Manual probe station

Abstract

The utility model relates to the technical field of semiconductor detection, and discloses a manual probe station, which comprises a base and an equipment table top, screw rod lifting shafts are arranged at four corners of the top of the base, the equipment table top is arranged at the top ends of the screw rod lifting shafts, supports are arranged on two sides of the top of the base, and transverse plates are arranged at the tops of the supports. The center of the top of the transverse plate is provided with a microscope support, one side of the microscope support is provided with a microscope, and the two sides of the top of the base are provided with Y-axis linear sliding rails. The X-axis and Y-axis positioning and locking of the air-floating objective table are achieved through the electromagnets, the position can be quickly locked, the air-floating objective table is prevented from displacing in the detection process, and the detection accuracy is improved. Through fine adjustment operation of the air floating objective table on the X axis and the Y axis of the objective table, movement is smoother and quicker, and high-precision operation can be achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor detection, in particular to a manual probe station. Background Art

[0002] In the process of chip production inspection, when it is necessary to randomly select some chip parameters for sampling inspection, a manual probe station is basically used. The manual probe station can accurately and quickly find the position of the wafer or packaged chip placed on the wafer tray that needs to be tested. The tester adjusts the probe on the probe holder to contact the position to be tested, sets the required test parameters on the chip tester, and inputs them to the chip under test through the probe to achieve the test requirements for chip parameters.

[0003] Currently, the manual probe stations on the market do not have the functions of fast moving positioning and fine-tuning alignment. Most of them use a screw structure to move and position the wafer plate. During sampling inspection, the movement time is long, and displacement occurs when the screw is locked. High-precision operation cannot be achieved, which is extremely inconvenient for the movement and alignment of the wafer. Utility Model Content

[0004] The purpose of the utility model is to provide a manual probe station to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a manual probe station, comprising: a base and an equipment table, wherein the four corners of the top of the base are provided with screw lifting shafts, the top of the screw lifting shaft is provided with an equipment table, supports are provided on both sides of the top of the base, a horizontal plate is provided on the top of the support, a microscope bracket is provided in the center of the top of the horizontal plate, a microscope is provided on one side of the microscope bracket, Y-axis linear slides are provided on both sides of the top of the base, a Y-axis slide seat is provided above the Y-axis linear slide rail, an elastic sheet is provided on the top of the Y-axis slide seat, an electromagnet is provided at the bottom of one end of the elastic sheet, and the electromagnet can be magnetically adsorbed to the top surface of the base; a Z-shaped plate is provided on one side of the Y-axis slide seat, a support plate is provided between the Z-shaped plates, an X-axis linear slide rail is provided on the top of the support plate, an X-axis slide rail is provided on the top of the X-axis linear slide rail, and an air-floating stage is provided on one side of the X-axis slide seat.

[0006] Furthermore, the air-floating stage includes an air-floating base, one side of the air-floating base is fixedly connected to the X-axis slide, the top of the air-floating base is provided with an air-floating pad, both sides of the top of the air-floating pad are provided with X-axis air-floating slides, the top of the X-axis air-floating slide is provided with an X-axis air-floating plate, both sides of the top of the X-axis air-floating plate are provided with Y-axis air-floating slides, the top of the Y-axis air-floating slide is provided with a Y-axis air-floating plate, the top of the Y-axis air-floating plate is provided with a turntable, and the top of the turntable is provided with a loading pan.

[0007] Furthermore, a Y-axis top block is provided on one side of the Y-axis air floating plate, a Y-axis threaded sleeve is provided on one side of the X-axis air floating plate close to the Y-axis top block, and a Y-axis air floating adjusting screw is provided inside the Y-axis threaded sleeve.

[0008] Furthermore, an X-axis threaded sleeve is provided on one side of the air floating pad, an X-axis top block is provided on the side of the X-axis air floating plate close to the X-axis threaded sleeve, and an X-axis air floating adjusting screw is provided inside the X-axis threaded sleeve.

[0009] Furthermore, cable clamps are provided on both sides of the top of the equipment table, a probe observation slot is opened in the middle of the equipment table, probe seat adsorption plates are provided on both sides of the top of the probe observation slot, and a height gauge is provided on one side of the horizontal plate.

