Probe adjusting device

By designing a probe adjustment device for chip testing, the elastic component and leveling component ensure the height consistency of the probe, the problem of inaccurate test results caused by the difficulty of maintaining the consistency of probe height in the prior art, and the test results are improved accuracy.

CN222189368UActive Publication Date: 2024-12-17SIDEA SEMICON EQUIP (SHENZHEN) CO LTD
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Patent Information

Application Number
CN202323417144.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2023-12-14
Publication Date
2024-12-17
Estimated Expiration
2033-12-14

AI Technical Summary

Technical Problem

In the prior art, it is difficult for the two probes of the chip test probe to maintain a high consistency, resulting in different needle pressures, which in turn affects the accuracy of the test results.

Method used

A probe adjustment device is designed, including a fixing seat, an elastic carrier, a needle pressure adjustment mechanism and a leveling assembly. The elastic assembly provides the cooperation between elastic force and leveling bolts to ensure the height of the two probes and achieve needle pressure. even adjustment.

Benefits of technology

It effectively solves the problem of uneven needle pressure caused by inconsistent probe height, improves the accuracy of test results and the adaptability of probes, and ensures the stability and accuracy of probes in chip testing.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a probe adjusting device. The probe adjusting device comprises a fixed seat; the two bearing pieces are arranged on the fixed seat, and the bearing pieces are arranged in an elastic mode; the two probes are arranged on the two bearing pieces in a one-to-one correspondence mode, and the two probes can abut against the same chip pin; the needle pressure adjusting mechanism comprises a connecting plate and two elastic assemblies, one end of the connecting plate is fixedly connected to the fixing base, the other end of the connecting plate extends to the bottom of the bearing plate, the two elastic assemblies are arranged on the connecting plate, the two elastic assemblies correspond to the two bearing parts one to one, and the two elastic assemblies are arranged on the connecting plate. The elastic assembly can continuously provide elastic force for the top of the bearing piece. And the leveling assembly is movably arranged on the fixed seat, and the leveling assembly can drive one of the bearing parts to be lifted. According to the invention, the heights of the two probes are kept consistent, so that the accuracy of a test result is improved.
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Description

Technical Field

[0001] The utility model relates to the field of semiconductor testing, in particular to a probe adjusting device. Background Art

[0002] A chip test probe is a tool used to test chip circuits. It can contact the circuit pins on the chip surface and transmit test signals to the chip, and then judge whether the performance and function of the chip circuit are normal based on the chip's response. A chip test probe usually consists of a probe, a wire, and a connector, where the probe is the part that directly contacts the chip pins.

[0003] In the related art, when some chips require two probes to contact one chip pin at the same time for testing, two independent probe holders are usually used to carry the probes, so that the two probe holders are controlled separately to drive the two probes to contact the same chip pin for testing.

[0004] However, it is difficult to keep the heights of the two probes consistent in the related art, which easily leads to different needle pressures when the two probes abut against the chip pins, resulting in inaccurate test results. Utility Model Content

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a probe adjustment device, which has the effect of making the heights of two probes consistent to improve the accuracy of the test results.

[0006] According to a probe adjustment device of an embodiment of the utility model, it includes: a fixed seat; two supporting members, the supporting members are arranged on the fixed seat, and the supporting members are elastically arranged; two probes, the two probes are respectively arranged on the two supporting members in a one-to-one manner, and the two probes can abut against the same chip pin; a needle pressure adjustment mechanism, the needle pressure adjustment mechanism includes a connecting plate and two elastic components, one end of the connecting plate is fixedly connected to the fixed seat, and the other end extends to the bottom of the supporting member, the two elastic components are arranged on the connecting plate, the two elastic components respectively correspond to the two supporting members in a one-to-one manner, and the elastic components can continuously provide elastic force for the top of the supporting member; a leveling component, the leveling component is movably arranged on the fixed seat, and the leveling component can drive one of the supporting members to lift.

