Crucible support vapor deposition charging tool
By designing the vapor-phase deposition loading tooling of the stent, the vertical placement and stable limit of the stent are achieved, the problem of poor flow of process gas is solved, the density enhancement effect is significantly improved, and the scope of application is wider, avoiding product deformation .
Patent Information
- Application Number
- CN202420300289.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-19
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-02-19
AI Technical Summary
The existing stents are placed horizontally during the vapor deposition process, resulting in poor circulation of process gas and unable to effectively flow to the upper stents, resulting in poor density enhancement effect.
Design a vapor-phase deposition loading tool for the stent, which can realize vertical insertion of the stent through frame and multi-layer horizontal placement platform. The outer circumference of the stent is located in the charging grooves where the platforms are placed on both sides. The positioning card is used for limiting positioning to ensure The process gas flows vertically along the cradle, and the cradle is in contact with the gas in all directions.
The smooth flow of process gas is achieved, avoids occlusion of the pot holder, enhances the density enhancement effect, and can adapt to pot holder of different specifications and sizes, avoiding product deformation caused by traditional loading and stacking.
Smart Images
Figure CN222182082U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of semiconductor material preparation, and in particular to a crucible support vapor deposition loading tool. Background Art
[0002] A single crystal susceptor is a tray used in the semiconductor material preparation process such as vapor deposition, used to support the substrate for semiconductor wafer growth. Single crystal susceptors are usually made of high-purity quartz or quartz glass and have excellent properties such as high temperature stability, chemical stability and mechanical strength.
[0003] However, the existing crucible holders are usually placed horizontally during vapor deposition, which causes the process gas to be blocked by the bottom crucible holder, and the gas flow cannot flow to the upper crucible holder, or the upper crucible holder cannot flow smoothly, resulting in the crucible holder installed on the upper layer being unable to achieve the densification effect due to lack of process gas.
[0004] Therefore, in view of the above technical problems, how to improve the fluidity of process gas is a technical problem that technical personnel in this field need to solve. Utility Model Content
[0005] The purpose of the present application is to provide a crucible holder vapor deposition loading tool, which can prevent process gas from being obstructed, ensure that all crucible holders can be in full contact with process gas, and make the gas phase densification effect of the crucible holder obvious.
[0006] To achieve the above-mentioned purpose, the present application provides a crucible support vapor deposition loading tool, comprising a frame for placing the crucible support, the frame is provided with multiple layers of horizontal placement platforms, the placement platforms are located on two opposite surfaces of the frame that are parallel to each other, any of the placement platforms is provided with multiple horizontal positioning cards that face the inside of the frame, and a loading trough for placing the crucible support is formed between adjacent positioning cards;
[0007] The crucible holder is vertically inserted into the charging grooves of the multiple layers of the placing platforms in sequence from the top, and the outer circumference of the crucible holder is located in the charging grooves of the placing platforms on both sides, and the end face of the crucible holder is abutted against the side edge of the positioning card.
[0008] Preferably, the protruding lengths of the positioning cards on the same placement platform are consistent, and the spacing between two adjacent positioning cards is consistent. The protruding lengths of the positioning cards on different placement platforms gradually increase from top to bottom to adjust the depth of the loading troughs on the placement platforms on different layers.
[0009] Preferably, the charging trough is a trapezoidal structure, and the bottom of the charging trough is the upper bottom of the trapezoid.
[0010] Preferably, the multiple layers of placement platforms located on two opposite surfaces of the frame correspond to each other one by one, and two corresponding placement platforms are located on the same horizontal plane.
[0011] Preferably, the positions of the charging troughs on the two placement platforms located on the same horizontal plane correspond to each other, so that the crucible holder can be vertically inserted into the charging trough in a posture perpendicular to the placement platforms.
[0012] Preferably, when each of the crucible holders is placed in the charging groove, at least one of the charging grooves on each side of the placement platform abuts against the outer circumference of the crucible holder and has an interference fit.
[0013] Preferably, when each of the crucible holders is placed in the charging trough, at least two of the charging troughs on the corresponding placement platforms located on the same horizontal plane abut against the outer circumference of the crucible holder and have an interference fit.
[0014] Preferably, the frame is hollow inside to provide a placement space for the crucible holder, and the bottom of the crucible holder is suspended in the air, and adjacent crucible holders are spaced apart.
[0015] Compared with the above background technology, the present application loads the crucible support vertically, and the outer circle of the crucible support is placed in the loading trough of the platforms on both sides, so as to limit its position. The process gas will flow vertically along the crucible support, and the flow is smoother. The crucible support can contact the process gas in all directions without blocking the process gas, and the operation is convenient and the densification effect is obvious. At the same time, by changing the extension length of the positioning card or the groove depth of the loading trough, a variety of crucible supports of different specifications and sizes can be loaded, which has a wider range of applications, and the crucible supports arranged vertically have no squeezing between adjacent crucible supports, avoiding product deformation caused by traditional loading and stacking.
