Linear ultrasonic motor vibrator module

Abstract

The utility model discloses a linear ultrasonic motor vibrator module, and the module comprises a vibrator which is in an annular shape. The two driving arms are positioned on the two sides of the vibrator and are provided with accommodating grooves; the piezoelectric ceramic group is positioned in the accommodating groove and transmits vibration to the vibrator through the driving arm; at least part of the pre-tightening structure is located in the containing groove, and the pre-tightening structure enables the piezoelectric ceramic set to be tightly attached to the side wall, close to one side of the vibrator, of the containing groove; the vibrator and the driving arm are of an integrated structure. The vibrator and the driving arm are integrally designed, the structure is more compact, and the problems of abrasion and looseness between parts caused by vibration can be effectively avoided in the using process.

Description

Technical Field

[0001] The utility model relates to the technical field of motors, and more specifically, to a linear ultrasonic motor vibrator module. Background Art

[0002] Ultrasonic motors are drivers that use mechanical vibrations in the ultrasonic frequency domain as a driving source. They use electrical energy to generate ultrasonic vibrations to obtain driving force, and convert power into the movement of the rotor or slider through friction coupling. Compared with traditional motors, ultrasonic motors have small inertia, fast response, good controllability, are not affected by magnetic fields, and do not generate magnetic fields themselves, and have high positioning accuracy. Ultrasonic motors also have the characteristics of light weight, simple structure, high efficiency, low noise, low speed and high torque, and can directly drive loads. Since the load is driven directly, the vibration noise, gap, low efficiency, and difficult control problems caused by the use of gear speed change are avoided. Therefore, ultrasonic motors are a new automatic control actuator and a new transmission mode. They are a breakthrough and a powerful supplement to the traditional electromagnetic drive principle.

[0003] The linear ultrasonic motor is a widely used linear ultrasonic motor. The linear ultrasonic motor uses the inverse piezoelectric effect of piezoelectric materials to excite its micro-vibration at the resonant frequency of the elastic metal matrix, and then transmits the micro-vibration to the mover through friction coupling, thereby causing the mover to move linearly. The advantages of the linear ultrasonic motor over the electromagnetic motor are: the linear ultrasonic motor does not require electromagnetic windings, so the structure is compact and easy to miniaturize; the vibrator module of the linear ultrasonic motor transfers kinetic energy to the mover through friction, so it has strong anti-electromagnetic interference ability and has power-off self-locking ability.

[0004] In order to fix the piezoelectric ceramics in the current linear ultrasonic motor, a through hole is usually set in the middle of the piezoelectric ceramics for bolts to pass through. However, during installation, if the piezoelectric ceramics are not well centered, the side wall of the through hole of the piezoelectric ceramics will contact the bolts, so that the bolts will generate torque on the piezoelectric ceramics during tightening, thereby damaging the piezoelectric ceramics. Therefore, it is urgent to design a new type of linear ultrasonic motor vibrator module to solve the above problems. Utility Model Content

[0005] The utility model aims to provide a linear ultrasonic motor vibrator module to solve the problem that piezoelectric ceramics are easily damaged.

[0006] The utility model provides a linear ultrasonic motor vibrator module, comprising: a vibrator, which is annular; two driving arms, which are respectively located on both sides of the vibrator, and the driving arms are provided with accommodating grooves; a piezoelectric ceramic group, which is located in the accommodating grooves of the driving arms, and the piezoelectric ceramic group transmits vibration to the vibrator through the driving arms; a pre-tightening structure, which is at least partially located in the accommodating grooves of the driving arms, and the pre-tightening structure makes the piezoelectric ceramic group and the side wall of the accommodating groove close to the vibrator tightly; wherein the vibrator and the driving arms are an integrated structure.

[0007] Optionally, the driving feet are located on outer side surfaces of the vibrator on two opposite sides where the driving arms are not provided.

[0008] Optionally, the two driving arms are symmetrically arranged on both sides of the vibrator.

[0009] Optionally, the vibrator includes a first through hole, and a second through hole is further provided at the junction of the vibrator and the driving arm, the axis of the second through hole is parallel to the axis of the first through hole, and the center of the second through hole and the center of the first through hole are both located on the central axis of the vibrator.

