Dustproof filtering device of transmission valve for semiconductor factory

Abstract

The utility model discloses a dustproof filtering device of a transmission valve for a semiconductor factory, which is characterized in that a pull ring is pulled outwards by hand holding, a connecting column is driven to move through the movement of the pull ring, then a circular ring is driven to move, then a connecting rod is driven to move, then a moving rod is driven to move, and then a fixed rod is pushed to move; then a clamping plate is pushed to move upwards, then a pull ring is loosened, then a fixing rod is restored to the original position under the action of a second spring, then the clamping plate is clamped to inner cavities of an inlet pipe and an output pipe, and therefore the effect of installing dustproof filtering on a filter plate is achieved, and the problem that in the using process of an existing transmission valve, dust cannot be removed easily is solved. The problems that in the prior art, conveyed materials contain a large amount of dust and impurities, if the conveyed materials cannot be thoroughly filtered, the dust enters the conveying valve, the materials conveyed next time are polluted, an inner cavity of the conveying valve is prone to being polluted and blocked, and therefore the valve cannot be normally opened are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a dust-proof filtering device for a transmission valve used in a semiconductor factory. Background Art

[0002] The semiconductor industry belongs to the electronic information industry and the hardware industry, and is an industry that has developed based on semiconductors.

[0003] At present, transfer valves are often needed in the production work of semiconductor factories, so that the flow rate can be adjusted as needed, precise control can be achieved, pipeline blockage and leakage can be avoided, and the integrity and safety of fluid transmission can be ensured. However, during the use of existing transfer valves, the materials transported contain a large amount of dust and impurities. If they are not thoroughly filtered, the dust will enter the interior of the transfer valve, which will not only pollute the next transmission material, but also easily pollute and clog the inner cavity of the transfer valve, thereby causing the valve to fail to open normally. Utility Model Content

[0004] The utility model aims to provide a dust-proof filtering device for a transmission valve used in a semiconductor factory. The pull ring is pulled outward by hand, and the movement of the pull ring drives the connecting column to move, and then drives the circular ring to move, and then drives the connecting rod to move, and then drives the moving rod to move, and then pushes the fixed rod to move, and then pushes the clamping plate to move upward, and then releases the pull ring, and then the fixed rod is restored to its original position under the action of a second spring, and then the clamping plate is clamped in the inner cavity of the inlet pipe and the outlet pipe, so as to achieve the effect of installing dust-proof filtering on the filter plate, and solves the problem that during the use of the existing transmission valve, the conveyed material contains a large amount of dust and impurities. If it cannot be thoroughly filtered, the dust will enter the interior of the transmission valve, which will not only pollute the next transmission material, but also easily pollute and block the inner cavity of the transmission valve, thereby causing the valve to fail to open normally.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A dust-proof filtering device for a transmission valve used in a semiconductor factory comprises a transmission valve body, the transmission valve body comprises a main body, the right side of the main body is connected with an output pipe, the bottom of the left side of the main body is connected with an inlet pipe, the top of the main body surface is fixedly connected with a round frame, the top of the round frame is fixedly connected with a round plate, the inner cavity of the round plate is fixedly connected with a screw sleeve, the inner cavity of the screw sleeve is threadedly connected with a screw rod, the bottom of the screw rod penetrates into the inner cavity of the main body and is movably connected with an insert block, both sides of the inner cavity of the main body are fixedly connected with connecting plates, the surface of the insert block is movably connected to the surface of the connecting plate, and filtering mechanisms are installed on the left side of the inlet pipe surface and the right side of the output pipe surface;

[0007] The filtering mechanism includes an outer frame, the surface of the outer frame is movably connected to the surfaces of the inlet pipe and the outlet pipe, the outer side of the outer frame is fixedly connected to an outer shell, the outer side of the outer shell is fixedly connected to a connecting pipe, the inner cavity of the connecting pipe is provided with an internal thread, the inner cavity of the outer shell is fixedly connected to a filter plate, the inner cavity of the outer frame is fixedly connected to a rotating shaft all around, the surface of the rotating shaft is movably connected to a clamping plate, and the surface of the clamping plate is clamped and connected to the inner cavity of the inlet pipe and the outlet pipe.

