Novel high-low speed switching movement mechanism

Abstract

The utility model relates to a novel high-speed and low-speed switching movement mechanism which comprises a Z-direction linear module, a Z-direction sliding block connected with a Z-direction transmission lead screw of the Z-direction linear module, and a supporting frame connected with the Z-direction sliding block, and is characterized in that the lower end of the Z-direction transmission lead screw is connected with the output end of a right-angle converter; an installation base is arranged on the back face of the support, a planetary reducer is fixed to one side of the installation base, an input shaft of the planetary reducer is connected with a first servo motor, an output shaft of the planetary reducer is connected with a driving belt wheel, and the driving belt wheel is connected with the driven belt wheel through a synchronous belt. The other side of the driving belt wheel is connected with a harmonic reducer through an electromagnetic clutch, and the input end of the harmonic reducer is connected with a second servo motor. According to the mechanism, the machining and assembling difficulty of the Z-direction transmission part of the Z-direction linear module is reduced, meanwhile, the height of the mechanism is reduced, and the situation that the overall height of crystal growth equipment is increased by the mechanism is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum crystal growth furnaces, in particular to a novel fast-slow speed switching motion mechanism suitable for the lifting and lowering motion of an electromagnetic induction coil outside a vacuum crystal growth furnace. Background Art

[0002] At present, as the requirements for crystal materials are getting higher and higher, the requirements for the crystal production environment of the vacuum crystal growth furnace are also getting higher and higher. Generally, the crucible shaft passes through the lower furnace cover to drive the crucible in the furnace to move up and down in the furnace, that is, to move up and down in the temperature field in the furnace, so as to adapt to the crystal growth process. After the crystal growth is completed, the lower furnace cover is opened to take out the crystal product in the crucible. During the crystal growth process, the crucible shaft and the lower furnace cover produce relative movement, which adds greater difficulty to the sealing means of the vacuum furnace.

[0003] In order to overcome this shortcoming, the Z-axis linear module can be used to drive the electromagnetic induction coil outside the vacuum crystal growth furnace to move up and down reciprocatingly. However, the Z-axis linear module drives the electromagnetic induction coil to move slowly outside the furnace body to meet the crystal growth requirements. Fine speed regulation is required to ensure smooth movement. The speed range is 0.05-10mm / h. This speed range is not conducive to the rapid resetting of the electromagnetic induction coil. At present, no single motor and reducer can simultaneously meet the above-mentioned fast and slow production requirements. Therefore, the solution is to use two motors to drive the Z-axis transmission screw of the Z-axis linear module, that is, the fast motor is connected to one end of the Z-axis transmission screw, and the slow motor is connected to the other end of the Z-axis transmission screw. However, the following problems still exist during use: 1. The machining accuracy of the Z-axis transmission screw is high. Both the upper and lower ends of the Z-axis transmission screw need to be equipped with motors as the active ends. Not only coaxiality is required, but also the length dimension and the shoulder position need very high form and position tolerances; 2. During the assembly process, the upper and lower ends of the Z-axis transmission screw are both references. It is necessary to rotate the Z-axis transmission screw while adjusting the relative positions of the fast motor and the slow motor and the Z-axis transmission screw to avoid jamming and shaking. It is also necessary to ensure the clearance size of the clutch, which makes assembly difficult; 3. Drive motors are installed at both the upper and lower ends of the Z-axis transmission screw, and space needs to be reserved for debugging and maintenance, thereby increasing the overall height of the Z-axis linear module. Utility Model Content

[0004] The purpose of the utility model is to provide a new fast-slow speed switching motion mechanism to solve the above-mentioned problems, reduce the difficulty of processing and assembling the Z-axis transmission part of the Z-axis linear module, and at the same time reduce the height of the mechanism to avoid the mechanism increasing the overall height of the crystal growth equipment.