[0007] According to a probe adjustment device of an embodiment of the utility model, at least the following beneficial effects are included: when the probe tests the chip, it is first necessary to apply needle pressure to the two probes, and the elastic component continuously provides elastic force to the top of the carrier to drive the carrier to descend, thereby increasing the needle pressure of the probe. In the process of needle pressure adjustment, the size of the elastic force provided by the two elastic components to the carrier is kept consistent by artificially controlling. At this time, if the two carriers are at the same height, the needle pressure of the two probes is equal; if the heights of the two carriers are inconsistent, the leveling component cooperates with the elastic component, because the leveling component provides support force for the carrier, and the elastic component provides pressure for the carrier, so that the two are in opposite forces; when the carrier needs to rise, the leveling component drives the carrier to rise; when the carrier needs to descend, the leveling component can make way for the carrier, so that the pressure applied by the elastic component makes the carrier descend, and then the two carriers are kept at the same height, so that the needle pressure of the two probes is kept consistent, so as to solve the problem that the heights of the two probes are difficult to keep consistent, which leads to different needle pressures of the two probes and inaccurate test results.

[0008] According to some embodiments of the utility model, the supporting member includes a supporting plate and a spring sheet, one end of the spring sheet is fixedly connected to the fixing seat, and the other end is connected to the supporting plate, the probe is arranged at one end of the supporting plate away from the spring sheet, and the spring sheet can produce elastic deformation to make the supporting plate rise and fall.

[0009] According to some embodiments of the present invention, the carrier board is a PCB board, and the PCB board is electrically connected to the probe.

[0010] According to some embodiments of the utility model, the elastic component includes a screw, an adjusting nut and an elastic member. A avoidance hole is opened through the supporting plate, and the avoidance hole is aligned with the connecting plate. One end of the screw is fixedly connected to the connecting plate, and the other end vertically passes through the avoidance hole upward. The adjusting nut is threadably matched with the screw, and the elastic member is arranged between the adjusting nut and the supporting plate.

[0011] According to some embodiments of the utility model, the elastic member includes a spring, and the spring is sleeved outside the screw rod. One end of the spring abuts against the adjusting nut, and the other end abuts against the supporting plate.

[0012] According to some embodiments of the present invention, the top thread of the screw rod is matched with a limiting nut.

[0013] According to some embodiments of the utility model, the leveling assembly includes a leveling bolt and a limit block, a first screw hole is opened through the top of the fixing seat, the leveling bolt is threadedly engaged with the first screw hole, a through hole is opened on the supporting plate, the through hole is aligned with the first screw hole, the bottom end of the leveling bolt passes through the through hole, and the limit block is fixedly sleeved on the end of the leveling bolt.

[0014] According to some embodiments of the present utility model, a locking piece for locking the leveling bolt is provided on the fixing seat.

[0015] According to some embodiments of the utility model, the locking member includes a locking bolt, a second screw hole is opened on one side of the fixing seat, the second screw hole is connected to the first screw hole, and the second screw hole is threadably matched with the locking bolt to tighten the leveling bolt.

[0016] According to some embodiments of the utility model, a conductive part is provided on the connecting board. Before the probe tests the chip, the top of the conductive part abuts against the carrier board and is energized when abutting against the carrier board. When the probe abuts against the chip pin, the conductive part detaches from the carrier board to cut off the power to the conductive part. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application;

[0018] Figure 2 is a structural diagram of the needle pressure regulating mechanism in an embodiment of the present application;

[0019] Figure 3 It is a partial cross-sectional view of the fixing seat in the embodiment of the present application.

[0020] Explanation of the reference numerals: 100, fixing seat; 210, bearing plate; 220, spring piece; 300, probe; 410, connecting plate; 421, screw rod; 422, adjusting nut; 4231, spring; 424, avoidance hole; 500, limiting nut; 600, conductive part; 710, leveling bolt; 720, limiting block; 730, through hole; 810, locking bolt. DETAILED DESCRIPTION

[0021] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0022] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0023] In the description of the utility model, if there is a description of first and second, it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0024] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0025] The following is combined with Figure 1-3 This application is described in further detail.

[0026] The probe adjustment device proposed in the embodiment of the utility model refers to Figure 1 and Figure 2 , including a fixed seat 100. In some embodiments, one end of the fixed seat 100 is fixed to the slide table so as to drive the fixed seat 100 to move through the slide table.

