PECVD (plasma enhanced chemical vapor deposition) loading cavity and control system thereof

Abstract

The utility model relates to the technical field of PECVD equipment, in particular to a PECVD loading cavity and a control system thereof. Comprising a cavity and a heating module arranged in the cavity, a cavity door valve used for opening or closing the cavity is arranged on the outer side of the cavity in a sliding mode, the heating module is divided into a plurality of heating areas, each heating area is independently provided with a heater, and each heating area is provided with a detection assembly. When an atmospheric state is needed, the cavity is opened through the cavity gate valve, external low-temperature gas enters the cavity, the temperature of the corresponding area is detected through the detection assembly on each heating area, and then the heating power of the heater can be independently controlled according to the actual temperature of each heating area. Therefore, the phenomenon of uneven temperature caused by large-area heating of the existing heating plate is avoided, the temperature fluctuation is reduced, and the temperature in the cavity rapidly tends to be balanced.

Description

Technical Field

[0001] The present application relates to the technical field of PECVD equipment, and in particular to a PECVD loading chamber and a control system thereof. Background Art

[0002] The loading chamber is the first chamber in the PECVD equipment that is connected to the outside world and has a built-in heating plate. When the loading chamber is in operation, the chamber needs to frequently switch between the atmospheric state and the vacuum state. When switching from the vacuum state to the atmospheric state, a large amount of low-temperature gas will flow into the chamber, causing the chamber temperature to drop and causing the temperature inside the chamber to drop. At this time, the heating plate increases the heating power. The large area heating of the heating plate is prone to uneven temperature, resulting in large temperature fluctuations. Utility Model Content

[0003] In order to solve the above technical problems, the present application provides a PECVD loading chamber, including a chamber, a heating module arranged in the chamber, a chamber gate valve for opening or closing the chamber is slidably arranged on the outside of the chamber, and the heating module is divided into a plurality of heating areas, each of which is individually provided with a heater, and each of which is provided with a detection component. When the atmospheric state is required, the chamber is opened through the chamber gate valve, and the external low-temperature gas enters the interior of the chamber. The temperature of the corresponding area is detected by the detection component on each heating area, and the heating power of the heater can be individually controlled according to the actual temperature on each heating area, thereby avoiding the phenomenon of uneven temperature caused by large-area heating of the existing heating plate, reducing temperature fluctuations, and making the temperature in the chamber quickly tend to balance.

[0004] Preferably, at least two groups of heating modules are provided, and the heating modules are arranged at intervals along the height direction of the cavity. The two groups of heating modules are arranged at the top and bottom of the cavity, and the two groups of heating modules are arranged at intervals to achieve uniform heating of the cavity.

[0005] Preferably, the heating module comprises a heating plate, and the heating plate is divided into a first area and a second area, and a third area and a fourth area, which are symmetrically arranged along the midline. The temperature of each heating area can be detected separately, and the output power of the heater can be controlled separately according to the temperature of each area, thereby avoiding the phenomenon of uneven temperature caused by large-area heating of the existing heating plate and reducing temperature fluctuations.

[0006] Preferably, the third area and the fourth area are C-shaped, and the third area and the fourth area surround the first area and the second area, so that the heating plate is symmetrically divided into multiple areas along the mid-vertical line. Through the multiple symmetrically distributed areas, the heating plate has excellent temperature distribution characteristics, and solves the temperature unevenness phenomenon that is easy to occur when heating a large area.

[0007] Preferably, the detection assembly includes at least two temperature measuring thermocouples arranged in each of the heating areas. The at least two temperature measuring thermocouples can play a foolproof protection role while achieving temperature measurement, avoiding the problem of abnormal temperature measurement caused by damage to one thermocouple.

[0008] Preferably, openings are provided on two opposite side walls of the cavity, and the chamber gate valve is slidably arranged on the outer side wall of the cavity. Then, the chamber gate valve opens the opening to allow external gas to enter the cavity, thereby switching the cavity to an atmospheric state.

[0009] Preferably, it further comprises a vacuum module connected to the cavity. The vacuum module evacuates the interior of the cavity by closing the opening through the cavity gate valve, thereby switching the cavity to a vacuum state.

[0010] Preferably, a control system comprises the above-mentioned PECVD loading chamber and a PLC module, wherein the PLC module is electrically connected to the detection component and the heater, and the PLC module is used to obtain the time point when the chamber gate valve is opened, and to control the time point when the heater increases the heating power to be earlier than the time point when the chamber gate valve is opened. The PLC module can obtain the time point when the chamber gate valve is opened, and control the time point when the heater increases the heating power to be earlier than the time point when the chamber gate valve is opened, thereby pre-raising the temperature to offset the temperature loss caused by the low-temperature gas, thereby ensuring the stability of the chamber heating and cooling, reducing temperature fluctuations and reducing the heating time.

