Multilayer burner for synthesizing quartz glass

Abstract

The utility model relates to a multi-layer burner for synthesizing quartz glass, and belongs to the technical field of production appliances for synthesizing quartz glass. A material oxygen preservation cavity, a hydrogen cavity A, an oxygen chamber A, a hydrogen cavity B and an oxygen chamber B are sequentially arranged on the periphery of the central pipe from top to bottom; a hydrogen chamber C, an oxygen chamber C, a hydrogen chamber D, a material oxygen-preserving chamber, a hydrogen chamber A, an oxygen chamber A, a hydrogen chamber B and an oxygen chamber B; the hydrogen cavity C, the oxygen chamber C and the hydrogen cavity D are respectively provided with a communicating pipe, one end of each communicating pipe is communicated with the corresponding gas cavity or gas chamber, and the other end of each communicating pipe is communicated with a hydrogen source or an oxygen source. The quartz glass burner is simple in structure and good in practicability, solves the problems that in the working process of an existing burner, distribution of a deposition temperature field is not uniform, and the temperature gradient is large, effectively improves optical uniformity of quartz glass, and has positive popularization significance for manufacturing enterprises.

Description

Technical Field

[0001] The utility model relates to a multi-layer burner used for synthetic quartz glass, belonging to the technical field of synthetic quartz glass production equipment. Background Art

[0002] Synthetic quartz glass is an indispensable key material in high-tech fields such as aerospace, laser, and precision optical instruments. Among them, the optical uniformity of quartz glass has a great influence on the imaging quality of the optical system. At present, the main method for making high-uniform quartz glass is the vapor deposition method (CVD method), which uses hydrogen-oxygen flame to hydrolyze silicon tetrachloride. The process flow can be summarized as follows: heated hydrogen, oxygen, and high-purity SiCl4 gas are introduced into the burner in a certain proportion, and the burner sprays out a mixed combustion reaction to produce water and heat. SiCl4 is hydrolyzed in water, and the generated SiO2 particles are deposited on the target surface. As the reaction continues, the deposited SiO2 particles accumulate on the target surface and melt at high temperature, and finally condense to form a quartz glass ingot. As the main combustion component in the quartz glass production process, the burner determines the temperature field distribution of the quartz glass deposition surface, and to a certain extent affects the uniformity of synthetic quartz glass. In the process of producing quartz ingots, the traditional quartz glass burner has the problems of insufficient hydrogen-oxygen combustion and uneven temperature distribution on the deposition surface. Therefore, it is necessary to improve it. Summary of the invention

[0003] The utility model aims to provide an oxyhydrogen burner which can flexibly distribute the temperature of each area in a silicon dioxide deposition surface during the production process and a method for synthesizing a quartz glass ingot with high optical uniformity by using the burner.

[0004] The technical solution of the utility model is:

[0005] A multilayer burner for synthesizing quartz glass comprises a central tube 1, a material oxygen preservation chamber, a hydrogen chamber A, an oxygen chamber A, a hydrogen chamber B, an oxygen chamber B, a hydrogen chamber C, an oxygen chamber C and a hydrogen chamber D, characterized in that: the periphery of the central tube is provided with a material oxygen preservation chamber, a hydrogen chamber A, an oxygen chamber A, a hydrogen chamber B and an oxygen chamber B in sequence from top to bottom; a hydrogen chamber C, an oxygen chamber C and a hydrogen chamber D, wherein the bottoms of the oxygen chambers A, B and C are respectively provided with wick tubes in annular shape, and the wick tubes are respectively connected with the corresponding air chambers; the material oxygen preservation chamber, the hydrogen chamber A, the oxygen chamber A, the hydrogen chamber B, the oxygen chamber B, the hydrogen chamber C, the oxygen chamber C and the hydrogen chamber D are respectively provided with connecting tubes, one end of the connecting tubes is respectively connected with the corresponding air chambers or air chambers, and the other end of the connecting tubes is respectively connected with a hydrogen source or an oxygen source.

[0006] The central tube, material oxygen preservation chamber, hydrogen chamber A, oxygen chamber A, hydrogen chamber B, oxygen chamber B, hydrogen chamber C, oxygen chamber C and hydrogen chamber D are independent and sealed from each other.

[0007] The oxygen chamber A, oxygen chamber B and oxygen chamber C are respectively drum-shaped hollow annular bodies, and the lower ends of the wick tubes at the bottom of the oxygen chambers A, oxygen chamber B and oxygen chamber C are arranged flush with the lower end of the central tube.

[0008] The material oxygen preservation chamber, hydrogen chamber A, hydrogen chamber B, hydrogen chamber C and hydrogen chamber D are respectively inverted cup-shaped bodies with convex tops, and their lower ports are arranged flush with the lower ports of the central tube and the fuel gas pipe.