[0027] It is understandable that in some embodiments of the present invention, reference Figure 1 and Figure 2 Two carriers and two probes 300 are arranged at the bottom of the fixing seat 100. The carriers are elastically arranged. The two probes 300 are arranged on the two carriers respectively and one by one. The two probes 300 can abut against the same chip pins, so that the two probes 300 are integrated on a fixing seat 100, so that the height of the two probes 300 is easier to adjust, thereby making the operation more convenient and saving production costs.

[0028] It is understandable that in some embodiments of the present invention, reference Figure 1 and Figure 2The carrier includes a carrier plate 210 and a spring 220, one end of the spring 220 is fixedly connected to the fixing seat 100, and the other end is connected to the carrier plate 210, so that the carrier plate 210 is supported by the spring 220, and the spring 220 can produce elastic deformation to make the carrier plate 210 rise and fall, so that when the probe 300 needs to be raised and lowered, the spring 220 produces elastic deformation by driving the carrier plate 210 to rise and fall, and then when the test is completed, the carrier plate 210 is driven to reset by the elastic reset force of the spring 220. In some embodiments, the carrier plate 210 is a PCB board, and the inside of the PCB board is electrically connected to the probe 300, so that it can be used as a conductor to conduct signals for the probe 300; at the same time, the outside of the PCB board is insulated, and the PCB board has a certain structural strength to provide support for the probe 300.

[0029] It is understandable that in some embodiments of the present invention, reference Figure 1 and Figure 2 The probe adjustment device also includes a needle pressure adjustment mechanism. According to the requirements of different chips, the needle pressure adjustment mechanism can adjust different needle pressures for the probe 300. Specifically, the needle pressure adjustment mechanism includes a connecting plate 410 and two elastic components. One end of the connecting plate 410 is fixedly connected to the fixing seat 100, and the other end extends to the bottom of the carrier plate 210, and the extended end is suspended. The two elastic components are arranged on the connecting plate 410, and the two elastic components correspond to the two carriers one by one. The elastic components can continuously provide elastic force to the top of the carrier so that the top of the carrier plate 210 can be continuously subjected to pressure.

[0030] It is understandable that in some embodiments of the present invention, reference Figure 1 and Figure 2 The elastic component includes a screw rod 421, an adjusting nut 422 and an elastic member. A position avoidance hole 424 is provided on the carrier plate 210. The position avoidance hole 424 is aligned with the connecting plate 410. One end of the screw rod 421 is fixedly connected to the connecting plate 410, and the other end vertically passes through the position avoidance hole 424 upward. The adjusting nut 422 is threadedly matched with the screw rod 421. The elastic member is arranged between the adjusting nut 422 and the carrier plate 210. Before the probe 300 tests the chip, the adjusting nut 422 is threadedly matched with the screw rod 421, so that the adjusting nut 422 is lowered to squeeze the elastic member, so that the elastic member drives the carrier plate 210 to lower by elastic force to increase the needle pressure of the probe 300. In the process of needle pressure adjustment, the distance between the adjusting nut 422 and the carrier plate 210 is controlled so that the adjustment amount of the two elastic components tends to be consistent. At this time, if the two carrier plates 210 are at the same height after adjustment, the needle pressures of the two probes 300 are equal. At the same time, by adjusting the nut 422 to adjust the needle pressure of the probe 300, it can adapt to the testing requirements of different chips, thereby improving the adaptability of the probe 300.

[0031] It is understandable that in some embodiments of the present invention, reference Figure 1 and Figure 2 The elastic member includes a spring 4231, which is sleeved outside the screw rod 421. One end of the spring 4231 abuts against the adjusting nut 422, and the other end abuts against the supporting plate 210. The adjusting nut 422 is lowered to squeeze the spring 4231 to produce elastic deformation, so that the bottom of the spring 4231 drives the supporting plate 210 to descend through the elastic restoring force to provide needle pressure for the probe 300.

[0032] It is understandable that in some embodiments of the present invention, reference Figure 1 and Figure 2 The top thread of the screw rod 421 cooperates with the limiting nut 500, and the limiting nut 500 is used to limit the moving position of the adjusting nut 422. At the same time, since the probe 300 will generate vibration during operation, the limiting nut 500 is used to reduce the situation where the adjusting nut 422 is separated from the screw rod 421 due to thread slippage after a long period of operation.

