Silicon wafer cleaning device

Abstract

The utility model provides a silicon wafer cleaning device which comprises an ultrasonic generator, a current detector, a controller and an alarm, when the ultrasonic generator breaks down, current in a power supply circuit becomes small, the current detector detects that the current in the power supply circuit becomes small and is lower than a preset value, the current detector sends a current signal, and the alarm gives an alarm. The controller receives the current signal and controls the alarm to work according to the current signal so as to prompt an operator that the ultrasonic generator breaks down, so that the operator can handle the fault in time, on one hand, the inspection time of the operator in the production process is shortened, and the labor intensity of the operator is reduced; operators can utilize most of the time in other operations in the production process, and the productivity of a production line is improved. And on the other hand, the situation that the silicon wafer is disqualified in cleaning after the ultrasonic generator breaks down, consequently, the silicon wafer is smudged on a large scale, and the yield of follow-up production products is affected is avoided, namely the yield of the products produced by the production line is guaranteed.

Description

Technical Field

[0001] The present application relates to the field of cleaning technology, and in particular to a silicon wafer cleaning device. Background Art

[0002] Photovoltaic silicon rods are turned into silicon wafers through wire cutting. After processes such as degumming, their surfaces have been seriously contaminated. The purpose of cleaning is mainly to remove the contamination on the surface of the wafer.

[0003] The pollutants on the surface of silicon wafers usually exist in the form of atoms, ions, molecules, particles or films in the form of physical adsorption or chemical adsorption. The ultrasonic cleaning machine uses the cavitation effect, acceleration effect and straight flow effect of ultrasound in the liquid to directly and indirectly affect the liquid and dirt, so that the dirt layer is dispersed, emulsified and peeled off to achieve the purpose of cleaning. Ultrasonic vibration forms extremely small bubbles in the liquid, and these bubbles collapse quickly to produce extremely small scrubbing actions to remove particles. When the ultrasonic generator is damaged, tripped, overloaded, or fails, if it cannot be accurately and promptly discovered, the cleanliness of the silicon wafers in the cleaning tank will not meet the standards, affecting the yield. Utility Model Content

[0004] The purpose of the present application is to provide a silicon wafer cleaning device that can improve the production capacity of a production line and ensure the yield of products produced by the production line.

[0005] To achieve the above-mentioned purpose, the present application provides a silicon wafer cleaning device, which includes: an ultrasonic generator, a current detector, a controller and an alarm; wherein the current detector is connected to the power supply circuit of the ultrasonic generator, and the current detector is configured to detect the current in the power supply circuit in real time, and send a current signal when the current in the power supply circuit is lower than a preset value; the controller is connected to the current detector and the alarm respectively, and the controller is configured to receive the current signal and control the alarm to work according to the current signal.

[0006] In the silicon wafer cleaning device as described above, the current detector is an undercurrent relay.

[0007] The silicon wafer cleaning device as described above, wherein the controller is a programmable logic controller.

[0008] In the silicon wafer cleaning device as described above, the alarm includes at least one of a vibrator, a buzzer and a warning light.

[0009] The silicon wafer cleaning device as described above, wherein the silicon wafer cleaning device further comprises: a circuit breaker protector, the circuit breaker protector is connected in series in the power circuit of the ultrasonic generator, and the circuit breaker protector is configured to be able to disconnect the power circuit of the ultrasonic generator.

[0010] In the silicon wafer cleaning device as described above, the circuit breaker protector is connected to the controller; the controller is configured to control the action of the circuit breaker protector according to the current signal to disconnect the power circuit of the ultrasonic generator.

[0011] In the silicon wafer cleaning device as described above, the circuit breaker protector is a relay, a circuit breaker or an intelligent switch.

[0012] The silicon wafer cleaning device as described above, wherein the silicon wafer cleaning device further comprises a display screen, the display screen is connected to the controller, and the controller is configured to control the display screen to display corresponding prompt information according to the current signal.