[0010] Optionally, the vibrator comprises a first surface and a second surface opposite to each other, and a fixing structure for fixing the linear ultrasonic motor vibrator module is arranged on the first surface and the second surface of the vibrator.

[0011] Optionally, the fixing structure is located between the second through hole and the accommodating groove, and the fixing structure includes a boss or a positioning hole.

[0012] Optionally, a cross section of the boss taken along a plane perpendicular to the first surface is in a convex shape.

[0013] Optionally, the positioning holes on the first surface and the second surface are connected.

[0014] Optionally, a threaded hole communicating with the accommodating groove is provided on a side of the driving arm away from the vibrator, and the pre-tightening structure comprises a bolt, and the bolt passes through the threaded hole to tighten the piezoelectric ceramic group in the accommodating groove.

[0015] Optionally, the pre-tightening structure further includes a pressing block, and the pressing block is at least located between the bolt and the piezoelectric ceramic group.

[0016] Optionally, the piezoelectric ceramics in the piezoelectric ceramic group have no perforations.

[0017] Optionally, the piezoelectric ceramic group includes a plurality of the piezoelectric ceramics and a plurality of the conductive sheets, the piezoelectric ceramics and the conductive sheets are alternately arranged, the number of the piezoelectric ceramics is 2n, the number of the conductive sheets is 2n+1, and 1≤n≤3, n is a positive integer, and the conductive sheets are located outside the piezoelectric ceramic group.

[0018] Optionally, the accommodating groove passes through two opposite side surfaces of the driving arm.

[0019] The linear ultrasonic motor vibrator module provided by the utility model provides a receiving groove on the driving arm, embeds the piezoelectric ceramic group in the receiving groove, and then extends the pre-tightening structure into the receiving groove to achieve the compression of the piezoelectric ceramic group, thereby avoiding the perforation of the piezoelectric ceramic, ensuring the strength of the piezoelectric ceramic, avoiding the problem of opening holes in the piezoelectric ceramic and the damage and breakage of the piezoelectric ceramic during the tightening of the bolt due to insufficient centering, and also reducing the difficulty of assembly, improving the product yield and production efficiency. The pressure block located between the bolt and the piezoelectric ceramic group avoids direct contact between the bolt and the piezoelectric ceramic group, making the pre-tightening force distribution more uniform.

[0020] Furthermore, the design of the receiving groove also makes the assembly of the linear ultrasonic motor vibrator module more convenient and simple. Since the vibrator and the driving arm are designed as an integrated structure, the structure is more compact, and the wear and looseness of parts caused by vibration can be effectively avoided during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and other objects, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings.

[0022] Figure 1 A schematic diagram of a linear ultrasonic motor vibrator module according to a first embodiment of the utility model is shown;

[0023] Figure 2 It shows a front view of a linear ultrasonic motor vibrator module according to a first embodiment of the utility model;

[0024] Figure 3 A cross-sectional schematic diagram of a linear ultrasonic motor vibrator module according to a first embodiment of the utility model is shown;

[0025] Figure 4 The right side view of the linear ultrasonic motor vibrator module of the first embodiment of the utility model is shown;

[0026] Figure 5a and Figure 5b It shows the working schematic diagram of different modes of the linear ultrasonic motor vibrator module of the first embodiment of the utility model;

[0027] Figure 6A schematic diagram of a linear ultrasonic motor vibrator module according to a second embodiment of the present utility model is shown;

[0028] Figure 7 A schematic diagram of a piezoelectric ceramic group in a linear ultrasonic motor vibrator module according to a second embodiment of the utility model is shown. DETAILED DESCRIPTION

[0029] The present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, the same elements are represented by similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale. In addition, some well-known parts may not be shown.

[0030] It should be understood that when describing a structure, when a component or a region is referred to as being "on" or "over" another component or region, it may mean that it is directly on the other component or region, or that other components or regions are included between it and the other component or region. Furthermore, if the part is turned over, the component or region will be "below" or "under" the other component or region.

[0031] If it is intended to describe a situation where a component or region is directly on another component or region, this document will use the expression “directly on” or “on and adjacent to”.