[0010] Furthermore, a protective cover is provided on the top of the Z-shaped plate above the elastic sheet, an air flotation control knob is provided on one side of the air flotation base, and the air flotation control knob is used to control the start and close of the X-axis air flotation slide and the Y-axis air flotation slide, and a lifting control knob is provided at a corner of the top of the base, and the lifting control knob is used to control the lifting and lowering of the screw lifting shaft.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] The utility model realizes that when the manual probe station is used, the wafer or chip to be tested is placed on the loading plate by means of the provided base, electromagnet and air-floating loading plate, and the air-floating loading plate is moved in the X-axis and Y-axis directions by means of the cooperation of the X-axis linear slide and the Y-axis linear slide, and after moving to the detection station, the electromagnet is started, and after being energized, the electromagnet is adsorbed on the top of the base, and the X-axis or Y-axis position of the air-floating loading plate is positioned to prevent displacement during probe detection, and then the probe seat is placed on the probe seat adsorption plate, and after the probe is installed, the X-axis air-floating slide and the Y-axis air-floating slide are started, and then under a microscope, the position on the X-axis and Y-axis of the loading plate is fine-tuned by means of the X-axis air-floating adjustment screw and the Y-axis air-floating adjustment screw to ensure the accuracy of the position, and then the lifting and lowering of the equipment table is controlled by the lifting and lowering control knob, and the lifting and lowering probe seat is in contact and separation with the wafer or new product to complete the test; after the detection is completed, the electromagnet is turned off, and the electromagnet is separated from the base under the elastic force of the elastic sheet, and the contact is locked;

[0013] The entire manual probe station uses electromagnets to achieve positioning and locking of the X-axis and Y-axis of the air-floating stage. It can quickly lock the position to prevent the air-floating stage from shifting during the inspection process. The air-floating stage can fine-tune the X-axis and Y-axis of the loading plate to make the movement smoother and faster, enabling high-precision operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional diagram of the manual probe station of the utility model;

[0015] Figure 2 This is a schematic diagram of the connection structure of the air-floating stage of the manual probe station of the utility model;

[0016] Figure 3 for Figure 2 The enlarged structural diagram at A in the middle;

[0017] Figure 4 It is an enlarged schematic diagram of the air-floating stage of the manual probe station of the utility model.

[0018] In the figure: 1-base; 2-screw lifting shaft; 3-equipment table; 4-cable clamp; 5-probe seat adsorption plate; 6-support; 7-cross plate; 8-microscope bracket; 9-microscope; 10-altimeter; 11-air floating base; 12-carrying plate; 13-Y-axis linear slide; 14-protective cover; 15-Z-type plate; 16-support plate; 17-X-axis linear slide; 18-X-axis slide; 19-Y-axis slide; 20-elastic sheet; 21-electromagnet; 22-air floating pad; 23-X-axis air floating slide; 24-X-axis air floating plate; 25-Y-axis air floating slide; 26-Y-axis air floating plate; 27-turntable; 28-air floating control knob; 29-X-axis air floating adjustment screw; 30-Y-axis air floating adjustment screw. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0020] See also Figure 1-Figure 4The utility model provides a technical solution: a manual probe station, comprising: a base 1 and an equipment table 3, a screw lifting shaft 2 is provided at the four corners of the top of the base 1, an equipment table 3 is provided at the top of the screw lifting shaft 2, supports 6 are provided on both sides of the top of the base 1, a horizontal plate 7 is provided on the top of the support 6, a microscope bracket 8 is provided in the center of the top of the horizontal plate 7, a microscope 9 is provided on one side of the microscope bracket 8, Y-axis linear slides 13 are provided on both sides of the top of the base 1, a Y-axis slide seat 19 is provided above the Y-axis linear slide rail 13, an elastic sheet 20 is provided on the top of the Y-axis slide seat 19, an electromagnet 21 is provided at the bottom of one end of the elastic sheet 20, and the electromagnet 21 can be magnetically adsorbed with the top surface of the base 1; a Z-type plate 15 is provided on one side of the Y-axis slide seat 19, a support plate 16 is provided between the Z-type plates 15, an X-axis linear slide rail 17 is provided on the top of the support plate 16, an X-axis slide rail 18 is provided on the top of the X-axis linear slide rail 17, and an air-floating stage is provided on one side of the X-axis slide seat 18. The air-floating stage is moved in the X-axis and Y-axis directions by the cooperation of the X-axis linear slide 17 and the Y-axis linear slide 13. After moving to the detection station, the electromagnet 21 is started. After being energized, the electromagnet 21 is adsorbed on the top of the base 1 to locate the X-axis or Y-axis position of the air-floating stage to prevent displacement during probe detection.