[0008] As a further solution of the utility model: a mounting plate is fixedly connected to the middle of the inner cavity of the main body, a fixing plate is movably connected to the top of the screw rod surface, sliding columns are fixedly connected to both sides of the bottom of the fixing plate, the bottom of the sliding column penetrates the inner cavity of the main body, a positioning frame is movably connected to the bottom of the sliding column surface, and the bottom of the positioning frame is fixedly connected to the top of the mounting plate;

[0009] Slide blocks are fixedly connected to both sides of the inner cavity of the fixed plate, the surfaces of the slide blocks are movably connected to the inner cavity of the screw rod, the bottom of the slide column is fixedly connected to a limit plate, and the surface of the limit plate is movably connected to the inner cavity of the positioning frame;

[0010] The top of the screw is fixedly connected with a rotating plate, the inner cavity of the rotating plate is provided with a plurality of handholding grooves, the surface of the sliding column is sleeved with a spring 1, the bottom of the spring 1 is fixedly connected to the top of the limit plate, and the top of the spring 1 is fixedly connected to the inner cavity of the positioning frame.

[0011] As a further solution of the utility model: a disassembly mechanism is installed on the inner side of the outer frame, and the disassembly mechanism includes a fixed sleeve, the inner cavity of the fixed sleeve is movably connected to the surfaces of the entrance pipe and the connecting pipe, the outer side of the inner cavity of the fixed sleeve is movably connected with a slide plate, the inner side of the slide plate is fixedly connected with a moving rod, the surface of the moving rod is movably connected with a rotating sleeve 2, the outer side of the rotating sleeve 2 is fixedly connected with a fixed rod, the outer side of the fixed rod is fixedly connected with a rotating sleeve 1, the inner cavity of the rotating sleeve 1 is movably connected with a rotating rod, and the inner cavity of the rotating rod is movably connected to the inner cavity of the clamping plate.

[0012] As a further solution of the utility model: both sides of the outer side of the moving rod are fixedly connected with connecting rods, the outer side of the connecting rods penetrates the outer side of the fixing sleeve and is fixedly connected with a ring, and the ring is arranged in an annular structure;

[0013] A connecting column is fixedly connected to the front side of the circular ring, and a pull ring is fixedly connected to the front side of the connecting column. The pull ring is arranged in a ring structure.

[0014] As a further solution of the utility model: support plates are fixedly connected to the four sides of the fixed sleeve, guide columns are fixedly connected to the inner sides of the support plates, the surfaces of the guide columns are movably connected to the inner cavity of the circular ring, a second spring is sleeved on the surface of the guide columns, the inner side of the second spring is fixedly connected to the outer side of the support plate, and the outer side of the second spring is fixedly connected to the inner side of the circular ring.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] 1. Pull the pull ring outward by hand, and the movement of the pull ring drives the connecting column to move, and then drives the ring to move, and then drives the connecting rod to move, and then drives the moving rod to move, and then drives the slide plate to move in the inner cavity of the fixed sleeve, and then drives the rotating sleeve 2 to rotate on the surface of the moving rod, and then pushes the fixed rod to move, and then pushes the rotating sleeve 1 to rotate around the rotating rod, and then pushes the card plate to move upward, and then the outer frame and the fixed sleeve are placed on the surface of the inlet pipe and the outlet pipe by hand, and then the pull ring is released, and then the fixed rod is restored to its original position under the action of the spring 2, and then the card plate is connected to the inner cavity of the inlet pipe and the outlet pipe, so as to achieve the effect of dust-proof filtration for the installation of the filter plate, and solves the problem that the existing transmission valve contains a large amount of dust and impurities in the conveyed materials during use. If it is not thoroughly filtered, the dust will enter the interior of the transmission valve, which will not only pollute the next transmission material, but also easily pollute and block the inner cavity of the transmission valve, thereby causing the valve to fail to open normally.