[0032] Many specific details of some embodiments of the present invention are described below, such as the structure, materials, dimensions, processing techniques and technologies of the components, so as to more clearly understand the present invention. However, as those skilled in the art will appreciate, the present invention may be implemented without following these specific details.

[0033] The present invention may be embodied in various forms, some examples of which will be described below.

[0034] Figure 1A schematic diagram of a linear ultrasonic motor vibrator module of the first embodiment of the utility model is shown; the linear ultrasonic motor vibrator module includes: a vibrator 111, a driving arm 112, a piezoelectric ceramic group 120 and a pre-tightening structure 130, wherein the vibrator 111 has a first surface and a second surface opposite to each other, the two driving arms 112 are located on two opposite outer side surfaces of the vibrator 111, the middle of the vibrator 111 has a first through hole 1111, the first through hole 1111 is, for example, a circular through hole, the two opposite sides of the outer side surface of the vibrator 111 where the driving arm 112 is not provided are driving feet 1112, and a second through hole 113 is provided at the junction of the vibrator 111 and the driving arm 112, and the two working modes of the linear ultrasonic motor vibrator module are adjusted through the second through hole 113 to reduce the difference between the two working modes. The frequency difference, the axis of the second through hole 113 is parallel to the axis of the first through hole 1111, and the second through hole 113 is, for example, a circular through hole; the shape of the vibrator 111 can be elliptical, circular, rectangular or other shapes, and the first through hole 1111 can also be elliptical, oval or other shapes, and the number of the first through hole 1111 is at least one; the driving arm 112 is provided with a receiving groove 1121, and the piezoelectric ceramic group 120 is provided in the receiving groove 1121, and a fixing structure 114 is also provided between the second through hole 113 and the receiving groove 1121. In this embodiment, the fixing structure 114 is, for example, a positioning hole, and the positioning hole completely penetrates the vibrator 111, and the positioning hole can be matched with the corresponding positioning pin to achieve the fixing of the linear ultrasonic motor vibrator module. The positioning hole is, for example, a circular through hole, an elliptical through hole, a polygonal through hole, and the positioning hole can be specifically designed according to the specific situation. The piezoelectric ceramic group 120 includes a piezoelectric ceramic 121 and a conductive sheet 122. The piezoelectric ceramic 121 and the conductive sheet 122 are both rectangular, for example. The conductive sheet 122 also includes a connection end extending outward for electrical connection, and the connection ends can be arranged alternately to facilitate the distinction between positive and negative poles. The pre-tightening structure 130 includes a bolt 131 and a pressing block 132, and the end of the driving arm 112 away from the vibrator 111 is provided with a threaded hole matching the bolt 131. The threaded hole passes through the side wall of the driving arm 112 and is connected to the receiving groove 1121. One end of the bolt 131 passes through the threaded hole. The hole extends into the receiving groove 1121, and the pressing block 132 is also located in the receiving groove 1121. The pressing block 132 is, for example, rectangular, and one side surface thereof is in contact with the bolt 131, and the other side surface is in contact with the piezoelectric ceramic group 120. The bolt 131 provides a pre-tightening force to the piezoelectric ceramic group 120 through the pressing block 132 and presses the piezoelectric ceramic group 120 and the side wall of the receiving groove 1121 close to the vibrator 111. By setting the pressing block 132, direct contact between the bolt 131 and the piezoelectric ceramic group 120 can be avoided, and the piezoelectric ceramic group 120 can be prevented from being damaged by uneven force. Optionally, the material of the pressing block 132 is metal. In other embodiments, the pressing block 132 can also be set between the piezoelectric ceramic group 120 and the side wall of the receiving groove 1121 close to the vibrator 111.

[0035] Figure 2 The front view of the linear ultrasonic motor vibrator module of the first embodiment of the utility model is shown; it can be seen from the front view that the linear ultrasonic motor vibrator module is symmetrical, and the centers of the first through hole 1111 of the vibrator 111, the second through holes 113 on both sides of the first through hole 1111, the fixing structure 114 and the accommodating groove 1121 are all located on the central axis of the vibrator 111.