[0021] The air-floating stage comprises an air-floating base 11, one side of the air-floating base 11 is fixedly connected to the X-axis slide 18, an air-floating pad 22 is arranged on the top of the air-floating pad 22, X-axis air-floating slide rails 23 are arranged on both sides of the top of the air-floating pad 22, an X-axis air-floating plate 24 is arranged on the top of the X-axis air-floating slide rail 23, Y-axis air-floating slide rails 25 are arranged on both sides of the top of the X-axis air-floating plate 24, a Y-axis air-floating plate 26 is arranged on the top of the Y-axis air-floating slide rail 25, a turntable 27 is arranged on the top of the Y-axis air-floating plate 26, and a loading tray 12 is arranged on the top of the turntable 27. A Y-axis top block is arranged on one side of the Y-axis air-floating plate 26, a Y-axis threaded sleeve is arranged on the side of the X-axis air-floating plate 26 close to the Y-axis top block, and a Y-axis air-floating adjustment screw 30 is arranged inside the Y-axis threaded sleeve. An X-axis threaded sleeve is arranged on one side of the air-floating pad 22, an X-axis top block is arranged on the side of the X-axis air-floating plate 26 close to the X-axis threaded sleeve, and an X-axis air-floating adjustment screw 29 is arranged inside the X-axis threaded sleeve. When the air-floating stage is in use, high-pressure air enters the X-axis air-floating slide rail 23 to blow the X-axis air-floating plate 24 upward, and the X-axis air-floating adjustment screw 29 is rotated to push and pull the X-axis top plate to achieve fine-tuning of the X-axis air-floating plate in the X-axis direction. After the fine-tuning is completed, the high-pressure air is turned off, and the X-axis air-floating plate 24 automatically falls and locks. Similarly, fine-tuning is performed in the Y-axis direction, and the adjustment is more accurate and fast.

[0022] Cable clamps 4 are provided on both sides of the top of the equipment table 3 for locking the cables of the probe seat. A probe observation slot is opened in the middle of the equipment table 3. Probe seat adsorption plates 5 are provided on both sides of the top of the probe observation slot for adsorbing the probe seat. A height gauge 10 is provided on one side of the horizontal plate 7 for detecting the height of the equipment table 3.

[0023] A protective cover 14 is provided at the top of the Z-shaped plate 15 above the elastic sheet 20, and an air flotation control knob 28 is provided on one side of the air flotation base 11. The air flotation control knob 28 is used to control the start and close of the X-axis air flotation slide 23 and the Y-axis air flotation slide 25. A lifting control knob is provided at a corner of the top of the base 1. The lifting control knob is used to control the lifting and lowering of the screw lifting shaft 2.

[0024] When the manual probe station is in use, the wafer or chip to be tested is placed on the carrier plate 12, and the air-floating carrier is moved in the X-axis and Y-axis directions through the cooperation of the X-axis linear slide 17 and the Y-axis linear slide 13. After moving to the detection station, the electromagnet 21 is started. After the electromagnet 21 is energized, it is adsorbed on the top of the base 1 to locate the X-axis or Y-axis position of the air-floating carrier to prevent displacement during probe detection. Then the probe seat is placed on the probe seat adsorption plate 5. After the probe is installed, the X-axis air-floating slide 23 and the Y-axis air-floating slide 25 are started. Then, under the microscope 9, the X-axis and Y-axis positions of the carrier plate 12 are fine-tuned through the X-axis air-floating adjustment screw 29 and the Y-axis air-floating adjustment screw 30 to ensure the accuracy of the position. Then, the lifting and lowering of the equipment table 3 is controlled by the lifting and lowering control knob, and the lifting and lowering probe seat is in contact and separation with the wafer or new product to complete the test; after the detection is completed, the electromagnet 21 is turned off, and the electromagnet 21 is separated from the base 1 under the elastic force of the elastic sheet 20, and the contact is locked;

