Feature size electron microscope conveying system

Abstract

The utility model discloses a characteristic size electron microscope conveying system, and relates to the field of microscope conveying devices. The characteristic size electron microscope transmission system comprises a microscope main body and an observation head at the bottom end, wherein a transmission unit is arranged at the bottom end of the microscope main body. According to the characteristic size electron microscope conveying system, the limiting plate is arranged on one side of the top end of the conveying unit, so that a wafer needing to be conveyed can be limited, the conveyed wafer can be located under the observation head, the situation that in the shooting process, the wafer deviates, and the situation that wafer shooting detection is affected is avoided, and the service life of the wafer is prolonged. And meanwhile, through cooperation of a bidirectional screw rod and a driving part, limiting plates on the two sides can be adjusted according to the sizes of the wafers, the effect of limiting the wafers of different sizes can be achieved, meanwhile, a limiting unit can be detached conveniently, the conveying unit can convey different objects, and normal use of the conveying unit is not affected.

Description

Technical Field

[0001] The utility model relates to the technical field of microscope transmission, in particular to a characteristic size electron microscope transmission system. Background Art

[0002] After the wafer is processed, it is necessary to inspect the surface of the wafer, which requires the use of a microscope. The wafer semiconductor microscope is used to detect the microscopic morphology distribution of the wafer surface and the defects of the wafer, find out the problems on the wafer surface and eliminate them, and is an important detection tool;

[0003] In order to improve the efficiency of wafer inspection, the wafer is generally transported through a conveyor, and the wafer is transported to the bottom of a microscope, and the transported wafer is photographed and inspected through the microscope;

[0004] During the wafer transmission and inspection process, it is necessary to ensure that the wafer is always located directly below the microscope. During the transmission process, the wafer is loaded onto the top of the conveyor belt. Without positioning the wafer loading, the transmitted wafer is easily offset. It is impossible to ensure that the transmitted wafer is always directly below the microscope, which in turn affects the microscope's shooting of the transmitted wafer, thereby reducing the possibility of errors in wafer inspection. In view of the shortcomings of the existing technology, we propose a feature size electron microscope transmission system to solve the above problems. Utility Model Content

[0005] In view of the deficiencies of the prior art, the utility model provides a characteristic size electron microscope transmission system, which solves the problem of reducing the error prone to wafer detection.

[0006] To achieve the above objectives, the utility model is implemented through the following technical solutions: a characteristic size electron microscope transmission system, including a microscope body and an observation head at the bottom, a transmission unit is arranged at the bottom of the microscope body, a limiting unit is arranged on one side of the top of the transmission unit, and the limiting unit includes;

[0007] Limiting plates, which are located on both sides of the top of the limiting unit;

[0008] An auxiliary plate, which is located at the top of the limiting plate, and has the function of assisting wafer unloading;

[0009] A bidirectional screw is provided on one side of the limit plates on both sides, and the limit plates are connected to the bidirectional screw. The bidirectional screw rotates to drive the limit plates on both sides to approach each other, and the inner walls of the limit plates on both sides are in contact with the outer wall of the chip.

[0010] Preferably, both side peripheral walls of the bidirectional screw are slidably connected to driving members, and one side outer wall of the driving member is fixedly connected to a connecting rod.

[0011] Preferably, the outer walls of the connecting rods are fixedly connected to one end of the limiting plate, and the auxiliary plate is fixedly mounted on the top end surface of the limiting plate.

[0012] Preferably, one end of the bidirectional screw is fixedly connected to a rotating member.

[0013] Preferably, the transmission unit comprises:

[0014] A workbench, which is located directly below the observation head;

[0015] The conveyor belt is installed on the top of the workbench, and a mounting frame is fixedly installed on one side of the top of the workbench.

[0016] Preferably, the bidirectional screw is rotatably connected to the interior of the installation frame, and the rotating member is located on an outer wall at one end of the installation frame.

[0017] Preferably, both end outer walls of the installation frame are fixedly connected with connecting plates, and the top ends of the connecting plates are provided with positioning pieces.

[0018] Preferably, the bottom end of the positioning member passes through the connecting plate, and the positioning member is inserted into the interior of the workbench.

[0019] The utility model discloses a characteristic size electron microscope transmission system, which has the following beneficial effects: the characteristic size electron microscope transmission system can limit the wafer to be transmitted by arranging a limit plate on one side of the top of the transmission unit, so that the transmitted wafer can be directly under the observation head, avoiding the wafer from being offset during the shooting process, which affects the shooting and detection of the wafer. At the same time, the cooperation between the bidirectional screw and the driving part can adjust the limit plates on both sides according to the size of the wafer, and can limit wafers of different sizes. At the same time, it is easy to disassemble the limit unit, so that the transmission unit can transmit different objects without affecting the normal use of the transmission unit. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0022] Figure 2 This is a schematic diagram of the main structure of the microscope of the utility model;

[0023] Figure 3 This is a schematic diagram of the connection structure between the limit plate and the installation frame of the utility model;

[0024] Figure 4 This is a schematic diagram of the explosion structure of the connecting plate and the workbench of the utility model;

[0025] Figure 5 It is a schematic diagram of the exploded structure of the bidirectional screw and the installation frame of the utility model.

