply to each electrode rod, optimizes the focusing degree and energy distribution of the ion beam in space, and performs homogenization and purification on the ion beam output by the ion source.

[0019] 2. The utility model is designed with four electrode rods symmetrically distributed around the central axis, and the voltage polarity between two adjacent electrode rods is opposite to form an orderly and efficient screening electric field; a first wiring ring and a second wiring ring are arranged at both ends, and electrode terminals and voltage sensors are buried respectively, which effectively prevents electromagnetic interference between adjacent electrodes, and can monitor the electrode rod voltage in real time and transmit it back to the controller, thereby realizing real-time detection of ion beam energy.

[0020] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following specifically cites a preferred embodiment and describes it in detail with the accompanying drawings as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Schematic diagram of the overall structure of this embodiment;

[0022] Figure 2 Schematic diagram of the electrode rod assembly of this embodiment.

[0023] In the figure: 1. ion screening mechanism; 11. insulating shielding shell; 111. wiring hole; 12. electrode rod; 13. first wiring ring; 131. electrode terminal; 2. electric control mechanism; 21. power supply; 22 controller; 3. second wiring ring; 31. voltage sensor; 4. voltage sensor. DETAILED DESCRIPTION

[0024] In order to make the content of the utility model more clearly understood, the utility model is further described below based on specific embodiments in combination with the accompanying drawings.

[0025] It should be noted that the terms "center", "upper", "lower", "front", "back", "left", "right", "top", "inner", "outer" and the like used herein to indicate directions or positional relationships are based on the directions or positions shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. Unless otherwise specified, "plurality" means two or more.

[0026] Unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood by specific circumstances.

[0027] like Figure 1 and Figure 2 As shown, an ion beam energy homogenization purification device can solve the problem of uneven energy after ion beam screening and purification. This embodiment includes an ion screening mechanism 1 for screening and purifying ion beams and an electric control mechanism 2 for dynamically controlling the voltage difference in the ion screening mechanism 1. The ion screening mechanism 1 includes an insulating shielding shell 11, an electrode rod 12 assembly arranged in the insulating shielding shell 11, and a first wiring ring 13 fixed to one end of the electrode rod 12 assembly. The insulating shielding shell 11 is provided with a plurality of wiring holes 111 for electrically connecting the first wiring ring 13 to the electric control mechanism 2.

[0028] In this embodiment, the ion screening mechanism 1 is docked and fixed at the output port of the ion source. After the ion beam generated by the ion source enters the device, the ions with wide energy distribution or mismatched energy are screened out through the quadrupole assembly, and the ion beam for ion injection is purified and focused; and the electric control mechanism 2 can dynamically adjust the internal electric field distribution, change the focusing degree and energy distribution of the ion beam in space, so that the ion beam obtains a more uniform energy density distribution at the output end, and achieves uniform purification. The shell is formed by a composite of high molecular polymer, insulating material and radiation-proof material, and has electromagnetic shielding performance, which can prevent external electromagnetic interference from affecting the internal electrode electric field, and ensure the accuracy and stability of voltage control; a wiring hole 111 is left on the insulating shielding shell 11, which is convenient for the wiring ring to connect the power supply 21 for power supply.

[0029] like Figure 2 As shown, the electrode rod 12 assembly of this embodiment includes four electrode rods 12 symmetrically distributed around the central axis, and the voltages on adjacent electrode rods 12 are opposite. An orderly electric field environment can be formed between the electrode rods 12. When the ion beam passes through this electric field, only ions with a specific mass-to-charge ratio can pass along a straight path without deflection, thereby screening ions of specific mass and purifying the ion beam.

[0030] like Figure 1As shown, the electric control mechanism 2 of this embodiment is a control box, which is arranged at the bottom of the ion screening mechanism 1, and includes a power supply 21 placed in the box and electrically connected to the electrode terminal 131 through a wire, and a controller for controlling the output voltage of the power supply 21. The controller can dynamically and accurately adjust the power supply of the power supply 21 to each electrode rod 12, so as to uniformly purify the ion beam energy. Two clamps are provided on the top of the control box to fix the ion screening mechanism 1.