[0013] Compared with the prior art, the above technical solution has the following advantages:

[0014] When the ultrasonic generator fails, the current in the power circuit becomes smaller. The current detector detects that the current in the power circuit becomes smaller and is lower than the preset value. The current detector sends a current signal, the controller receives the current signal, and controls the alarm to work according to the current signal to remind the operator that the ultrasonic generator has failed, so that the operator can deal with the failed ultrasonic generator in time. On the one hand, it reduces the inspection time of the operator in the production process and reduces the labor intensity of the operator, so that the operator can use most of the time in other operations in the production process, thereby improving the production capacity of the production line; on the other hand, it avoids unqualified silicon wafer cleaning after the ultrasonic generator fails, resulting in large-scale dirt on the silicon wafer affecting the yield of subsequent products, that is, ensuring the yield of the products produced by the production line. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The following drawings are only intended to illustrate and explain the present application, and do not limit the scope of the present application.

[0016] Figure 1 is a structural schematic diagram of a first embodiment of the silicon wafer cleaning device described in the present application;

[0017] Figure 2 is a structural schematic diagram of a second embodiment of the silicon wafer cleaning device described in the present application;

[0018] Figure 3 is a structural schematic diagram of a third embodiment of the silicon wafer cleaning device described in the present application;

[0019] Figure 4 is a structural schematic diagram of a fourth embodiment of the silicon wafer cleaning device described in the present application;

[0020] Figure 5 It is a structural schematic diagram of the fifth embodiment of the silicon wafer cleaning device described in the present application.

[0021] Description of Figure Numbers:

[0022] 10. Ultrasonic generator;

[0023] 20. Current detector;

[0024] 30. Controller;

[0025] 40. Alarm;

[0026] 50. Circuit breaker;

[0027] 60. Display screen. DETAILED DESCRIPTION

[0028] The present application is further described in detail below through the accompanying drawings and embodiments. Through these descriptions, the characteristics and advantages of the present application will become clearer and more specific.

[0029] The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration." Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments. Although various aspects of the embodiments are shown in the drawings, the drawings are not necessarily drawn to scale unless otherwise noted.

[0030] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other. The following discussion provides multiple embodiments of the present application. Although each embodiment represents a single combination of the application, different embodiments of the present application can be replaced or combined, so the present application can also be considered to include all possible combinations of the same and / or different embodiments recorded. Therefore, if one embodiment includes A, B, C, and another embodiment includes a combination of B and D, then the present application should also be considered to include an embodiment containing one or more of all other possible combinations of A, B, C, D, although the embodiment may not be clearly recorded in the following text. In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0031] like Figure 1 As shown, the silicon wafer cleaning device provided in the present application includes: an ultrasonic generator 10 , a current detector 20 , a controller 30 and an alarm 40 .

[0032] The current detector 20 is connected to the power circuit of the ultrasonic generator 10 . The current detector 20 is configured to detect the current in the power circuit in real time and send a current signal when the current in the power circuit is lower than a preset value.

[0033] The controller 30 is connected to the current detector 20 and the alarm 40 respectively. The controller 30 is configured to receive a current signal and control the alarm 40 to operate according to the current signal.

[0034] The silicon wafer cleaning device provided by the present application, when the ultrasonic generator 10 fails, the current in the power supply circuit becomes smaller, the current detector 20 detects that the current in the power supply circuit becomes smaller and is lower than the preset value, the current detector 20 sends a current signal, the controller 30 receives the current signal, and controls the alarm 40 to work according to the current signal to prompt the operator that the ultrasonic generator 10 fails, so that the operator can deal with the failed ultrasonic generator 10 in a timely manner. On the one hand, it reduces the inspection time of the operator in the production process, reduces the labor intensity of the operator, and enables the operator to use most of the time in other operations in the production process, thereby improving the production capacity of the production line. On the other hand, it avoids the unqualified cleaning of the silicon wafer after the ultrasonic generator 10 fails, resulting in a large number of dirty silicon wafers affecting the yield of subsequent products, that is, the yield of the products produced by the production line is guaranteed.

[0035] like Figure 2 As shown, in one embodiment of the present application, the current detector 20 is an undercurrent relay.

[0036] When the current passing through the undercurrent relay decreases to be lower than the set value (preset value) thereof, the undercurrent relay is activated to output an electrical signal, which is received by the controller 30 as a current signal.