[0017] 2. By setting the slider, the movement of the screw can drive the fixed plate to move. At the same time, the fixed plate will not rotate when the screw rotates. By setting the rotating plate, it is easier for the operator to rotate the screw, thereby moving the screw. By setting the spring, when the slide column moves, it will drive the limit plate to move. When the slide column loses its strength, the limit plate will return to its original position, thereby achieving the effect of guiding the screw in the moving state and preventing the screw from deviating during the movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the main body, the inlet pipe and the outlet pipe in the utility model;

[0020] Figure 3 It is a structural schematic diagram of the positioning frame in the utility model;

[0021] Figure 4 This is a schematic diagram of the structure of the filter plate in the utility model;

[0022] Figure 5 It is a schematic diagram of the structure of the outer frame, the outer shell and the connecting pipe in the utility model;

[0023] Figure 6 It is a schematic diagram of the disassembled connection structure of the transfer sleeve 1 and the transfer rod in the utility model.

[0024] In the figure:

[0025] 1. Transfer valve body; 101. Main body; 102. Inlet pipe; 103. Output pipe; 104. Round frame; 105. Round plate; 106. Rotating plate; 107. Screw sleeve; 108. Screw rod; 109. Connecting plate; 110. Insert block; 111. Fixed plate; 112. Sliding block; 113. Spring 1; 114. Stop plate; 115. Positioning frame; 116. Sliding column; 117. Mounting plate;

[0026] 2. Filter mechanism; 201. Outer frame; 202. Outer shell; 203. Connecting pipe; 204. Filter plate; 205. Rotating shaft; 206. Clamping plate; 207. Rotating rod; 208. Rotating sleeve 1;

[0027] 3. Disassembly mechanism; 301. Fixed sleeve; 302. Support plate; 303. Pull ring; 304. Connecting column; 305. Ring; 306. Slide plate; 307. Connecting rod; 308. Moving rod; 309. Rotating sleeve 2; 310. Fixed rod; 311. Guide column; 312. Spring 2. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the implementation mode of the utility model clearer, the technical solution in the implementation mode of the utility model will be clearly and completely described below in conjunction with the drawings in the implementation mode of the utility model. Obviously, the implementation mode described is a part of the implementation mode of the utility model, not all the implementation modes. Based on the implementation mode of the utility model, all other implementation modes obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] Example

[0030] See also Figure 1 , 2, 3, 4 and 5, a dust filter device for a transmission valve used in a semiconductor factory, comprising a transmission valve body 1, the transmission valve body 1 comprising a main body 101, the right side of the main body 101 is connected with an output pipe 103, the bottom of the left side of the main body 101 is connected with an inlet pipe 102, the top of the surface of the main body 101 is fixedly connected with a round frame 104, the top of the round frame 104 is fixedly connected with a round plate 105, the inner cavity of the round plate 105 is fixedly connected with a screw sleeve 107, the inner cavity of the screw sleeve 107 is threadedly connected with a screw rod 108, the bottom of the screw rod 108 penetrates into the inner cavity of the main body 101 and is movably connected with an insert block 110, both sides of the inner cavity of the main body 101 are fixedly connected with a connecting plate 109, the surface of the insert block 110 is movably connected to the surface of the connecting plate 109, and the left side of the surface of the inlet pipe 102 and the right side of the surface of the output pipe 103 are both installed with a filtering mechanism 2;

[0031] The filtering mechanism 2 includes an outer frame 201, the surface of the outer frame 201 is movably connected to the surfaces of the inlet pipe 102 and the outlet pipe 103, the outer side of the outer frame 201 is fixedly connected to the outer shell 202, the outer side of the outer shell 202 is fixedly connected to the connecting pipe 203, the inner cavity of the connecting pipe 203 is provided with an internal thread, the inner cavity of the outer shell 202 is fixedly connected to the filter plate 204, the inner cavity of the outer frame 201 is fixedly connected with a rotating shaft 205 on all sides, the surface of the rotating shaft 205 is movably connected to a clamping plate 206, and the surface of the clamping plate 206 is clamped and connected to the inner cavity of the inlet pipe 102 and the outlet pipe 103.