[0016] Specifically, the present application includes a frame for placing a crucible support, which serves as the main load-bearing component and provides stable support for the crucible support. Multiple layers of horizontal placement platforms are arranged on two opposite sides of the frame, and multiple horizontal positioning cards protruding toward the inside of the frame are arranged on any placement platform. Loading troughs for placing the crucible support are formed between adjacent positioning cards, and the crucible support is vertically inserted into the loading troughs of the multiple layers of placement platforms in sequence from top to bottom, and the outer circumference of the crucible support is located in the loading troughs of the placement platforms on both sides, and the end face of the crucible support is abutted against the side edges of the positioning cards, thereby limiting the axial and radial positions of the crucible support at the same time, thereby improving the stability of the crucible support placement. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.
[0018] Figure 1 A schematic diagram of the structure of the crucible support vapor deposition loading tooling provided in the embodiment of the present application;
[0019] Figure 2 This is a schematic diagram of placing the crucible support provided in an embodiment of the present application.
[0020] In the figure: 1, frame 11, placement platform 12, positioning card 13, charging trough 2, crucible support. DETAILED DESCRIPTION
[0021] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0022] It should be noted that in this embodiment, the directions or positional relationships indicated by "upper", "lower", "front", "back", etc. are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present application. In addition, "first", "second", "third", and "fourth" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.
[0023] In order to enable those skilled in the art to better understand the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.
[0024] like Figure 1 As shown, in this embodiment, a crucible holder vapor deposition loading tool is provided, which includes a frame 1 for placing a crucible holder 2. The frame 1 is a main bearing component that provides stable support for the crucible holder 2. In this embodiment, the frame 1 is in the shape of a rectangular parallelepiped as a whole, so it has two opposite sides; of course, the frame 1 can also adopt other structural forms, ensuring that it has two opposite parallel sides, such as a trapezoid, etc., which will not be described in detail here. Of course, the frame 1 itself can be placed stably.
[0025] This application is introduced by taking the frame 1 as a rectangular parallelepiped as an example. A multi-layer horizontal placement platform 11 is arranged on the frame 1. The placement platform 11 is located on two opposite sides of the frame 1 that are parallel to each other. Please refer to Figure 1 That is to say, a plurality of placement platforms 11 are provided on two opposite sides of the frame 1. The placement platforms 11 can provide a placement position for the crucible holder 2 on the one hand, and can be used to constitute the overall structure of the frame 1 on the other hand, thereby improving the overall stability of the frame 1.
[0026] Each placement platform 11 is provided with a plurality of horizontal positioning cards 12 protruding toward the inside of the frame 1, so a relative groove structure will inevitably be formed between adjacent positioning cards 12, that is, the loading groove 13 of the present application; the crucible holder 2 is vertically inserted into the loading groove 13 of the multi-layer placement platform 11 in sequence from the top, and the outer circumference of the crucible holder 2 is located in the loading groove 13 of the placement platforms 11 on both sides, and the end face of the crucible holder 2 is abutted against the side edge of the positioning card 12, thereby limiting the axial and radial directions of the crucible holder 2 at the same time, thereby improving the placement stability of the crucible holder 2.
[0027] Based on the above embodiments, the present application vertically loads the crucible support 2, such as Figure 2 As shown, the outer circle of the crucible support 2 is placed in the charging trough 13 of the two side placement platforms 11, so as to limit the position of the crucible support 2, and the process gas will flow vertically along the crucible support 2, and the flow is smoother. The crucible support 2 can contact the process gas in all directions and does not block the process gas. The operation is convenient and the densification effect is obvious. At the same time, by changing the extension length of the positioning card 12 or the groove depth of the charging trough 13, a variety of crucible supports 2 of different specifications and sizes can be loaded, and the scope of application is wider. In addition, there is no squeezing between adjacent crucible supports 2 for vertically arranged crucible supports 2, which avoids product deformation caused by traditional loading and stacking.
[0028] It should be noted that the protruding lengths of the positioning cards 12 on the same placement platform 11 are consistent, and the distances between two adjacent positioning cards 12 are consistent; in other words, the positioning cards 12 on the same placement platform 11 have the same structure, and similarly, the structure of the loading trough 13 is also the same; the structure here includes size, shape, etc.
[0029] The protruding lengths of the positioning cards 12 on different placement platforms 11 gradually increase from top to bottom to adjust the depths of the loading slots 13 on different layers of placement platforms 11. Figure 1 Since the crucible support 2 targeted by the present application is disc-shaped, different protruding lengths of the positioning card 12 are set as the curvature of the outer circumference of the crucible support 2 changes, thereby ensuring that the protruding length of the positioning card 12 meets the requirements of abutting against the end surface of the crucible support 2. At the same time, as the curvature of the outer circumference of the crucible support 2 changes, the depths of the loading grooves 13 on the placement platforms 11 at different levels will also be adjusted accordingly, thereby ensuring that the crucible support 2 can be inserted into multiple layers of different loading grooves 13, thereby ensuring the placement stability of the crucible support 2.
[0030] In addition, for the positioning card 12, its width should not be too long so as not to affect the circulation of process gas. As for the specific width, it will not be described in detail here and can be adjusted according to actual conditions.
