Equipment for preparing silane from trichlorosilane

Abstract

The utility model provides equipment for preparing silane from trichlorosilane, which comprises a reaction tank, a catalyst tube is arranged in the middle of the top of the reaction tank, and a fan for blowing air into the reaction tank is arranged on the inner wall of one side of the catalyst tube; the insulation pad is located at the bottom of the inner wall of the reaction tank and provided with an electric heater for heating, and a wire of the electric heater penetrates through the insulation pad and a wire through hole in the bottom of the reaction tank to be connected with an external power source; the two gas inlet pipes are positioned at the left end of the reaction tank and are symmetrically arranged up and down, and an exhaust pipe is arranged at the right end of the reaction tank. According to the utility model, a catalyst can be efficiently and quickly added into a mixed gas of trichlorosilane gas and hydrogen, and the mixed gas can be quickly and uniformly mixed and heated to a specified temperature. The equipment provides a stable and efficient platform for chemical reaction, and is beneficial to improving the production efficiency and the product quality.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical equipment, in particular to equipment for preparing silane from trichlorosilane. Background Art

[0002] With the rapid development of the electronics, semiconductor and photovoltaic industries, the demand for silane as a key raw material gas is growing. Among many domestic and foreign companies, most use the disproportionation method, namely the UCC process, to prepare silane using trichlorosilane.

[0003] In the UCC process, trichlorosilane undergoes a heterogeneous reaction under the action of a catalyst and disproportionates to produce dichlorosilane. Subsequently, dichlorosilane undergoes a heterogeneous reaction again and disproportionates to produce silane. The chemical reactions involved in this process are as follows:

[0004] 2SiHCl3 → SiH2Cl2 + SiCl4

[0005] 2SiH2Cl2→ SiH4 + SiHCl3

[0006] However, the two-step reaction from trichlorosilane to silane in the UCC process is a reversible disproportionation reaction, so the reaction conversion rate of the product is relatively low. This not only affects the production efficiency, but also increases the production cost. In the process of preparing silane, it is a key step for the mixed gas of trichlorosilane gas and hydrogen to pass through a high-temperature catalyst bed. However, the existing technical means often find it difficult to efficiently and quickly add a catalyst to the mixed gas of trichlorosilane gas and hydrogen and mix them quickly and evenly during the processing process, and it is also difficult to heat the mixed gas to a specified temperature. Therefore, in order to solve the above problems, a device for preparing silane from trichlorosilane is proposed. Utility Model Content

[0007] In order to solve the above problems, the utility model designs a device which can quickly add a catalyst into a mixed gas of trichlorosilane gas and hydrogen, quickly mix the mixed gas and heat the mixed gas to a specified temperature.

[0008] A device for preparing silane from trichlorosilane, comprising: a reaction tank, a catalyst tube is arranged in the middle of the top of the reaction tank, and a fan is arranged on the inner wall of one side of the catalyst tube to blow air into the reaction tank;

[0009] An insulating pad is located at the bottom of the inner wall of the reaction tank, an electric heater for heating is installed on the insulating pad, and the wires of the electric heater pass through the insulating pad and the wire through hole at the bottom of the reaction tank to connect with an external power supply;

[0010] Two air inlet pipes are located at the left end of the reaction tank and are symmetrically arranged up and down and do not interfere with each other. An exhaust pipe is arranged at the right end of the reaction tank.

[0011] In this technical solution, trichlorosilane gas and hydrogen are introduced into the reaction tank through different air inlet pipes, and the catalyst is introduced from the catalyst tube at the top. The fan drives the air flow to blow the mixed gas in the reaction tank evenly, and the electric heater heats the mixed gas in the tube. The insulating pad isolates the electric heater from the reaction tank, reducing heat transfer and conduction, reducing energy loss, and improving energy utilization efficiency.

[0012] In order to ensure the sealing of the entire equipment, the reaction tank, air intake pipe, exhaust pipe and catalyst tube are all made of stainless steel. The air intake pipe, exhaust pipe and catalyst tube are tightly connected to the reaction tank by welding to form a sealed whole.

