Noise detection device for noise source of clean room
By using a combination of high sound insulation and sound absorbing materials in the clean room noise detection device, the problem of difficulty in accurately measuring the noise data of the equipment is solved, and accurate noise detection is realized during the production process, reducing noise source interference and improving detection Accuracy of the results.
Patent Information
- Application Number
- CN202420326431.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-22
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-02-22
AI Technical Summary
In the clean room of semiconductor factory, equipment noise data is difficult to accurately measure, and is greatly affected by other noise sources. The noise data provided by equipment manufacturers is limited, so it is impossible to effectively guide noise control.
A clean room noise source noise detection device is designed, using a metal shell with high sound insulation performance and a porous material with high sound absorption performance. Combining interlaced barrier plates and sound absorption materials, it reduces external noise interference and passes through the noise entrance and The avoidance hole design ensures that the sound level meter receives target noise waves and reduces the reflected sound field.
It improves the accuracy of noise detection, allows detection during production, reduces the impact of other noise sources on measurement results, and enhances the reliability of detection results.
Smart Images
Figure CN222188534U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of noise detection, in particular to a noise detection device for a clean room noise source. Background Art
[0002] In the clean room noise control project of semiconductor factories, accurately obtaining the noise value of clean room equipment can effectively guide the design of noise reduction solutions. However, for confidentiality reasons, equipment manufacturers only provide noise data of some equipment, and the equipment noise data only has the noise value under A-weighting, which cannot provide a reference for noise control. Therefore, it is necessary to conduct on-site noise testing on related equipment to obtain noise spectrum data.
[0003] According to the noise measurement specifications of industrial enterprises, the noise measurement of equipment in clean rooms must avoid or reduce the impact of environmental background noise. However, since shutting down the test object or other equipment will seriously affect production, it is difficult to measure the background noise in actual measurement. In order to reduce the impact of background noise and interfering noise sources on the measurement results, the sound level meter is usually placed as close to the equipment as possible for testing. However, when there are multiple noise source devices near the test object, the measurement results still have large errors. Utility Model Content
[0004] Aiming at the problem that noise detection in a clean room is easily affected by other noise source equipment, the utility model provides a noise detection device for a clean room noise source, which can be used together with a sound level meter to reduce the influence of other noise source equipment in the clean room.
[0005] The technical solution is as follows: a noise detection device for a clean room noise source, comprising a shell, the interior of the shell is hollow, a noise inlet is provided at the front end of the shell, and an avoidance hole for the microphone of the sound level meter to extend into is provided at the rear end of the shell, characterized in that: the material of the shell is sound insulation material, sound absorbing material is attached to the inner wall of the shell, a plurality of baffle plates arranged in an alternating manner are provided at the rear end of the shell, and an avoidance channel for the microphone to pass through is provided in the middle of the baffle plates.
[0006] Furthermore, the shell includes a front conical head, a middle detection area, and a rear tail, the noise inlet is located at the front end of the front conical head, the avoidance hole is located at the rear end of the rear tail, and the baffle is provided in the rear end tail.
[0007] Furthermore, the baffle plate is made of sound insulation material, and sound absorbing material is attached to the surface of the baffle plate.
[0008] Furthermore, the sound insulation material is a metal material with high sound insulation performance, and the sound absorption material is a porous material with high sound absorption performance.
[0009] Furthermore, the cone angle of the front end conical head is less than or equal to 5°.
[0010] Furthermore, the diameter of the noise inlet is less than or equal to 3 mm.
[0011] Furthermore, the size of the avoidance channel corresponds to the size of a component of the sound level meter placed in the avoidance channel during use.
[0012] Beneficial effects: The device adopts a metal shell and is provided with a staggered baffle plate at the rear for blocking, which can reduce the interference of external sound waves on the internal sound field of the device; when in use, the noise inlet is facing the detection point in the clean room, and other equipment in the clean room can be kept open during detection without affecting production. The sound waves generated by the detection target facing the noise inlet can be received by the sound level meter, while the sound waves generated by the non-detection target are generally not facing the noise inlet, and they will be refracted in the shell and absorbed by the sound-absorbing material, thereby reducing the impact on the sound level meter. At the same time, the sound-absorbing material inside the shell can avoid the formation of a reflected sound field inside the device, so that a small-scale free sound field is formed inside the device, which greatly improves the accuracy of the detection results. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 This is a schematic diagram of the external structure of the utility model;
[0014] Figure 2 This is a schematic diagram of the internal structure of the utility model;
[0015] Figure 3 This is a schematic diagram of the use of the utility model. DETAILED DESCRIPTION
[0016] like Figure 1 , Figure 2 A noise detection device for a clean room noise source shown in the figure comprises a shell 1, the interior of the shell is hollow, the shell is composed of a front end conical head 2, a middle end detection area 3, and a rear end tail 4, the cone angle of the front end conical head 2 is preferably less than or equal to 5°, a noise inlet 5 is opened at the front end of the shell 1, and the diameter of the noise inlet 5 is preferably less than or equal to 3mm, combined with Figure 3The rear end of the shell is provided with an avoidance hole 6 for the microphone 100 of the sound level meter to extend into. The shell 1 is made of sound insulation material. The inner wall of the shell 1 is attached with sound absorbing material by adhesion or other means. The rear end of the shell 1 is fixed with a plurality of staggered baffles 7. The middle of the baffles 7 is provided with an avoidance channel 8 for the microphone 100 to pass through. The size of the avoidance channel 8 corresponds to the size of the component of the sound level meter placed in the avoidance channel 8 when in use. In addition, the baffles 7 are also made of sound insulation material, and the surface of the baffles 7 is also attached with sound absorbing material. As a preferred embodiment, the sound insulation material used in the shell 1 and the baffles 7 is a metal material with high sound insulation performance (referring to a metal material with an average sound insulation of more than 40dB within 100Hz~3150Hz, and representative materials include steel, cast iron, aluminum plate, etc.), and the sound absorbing material used in the shell 1 and the baffles 7 is a porous material with high sound absorption performance (referring to an average sound absorption coefficient greater than or equal to 0.4, and representative materials include sound absorbing cotton, glass wool, polyurethane foam material, etc.).