[0032] The middle of the inner cavity of the main body 101 is fixedly connected with a mounting plate 117, the top of the surface of the screw 108 is movably connected with a fixing plate 111, both sides of the bottom of the fixing plate 111 are fixedly connected with sliding columns 116, the bottom of the sliding column 116 penetrates into the inner cavity of the main body 101, the bottom of the surface of the sliding column 116 is movably connected with a positioning frame 115, and the bottom of the positioning frame 115 is fixedly connected to the top of the mounting plate 117, and the rotating plate 106 is rotated by hand, and the screw 108 is driven to move in the inner cavity of the screw sleeve 107 through the rotation of the rotating plate 106, and then the screw 108 moves downward under the action of the thread, and then The plug block 110 is driven to move, and then the surface of the plug block 110 is fitted with the connecting plate 109, so as to achieve the effect of controlling the flow inside the inlet pipe 102, the main body 101 and the outlet pipe 103. At the same time, the slider 112 is moved in the inner cavity of the screw 108 by the rotation of the screw 108, and then the screw 108 moves downward to drive the slide column 116 to move downward in the inner cavity of the positioning frame 115, and then the limit plate 114 moves downward, and then the spring 113 is extended, so as to achieve the effect of guiding and limiting the screw 108 in the moving state;

[0033] Both sides of the inner cavity of the fixed plate 111 are fixedly connected with sliders 112, and the surface of the slider 112 is movably connected to the inner cavity of the screw 108. The bottom of the slide column 116 is fixedly connected to the limit plate 114, and the surface of the limit plate 114 is movably connected to the inner cavity of the positioning frame 115. Through the setting of the slider 112, the fixed plate 111 is driven to move by the movement of the screw 108, but the fixed plate 111 will not be driven to rotate when the screw 108 rotates. The top of the screw 108 is fixedly connected with a rotating plate 106, and the inner cavity of the rotating plate 106 is provided with a plurality of hand-holding grooves. The surface of the slide column 116 is sleeved with Spring 113, the bottom of spring 113 is fixedly connected to the top of limit plate 114, and the top of spring 113 is fixedly connected to the inner cavity of positioning frame 115. Through the setting of rotating plate 106, it is more convenient for operators to rotate screw 108, so as to achieve the effect of moving screw 108. Through the setting of spring 113, when sliding column 116 moves, it will drive limit plate 114 to move. When sliding column 116 loses its strength, it will make limit plate 114 return to its original position, so as to achieve the effect of guiding the screw 108 in the moving state and prevent the screw 108 from deviating during the movement.

[0034] See also Figure 1 , 4, 5 and 6, a dust-proof filtering device for a transmission valve used in a semiconductor factory, a disassembly mechanism 3 is installed on the inner side of an outer frame 201, the disassembly mechanism 3 comprises a fixed sleeve 301, the inner cavity of the fixed sleeve 301 is movably connected to the surface of the inlet pipe 102 and the connecting pipe 203, the outer side of the inner cavity of the fixed sleeve 301 is movably connected to a slide plate 306, the inner side of the slide plate 306 is fixedly connected to a moving rod 308, the surface of the moving rod 308 is movably connected to a rotating sleeve 209, the outer side of the rotating sleeve 209 is fixedly connected to a fixed rod 310, the outer side of the fixed rod 310 is fixedly connected to a rotating sleeve 1 208, the inner cavity of the rotating sleeve 1 208 is movably connected to a rotating rod 207, the inner cavity of the rotating rod 207 is movably connected to the inner cavity of the clamping plate 206, the pull ring 303 is pulled outward by hand, the movement of the pull ring 303 drives the connecting column 304 to move, and then drives the ring 305 to move on the surface of the guide column 311 The second spring 312 is extended at the same time, and then the connecting rod 307 is moved, and then the moving rod 308 is moved, and then the slide plate 306 is driven to slide in the inner cavity of the fixed sleeve 301, and then the rotating sleeve 209 is rotated on the surface of the moving rod 308, and then the fixed rod 310 is pushed to move outward after adjusting to the specified angle, and then the rotating sleeve 1 208 is driven to rotate on the surface of the rotating rod 207, and then the rotating rod 207 is pushed to move upward, and then the card plate 206 is pushed out of the inner cavity of the fixed sleeve 301, and then the outer frame 201 is pulled outward by hand, and the outer shell 202 is driven to move by the movement of the outer frame 201, and then the connecting pipe 203 is driven to move, and then the fixed sleeve 301 is driven to separate from the surface of the inlet pipe 102 and the outlet pipe 103, so as to achieve the effect of disassembling and cleaning the filter plate 204 after use.