[0005] The technical solution of the utility model is:

[0006] A novel fast-slow speed switching motion mechanism comprises a bracket, a Z-axis linear module arranged on the bracket, a Z-axis slider connected to the Z-axis transmission screw of the Z-axis linear module, and a support frame connected to the Z-axis slider and used for installing an electromagnetic induction coil. The technical key points are: the lower end of the Z-axis transmission screw is connected to the output end of a right-angle converter, the input shaft of the right-angle converter is parallel to the horizontal plane and is fixed with a driven pulley, a mounting seat is provided on the back of the bracket, a planetary reducer is fixed on one side of the mounting seat, the input shaft of the planetary reducer is connected to a first servo motor, and the output shaft is connected to a driving pulley, the driving pulley is connected to the driven pulley by a synchronous belt, the other side of the driving pulley is connected to a harmonic reducer by an electromagnetic clutch, and the input end of the harmonic reducer is connected to a second servo motor.

[0007] The above-mentioned new fast-slow speed switching motion mechanism, the support frame is composed of a C-shaped cantilever connected to the Z-axis slider, an upper support ring connected to the upper end of the C-shaped cantilever, a lower support ring connected to the lower end of the C-shaped cantilever, and a plurality of longitudinal connecting columns connected between the upper support ring and the lower support ring. The upper support ring and the lower support ring are arranged concentrically, and the longitudinal connecting columns are evenly arranged around the center lines of the upper and lower support rings, and the outer side walls of the electromagnetic induction coil are connected and fixed to the longitudinal connecting columns.

[0008] The beneficial effects of the utility model are:

[0009] 1. The first servo motor and the planetary reducer are combined to form a fast transmission part, which outputs power to the active pulley, and drives the Z-axis transmission screw to rotate through the active pulley and the right-angle converter, thereby driving the Z-axis slider to rise or fall quickly, and can drive the support frame for installing the electromagnetic induction coil to quickly reset, meeting the demand for improving production efficiency; when in the crystal growth process, the electromagnetic clutch, the harmonic reducer, and the second servo motor are combined to form a slow transmission part, which outputs power to the active pulley, and drives the Z-axis transmission screw to rotate through the active pulley and the right-angle converter, thereby driving the Z-axis slider to rise or fall slowly, meeting the crystal growth process requirements and achieving the purpose of fine speed regulation.

[0010] 2. The utility model changes the direct drive at both ends of the prior art into an indirect drive through a synchronous belt and a synchronous pulley, thereby reducing the difficulty of processing and assembling the Z-axis transmission screw of the Z-axis linear module. During the assembly process, it is only necessary to assemble the entire drive part on the mounting seat in sequence, and then use the synchronous belt to connect the active pulley and the driven pulley. The coaxiality of the drive part where the driven pulley is located and the gap size of the electromagnetic clutch are guaranteed by the processing of the mounting seat, and there is no need to adjust the position while trial turning.

[0011] 3. The driving part where the driven pulley is located is installed on the back of the Z-axis linear module. Compared with the prior art, the height of the mechanism is reduced, and the mechanism is prevented from increasing the overall height of the crystal growth equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of the utility model;

[0013] Figure 2 yes Figure 1 Right view of .

[0014] In the figure: 1. upper support ring, 2. electromagnetic induction coil, 3. longitudinal connecting column, 4. C-shaped cantilever, 5. bracket, 6. Z-axis linear module, 7. mounting seat, 8. first servo motor, 9. driven pulley, 10. right-angle converter, 11. Z-axis slider, 12. lower support ring, 13. planetary reducer, 14. driving pulley, 15. electromagnetic clutch, 16. harmonic reducer, 17. second servo motor. DETAILED DESCRIPTION

[0015] The utility model is described in detail according to the accompanying drawings of the specification.

[0016] like Figure 1 , Figure 2 As shown, the new fast-slow speed switching motion mechanism includes a bracket 5, a Z-axis linear module 6 arranged on the bracket 5, a Z-axis slider 11 connected to the Z-axis transmission screw of the Z-axis linear module 6, and a support frame connected to the Z-axis slider 11 and used to install the electromagnetic induction coil 2.