[0033] It is understandable that in some embodiments of the present invention, reference Figure 2 A conductive part 600 is provided on the connecting plate 410. The conductive part 600 is used to react to the contact between the probe 300 and the chip. Before the probe 300 tests the chip, the conductive part 600 contacts the carrier plate 210. At this time, the conductive part 600 and the carrier plate 210 are energized. When the probe 300 contacts the chip pin, there is a certain needle pressure, so that the probe 300 is subjected to force to rise relative to the fixing seat 100, thereby driving the carrier plate 210 to rise, so that the conductive part 600 is separated from the carrier plate 210. At this time, the conductive part 600 and the carrier plate 210 are not conductive, so that the contact between the probe 300 and the chip is judged by whether the current is conducted.

[0034] It is understandable that in some embodiments of the present invention, reference Figure 2 and Figure 3 The probe adjustment device also includes a leveling component, which is used to drive one of the supporting plates 210 to lift up, so as to cooperate with the needle pressure adjustment mechanism to adjust one of the supporting plates 210 and the other supporting plate 210 to the same height.

[0035] It is understandable that in some embodiments of the present invention, reference Figure 2 and Figure 3The leveling assembly includes a leveling bolt 710 and a limiting block 720. A first screw hole is formed through the top of the fixing seat 100. The leveling bolt 710 is threadedly matched with the first screw hole. A through hole 730 is formed on the supporting plate 210. The through hole 730 is aligned with the first screw hole. The bottom end of the leveling bolt 710 passes through the through hole 730. The limiting block 720 is fixedly sleeved on the end of the leveling bolt 710 so that the limiting block 720 abuts against the bottom surface of the supporting plate 210. When the adjustment amounts of the two elastic assemblies tend to be consistent, if the heights of the two supporting plates 210 are inconsistent, the leveling bolt 710 can be adjusted by the leveling bolt 710. 0 cooperates with the thread of the first screw hole, when the leveling bolt 710 rises, the limit block 720 drives the carrier plate 210 to rise; when the leveling bolt 710 falls, the top of the carrier plate 210 is continuously subjected to the pressure of the elastic component, so the limit block 720 falls to make the carrier plate 210 fall, thereby controlling the lifting and lowering of one of the carrier plates 210, and then driving the two carrier plates 210 to maintain the same height, so that the variables of the elastic deformation of the two springs 4231 are the same, that is, the pressure on the two carrier plates 210 is the same, so that the needle pressure of the two probes 300 remains consistent.

[0036] It is understandable that in some embodiments of the present invention, reference Figure 2 and Figure 3 , a locking member for locking the leveling bolt 710 is provided on the fixing seat 100. Specifically, the locking member includes a locking bolt 810, and a second screw hole is provided on one side of the fixing seat 100, the second screw hole is communicated with the first screw hole, and the second screw hole is threadedly matched with the locking bolt 810. When the leveling bolt 710 is rotated to keep the two probes 300 at the same height, the locking bolt 810 is threadedly matched with the second screw hole so that the locking bolt 810 passes through the second screw hole, thereby tightening the leveling bolt 710, so as to reduce the vibration generated when the probe 300 is in operation and cause the leveling bolt 710 to rotate, thereby ensuring the stability of the two probes 300 to keep the same height.

[0037] The implementation principle of the present application is: when the probe 300 tests the chip, it is first necessary to apply needle pressure to the two probes 300, and the needle pressure of the two probes 300 needs to be kept consistent. By adjusting the threaded cooperation between the nut 422 and the screw 421, the adjusting nut 422 is lowered to squeeze the spring 4231 to produce elastic deformation, so that the elastic reset force at the bottom of the spring 4231 drives the carrier plate 210 to descend to increase the needle pressure of the probe 300. In the process of needle pressure adjustment, it is considered that the distance between the adjusting nut 422 and the carrier plate 210 is controlled to make the adjustment amount of the two adjusting nuts 422 tend to be consistent.