[0009] The beneficial effects of this utility model patent are:

[0010] The utility model has a simple structure and good practicality. The hydrogen and oxygen mixing area (i.e., the combustion area) is divided by hydrogen chamber B, hydrogen chamber C, hydrogen chamber D and the corresponding oxygen chamber. Compared with the traditional burner, it has the following advantages: 1) The combustion area is increased from one to three, so that the hydrogen and oxygen are mixed more evenly and the combustion is more complete;

[0011] 2) Each area can independently adjust the hydrogen and oxygen mixing ratio, which greatly increases the adjustability of the gas flow in each area of ​​the burner;

[0012] 3) By rationally optimizing the gas flow rate in each area, the temperature field distribution on the deposition surface is made more uniform, thereby effectively improving the optical uniformity of quartz glass, which has positive promotion significance for production enterprises. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the utility model;

[0014] Figure 2 for Figure 1 Schematic diagram of the AA section.

[0015] In the figure: 1. central tube; 2. material oxygen chamber; 3. hydrogen chamber A; 4. oxygen chamber A; 5. hydrogen chamber B; 6. oxygen chamber B; 7. hydrogen chamber C; 8. oxygen chamber C; 9. hydrogen chamber D; 10. wick tube; 11. connecting tube. DETAILED DESCRIPTION

[0016] The multilayer burner for synthesizing quartz glass comprises a central tube 1, a material oxygen chamber 2, a hydrogen chamber A3, an oxygen chamber A4, a hydrogen chamber B5, an oxygen chamber B6, a hydrogen chamber C7, an oxygen chamber C8 and a hydrogen chamber D9. The periphery of the central tube 1 is provided with the material oxygen chamber 2, a hydrogen chamber A3, an oxygen chamber A4, a hydrogen chamber B5, an oxygen chamber B6, a hydrogen chamber C7, an oxygen chamber C8 and a hydrogen chamber D9 in order from top to bottom, wherein the oxygen chamber A4, the oxygen chamber B6 and the oxygen chamber C8 are respectively independent and sealed drum-shaped hollow bodies, and the bottoms of the oxygen chambers A4, B6 and C8 are respectively provided with a plurality of wick tubes 10 in an annular shape, and the ports at one end of the wick tubes 10 are respectively connected with the corresponding air chambers; the ports at the other end of the wick tubes 11 extend downward and are arranged flush with the lower port of the central tube 1.

[0017] The material preservation oxygen chamber 2, hydrogen chamber A3, oxygen chamber A4, hydrogen chamber B5, oxygen chamber B6, hydrogen chamber C7, oxygen chamber C8 and hydrogen chamber D9 are respectively provided with connecting pipes 11, one end of the connecting pipe 11 is respectively connected to the corresponding gas cavity or gas chamber, and the other end of the connecting pipe 11 is respectively connected to the hydrogen source or the oxygen source.

[0018] The central tube 1, the material oxygen chamber 2, the hydrogen chamber A3, the oxygen chamber A4, the hydrogen chamber B5, the oxygen chamber B6, the hydrogen chamber C7, the oxygen chamber C8 and the hydrogen chamber D9 of the multilayer burner are independent and sealed. The material oxygen chamber 2, the hydrogen chamber A3, the oxygen chamber A4, the hydrogen chamber B5, the oxygen chamber B6; the hydrogen chamber C7, the oxygen chamber C8 and the hydrogen chamber D9 are respectively inverted cup-shaped bodies with convex upper ends, and their lower ports are arranged flush with the lower ports of the central tube 1 and the fuel gas pipe 10 (see attached Figure 1 , Figure 2 ).

[0019] The multilayer burner is composed of a central tube 1, a material oxygen chamber 2 and a hydrogen chamber A3 to form a central material loading area; an oxygen chamber A4, a hydrogen chamber B5 and a wick tube 10 arranged at the bottom of the oxygen chamber A4 to form a first mixing section; an oxygen chamber B6, a hydrogen chamber C7 and a wick tube 10 arranged at the bottom of the oxygen chamber B6 to form a second mixing section; an oxygen chamber C8, a hydrogen chamber D9 and a wick tube 10 arranged at the bottom of the oxygen chamber C8 to form a third mixing section. The above-mentioned mixing sections divide the mixing area of ​​hydrogen and oxygen gases, so that the hydrogen and oxygen are mixed more fully and the combustion efficiency is higher; at the same time, by reasonably allocating the gas flow rate of each mixing section, the temperature field distribution of the deposition surface is more uniform, which can effectively improve the optical uniformity of the quartz glass.

[0020] When the multi-layer burner is working, a mixed gas composed of gasified SiCl4 raw material and oxygen is sprayed out from the central tube 1, and mixed with oxygen sprayed from the material oxygen chamber 2 and hydrogen sprayed from the hydrogen chamber A3 to form a central combustion zone; oxygen sprayed from the bottom wick tube 10 of the oxygen chamber A4 of the first mixing part and hydrogen sprayed from the hydrogen chamber B5 form a first combustion zone; oxygen sprayed from the bottom wick tube 10 of the oxygen chamber B6 in the second mixing part and hydrogen sprayed from the hydrogen chamber C7 form a second combustion zone; oxygen sprayed from the bottom wick tube 10 of the oxygen chamber C8 in the third mixing part and hydrogen sprayed from the hydrogen chamber D9 form a third combustion zone; the central combustion zone, the first combustion zone, the second combustion zone, and the third combustion zone form a multi-layer wrapping (encirclement) from the outside to the inside.