[0017] The lower end of the Z-axis transmission screw is connected to the output end of the right-angle converter 10, and the input shaft of the right-angle converter 10 is parallel to the horizontal plane and fixed with a driven pulley 9. A mounting seat 7 is provided on the back of the bracket 5, and a planetary reducer 13 is fixed on one side of the mounting seat 7. The input shaft of the planetary reducer 13 is connected to the first servo motor 8, and the output shaft is connected to the driving pulley 14. The driving pulley 14 is connected to the driven pulley 9 by a synchronous belt, and the other side of the driving pulley 14 is connected to the harmonic reducer 16 by an electromagnetic clutch 15, and the input end of the harmonic reducer 16 is connected to the second servo motor 17.

[0018] In this embodiment, the support frame is composed of a C-shaped cantilever 4 connected to the Z-direction slider 11, an upper support ring 1 connected to the upper end of the C-shaped cantilever 4, a lower support ring 12 connected to the lower end of the C-shaped cantilever 4, and a plurality of longitudinal connecting columns 3 connected between the upper support ring 1 and the lower support ring 12. The upper support ring 1 and the lower support ring 12 are arranged concentrically, and the longitudinal connecting columns 3 are evenly arranged around the center line of the upper and lower support rings, and the outer side wall of the electromagnetic induction coil 2 is connected and fixed to each longitudinal connecting column 3.

[0019] In this embodiment, the first servo motor 8 and the planetary reducer 13 are combined to form a fast transmission part, which outputs power to the active pulley 14, drives the Z-axis transmission screw to rotate through the driven pulley 9 and the right-angle converter 10, thereby driving the Z-axis slider 11 to rise or fall quickly, and the up and down speeds are 1-300mm / min. When in the crystal growth process, the electromagnetic clutch 15, the harmonic reducer 16, and the second servo motor 17 are combined to form a slow transmission part, which outputs power to the active pulley 14, drives the Z-axis transmission screw to rotate through the driven pulley 9 and the right-angle converter 10, thereby driving the Z-axis slider 11 to rise or fall slowly, and the up and down speeds are 0.05-10mm / h.

[0020] The above is a detailed description of the embodiments of the utility model, but the above contents are only preferred embodiments of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of the invention of the utility model should still fall within the scope of this patent.

Claims

1. A novel fast-slow speed switching motion mechanism, comprising a bracket, a Z-direction linear module arranged on the bracket, a Z-direction slider connected to the Z-direction transmission screw of the Z-direction linear module, and a support frame connected to the Z-direction slider and used to install an electromagnetic induction coil, characterized in that: The lower end of the Z-axis transmission screw is connected to the output end of the right-angle converter, the input shaft of the right-angle converter is parallel to the horizontal plane and is fixed with a driven pulley, a mounting seat is provided on the back of the bracket, a planetary reducer is fixed on one side of the mounting seat, the input shaft of the planetary reducer is connected to the first servo motor, and the output shaft is connected to the driving pulley, the driving pulley is connected to the driven pulley by a synchronous belt, the other side of the driving pulley is connected to the harmonic reducer by an electromagnetic clutch, and the input end of the harmonic reducer is connected to the second servo motor.

2. The novel fast-slow speed switching motion mechanism according to claim 1 is characterized in that: The support frame consists of a C-shaped cantilever connected to the Z-axis slider, an upper support ring connected to the upper end of the C-shaped cantilever, a lower support ring connected to the lower end of the C-shaped cantilever, and a plurality of longitudinal connecting columns connected between the upper support ring and the lower support ring. The upper support ring and the lower support ring are concentrically arranged, and the longitudinal connecting columns are evenly arranged around the center lines of the upper and lower support rings. The outer side walls of the electromagnetic induction coil are connected and fixed to the longitudinal connecting columns.

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