[0035] Both sides of the outer side of the moving rod 308 are fixedly connected with connecting rods 307. The outer side of the connecting rod 307 penetrates the outer side of the fixed sleeve 301 and is fixedly connected with a ring 305. The ring 305 is arranged in an annular structure. Through the arrangement of the connecting rod 307, the moving rod 308 and the ring 305 are connected, so that the moving rod 308 is driven to move by the movement of the ring 305. Through the arrangement of the ring 305, it is more convenient for the operator to move the moving rod 308. The front side of the circular ring 305 is fixedly connected with a connecting column 304, and the front side of the connecting column 304 is fixedly connected with a pull ring 303. The pull ring 303 is arranged in an annular structure. Through the arrangement of the connecting column 304, the pull ring 303 and the circular ring 305 are connected, so that the operator can pull the pull ring 303 by hand, and the movement of the pull ring 303 drives the circular ring 305 to move. Through the arrangement of the pull ring 303, it is more convenient for the operator to pull the circular ring 305, and the fixed sleeve 30 The support plates 302 are fixedly connected to the four sides of both sides, and the guide posts 311 are fixedly connected to the inner side of the support plates 302. The surface of the guide posts 311 is movably connected to the inner cavity of the circular ring 305. The surface of the guide posts 311 is sleeved with springs 312. The inner side of the springs 312 is fixedly connected to the outer side of the support plates 302, and the outer side of the springs 312 is fixedly connected to the inner side of the circular ring 305. Through the setting of the support plates 302, it can not only achieve the function of supporting and fixing the guide posts 311 in the working state, but also achieve the connection effect between the fixing sleeve 301 and the outer frame 201. Through the setting of the guide posts 311, the circular ring 305 in the moving process is guided. Through the setting of the springs 312, when the connecting posts 304 move, the circular ring 305 will be driven to move, so as to absorb the generated force. Further, when the connecting posts 304 lose their force, the circular ring 305 will be restored to its original position, thereby achieving the function of installing, fixing, disassembling and cleaning the filter plate 204.

[0036] The working process of the utility model is:

[0037] First, pull the pull ring 303 outward by hand, and the movement of the pull ring 303 drives the connecting column 304 to move, and then drives the ring 305 to move on the surface of the guide column 311, and at the same time makes the spring 2 312 extend, and then drives the connecting rod 307 to move, and then drives the moving rod 308 to move, and then drives the slide plate 306 to slide in the inner cavity of the fixed sleeve 301, and then makes the rotating sleeve 209 rotate on the surface of the moving rod 308, and then pushes the fixed rod 310 to move outward after adjusting to the specified angle, and then drives the rotating sleeve 1 208 to rotate on the surface of the rotating rod 207, and then pushes the rotating rod 207 to move upward, and then pushes the clamping plate 206 out of the inner cavity of the fixed sleeve 301, and then the hand The outer frame 201 and the fixing sleeve 301 are placed on the surface of the inlet pipe 102 and the outlet pipe 103, and then the pull ring 303 is released after reaching the specified position, and then the fixing rod 310 is restored to its original position under the action of the second spring 312, and then the clamping plate 206 is clamped in the inner cavity of the inlet pipe 102 and the outlet pipe 103, so as to achieve the effect of installing dust-proof filtering on the filter plate 204, and then the rotating plate 106 is rotated by hand, and the rotation of the rotating plate 106 drives the screw 108 to move in the inner cavity of the screw sleeve 107, and then the screw 108 moves upward under the action of the thread, and then drives the plug 110 to move, and then the surface of the plug 110 and the connecting plate 109 fall off, so as to achieve the effect of fixing the inlet pipe 102 and the main body 101. The function of controlling the flow rate inside the output pipe 103 is to control the flow rate inside the output pipe 103. At the same time, the rotation of the screw 108 causes the slider 112 to move in the inner cavity of the screw 108, and then the downward movement of the screw 108 drives the sliding column 116 to move downward in the inner cavity of the positioning frame 115, and then the limit plate 114 moves downward, and then the spring 113 is extended, so as to achieve the effect of guiding and limiting the screw 108 in the moving state, and then the pipeline to be connected is connected through the filter plate 204, and then the material is filtered through the filter plate 204 and then enters the inner cavity of the inlet pipe 102, and then is guided by the connecting plate 109, and then flows into the inner cavity of the output pipe 103, and then is filtered through the filter plate 204 and discharged, and finally filtered. After the work is completed, the pull ring 303 is pulled outward by hand, and the movement of the pull ring 303 drives the connecting column 304 to move, and then drives the ring 305 to move on the surface of the guide column 311, and at the same time, the spring 2 312 is extended, and then drives the connecting rod 307 to move, and then drives the moving rod 308 to move, and then drives the slide plate 306 to slide in the inner cavity of the fixed sleeve 301, and then makes the rotating sleeve 209 rotate on the surface of the moving rod 308, and then after adjusting to the specified angle, push the fixed rod 310 to move outward, and then drive the rotating sleeve 1 208 to rotate on the surface of the rotating rod 207, and then push the rotating rod 207 to move upward, and then push the clamping plate 206 to separate from the inner cavity of the fixed sleeve 301.Then, the outer frame 201 is pulled outward by hand, and the outer shell 202 is moved by the movement of the outer frame 201, and then the connecting pipe 203 is moved, and then the fixing sleeve 301 is separated from the surface of the inlet pipe 102 and the outlet pipe 103, so as to achieve the effect of disassembling and cleaning the filter plate 204 after use.

[0038] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A dust filter device for a transfer valve used in a semiconductor factory, comprising a transfer valve body (1), characterized in that: The transmission valve body (1) comprises a main body (101), the right side of the main body (101) is connected to an output pipe (103), the bottom of the left side of the main body (101) is connected to an inlet pipe (102), the top of the surface of the main body (101) is fixedly connected to a round frame (104), the top of the round frame (104) is fixedly connected to a round plate (105), the inner cavity of the round plate (105) is fixedly connected to a screw sleeve (107), and the screw sleeve (107) is fixedly connected to the inner cavity of the round plate (105). ) is threadedly connected to an inner cavity of the main body (101), the bottom of the screw rod (108) penetrates into the inner cavity of the main body (101) and is movably connected to an insert block (110), both sides of the inner cavity of the main body (101) are fixedly connected to connecting plates (109), the surface of the insert block (110) is movably connected to the surface of the connecting plate (109), and the left side of the surface of the inlet pipe (102) and the right side of the surface of the outlet pipe (103) are both installed with a filtering mechanism (2); The filtering mechanism (2) comprises an outer frame (201), the surface of the outer frame (201) being movably connected to the surfaces of the inlet pipe (102) and the outlet pipe (103), the outer side of the outer frame (201) being fixedly connected to the outer shell (202), the outer side of the outer shell (202) being fixedly connected to the connecting pipe (203), the inner cavity of the connecting pipe (203) being provided with an internal thread, the inner cavity of the outer shell (202) being fixedly connected to a filter plate (204), the inner cavity of the outer frame (201) being fixedly connected to a rotating shaft (205) on all sides, the surface of the rotating shaft (205) being movably connected to a clamping plate (206), the surface of the clamping plate (206) being clamped and connected to the inner cavities of the inlet pipe (102) and the outlet pipe (103).