[0021] The main difference between this multi-layer burner and the traditional burner is that the traditional burner's one combustion zone is divided into three, thereby strengthening the mixing of hydrogen and oxygen and improving combustion efficiency; at the same time, by optimizing the gas flow rate of each combustion zone, the central material temperature of the burner is better and the temperature gradient of the deposition surface is smaller, thereby solving the problem of uneven temperature field distribution and large temperature gradient on the deposition surface produced by the existing burner during the production process.

[0022] To further demonstrate the advantages of the present application, the inventor conducted a comparative experiment on the burner of the present application and the existing burner, and the results are as follows:

[0023] The raw material used for the multi-layer burner of the present application is high-purity SiCl4 gas, which is fed from the central tube 1. The oxygen sprayed from the central tube 1 and the material oxygen chamber 2 and the hydrogen sprayed from the hydrogen chamber A3 are mixed to form a central combustion zone. The oxygen sprayed from the fuel gas pipe 10 at the bottom of the oxygen chamber A4 and the hydrogen sprayed from the hydrogen chamber B5 form the first epoxy zone. The oxygen sprayed from the fuel gas pipe 10 at the bottom of the oxygen chamber B6 and the hydrogen sprayed from the hydrogen chamber C7 form the second epoxy zone; the oxygen sprayed from the fuel gas pipe 10 at the bottom of the oxygen chamber C8 and the hydrogen sprayed from the hydrogen chamber D9 form the third epoxy zone. The hydrogen flow rates of the hydrogen chamber A3, the hydrogen chamber B5, the hydrogen chamber C7 and the hydrogen chamber D9 increase successively, and the ratio of hydrogen to oxygen flow rates (H2 / O2) in each combustion zone remains consistent. The test results show that the optical uniformity of the quartz glass produced by the multi-layer burner of the present application at a diameter of 300 mm is 5.96 ppm, which is significantly improved compared with the conventional burner (the conventional burner is 9.62 ppm). After further optimizing the gas volume of hydrogen and oxygen in each area, the optical uniformity of the product produced by the burner can reach 4.78 ppm. This shows that the multi-layer burner described in the utility model can effectively improve the problem of uneven hydrogen distribution in the combustion area by subdividing the hydrogen and oxygen combustion area, improve the combustion efficiency, and improve the optical uniformity of the quartz glass.

Claims

1. A multi-layer burner for synthesizing quartz glass, comprising a central tube (1), a material oxygen chamber (2), a hydrogen chamber A (3), an oxygen chamber A (4), a hydrogen chamber B (5), an oxygen chamber B (6), a hydrogen chamber C (7), an oxygen chamber C (8) and a hydrogen chamber D (9), characterized in that: The periphery of the central tube (1) is provided with a material oxygen preservation chamber (2), a hydrogen chamber A (3), an oxygen chamber A (4), a hydrogen chamber B (5), an oxygen chamber B (6), a hydrogen chamber C (7), an oxygen chamber C (8) and a hydrogen chamber D (9) in order from top to bottom, wherein the bottoms of the oxygen chambers A (4), B (6) and C (8) are provided with fuel gas pipes (10) in annular shape, and the fuel gas pipes (10) are respectively connected to the corresponding gas chambers; the material oxygen preservation chamber (2), the hydrogen chamber A (3), the oxygen chamber A (4), the hydrogen chamber B (5), the oxygen chamber B (6), the hydrogen chamber C (7), the oxygen chamber C (8) and the hydrogen chamber D (9) are respectively provided with connecting pipes (11), one end of the connecting pipes (11) is respectively connected to the corresponding gas chambers or gas chambers, and the other end of the connecting pipes (11) is respectively connected to the hydrogen source or the oxygen source.

2. A multilayer burner for synthetic quartz glass according to claim 1, characterized in that: The central tube (1), the material oxygen chamber (2), the hydrogen chamber A (3), the oxygen chamber A (4), the hydrogen chamber B (5), the oxygen chamber B (6), the hydrogen chamber C (7), the oxygen chamber C (8) and the hydrogen chamber D (9) are independent of each other and sealed.

3. A multilayer burner for synthetic quartz glass according to claim 1, characterized in that: The oxygen chamber A (4), oxygen chamber B (6) and oxygen chamber C (8) are respectively drum-shaped hollow annular bodies, and the lower end of the fuel gas pipe (10) at the bottom of the oxygen chamber A (4), oxygen chamber B (6) and oxygen chamber C (8) is arranged flush with the lower end of the central pipe (1).

4. A multilayer burner for synthesizing quartz glass according to claim 1, characterized in that: The material oxygen chamber (2), hydrogen chamber A (3), hydrogen chamber B (5), hydrogen chamber C (7) and hydrogen chamber D (9) are respectively inverted cup-shaped bodies with convex tops, and their lower ports are arranged flush with the lower ports of the central tube (1) and the fuel gas pipe.

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