[0011] Preferably, it also includes a driving component whose driving end is connected to the chamber gate valve, and the driving component is electrically connected to the PLC module. Before the atmospheric state needs to be switched, the PLC module controls the heater to preselect and increase the heating power. After the temperature in the cavity rises, the driving component is then controlled to drive the chamber gate valve to open the cavity, thereby pre-raising the temperature to offset the temperature loss caused by the low-temperature gas, thereby ensuring the stability of the cavity heating and cooling.

[0012] Preferably, the PLC module includes a PID control module, the PLC module obtains the detected temperature of the detection component, and calculates the heating power required by the heater through the PID control module. The PLC module obtains the detected temperature of the detection component, compares and processes it with the set temperature, and calculates the heating power required by the heater through the PID control module, and finally outputs the corresponding heating power to the heater, and the heater heats according to the specified heating power to achieve smooth heating and temperature stability.

[0013] As can be seen from the above, the following beneficial effects can be obtained by applying the present application: by arranging a heating module in the cavity, a chamber door valve for opening or closing the cavity is slidably arranged on the outside of the cavity, and when a vacuum state is required, the chamber door valve slides and is closed in the cavity, so that the inside of the cavity can form a vacuum state after evacuation, and the heating module is divided into several heating areas, each heating area is individually provided with a heater, and each heating area is provided with a detection component. When an atmospheric state is required, the cavity is opened through the chamber door valve, and the external low-temperature gas enters the cavity, and the temperature of the corresponding area is detected by the detection component on each heating area, and then the heating power of the heater can be individually controlled according to the actual temperature on each heating area, thereby avoiding the phenomenon of uneven temperature caused by large-area heating of the existing heating plate, reducing temperature fluctuations, and making the temperature in the cavity quickly tend to balance. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings required for use in the description of the embodiments of the present application or the prior art are briefly introduced below. Obviously, the drawings described below are only part of the embodiments of the present application, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor.

[0015] Figure 1 This is a schematic diagram of the PECVD loading chamber of an embodiment of the present application;

[0016] Figure 2 This is a schematic diagram of a heating plate according to an embodiment of the present application.

[0017] Reference numerals

[0018] 10. Cavity; 11. Opening; 20. Heating module; 21. First area; 22. Second area; 23. Third area; 24. Fourth area; 30. Chamber gate valve. DETAILED DESCRIPTION

[0019] The following will disclose multiple embodiments of the present application with drawings. For the purpose of clear description, many practical details will be described together in the following description. However, it should be understood that these practical details should not be used to limit the present application. In other words, in some embodiments of the present application, these practical details are not necessary. In addition, in order to simplify the drawings, some conventional structures and components will be depicted in a simple schematic manner in the drawings.

[0020] It should be noted that all directional indications such as up, down, left, right, front, back... in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture as shown in the accompanying drawings. If the specific posture changes, the directional indication will also change accordingly.

[0021] In addition, in the present application, the descriptions of "first", "second", etc. are only used for descriptive purposes, and do not specifically refer to the order or sequence, nor are they used to limit the present application. They are only used to distinguish components or operations described with the same technical terms, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present application.

[0022] In order to further understand the content, features and effects of the present application, the following embodiments are given as examples and described in detail with reference to the accompanying drawings:

[0023] In order to solve the above technical problems, this embodiment provides a PECVD loading chamber, such as Figure 1-2 As shown, it includes a cavity 10, a heating module 20 arranged in the cavity 10, and a chamber door valve 30 for opening or closing the cavity 10 is slidably arranged on the outer side of the cavity 10. When a vacuum state is required, the chamber door valve 30 slides and is closed in the cavity 10, so that the inside of the cavity 10 can form a vacuum state after evacuation. The heating module 20 is divided into several heating areas, each heating area is individually provided with a heater, and each heating area is provided with a detection component. When an atmospheric state is required, the cavity 10 is opened through the chamber door valve 30, and the external low-temperature gas enters the cavity 10. The temperature of the corresponding area is detected by the detection component on each heating area, and then the heating power of the heater can be individually controlled according to the actual temperature on each heating area, thereby avoiding the phenomenon of uneven temperature caused by large-area heating of the existing heating plate, reducing temperature fluctuations, and making the temperature in the cavity 10 quickly tend to balance.

