Monocrystal growing furnace
By adopting a triangular lifting adjustment assembly and meshing transmission mechanism in a single crystal growth furnace, the lifting platform level is adjusted in real time, which solves the heat inhomogeneity caused by the tilt of the furnace body and improves the crystallization rate of the single crystal.
Patent Information
- Application Number
- CN202420420063.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-05
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-03-05
AI Technical Summary
During the growth of semiconductor single crystals, the crystals are heated unevenly due to the inclination of the furnace body, resulting in large thermal stress, resulting in dislocation proliferation and reducing crystallization rate.
A single crystal growth furnace is designed, including a triangular lifting and adjustment assembly. The lifting platform is meshed by a rotating shaft, lifting screw, nut seat and bevel gear. The lifting table is kept horizontal in real time to avoid tilting the furnace body and ensure uniform heat of the crystals.
It achieves uniform heat treatment of the crystal, improves the crystal formation rate of the single crystal, and has a simple structure and is easy to operate.
Smart Images
Figure CN222182558U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor material preparation, in particular to a single crystal growth furnace. Background Art
[0002] At present, in the growth process of semiconductor single crystals, the tilted furnace body can easily lead to uneven heating of the crystal, resulting in excessive temperature gradient, thus generating large thermal stress inside the crystal. Under the action of stress, the dislocations inside the crystal move and proliferate a lot, thus generating a large number of dislocations, which greatly reduces the crystallization rate of the single crystal. Utility Model Content
[0003] The utility model aims to provide a single crystal growth furnace with a simple structure and convenient operation. The lifting platform can be adjusted in real time to keep it level, avoid tilting the furnace body, heat the crystal evenly, and improve the crystallization rate of the single crystal.
[0004] In order to achieve the above-mentioned purpose, the utility model provides a single crystal growth furnace, comprising a furnace frame, three lifting and adjusting components, a lifting platform and a furnace body, the three lifting and adjusting components are installed on the furnace frame and are located below the lifting platform, the three lifting and adjusting components are arranged in a triangle, the output ends of the three lifting and adjusting components are movably connected with the lifting platform, and are used to adjust the lifting platform to keep it horizontal, the furnace body is fixed on the lifting platform, the lifting and adjusting components include a rotating shaft, a lifting screw, a nut seat, a first bevel gear and a second bevel gear, the lifting screw is vertically arranged, the rotating shaft is horizontally arranged, the axis of the rotating shaft is perpendicular to the axis of the lifting screw, the rotating shaft is rotatably connected to the furnace frame, one end of the rotating shaft is fixed with the first bevel gear, the nut seat is fixed on the furnace frame, one end of the lifting screw is hinged with the lifting platform, the lifting screw is inserted in the nut seat and the other end is fixed with the second bevel gear, the first bevel gear is meshed with the second bevel gear, the rotating shaft is rotated, and the lifting screw is lifted and adjusted in the vertical direction to keep the lifting platform horizontal.
[0005] Furthermore, the lifting screw includes a threaded section and an optical axis section, the threaded section is inserted into the nut seat, a linear bearing is further provided on the furnace frame, and the optical axis section is inserted into the linear bearing.
[0006] Furthermore, the end of the rotating shaft is also sleeved with an adjusting handle, the adjusting handle is provided with a square hole, and the end of the rotating shaft is provided with a square protrusion corresponding to the square hole.
[0007] Furthermore, the furnace body is hollow inside and has an opening at the upper end to provide a furnace chamber, a quartz wool base is provided at the bottom of the furnace chamber, a crucible is provided above the quartz wool base, and a quartz wool cover is provided on the opening.
[0008] Furthermore, a fixing platform is provided on the furnace frame, the nut seat is installed on the fixing platform, and the fixing platform is provided with a bearing rotatably connected to the rotating shaft.
[0009] Furthermore, the rotating shaft and the first bevel gear, and the lifting screw and the second bevel gear are all connected via keys.
[0010] Furthermore, a supporting base is provided around the bottom of the furnace frame.
[0011] Furthermore, the distances between any two of the three adjustable lifting assemblies are equal.
[0012] Furthermore, a limiting baffle is provided on the furnace frame around the furnace body.
[0013] Compared with the prior art, a single crystal growth furnace in an embodiment of the utility model has the following beneficial effects: three lifting and adjusting components are arranged in a triangle, and the output ends of the three lifting and adjusting components are movably connected with the lifting platform to adjust the lifting platform to keep it horizontal. The furnace body is fixed on the lifting platform. The lifting and adjusting components include a rotating shaft, a lifting screw, a nut seat, a first bevel gear and a second bevel gear. The rotating shaft is rotated, and the lifting screw is meshed and transmitted by the first bevel gear and the second bevel gear to make the lifting screw rise and fall in the vertical direction to adjust the lifting platform to keep it horizontal. The overall structure is simple and easy to operate. The lifting platform can be adjusted to keep it horizontal in real time, thereby improving the crystallization rate of single crystals. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a structural schematic diagram of a single crystal growth furnace according to an embodiment of the utility model;
[0015] Figure 2 It is a top view of a single crystal growth furnace according to an embodiment of the utility model;
[0016] Figure 3 It is a transmission schematic diagram of the rotating shaft of the single crystal growth furnace according to the embodiment of the utility model.
