The invention relates to an
ultraviolet detection device based on a
gallium oxide thin film and a preparation method thereof, in particular to an
ultraviolet detection device based on a gold
nanoparticle enhanced Ga2O3 thin film and a preparation method thereof. The preparation method includes the steps that a layer of Ga2O3 thin film is deposited on a
Si substrate according to the radio-frequency magnetron
sputtering technology; then, a layer of gold thin film is deposited on the surface of the Ga2O3 thin film, the obtained gold thin film is subjected to spheroidizing annealing, and thus
gold particles are obtained; finally, a layer of gold thin film interdigital electrodes are deposited on the Au-Ga2O3 thin film with a
mask. A photoelectric
property testing result of the
ultraviolet detection device shows that the device has good photoelectric responses. The ultraviolet detection device based on the gold
nanoparticle enhanced
gallium oxide thin film and the preparation method thereof have the advantages that the prepared ultraviolet detection device based on the gold
nanoparticle enhanced
gallium oxide thin film is stable in property, capable of making sensitive responses and small in
dark current and has good potential application; besides, the preparation method is strong in process
controllability, easy to implement and good in universality, has restorability in repeated testing and has broad application prospects.