[0036] Figure 3 The first embodiment shows a linear ultrasonic motor vibrator module along Figure 2 11; it can be seen from the cross-sectional diagram that a threaded hole 1122 matching the bolt 131 is provided at one end of the driving arm 112 away from the vibrator 111, and the threaded hole 1122 has a step, for example, and the bolt hole 1122 passes through the side wall of the driving arm 112 and is connected to the accommodating groove 1121. One end of the bolt 131 extends into the accommodating groove 1121 through the threaded hole 1122, and the pressing block 132 is also located in the accommodating groove 1121. The pressing block 132 is, for example, rectangular, and one side surface thereof is in contact with the bolt 131, and the other side surface is in contact with the piezoelectric ceramic group 120. The bolt 131 provides a pre-tightening force to the piezoelectric ceramic group 120 through the pressing block 132 and presses the piezoelectric ceramic group 120. By providing the pressing block 132, direct contact between the bolt 131 and the piezoelectric ceramic group 120 can be avoided, thereby preventing the piezoelectric ceramic group 120 from being damaged by uneven force. The length of the bolt 131 in the figure is relatively short, and the length of the bolt 131 can be adjusted according to the requirement of the pre-tightening force and the depth of the threaded hole 1122 to avoid the piezoelectric ceramic group 120 being unable to be compressed after the bolt 131 is screwed to the bottom.

[0037] The receiving groove 1121, for example, passes through the first surface and the second surface of the vibrator, the conductive sheet 122, for example, is a copper sheet, the piezoelectric ceramic 121 and the conductive sheet 122 are alternately arranged, and the embodiment in the figure adopts a combination of 4 piezoelectric ceramics 121 and 5 conductive sheets 122. No perforations are set in the middle of the piezoelectric ceramic 121 and the conductive sheet 122. This design ensures the strength of the piezoelectric ceramic 121, avoids the problem of opening holes in the piezoelectric ceramic 121 and damaging and breaking the piezoelectric ceramic 121 during the tightening of the bolts due to insufficient centering, and also reduces the difficulty of assembly, improves product yield and production efficiency. Of course, the number of piezoelectric ceramics 121 and conductive sheets 122 can be adjusted according to demand, for example, the piezoelectric ceramic 121 is 2n sheets, the conductive sheet 122 is 2n+1 sheets, and 1≤n≤3, n is a positive integer. The outer surfaces of the piezoelectric ceramic 121, the conductive sheet 122 and the pressing block 132 are flush with the first surface and the second surface of the vibrator.

[0038] Figure 4The right side view of the linear ultrasonic motor vibrator module of the first embodiment of the utility model is shown; the outer annular surfaces on the opposite sides of the vibrator 111 without the driving arm 112 are used as the driving feet 1112. Specifically, for example, taking the sinusoidal signal applied to the piezoelectric ceramic 121 on the left driving arm 112 as a reference, at the same electrical signal frequency, when the sinusoidal signal applied to the piezoelectric ceramic 121 on the right driving arm 112 is 90° ahead in phase with the sinusoidal signal applied to the piezoelectric ceramic 121 on the left driving arm 112, the linear ultrasonic motor vibrator module will respectively generate two vibration working modes, and the two vibration working modes of the linear ultrasonic motor vibrator module are superimposed on each other, so that the driving foot 1112 performs an elliptical motion, thereby pushing the structure in contact with the driving foot to move forward; at the same electrical signal frequency, when the sinusoidal signal applied to the piezoelectric ceramic 121 on the right driving arm 112 is 90° behind in phase with the sinusoidal signal applied to the piezoelectric ceramic 121 on the left driving arm 112, the driving foot 1112 can push the structure in contact with the driving foot to move in the opposite direction.

[0039] Figure 5a and Figure 5b The schematic diagram of the operation of the linear ultrasonic motor vibrator module of the first embodiment of the utility model shows different modes; a high-frequency signal with a phase difference of 90° is applied by two piezoelectric ceramic groups 120 located on the left and right sides of the vibrator 111, thereby exciting two vibration modes with a time difference of 90° to form an elliptical trajectory, thereby driving the structure in contact with the driving foot to move.