[0017] The device is used together with a sound level meter for detecting noise (the accuracy level of the sound level meter used for detecting noise in a clean room should be level 1 or 2, and representative sound level meter models include Hangzhou Aihua AWA6292, Beijing Shengwang BSWA308, and Denmark B&K2250-S). The microphone 100 and the preamplifier 101 of the sound level meter pass through the staggered baffle plates 7 so that the microphone 100 is located in the middle detection area 3.
[0018] When in use, other devices in the clean room can be tested for noise without being shut down, which will not affect production. The front noise inlet 5 of the device is directly opposite to the noise source, and the device is located on the central axis of the noise source so that the sound waves generated by the noise source mainly enter the device parallel to the device axis direction, and the front inlet of the device is as close to the target noise source as possible. During the detection process, the shell of the device is made of metal material, and it is difficult for the sound waves in the clean room to pass through the metal shell and enter the internal area of the equipment. In addition, a staggered baffle plate 7 is provided at the tail of the device, which prevents the sound waves generated by other sound sources in the clean room from entering the interior of the device through the tail. Moreover, the noise inlet at the front end of the device has a small diameter and is close to the target sound source, making it difficult for the sound waves generated by other interfering sound sources to enter the entrance of the device, or they can only enter at a certain angle. The interior of the device and the surface of the staggered baffle plate 7 are provided with materials with high sound absorption performance. After the sound waves that enter the entrance non-vertically hit the high sound absorption material inside, the sound energy of the sound waves is absorbed and weakened, so that the middle of the device mainly contains sound waves generated by the target sound source. The high sound absorption material on the surface of the rear staggered baffle plate 7 can absorb the sound waves propagating backward from the middle of the device, avoiding the reflected sound waves generated by these sound waves after hitting the rear staggered baffle plate 7 to interfere with the sound field at the front end.
[0019] At the same time, when the device is measuring the fan outlet noise in the clean room, since the staggered baffle plate 7 at the tail of the device is not blocked, the airflow will not be hindered during the detection process. At the same time, the front end of the device is conical, and the flow cross-section from the device noise inlet 5 to the middle end of the device gradually increases, so the airflow velocity can be reduced to avoid the aerodynamic noise generated by excessive airflow velocity affecting the measurement accuracy.
[0020] The above are only preferred specific implementations of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by anyone familiar with the technology within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.
Claims
1. A noise detection device for a clean room noise source, comprising a shell, the interior of the shell is hollow, a noise inlet is provided at the front end of the shell, and a avoidance hole for a microphone of a sound level meter to extend into is provided at the rear end of the shell, characterized in that: The shell is made of sound-insulating material, the inner wall of the shell is attached with sound-absorbing material, the rear of the shell is provided with a plurality of staggered baffles, and an avoidance channel for the microphone to pass through is opened in the middle of the baffle.
2. A clean room noise source noise detection device according to claim 1, characterized in that: The shell includes a front conical head, a middle detection area, and a rear tail. The noise inlet is located at the front end of the front conical head, the avoidance hole is located at the rear end of the rear tail, and the baffle is provided in the rear end tail.
3. A clean room noise source noise detection device according to claim 2, characterized in that: The baffle plate is made of sound insulation material, and sound absorbing material is attached to the surface of the baffle plate.
4. A clean room noise source noise detection device according to claim 3, characterized in that: The sound insulation material is a metal material with high sound insulation performance, and the sound absorption material is a porous material with high sound absorption performance.
5. A clean room noise source noise detection device according to claim 2, characterized in that: The cone angle of the front end cone head is less than or equal to 5°.
6. A clean room noise source noise detection device according to claim 1, characterized in that: The diameter of the noise inlet is less than or equal to 3 mm.
7. A clean room noise source noise detection device according to claim 1, characterized in that: The size of the avoidance channel corresponds to the size of the components of the sound level meter placed in the avoidance channel during use.