2. The dust-proof filter device for a transfer valve used in a semiconductor factory according to claim 1, characterized in that: A mounting plate (117) is fixedly connected to the middle of the inner cavity of the main body (101), a fixing plate (111) is movably connected to the top of the surface of the screw rod (108), sliding columns (116) are fixedly connected to both sides of the bottom of the fixing plate (111), the bottom of the sliding column (116) penetrates the inner cavity of the main body (101), and a positioning frame (115) is movably connected to the bottom of the surface of the sliding column (116), and the bottom of the positioning frame (115) is fixedly connected to the top of the mounting plate (117); Slide blocks (112) are fixedly connected to both sides of the inner cavity of the fixed plate (111), and the surface of the slide block (112) is movably connected to the inner cavity of the screw rod (108). The bottom of the slide column (116) is fixedly connected to a limit plate (114), and the surface of the limit plate (114) is movably connected to the inner cavity of the positioning frame (115); The top of the screw rod (108) is fixedly connected to a rotating plate (106), the inner cavity of the rotating plate (106) is provided with a plurality of hand-holding grooves, the surface of the sliding column (116) is sleeved with a spring 1 (113), the bottom of the spring 1 (113) is fixedly connected to the top of the limiting plate (114), and the top of the spring 1 (113) is fixedly connected to the inner cavity of the positioning frame (115).

3. The dust-proof filter device for a transfer valve used in a semiconductor factory according to claim 1, characterized in that: A disassembly mechanism (3) is installed on the inner side of the outer frame (201), and the disassembly mechanism (3) comprises a fixed sleeve (301), the inner cavity of the fixed sleeve (301) is movably connected to the surfaces of the inlet pipe (102) and the connecting pipe (203), the outer side of the inner cavity of the fixed sleeve (301) is movably connected to a slide plate (306), the inner side of the slide plate (306) is fixedly connected to a moving rod (308), the surface of the moving rod (308) is movably connected to a rotating sleeve 2 (309), the outer side of the rotating sleeve 2 (309) is fixedly connected to a fixed rod (310), the outer side of the fixed rod (310) is fixedly connected to a rotating sleeve 1 (208), the inner cavity of the rotating sleeve 1 (208) is movably connected to a rotating rod (207), and the inner cavity of the rotating rod (207) is movably connected to the inner cavity of the clamping plate (206).

4. The dust-proof filter device for a transfer valve used in a semiconductor factory according to claim 3, characterized in that: Both sides of the outer side of the moving rod (308) are fixedly connected with connecting rods (307); the outer side of the connecting rod (307) passes through the outer side of the fixing sleeve (301) and is fixedly connected with a circular ring (305); the circular ring (305) is arranged in an annular structure; the front side of the circular ring (305) is fixedly connected with a connecting column (304); the front side of the connecting column (304) is fixedly connected with a pull ring (303); the pull ring (303) is arranged in an annular structure.

5. The dust-proof filter device for a transfer valve used in a semiconductor factory according to claim 4, characterized in that: The fixing sleeve (301) is fixedly connected to support plates (302) on all sides thereof, the inner side of the support plate (302) is fixedly connected to a guide column (311), the surface of the guide column (311) is movably connected to the inner cavity of the circular ring (305), the surface of the guide column (311) is sleeved with a second spring (312), the inner side of the second spring (312) is fixedly connected to the outer side of the support plate (302), and the outer side of the second spring (312) is fixedly connected to the inner side of the circular ring (305).

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