[0024] Specifically, at least two groups of heating modules 20 are provided, and the heating modules 20 are arranged at intervals along the height direction of the cavity 10. Exemplarily, two groups of heating modules 20 are provided, and the two groups of heating modules 20 are arranged at the top and bottom of the cavity 10, and the two groups of heating modules 20 are arranged at intervals to achieve uniform heating of the interior of the cavity 10.

[0025] Furthermore, in some embodiments, the heating module 20 includes a heating plate, and the heating plate is divided along the midline into a symmetrically arranged first area 21 and a second area 22, and a symmetrically arranged third area 23 and a fourth area 24. Furthermore, by dividing the heating plate into a plurality of heating areas, each area is equipped with a detection component and a heater, and the temperature of each heating area can be detected separately, and then the output power of the heater can be controlled separately according to the temperature of each area, thereby avoiding the phenomenon of uneven temperature caused by large-area heating of the existing heating plate and reducing temperature fluctuations.

[0026] In the above scheme, the third area 23 and the fourth area 24 are C-shaped, the first area 21 and the second area 22 are rectangular, and the third area 23 and the fourth area 24 surround the first area 21 and the second area 22, so that the heating plate is symmetrically divided into multiple areas along the midpoint. Through the symmetrically distributed multiple areas, the heating plate has excellent temperature distribution characteristics, which solves the temperature unevenness phenomenon that is easy to occur when heating a large area.

[0027] Furthermore, the detection component includes at least two temperature measuring thermocouples arranged in each heating area. At least two temperature measuring thermocouples work simultaneously, which can achieve accurate temperature measurement and play a role of foolproof protection, avoiding the problem of product damage caused by abnormal temperature measurement due to damage of one thermocouple, thereby improving product quality.

[0028] In the above scheme, openings 11 are provided on opposite side walls of the cavity 10, and the chamber gate valve 30 is slidably disposed on the outer wall of the cavity 10. The chamber gate valve 30 then opens the opening 11 to allow external gas to enter the cavity 10, thereby switching the cavity 10 to an atmospheric state.

[0029] Furthermore, it also includes a vacuum module connected to the cavity 10. When it is necessary to switch to a vacuum state, the opening 11 is closed by the chamber gate valve 30, and the vacuum module evacuates the interior of the cavity 10, thereby switching the cavity 10 to a vacuum state.

[0030] When the cavity 10 is switched to the atmospheric state, the chamber gate valve 30 opens the opening 11, allowing a large amount of low-temperature gas from the outside to enter the cavity 10, which will take away a large amount of heat from the heating plate, causing the temperature inside the cavity 10 to drop sharply, resulting in large temperature fluctuations. To this end, the present embodiment also provides a control system, including the above-mentioned PECVD loading chamber and a PLC module, the PLC module is electrically connected to the detection component and the heater, the PLC module obtains the temperature detected by the detection component, and adjusts the heating power of the heater according to the temperature. In this embodiment, the PLC module can obtain the time point when the chamber gate valve 30 is opened, and control the time point when the heater increases the heating power to be earlier than the time point when the chamber gate valve 30 is opened, and then by pre-raising the temperature to offset the temperature loss caused by the low-temperature gas, the stability of the cavity heating and cooling is ensured, and the temperature fluctuation and heating time are reduced.

[0031] Furthermore, it also includes a driving component whose driving end is connected to the chamber gate valve 30, and the driving component is electrically connected to the PLC module. For example, the driving component can be a cylinder. In some embodiments, the time point for opening the chamber gate valve 30 can be set in the PLC module, and then before the atmospheric state needs to be switched, the PLC module is used to control the heater to preselect and increase the heating power. After the temperature in the cavity 10 rises, the driving component is then controlled to drive the chamber gate valve 30 to open the cavity 10, and then the temperature is pre-raised to offset the temperature loss caused by the low-temperature gas, thereby ensuring the stability of the cavity heating and cooling.

[0032] In the above scheme, the PLC module includes a PID control module. The PLC module obtains the detection temperature of the detection component, compares and processes it with the set temperature, and calculates the heating power required by the heater through the PID control module, and finally outputs the corresponding heating power to the heater. The heater heats according to the specified heating power to achieve smooth heating and temperature stability.