[0013] As a further preferred embodiment of the present technical solution, the bottom of the reaction tank is fixedly connected to the support frame by screws, and the support frame is made of hard PVC plastic material.

[0014] In this technical solution, the hard PVC plastic has a low thermal conductivity, has good thermal insulation properties, and can maintain its original properties and shape under high or low temperatures for a long time.

[0015] As a further preferred embodiment of the present technical solution, a valve for opening and closing the exhaust pipe is installed on the exhaust pipe.

[0016] As a further preferred embodiment of the present technical solution, the insulating pad is made of ceramic material.

[0017] In this technical solution, ceramic material insulation pads can withstand the invasion of high-temperature gases, liquids and solid media, showing excellent temperature resistance, ensuring stable operation in extreme temperature environments. Secondly, ceramic material insulation pads have the ability to resist acids, alkalis, salts and other chemicals, and can effectively resist corrosion and acid-base erosion, maintain their stable performance and extend their service life. In addition, ceramic material insulation pads have good chemical stability and are not easily corroded by chemical substances, ensuring stable operation in various chemical environments. Ceramic material insulation pads can also effectively reduce heat transfer and conduction, reduce energy loss, improve energy utilization efficiency, and provide more stable support for equipment operation.

[0018] As a further preferred embodiment of the present technical solution, the electric heater is made of nickel-chromium alloy.

[0019] In this technical solution, the nickel-chromium alloy electric heater is an efficient and reliable heating device that can quickly heat air or liquid to the required temperature. It is made of high-temperature alloy materials and can withstand high temperature and high pressure environments, so it has a long service life. In addition, the nickel-chromium alloy electric heater adopts a rated power design, which can effectively utilize electrical energy and has a high thermal efficiency.

[0020] Since the nickel-chromium alloy electric heater is small in size, easy to install, and does not require a large area of ​​space, it is suitable for various small spaces. At the same time, it adopts hot and cold cycle technology, can work normally in complex environments, and is not easy to damage.

[0021] The technical effects of the utility model are:

[0022] The present application specially arranges a catalyst tube on the top of the reaction tank. This design enables the catalyst to be fed into the reaction tank together with trichlorosilane gas and hydrogen. Such a layout ensures that the catalyst can quickly contact the mixed gas at the beginning of the reaction, thereby starting the chemical reaction.

[0023] In order to ensure that the gas in the reaction tank is evenly mixed, a fan is installed on the inner wall of the catalyst tube. It drives the air flow so that the gas in the reaction tank can be fully mixed. This even mixing not only helps to improve the efficiency of the reaction, but also ensures the stability of the reaction.

[0024] In order to accurately control the reaction temperature, an electric heater made of nickel-chromium alloy is used in the equipment. This electric heater has efficient and stable heating performance and can quickly heat the temperature inside the reaction tank to the specified temperature.

[0025] In summary, the equipment for preparing silane from trichlorosilane achieves an efficient, rapid and stable chemical reaction process through the design of the top catalyst tube, fan-driven mixing technology and temperature control of the nickel-chromium alloy electric heater. It not only improves production efficiency, but also provides a strong guarantee for obtaining high-quality products. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a front view of a device for preparing silane from trichlorosilane in the utility model;

[0027] Figure 2 This is a cross-sectional view of a device for preparing silane from trichlorosilane in the utility model;

[0028] In the figure,

[0029] 1. Reactor, 2. Inlet pipe, 3. Exhaust pipe, 4. Catalyst tube, 5. Support frame, 6. Electric heater, 7. Fan, 8. Insulation pad, 9. Valve. DETAILED DESCRIPTION

[0030] Combine the following Figure 1-2 The embodiments of the present invention will be described in detail.