[0038] If the two supporting plates 210 are at the same height after the elastic component applies pressure to the supporting plates 210 , the needle pressures of the two probes 300 are equal;

[0039] If the heights of the two supporting plates 210 are inconsistent, the leveling bolt 710 cooperates with the thread of the first screw hole, and when the leveling bolt 710 rises, the limit block 720 drives the supporting plate 210 to rise; when the leveling bolt 710 falls, the top of the supporting plate 210 is continuously subjected to the pressure of the elastic component, so the limit block 720 falls to make the supporting plate 210 fall, thereby controlling the lifting and lowering of one of the supporting plates 210, and then driving the two supporting plates 210 to maintain the same height, so that the variables of the elastic deformation of the two springs 4231 are the same, that is, the pressure on the two supporting plates 210 is the same, so that the needle pressure of the two probes 300 is kept consistent. At this point, the problem that it is difficult to keep the heights of the two probes 300 consistent, which leads to inaccurate test results, is solved.

[0040] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A probe adjustment device, characterized in that: include: Fixed seat (100); Two bearing members, the bearing members are arranged on the fixing seat (100), and the bearing members are elastically arranged; Two probes (300), the two probes (300) being arranged on the two carriers in a one-to-one correspondence, and the two probes (300) can abut against the same chip pin; A needle pressure regulating mechanism, the needle pressure regulating mechanism comprising a connecting plate (410) and two elastic components, one end of the connecting plate (410) is fixedly connected to the fixing seat (100), and the other end extends to the bottom of the supporting member, the two elastic components are arranged on the connecting plate (410), the two elastic components correspond to the two supporting members one by one, and the elastic components can continuously provide elastic force for the top of the supporting member; A leveling component is movably arranged on the fixing seat (100), and the leveling component can drive one of the bearing members to lift.

2. The probe adjustment device according to claim 1, characterized in that: The support member comprises a support plate (210) and a spring sheet (220), one end of the spring sheet (220) is fixedly connected to the fixing seat (100), and the other end is connected to the support plate (210), the probe (300) is arranged at one end of the support plate (210) away from the spring sheet (220), and the spring sheet (220) can generate elastic deformation to make the support plate (210) rise and fall.

3. The probe adjustment device according to claim 2, characterized in that: The carrier board (210) is a PCB board, and the PCB board is electrically connected to the probe (300).

4. The probe adjustment device according to claim 2, characterized in that: The elastic component comprises a screw rod (421), an adjusting nut (422) and an elastic member; a position avoidance hole (424) is provided through the support plate (210); the position avoidance hole (424) is aligned with the connecting plate (410); one end of the screw rod (421) is fixedly connected to the connecting plate (410), and the other end vertically passes through the position avoidance hole (424); the adjusting nut (422) is threadedly matched with the screw rod (421); and the elastic member is arranged between the adjusting nut (422) and the support plate (210).

5. The probe adjustment device according to claim 4, characterized in that: The elastic member comprises a spring (4231), wherein the spring (4231) is sleeved outside the screw rod (421), one end of the spring (4231) abuts against the adjusting nut (422), and the other end abuts against the supporting plate (210).

6. The probe adjustment device according to claim 4, characterized in that: The top thread of the screw rod (421) is matched with a limit nut (500).

7. The probe adjustment device according to claim 2, characterized in that: The leveling assembly includes a leveling bolt (710) and a limit block (720); a first screw hole is formed through the top of the fixing seat (100); the leveling bolt (710) is threadedly engaged with the first screw hole; a through hole (730) is formed on the supporting plate (210); the through hole (730) is aligned with the first screw hole; the bottom end of the leveling bolt (710) passes through the through hole (730); and the limit block (720) is fixedly sleeved on the end of the leveling bolt (710).

8. The probe adjustment device according to claim 7, characterized in that: The fixing seat (100) is provided with a locking piece for locking the leveling bolt (710).

9. The probe adjustment device according to claim 8, characterized in that: The locking member comprises a locking bolt (810), a second screw hole is opened on one side of the fixing seat (100), the second screw hole is connected to the first screw hole, and the second screw hole is threadedly matched with the locking bolt (810) to be able to tighten the leveling bolt (710).

10. The probe adjustment device according to claim 3, characterized in that: The connecting plate (410) is provided with a conductive part (600). Before the probe (300) tests the chip, the top of the conductive part (600) abuts against the carrier plate (210) and is energized when abutting against the carrier plate (210). When the probe (300) abuts against the chip pin, the conductive part (600) is detached from the carrier plate (210) so that the conductive part (600) is de-energized.