[0025] The entire manual probe station realizes the positioning and locking of the X-axis and Y-axis of the air-floating stage through the electromagnet 21, which can quickly lock the position to prevent the air-floating stage from shifting during the detection process. The air-floating stage fine-tunes the X-axis and Y-axis of the loading plate 12 to make the movement smoother and faster, and can achieve high-precision operation.

[0026] Based on the embodiments of the present utility model, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present utility model.

Claims

1. Manual probe station, including: A base (1) and an equipment table (3), characterized in that: screw lifting shafts (2) are provided at the four corners of the top of the base (1), the top of the screw lifting shaft (2) is provided with an equipment table (3), supports (6) are provided on both sides of the top of the base (1), a horizontal plate (7) is provided on the top of the support (6), a microscope bracket (8) is provided in the center of the top of the horizontal plate (7), a microscope (9) is provided on one side of the microscope bracket (8), Y-axis linear slides (13) are provided on both sides of the top of the base (1), a Y-axis slide seat (19) is provided above the Y-axis linear slide rails (13), an elastic sheet (20) is provided on the top of the Y-axis slide seat (19), an electromagnet (21) is provided at the bottom of one end of the elastic sheet (20), and the electromagnet (21) can be magnetically adsorbed with the top surface of the base (1); A Z-shaped plate (15) is provided on one side of the Y-axis slide (19), a support plate (16) is provided between the Z-shaped plates (15), an X-axis linear slide (17) is provided on the top of the support plate (16), an X-axis slide (18) is provided on the top of the X-axis linear slide (17), and an air-floating stage is provided on one side of the X-axis slide (18).

2. The manual probe station according to claim 1, characterized in that: The air-floating loading platform comprises an air-floating base (11), one side of the air-floating base (11) is fixedly connected to an X-axis slide seat (18), an air-floating pad (22) is provided on the top of the air-floating base (11), X-axis air-floating slide rails (23) are provided on both sides of the top of the air-floating pad (22), an X-axis air-floating plate (24) is provided on the top of the X-axis air-floating slide rail (23), Y-axis air-floating slide rails (25) are provided on both sides of the top of the X-axis air-floating plate (24), a Y-axis air-floating plate (26) is provided on the top of the Y-axis air-floating slide rail (25), a turntable (27) is provided on the top of the Y-axis air-floating plate (26), and an object loading tray (12) is provided on the top of the turntable (27).

3. The manual probe station according to claim 2, characterized in that: A Y-axis top block is provided on one side of the Y-axis air floating plate (26), a Y-axis threaded sleeve is provided on the side of the X-axis air floating plate (26) close to the Y-axis top block, and a Y-axis air floating adjustment screw (30) is provided inside the Y-axis threaded sleeve.

4. The manual probe station according to claim 3, characterized in that: An X-axis threaded sleeve is provided on one side of the air-floating pad (22), an X-axis top block is provided on one side of the X-axis air-floating plate (26) close to the X-axis threaded sleeve, and an X-axis air-floating adjustment screw (29) is provided inside the X-axis threaded sleeve.

5. The manual probe station according to claim 1, characterized in that: Cable clamps (4) are provided on both sides of the top of the equipment table (3), a probe observation slot is provided in the middle of the equipment table (3), probe seat adsorption plates (5) are provided on both sides of the top of the probe observation slot, and a height gauge (10) is provided on one side of the horizontal plate (7).

6. The manual probe station according to claim 2, characterized in that: A protective cover (14) is provided at the top of the Z-shaped plate (15) above the elastic sheet (20); an air flotation control knob (28) is provided on one side of the air flotation base (11); the air flotation control knob (28) is used to control the start and stop of the X-axis air flotation slide rail (23) and the Y-axis air flotation slide rail (25); a lifting control knob is provided at one corner of the top of the base (1); the lifting control knob is used to control the lifting of the screw lifting shaft (2).

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