[0031] Please refer to Figure 1-2, a device for preparing silane from trichlorosilane, comprising: a reaction tank 1, a catalyst tube 4 is arranged in the middle of the top of the reaction tank 1, and a fan 7 for blowing air into the reaction tank is arranged on the inner wall of one side of the catalyst tube 4;

[0032] An insulating pad 8 made of ceramic material is located at the bottom of the inner wall of the reaction tank 1, and an electric heater 6 made of nickel-chromium alloy material is installed on the insulating pad 8. The wires of the electric heater 6 pass through the insulating pad 8 and the wire through hole at the bottom of the reaction tank 1 to connect with an external power supply;

[0033] Two air inlet pipes 2 are located at the left end of the reaction tank 1 and are symmetrically arranged up and down and do not interfere with each other. An exhaust pipe 3 is arranged at the right end of the reaction tank 1, and a valve 9 is installed on the exhaust pipe 3.

[0034] The bottom of the reaction tank 1 is fixedly connected to the support frame 5 by screws, and the support frame 5 is made of hard PVC plastic material.

[0035] The reaction tank 1, the air intake pipe 2, the exhaust pipe 3 and the catalyst tube 4 are all made of stainless steel. The air intake pipe 2, the exhaust pipe 3 and the catalyst tube 4 are tightly connected to the reaction tank by welding to form a sealed whole.

[0036] Working principle: When using the equipment, first, the operator feeds trichlorosilane gas and hydrogen into the reaction tank 1 from different inlet pipes 2. The required amount of these two gases has been determined by a precise metering device before entering the reaction tank 1. At the same time, the catalyst is fed into the reaction tank 1 from the catalyst tube 4 to ensure the smooth progress of the reaction.

[0037] Secondly, in order to ensure that the mixed gas is evenly distributed in the reaction tank, the fan 7 is turned on to drive the air flow to evenly blow the mixed gas in the reaction tank 1. This not only helps to improve the efficiency of the reaction, but also ensures the stability of the reaction.

[0038] Finally, the electric heater 6 is turned on to heat the mixed gas to increase the reaction speed and shorten the reaction time. When the reaction is finished, the operator opens the valve 9 to discharge the reaction gas in the reaction tank 1 from the exhaust pipe 3 and enter the reaction vessel in the next step.

[0039] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in the field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

Claims

1. A device for preparing silane from trichlorosilane, characterized in that: include: A reaction tank (1), wherein a catalyst tube (4) is provided in the middle of the top of the reaction tank (1), and a fan (7) for blowing air into the interior of the reaction tank is provided on the inner wall of one side of the catalyst tube (4); An insulating pad (8) is located at the bottom of the inner wall of the reaction tank (1), an electric heater (6) for heating is installed on the insulating pad (8), and the electric wire of the electric heater (6) passes through the insulating pad (8) and the wire through hole at the bottom of the reaction tank (1) to be connected to an external power source; Two air inlet pipes (2) are located at the left end of the reaction tank (1) and are symmetrically arranged up and down so as not to interfere with each other. An exhaust pipe (3) is provided at the right end of the reaction tank (1).

2. The device for preparing silane from trichlorosilane according to claim 1, characterized in that: The bottom of the reaction tank (1) is fixedly connected to the support frame (5) by means of screws, and the support frame (5) is made of hard PVC plastic material.

3. The equipment for preparing silane from trichlorosilane according to claim 1, characterized in that: The reaction tank (1), the air intake pipe (2), the exhaust pipe (3) and the catalyst tube (4) are all made of stainless steel; the air intake pipe (2), the exhaust pipe (3) and the catalyst tube (4) are tightly connected to the reaction tank by welding to form a sealed whole.

4. The equipment for preparing silane from trichlorosilane according to claim 1, characterized in that: The exhaust pipe (3) is provided with a valve for opening and closing the exhaust pipe.

5. The equipment for preparing silane from trichlorosilane according to claim 1, characterized in that: The insulating pad (8) is made of ceramic material.

6. The equipment for preparing silane from trichlorosilane according to claim 1, characterized in that: The electric heater (6) is made of nickel-chromium alloy.

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