[0017] In the figure, 1. furnace frame; 11. fixed table; 12. supporting base; 13. limit baffle; 2. lifting adjustment component; 21. rotating shaft; 22. lifting screw; 23. nut seat; 24. first bevel gear; 25. second bevel gear; 26. adjusting handle; 27. linear bearing; 3. lifting platform; 4. furnace body; 41. furnace chamber; 42. quartz wool base; 43. crucible; 44. quartz wool cover; a. quartz material tube. DETAILED DESCRIPTION
[0018] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0019] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. used in the present invention to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred devices and elements must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0020] In the description of the present invention, it should be understood that the terms "first", "second", etc. are used in the present invention to describe various information, but these information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present invention, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information.
[0021] like Figure 1 As shown, a single crystal growth furnace of a preferred embodiment of the utility model can avoid the furnace body from being tilted, and includes a furnace frame 1, three lifting and adjusting components 2, a lifting platform 3 and a furnace body 4, wherein the furnace frame 1 is used as a supporting body for installing other components, and the furnace body 4 is placed on the lifting platform 3. In order to avoid the furnace body 4 from being tilted, it is necessary to ensure that the lifting platform 3 always remains horizontal. The three lifting and adjusting components 2 are installed on the furnace frame 1 and are located below the lifting platform 3. In order to facilitate the adjustment of the level of the lifting platform 3, the three lifting and adjusting components 2 are arranged in a triangle, and the output ends of the three lifting and adjusting components 2 are movably connected to the lifting platform 3. In order to simplify the lifting and adjusting structure and facilitate adjustment, the lifting and adjusting component 2 includes a rotating shaft 21, a lifting screw 22, a nut seat 23, a first bevel gear 24 and a second bevel gear 25, as shown in FIG. Figure 1 , Figure 2 As shown, the lifting screw 22 is vertically arranged, the rotating shaft 21 is horizontally arranged, the axis of the rotating shaft 21 is perpendicularly intersected with the axis of the lifting screw 22, the rotating shaft 21 and the grate 1 are rotatably connected, one end of the rotating shaft 21 is fixed with a first bevel gear 24, the nut seat 23 is fixed on the grate 1, one end of the lifting screw 22 is hinged to the lifting platform 3, the lifting screw 22 is inserted into the nut seat 23 and the other end is fixed with a second bevel gear 25, the first bevel gear 24 is meshed with the second bevel gear 25, when the lifting platform 3 is adjusted horizontally, the three rotating shafts 21 can be rotated respectively, and the lifting platform 3 can be kept horizontal by adjusting the height of the three lifting screws 22 in the vertical direction.
[0022] In some embodiments, see Figure 1In order to facilitate the upward guidance of the lifting screw 22, the lifting screw 22 includes a threaded section and an optical axis section. The threaded section is inserted into the nut seat 23. A linear bearing 27 is also provided on the furnace frame 1. The optical axis section is inserted into the linear bearing 27 to guide the lifting screw 22. In some embodiments, in order to facilitate the rotation of the rotating shaft 21, an adjustment handle 26 is also sleeved on the end of the rotating shaft 21. Further, in order to facilitate the assembly of the adjustment handle 26 and the rotating shaft 21, refer to Figure 3 A square hole is provided on the adjusting handle 26, and a square protrusion corresponding to the square hole is provided at the end of the rotating shaft 21. During installation, the protrusion can be inserted into the square hole, so that the rotating shaft 21 and the adjusting handle 26 can be quickly installed.
[0023] In some embodiments, the furnace body 4 is hollow inside and has an opening at the upper end with a furnace chamber 41. In order to prevent the single crystal from being affected by the external environment during growth, a quartz wool base 42 is provided at the bottom of the furnace chamber 41, and a quartz wool cover plate 44 is provided on the opening. The quartz wool base 42 and the quartz wool cover plate 44 can reduce the heat transfer between the furnace body 4 and the outside world, making the temperature in the furnace chamber 41 more stable. A crucible 43 is provided above the quartz wool base 42 for heating the growth of the single crystal.
[0024] In some embodiments, in order to facilitate the installation of the nut seat 23 and the rotating shaft 21, a fixing platform 11 is provided on the furnace frame 1, the nut seat 23 is installed on the fixing platform 11, and a bearing rotatably connected to the rotating shaft 21 is provided on the fixing platform 11. In some embodiments, in order to improve the connection strength between the rotating shaft 21 and the first bevel gear 24, the lifting screw 22 and the second bevel gear 25, and prevent the bevel gears from slipping, the rotating shaft 21 and the first bevel gear 24, the lifting screw 22 and the second bevel gear 25 are all connected by keys.