[0040] Specifically, the linear ultrasonic motor vibrator module is fixed at the node surface 1 and the node surface 2, the node surface 1 and the node surface 2 correspond to the positioning hole 114 or the boss, and the driving foot 115 is located in the node surface 3. When the second-order vibration mode of the linear ultrasonic motor is excited, Figure 5a As shown, the vibrator modules on both sides of the nodal plane 1 move away from the nodal plane 1, and the vibrator modules on both sides of the nodal plane 2 move close to the nodal plane 2, or the vibrator modules on both sides of the nodal plane 1 move close to the nodal plane 1, and the vibrator modules on both sides of the nodal plane 2 move away from the nodal plane 2, so that the driving foot 115 vibrates left and right, providing the driving foot 115 with left and right translation; when the third-order vibration mode of the linear ultrasonic motor is excited, as shown in FIG. Figure 5b As shown, the vibrator modules on both sides of the nodal plane 1 move away from the nodal plane 1, the vibrator modules on both sides of the nodal plane 3 move close to the nodal plane 3, and the vibrator modules on both sides of the nodal plane 2 move away from the nodal plane 2, or the vibrator modules on both sides of the nodal plane 1 move close to the nodal plane 1, the vibrator modules on both sides of the nodal plane 3 move away from the nodal plane 3, and the vibrator modules on both sides of the nodal plane 2 move close to the nodal plane 2, so that the driving foot 115 vibrates up and down, providing the driving foot 115 with up and down translation. When two electrical signals with a phase difference of ninety degrees are applied to the two piezoelectric ceramic groups respectively, two modes will be excited and form an elliptical trajectory, thereby outputting displacement to the outside.

[0041] Figure 6 The schematic diagram of the linear ultrasonic motor vibrator module of the second embodiment of the utility model is shown. Its overall structure is basically similar to that of the first embodiment, except that the extended connection ends of the conductive sheet 122 in the second embodiment are aligned on the same side; its fixed structure 114 adopts a boss perpendicular to the first surface and the second surface, and the boss is convex in the cross section perpendicular to the first surface. Through the cooperation of multiple surfaces of the boss and the fixed structure, the multiple degrees of freedom of the linear ultrasonic motor vibrator module are constrained, thereby achieving the fixation of the linear ultrasonic motor vibrator module. The protrusion on the boss can be a semicircular protrusion, a rectangular protrusion, a triangular protrusion, etc., or a concave in the middle and convex at both ends, etc., and can be specifically designed according to specific circumstances.

[0042] Figure 7 The schematic diagram of the piezoelectric ceramic assembly in the linear ultrasonic motor vibrator module of the second embodiment of the utility model is shown. The piezoelectric ceramic group of the second embodiment includes five conductive sheets 122 and four piezoelectric ceramics 121, wherein the piezoelectric ceramic 121 is a rectangular sheet without perforations, and the thickness of the piezoelectric ceramic 121 is, for example, 0.5 mm to 5 mm, and the thickness of each piezoelectric ceramic is equal. In other embodiments, the piezoelectric ceramic 131 can also be circular, polygonal, etc., and the piezoelectric ceramic 131 can also have perforations. The polarization directions of adjacent piezoelectric ceramics 121 are opposite, the outermost conductive sheet 122 is connected to the negative pole of the driving power supply, and the adjacent two conductive sheets 122 are respectively connected to the positive and negative poles of the driving power supply. Specifically, from left to right, the conductive sheets 122 at the 1st, 3rd, and 5th positions are connected to the negative pole, and the conductive sheets 122 at the 2nd and 4th positions are connected to the positive pole. The piezoelectric ceramic groups in the other embodiments are similar and will not be elaborated herein. Of course, the protruding parts of the conductive sheet 122 connected to the positive electrode and the conductive sheet 122 connected to the negative electrode can be staggered to facilitate distinction and connection, and the number of conductive sheets 122 and piezoelectric ceramics 121 can be adjusted accordingly as required.