[0037] On the one hand, the action of the undercurrent relay is usually mechanical, and has the characteristics of impact resistance, long life, not susceptible to external interference, not susceptible to changes in power supply voltage, etc., ensuring the stable operation of the system, thereby ensuring the accuracy and reliability of current detection. On the other hand, the undercurrent relay usually has a relatively fast action speed, can complete the relevant actions in a short time, responds quickly, and can quickly send out electrical signals, so that the controller 30 controls the alarm 40 to work in time, so that the operator can promptly deal with the faulty ultrasonic generator 10.

[0038] like Figure 2 As shown, in one embodiment of the present application, the controller 30 is a programmable logic controller.

[0039] The programmable logic controller uses a programmable memory that stores instructions for performing operations such as logical operations, sequential control, timing, counting and arithmetic operations. It controls various types of mechanical equipment or production processes through digital or analog input and output. The programmable logic controller controls the operation of the alarm 40 by receiving the current signal emitted by the current detector 20.

[0040] On the one hand, since most of the programmable logic controllers use single-chip microcomputers, they are highly integrated, and coupled with the corresponding protection circuits and self-diagnosis functions, the reliability of the system is improved, thereby ensuring the accuracy and reliability of current detection. On the other hand, since the control of the programmable logic controller is executed by program control, it can quickly process a large amount of data and logical operations, and then can promptly and quickly control the alarm 40 to work, so that the operator can promptly handle the ultrasonic generator 10 that has a fault.

[0041] In one embodiment of the present application, the alarm includes at least one of a vibrator, a buzzer and a warning light.

[0042] Vibrators can provide additional tactile feedback, quickly drawing attention even in noisy environments or when operators are unable to immediately notice audible alarms, increasing the operator's awareness and reaction speed to alarms.

[0043] The sound of a buzzer is usually harsh, which can attract people's attention and effectively convey alarm information. Secondly, it has a fast response speed and can quickly sound an alarm when an abnormal situation is detected. In addition, the buzzer also has high reliability and is not prone to failure.

[0044] Warning lights usually have bright colors and flashing effects, which can quickly attract people's attention, allowing people to react faster and take corresponding measures, increasing the operator's perception and reaction speed to the alarm. In addition, warning lights can convey information through light color, flashing, etc., which is easier to be noticed by people than other warning methods, thereby enhancing the alarm effect.

[0045] like Figure 3 As shown, in one embodiment of the present application, the silicon wafer cleaning device further includes: a circuit breaker protector 50 .

[0046] The circuit breaker protector 50 is connected in series in the power circuit of the ultrasonic generator 10 , and the circuit breaker protector 50 is configured to be able to disconnect the power circuit of the ultrasonic generator 10 .

[0047] When the ultrasonic generator 10 fails, the power circuit of the ultrasonic generator 10 can be disconnected by the circuit breaker 50, thereby reducing the impact of the ultrasonic generator 10 failure on the entire circuit system and ensuring the stable operation of the system. In addition, when the ultrasonic generator 10 fails such as short circuit, overload, etc., the power supply can be quickly cut off by the circuit breaker 50 to avoid the fault current from causing a fire. At the same time, the fault current is prevented from causing damage to other electrical equipment, reducing the cost of equipment maintenance and replacement.

[0048] like Figure 4As shown, in one embodiment of the present application, the circuit breaker 50 is connected to the controller 30 .

[0049] The controller 30 is configured to control the circuit breaker 50 to operate according to the current signal, so as to disconnect the power circuit of the ultrasonic generator 10 .

[0050] The above structure improves the degree of product automation, can quickly and accurately complete the disconnection of the power circuit, reduce the time and errors of manual operation, and thus improve production efficiency. Secondly, it can achieve precise control of the circuit breaker protector 50 to ensure the stability and reliability of the system. Thirdly, it can reduce the dependence on manual labor, so that people have more time and energy to engage in other work, and improve the production capacity of the production line.

[0051] In one embodiment of the present application, the circuit breaker is a relay, a circuit breaker or an intelligent switch.