[0031] In addition, since the crucible support 2 is disc-shaped and the end surface of the crucible support 2 has a certain convex curvature, the present application sets the charging trough 13 to a trapezoidal structure to adapt to the curvature change of the end surface of the crucible support 2, and can also be used for crucible supports 2 with a variety of different curvatures, thereby improving its scope of application.
[0032] On the basis of the above-mentioned embodiment, the multi-layer placement platforms 11 located on the two opposite surfaces of the frame 1 correspond one to one, and the two corresponding placement platforms 11 are located on the same horizontal plane; that is, one placement platform 11 on one side corresponds to another placement platform 11 on the other side, and they are located on the same horizontal plane. At the same time, the positions of the loading troughs 13 on the two placement platforms 11 located on the same horizontal plane correspond one to one, so that the crucible holder 2 can be vertically inserted into the loading trough 13 in a posture perpendicular to the placement platform 11. Of course, the crucible holder 2 can also be vertically inserted into the loading trough 13 in a posture inclined to the placement platform 11, then the inclination of the positioning card 12 can be adjusted at the same time, so that the positioning card 12 and the loading trough 13 can adapt to the position of the crucible holder 2, which will not be described in detail here, and all fall within the protection scope of this application.
[0033] When each crucible holder 2 is placed in the charging trough 13, at least one charging trough 13 on each side of the placing platform 11 abuts against the outer circumference of the crucible holder 2 and has an interference fit, thereby ensuring that the crucible holder 2 can be limited in radial direction, while the crucible holder 2 is still limited in axial direction by the positioning card 12. Furthermore, when each crucible holder 2 is placed in the charging trough 13, at least two charging troughs 13 on the corresponding placing platforms 11 located in the same horizontal plane abut against the outer circumference of the crucible holder 2 and have an interference fit, thereby improving the stability of the placement of the crucible holder 2.
[0034] Of course, depending on the specifications of the crucible holder 2, the number of charging slots 13 supported by the outer circumference of the crucible holder 2 of different specifications may be different. Therefore, on the basis of the above embodiment, at least the stable placement of crucibles of different specifications can be achieved.
[0035] It should be pointed out that the frame 1 of the present application is hollow inside and has a stable frame structure, thereby providing a placement space for the crucible holder 2 and a circulation space for the process gas. When the crucible holder 2 is placed inside the frame 1, the bottom of the crucible holder 2 is suspended in the air, and adjacent crucible holders 2 are spaced apart to ensure that the process gas can flow smoothly.
[0036] It should be noted that, in this specification, relational terms such as first and second are merely used to distinguish one entity from other entities, but do not necessarily require or imply any actual relationship or order between these entities.
[0037] Specific examples are used herein to illustrate the principles and implementation methods of the present application, and the description of the above embodiments is only used to help understand the method and core ideas of the present application. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the scope of protection of the claims of the present application.
Claims
1. A crucible vapor deposition loading tool, characterized in that: A frame for placing a crucible support is provided on the frame, wherein multiple horizontal placement platforms are provided on two opposite parallel surfaces of the frame, and any of the placement platforms is provided with multiple horizontal positioning cards protruding toward the inside of the frame, and a loading trough for placing the crucible support is formed between adjacent positioning cards; The crucible holder is vertically inserted into the charging grooves of the multiple layers of the placing platforms in sequence from the top, and the outer circumference of the crucible holder is located in the charging grooves of the placing platforms on both sides, and the end face of the crucible holder is abutted against the side edge of the positioning card.
2. The crucible vapor deposition charging tool according to claim 1, characterized in that: The protruding lengths of the positioning cards on the same placement platform are consistent, and the spacing between two adjacent positioning cards is consistent. The protruding lengths of the positioning cards on different placement platforms gradually increase from top to bottom to adjust the depths of the loading troughs on the placement platforms at different levels.
3. The crucible holder vapor deposition charging tool according to claim 2, characterized in that: The charging trough is a trapezoidal structure, and the bottom of the charging trough is the upper bottom of the trapezoid.
4. The crucible vapor deposition charging tool according to claim 1, characterized in that: The multiple layers of placement platforms located on two opposite surfaces of the frame correspond to each other one by one, and the two corresponding placement platforms are located on the same horizontal plane.
5. The crucible holder vapor deposition charging tool according to claim 4, characterized in that: The positions of the charging troughs on the two placement platforms located on the same horizontal plane correspond to each other, so that the crucible holder is vertically inserted into the charging trough in a posture perpendicular to the placement platform.
6. The crucible vapor deposition charging tool according to claim 5, characterized in that: When each of the crucible holders is placed in the charging groove, at least one of the charging grooves on each side of the placement platform abuts against the outer circumference of the crucible holder and has an interference fit.
7. The crucible vapor deposition charging tool according to claim 6, characterized in that: When each of the crucible holders is placed in the charging trough, at least two of the charging troughs on the corresponding placement platforms located on the same horizontal plane abut against the outer circumference of the crucible holder and have an interference fit.
8. The crucible holder vapor deposition charging tool according to any one of claims 1 to 7, characterized in that: The frame is hollow inside to provide a placement space for the crucible holder, and the bottom of the crucible holder is suspended in the air, and adjacent crucible holders are arranged at intervals.