[0043] The linear ultrasonic motor vibrator module provided by the utility model provides a receiving groove on the driving arm, embeds the piezoelectric ceramic group in the receiving groove, and then extends the pre-tightening structure into the receiving groove to achieve the compression of the piezoelectric ceramic group, thereby avoiding the perforation of the piezoelectric ceramic, ensuring the strength of the piezoelectric ceramic, avoiding the problem of opening holes in the piezoelectric ceramic and the damage and breakage of the piezoelectric ceramic during the tightening of the bolt due to insufficient centering, and also reducing the difficulty of assembly, improving the product yield and production efficiency. The pressure block located between the bolt and the piezoelectric ceramic group avoids direct contact between the bolt and the piezoelectric ceramic group, making the pre-tightening force distribution more uniform.

[0044] Furthermore, the design of the receiving groove also makes the assembly of the linear ultrasonic motor vibrator module more convenient and simple. Since the vibrator and the driving arm are designed as an integrated structure, the structure is more compact, and the wear and looseness of parts caused by vibration can be effectively avoided during use.

[0045] In the above description, the technical details such as the position combination and connection mode of each component are not described in detail. However, those skilled in the art should understand that various technical means can be used to form the required connection relationship, etc. In addition, in order to have the same function, those skilled in the art can also design a structure that is not completely the same as the structure described above. In addition, although each embodiment is described above separately, this does not mean that the measures in each embodiment cannot be used in combination to advantage.

[0046] The embodiments of the present invention are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Without departing from the scope of the present invention, a person skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present invention.

Claims

1. A linear ultrasonic motor vibrator module, characterized in that: include: A vibrator, wherein the vibrator is ring-shaped; Two driving arms, the two driving arms are respectively located on two sides of the vibrator, and the driving arms are provided with accommodating grooves; A piezoelectric ceramic group is located in the receiving groove of the driving arm, and the piezoelectric ceramic group transmits vibration to the vibrator through the driving arm; A pre-tightening structure, at least partially located in the receiving groove of the driving arm, wherein the pre-tightening structure causes the piezoelectric ceramic group to be in close contact with a side wall of the receiving groove close to the vibrator; Wherein, the vibrator and the driving arm are an integrated structure.

2. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: The driving feet are located on the outer side surfaces of the vibrator at two opposite sides where the driving arms are not arranged.

3. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: The two driving arms are symmetrically arranged on both sides of the vibrator.

4. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: The vibrator comprises a first through hole, and a second through hole is further provided at the junction of the vibrator and the driving arm, the axis of the second through hole is parallel to the axis of the first through hole, and the center of the second through hole and the center of the first through hole are both located on the central axis of the vibrator.

5. The linear ultrasonic motor vibrator module according to claim 4, characterized in that: The vibrator comprises a first surface and a second surface opposite to each other, and fixing structures for fixing the linear ultrasonic motor vibrator module are arranged on the first surface and the second surface of the vibrator.

6. The linear ultrasonic motor vibrator module according to claim 5, characterized in that: The fixing structure is located between the second through hole and the accommodating groove, and the fixing structure includes a boss or a positioning hole.

7. The linear ultrasonic motor vibrator module according to claim 6, characterized in that: The cross section of the boss taken along a plane perpendicular to the first surface is in a convex shape.

8. The linear ultrasonic motor vibrator module according to claim 6, characterized in that: The positioning holes on the first surface and the second surface are connected.

9. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: A threaded hole communicating with the receiving groove is disposed on one side of the driving arm away from the vibrator, and the pre-tightening structure comprises a bolt, which passes through the threaded hole to press the piezoelectric ceramic group in the receiving groove.

10. The linear ultrasonic motor vibrator module according to claim 9, characterized in that: The pre-tightening structure further includes a pressing block, and the pressing block is at least located between the bolt and the piezoelectric ceramic group.

11. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: The piezoelectric ceramics in the piezoelectric ceramic group have no perforations.

12. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: The piezoelectric ceramic group includes a plurality of piezoelectric ceramics and a plurality of conductive sheets, the piezoelectric ceramics and the conductive sheets are alternately arranged, the number of the piezoelectric ceramics is 2n, the number of the conductive sheets is 2n+1, and 1≤n≤3, n is a positive integer, and the conductive sheets are located outside the piezoelectric ceramic group.

13. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: The accommodating groove passes through two opposite side surfaces of the driving arm.

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