[0031] like Figure 2 As shown, the first wiring ring 13 of this embodiment is provided with four electrode terminals 131 for transmitting electricity to the electrode rods 12. Each electrode terminal 131 transmits electricity to one electrode rod 12, and the voltage on each electrode rod 12 can be independently and accurately controlled to prevent electromagnetic interference between adjacent electrodes, ensure the uniformity of ion beam energy and accurate screening and purification, and facilitate later maintenance. A second wiring ring 22 controller; 3 is also sleeved on the other end of the electrode rod 12 assembly. The second wiring ring 22 controller; 3 is provided with a plurality of voltage sensors 31 attached to each electrode rod 12, and the voltage sensor 31 is electrically connected to the controller. The second wiring ring 22 controller; 3 cooperates with the first wiring ring 13 to be fixed at the head and tail ends of the four electrode rods 12 respectively, so as to ensure that the four electrode rods 12 are strictly arranged into an electrode rod 12 assembly according to the preset position. The voltage sensor 31 is embedded in the second wiring ring 22 controller; 3, which can monitor the actual voltage value on each electrode rod 12 in real time and uninterruptedly, and transmit these data back to the controller in real time. The precise control of ion beam energy can be achieved, and the accuracy and stability of ion beam energy control can be ensured through real-time feedback and precise regulation of voltage distribution on each electrode rod 12.

[0032] like Figure 1 As shown, in this embodiment, an analog-to-digital converter 4 is provided between the controller and the power supply 21, which can convert the analog signal of the voltage sensor 31 into a digital control signal, and then the digital signal is processed by the controller to realize precise control of the power supply 21.

[0033] The working principle of this embodiment is: this embodiment adds a controller to dynamically control the power supply 21 to supply power to each electrode rod 12, optimizes the focusing degree and energy distribution of the ion beam in space, and performs uniform purification treatment on the ion beam output by the ion source. The electrode rod 12 assembly is composed of four electrode rods 12 symmetrically distributed around the central axis, and the voltage polarity between two adjacent electrode rods 12 is opposite to form an orderly and efficient screening electric field; the first wiring ring 13 and the second wiring ring 22 controller are arranged at both ends; 3, the electrode terminal 131 and the voltage sensor 31 are respectively buried, which effectively prevents electromagnetic interference between adjacent electrodes, and can monitor the voltage of the electrode rod 12 in real time and transmit it back to the controller, realizing real-time detection of the ion beam energy.

[0034] The embodiments described above are only preferred implementation modes of the present utility model and cannot be used to limit the protection scope of the present utility model. Any non-substantial changes and modifications made by technicians in this field on the basis of the utility model shall fall within the protection scope of the present utility model.

Claims

1. An ion beam energy homogenization purification device, characterized in that: It includes an ion screening mechanism for screening purified ion beams and an electric control mechanism for dynamically controlling the voltage difference in the ion screening mechanism. The ion screening mechanism includes an insulating shielding shell, an electrode rod assembly arranged in the insulating shielding shell, and a first wiring ring fixed to one end of the electrode rod assembly. The insulating shielding shell is provided with a wiring hole for electrically connecting the first wiring ring to the electric control mechanism.

2. The ion beam energy homogenization purification device according to claim 1, characterized in that: The electrode rod assembly comprises four electrode rods symmetrically distributed around a central axis, and the voltages on adjacent electrode rods are opposite.

3. The ion beam energy homogenization purification device according to claim 2, characterized in that: Four electrode terminals for transmitting electricity to the electrode rods are arranged in the first wiring ring.

4. The ion beam energy homogenization purification device according to claim 3, characterized in that: The electric control mechanism includes a power supply unit electrically connected to the electrode terminal and a controller for controlling the output voltage of the power supply unit.

5. The ion beam energy homogenization purification device according to claim 4, characterized in that: A second wiring ring is also provided at the other end of the electrode rod assembly. A plurality of voltage sensors attached to each electrode rod are provided in the second wiring ring. The voltage sensors are electrically connected to the controller.

6. The ion beam energy homogenization purification device according to claim 5, characterized in that: The controller includes an analog-to-digital converter for converting an analog signal of the voltage sensor into a digital control signal.

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