[0033] Furthermore, to ensure stable temperature, the PLC module monitors the opening time of the chamber door valve 30. When the chamber door valve 30 is opened for more than a certain time, the PLC module controls the heater to increase the heating power. After the power is increased for more than a certain time, the PLC module restores the PID automatic control mode. Among them, the time from opening the chamber door valve 30 to increasing the heater power is t1, and the duration of t1 is adjustable. The duration of increasing the power is t2, and the duration of t2 is adjustable. The power size is p1, and the size of p1 is adjustable. In actual production, the corresponding values ​​can be adjusted and set to achieve stable temperature regulation in the cavity 10 and avoid large temperature fluctuations.

[0034] Furthermore, the PLC module monitors the real-time temperature change curve after the chamber gate valve 30 is opened. When the temperature drops to a certain value, the PLC module controls the heater to increase the heating power. After the power is increased and the temperature rises to a certain value, the control is restored to the PID automatic control. Among them, the temperature drop value is T1, and the T1 value is adjustable. The temperature rise value is T2, and the T2 value is adjustable. The power size is P2, and the P2 size is adjustable. Then, the PLC module can be adjusted according to the real-time temperature. In actual production, the corresponding value can be adjusted to achieve a stable adjustment of the temperature in the cavity 10. Among them, it should be noted that the above control process is based on the necessary condition of the chamber gate valve 30 being started, that is, the necessary condition is the change of the air pressure in the cavity 10. When the gate valve is closed or the chamber gate valve 30 is opened for more than a certain period of time, its temperature change is not within this control range.

[0035] In summary, the present application scheme is to set a heating module in the cavity, and a chamber door valve for opening or closing the cavity is slidably set on the outside of the cavity. When a vacuum state is required, the chamber door valve slides and is closed in the cavity, so that the inside of the cavity can form a vacuum state after evacuation. The heating module is divided into several heating areas, each heating area is individually provided with a heater, and each heating area is provided with a detection component. When an atmospheric state is required, the cavity is opened through the chamber door valve, and the external low-temperature gas enters the cavity. The temperature of the corresponding area is detected by the detection component on each heating area, and then the heating power of the heater can be individually controlled according to the actual temperature on each heating area, thereby avoiding the phenomenon of uneven temperature caused by large-area heating of the existing heating plate, reducing temperature fluctuations, and allowing the temperature in the cavity to quickly tend to equilibrium.

[0036] The above-described implementation methods do not constitute a limitation on the protection scope of the technical solution. Any modification, equivalent replacement and improvement made within the spirit and principle of the above-described implementation methods shall be included in the protection scope of the technical solution.

Claims

1. A PECVD loading chamber, characterized in that: The invention comprises a cavity (10) and a heating module (20) arranged in the cavity (10); a chamber door valve (30) is slidably arranged on the outer side of the cavity (10) for opening or closing the cavity (10); the heating module (20) is divided into a plurality of heating areas, each of the heating areas is individually provided with a heater, and each of the heating areas is provided with a detection component.

2. The PECVD loading chamber according to claim 1, characterized in that: At least two groups of the heating modules (20) are provided, and the heating modules (20) are arranged at intervals along the height direction of the cavity (10).

3. The PECVD loading chamber according to claim 2, characterized in that: The heating module (20) comprises a heating plate, on which a symmetrically arranged first area (21) and a second area (22) are divided along a perpendicular midline, and a symmetrically arranged third area (23) and a fourth area (24) are divided.

4. The PECVD loading chamber according to claim 3, characterized in that: The third area (23) and the fourth area (24) are in a C-shape, and the third area (23) and the fourth area (24) surround the first area (21) and the second area (22).

5. The PECVD loading chamber according to claim 1, characterized in that: The detection component includes at least two temperature measuring thermocouples arranged in each of the heating areas.

6. The PECVD loading chamber according to claim 1, characterized in that: Openings (11) are provided on two opposite side walls of the cavity (10), and the chamber door valve (30) is slidably arranged on the outer side wall of the cavity (10), and the chamber door valve (30) is used to open or close the opening (11).

7. The PECVD loading chamber according to claim 1, characterized in that: Also included is a vacuum module connected to the cavity.

8. A control system, characterized in that: It comprises the PECVD loading chamber and PLC module as described in any one of claims 1 to 7, wherein the PLC module is electrically connected to the detection component and the heater, and the PLC module is used to obtain the time point when the chamber gate valve (30) is opened, and to make the time point when the heater increases the heating power earlier than the time point when the chamber gate valve (30) is opened.

9. The control system according to claim 8, characterized in that: It also includes a driving component whose driving end is connected to the chamber gate valve (30), and the driving component is electrically connected to the PLC module.

10. The control system according to claim 9, characterized in that: The PLC module includes a PID control module, and the PLC module obtains the detection temperature of the detection component and calculates the heating power required by the heater through the PID control module.

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