[0025] In some embodiments, in order to facilitate supporting the furnace frame 1, a support base 12 is provided around the bottom of the furnace frame 1. Further, in order to make the three lifting and adjusting components 2 have the same adjustment effect on the lifting platform 3, the three lifting and adjusting components are spaced equally between each other, that is, the three lifting and adjusting components 2 are arranged in an equilateral triangle. Furthermore, in order to prevent the furnace body 4 from tipping over during horizontal adjustment, a limit baffle 13 is provided on the furnace frame 1 around the furnace body 4.
[0026] The working process of the utility model is as follows: adjust the three lifting adjustment components 2 to keep the lifting platform 3 horizontal, place the furnace body 4 on the lifting platform 3 to avoid the furnace body 4 being tilted, place the packaged quartz material tube a in the furnace chamber 41, and cover it with a quartz wool cover plate 44, heat the crucible 43, and the single crystal begins to grow.
[0027] In summary, the embodiment of the utility model provides a single crystal growth furnace, wherein the three lifting and adjusting components 2 are arranged in a triangle, and the output ends of the three lifting and adjusting components 2 are movably connected to the lifting platform 3, so as to adjust the lifting platform 3 to keep it horizontal. The furnace body 4 is fixed on the lifting platform 3, and the lifting and adjusting components 2 include a rotating shaft 21, a lifting screw 22, a nut seat 23, a first bevel gear 24 and a second bevel gear 25. The rotating shaft 21 is rotated, and the lifting screw 22 is meshed and transmitted with the first bevel gear 24 and the second bevel gear 25 so as to lift and lower the lifting platform 3 in the vertical direction to keep it horizontal. The overall structure is simple and easy to operate, and the lifting platform 3 can be adjusted to keep it horizontal in real time, thereby improving the crystallization rate of single crystals.
[0028] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.
Claims
1. A single crystal growth furnace, characterized in that: The invention comprises a furnace frame, three lifting and adjusting components, a lifting platform and a furnace body, wherein the three lifting and adjusting components are installed on the furnace frame and are located below the lifting platform, the three lifting and adjusting components are arranged in a triangle, the output ends of the three lifting and adjusting components are movably connected with the lifting platform for adjusting the lifting platform to keep it horizontal, the furnace body is fixed on the lifting platform, the lifting and adjusting component comprises a rotating shaft, a lifting screw, a nut seat, a first bevel gear and a second bevel gear, the lifting screw is vertically arranged, the rotating shaft is horizontally arranged, the axis of the rotating shaft intersects perpendicularly with the axis of the lifting screw, the rotating shaft and the furnace frame are rotatably connected, one end of the rotating shaft is fixed with the first bevel gear, the nut seat is fixed on the furnace frame, one end of the lifting screw is hinged with the lifting platform, the lifting screw is penetrated in the nut seat and the other end is fixed with the second bevel gear, the first bevel gear is meshed with the second bevel gear, and the rotating shaft is rotated, and the lifting screw is lifted and lowered in the vertical direction to adjust the lifting platform to keep it horizontal.
2. The single crystal growth furnace according to claim 1, characterized in that: The lifting screw comprises a threaded section and an optical axis section, the threaded section is inserted into the nut seat, a linear bearing is further arranged on the furnace frame, and the optical axis section is inserted into the linear bearing.
3. The single crystal growth furnace according to claim 1, characterized in that: The end of the rotating shaft is also sleeved with an adjusting handle, the adjusting handle is provided with a square hole, and the end of the rotating shaft is provided with a square protrusion corresponding to the square hole.
4. The single crystal growth furnace according to claim 1, characterized in that: The furnace body is hollow inside and has an opening at the upper end with a furnace chamber, a quartz wool base is provided at the bottom of the furnace chamber, a crucible is provided above the quartz wool base, and a quartz wool cover plate is provided on the opening.
5. The single crystal growth furnace according to claim 1, characterized in that: A fixing platform is provided on the furnace frame, the nut seat is mounted on the fixing platform, and a bearing rotatably connected to the rotating shaft is provided on the fixing platform.
6. The single crystal growth furnace according to claim 1, characterized in that: The rotating shaft and the first bevel gear, and the lifting screw and the second bevel gear are all connected via keys.
7. The single crystal growth furnace according to claim 1, characterized in that: A supporting base is arranged around the bottom of the furnace frame.
8. The single crystal growth furnace according to claim 1, characterized in that: The distances between any two of the three lifting and adjusting components are equal.
9. The single crystal growth furnace according to claim 1, characterized in that: A limiting baffle is arranged on the furnace frame around the furnace body.