[0052] The relay can quickly respond to the circuit-breaking signal sent by the controller and quickly cut off the power circuit, thereby protecting the electrical equipment from damage caused by faults such as overload and short circuit. Secondly, the relay has a fast action speed and can complete the circuit-breaking operation in a short time, reducing the impact of the fault on the system. In addition, the relay also has high reliability and durability, and can maintain good working condition during long-term use.

[0053] Circuit breakers can quickly and accurately detect faults in the circuit and quickly cut off the power supply, thereby protecting electrical equipment and personal safety. Secondly, circuit breakers have high reliability and are not prone to malfunction or failure. In addition, they have multiple functions such as overload protection and short circuit protection, which can effectively prevent electrical accidents. Thirdly, circuit breakers usually have faster breaking speeds and can respond quickly when faults occur. Moreover, they are relatively simple to install and use, and do not require complex debugging and maintenance.

[0054] Smart switches can achieve remote control and timing control, allowing operators to easily control the switch of electrical appliances anytime and anywhere, which is very convenient. Secondly, smart switches usually have overload protection and short-circuit protection functions, which can automatically cut off the power supply to protect the safety of electrical equipment. In addition, the installation and use of smart switches are also relatively simple, and do not require complicated wiring and wiring work. Moreover, some smart switches also support mobile phone APP (application) control, allowing operators to easily manage electrical equipment through mobile phones.

[0055] like Figure 5 As shown, in one embodiment of the present application, the silicon wafer cleaning device further includes a display screen 60 .

[0056] The display screen 60 is connected to the controller 30 , and the controller 30 is configured to control the display screen 60 to display corresponding prompt information according to the current signal.

[0057] When the ultrasonic generator 10 fails, the controller 30 controls the display screen 60 to display corresponding prompt information according to the current signal. The operator can intuitively understand the relevant fault information from the display screen 60. The real-time display information can help the operator to respond quickly and improve work efficiency and safety. Secondly, the display screen 60 can update the warning information in real time, so that people can understand the changes in the situation in a timely manner. In addition, the display screen 60 can also display warning information in various forms and display more information at the same time, such as images, text, animations, etc., and can be presented in a more intuitive and vivid way, making the information easier to understand and remember.

[0058] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. The term "plurality" refers to two or more, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0059] The present application has been described above in conjunction with preferred embodiments, but these embodiments are only exemplary and serve only as an illustration. On this basis, various replacements and improvements may be made to the present application, all of which fall within the scope of protection of the present application.

Claims

1. A silicon wafer cleaning device, characterized in that: The silicon wafer cleaning device comprises: an ultrasonic generator, a current detector, a controller and an alarm; Wherein, the current detector is connected to the power circuit of the ultrasonic generator, and the current detector is configured to detect the current in the power circuit in real time, and send a current signal when the current in the power circuit is lower than a preset value; The controller is connected to the current detector and the alarm respectively, and is configured to receive the current signal and control the alarm to work according to the current signal.

2. The silicon wafer cleaning device according to claim 1, characterized in that: The current detector is an undercurrent relay.

3. The silicon wafer cleaning device according to claim 1, characterized in that: The controller is a programmable logic controller.

4. The silicon wafer cleaning device according to claim 1, characterized in that: The alarm includes at least one of a vibrator, a buzzer and a warning light.

5. The silicon wafer cleaning device according to claim 1, characterized in that: The silicon wafer cleaning device further includes: a circuit breaker protector, which is connected in series in the power supply circuit of the ultrasonic generator, and the circuit breaker protector is configured to be able to disconnect the power supply circuit of the ultrasonic generator.

6. The silicon wafer cleaning device according to claim 5, characterized in that: The circuit breaker is connected to the controller; The controller is configured to control the circuit breaker to operate according to the current signal so as to disconnect the power circuit of the ultrasonic generator.

7. The silicon wafer cleaning device according to claim 5, characterized in that: The circuit breaker protector is a relay, a circuit breaker or an intelligent switch.

8. The silicon wafer cleaning device according to claim 1, characterized in that: The silicon wafer cleaning device also includes a display screen, which is connected to the controller. The controller is configured to control the display screen to display corresponding prompt information according to the current signal.

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