[0026] In the figure: 1. microscope body; 101. observation head; 2. transmission unit; 201. workbench; 202. conveyor belt; 3. limit unit; 301. limit plate; 302. auxiliary plate; 303. mounting frame; 3031. bidirectional screw; 3032. driving member; 3033. connecting rod; 3034. rotating member; 304. connecting plate; 3041. positioning member. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model is described clearly and completely. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] The embodiment of the present application provides a characteristic size electron microscope transmission system, thereby reducing the problem of easy errors in wafer detection, and achieving the ability to limit the wafer and avoid wafer deviation.

[0029] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0030] The utility model embodiment discloses a characteristic size electron microscope transmission system.

[0031] According to the attached Figure 1-5 As shown, it includes a microscope body 1 and an observation head 101 at the bottom. A transmission unit 2 is arranged at the bottom of the microscope body 1. A limiting unit 3 is arranged on one side of the top of the transmission unit 2. The limiting unit 3 includes;

[0032] Limiting plates 301, which are located on both sides of the top of the limiting unit 3;

[0033] The auxiliary plate 302 is located at the top of the limiting plate 301, and the auxiliary plate 302 has the function of assisting the unloading of wafers; when in use, the conveying unit 2 is started, and the wafer to be photographed is limited and loaded to the top of the conveyor belt 202 through the limiting unit 3, so that the conveyor belt 202 conveys the wafer, and the moving wafer is recognized and photographed by the microscope body 1 at the top, and then the pattern on the wafer can be photographed through the microscope observation head 101, and the defects on the wafer surface can be photographed and detected through external equipment.

[0034] A bidirectional screw 3031 is provided on one side of the limit plates 301 on both sides, and the limit plates 301 are connected to the bidirectional screw 3031. The bidirectional screw 3031 rotates to drive the limit plates 301 on both sides to approach each other. The inner walls of the limit plates 301 on both sides are in contact with the outer wall of the wafer. When limiting the wafer for loading, the limit plates 301 on both sides are adjusted by the bidirectional screw 3031 so that the inner wall of the limit plate 301 can match the outer wall of the wafer, so that the wafer can be limited and the transferred wafer is located directly below the observation head 101, which is convenient for shooting the pattern on the wafer.

[0035] The outer peripheral walls on both sides of the bidirectional screw 3031 are slidably connected with a driving member 3032, and a connecting rod 3033 is fixedly connected to the outer wall of one side of the driving member 3032. The outer walls of the connecting rod 3033 are fixedly connected to one end of the limit plate 301. The auxiliary plate 302 is fixedly installed on the top end surface of the limit plate 301. The wafer is unloaded through the top of the auxiliary plate 302. At this time, the wafer can be unloaded along the limit plates 301 on both sides to the top of the conveyor belt 202 for transmission. The observation head 101 corresponds to the position of the limit plates 301 on both sides after installation, and the observation head 101 is located in the middle position of the limit plates 301 on both sides.

[0036] One end of the bidirectional screw 3031 is fixedly connected to a rotating member 3034. The transmission unit 2 includes:

[0037] A workbench 201, which is located directly below the observation head 101;

[0038] The conveyor belt 202 is installed on the top of the workbench 201. A mounting frame 303 is fixedly installed on one side of the top of the workbench 201. By rotating the rotating member 3034, the bidirectional screw 3031 drives the driving members 3032 on both sides to approach each other, and then the limit plates 301 on both sides can be adjusted. The limit plates 301 can be adjusted according to the size of the wafer to meet the function of limiting the wafers of different sizes.

[0039] The bidirectional screw 3031 is rotatably connected to the inside of the installation frame 303, and the rotating member 3034 is located on the outer wall of one end of the installation frame 303. After use, the limiting unit 3 can be removed as a whole, so that the transmission unit 2 can transmit different objects without affecting the normal use of the transmission unit 2.

[0040] The outer walls at both ends of the installation frame 303 are fixedly connected with a connecting plate 304, and a positioning piece 3041 is set at the top of the connecting plate 304. The positioning piece 3041 is inserted between the connecting plate 304 and the top of the workbench 201 to install the limit unit 3. The bottom end of the positioning piece 3041 passes through the connecting plate 304, and the positioning piece 3041 is inserted into the inside of the workbench 201.

[0041] In summary, compared with the prior art, the present invention has the following beneficial effects: by setting a limit plate 301 on one side of the top of the conveying unit 2, the wafer to be conveyed can be limited, so that the conveyed wafer can be directly under the observation head 101, avoiding the wafer from being offset during the shooting process, which affects the shooting and detection of the wafer. At the same time, the cooperation between the bidirectional screw 3031 and the driving member 3032 can adjust the limit plates 301 on both sides according to the size of the wafer, so as to limit wafers of different sizes. At the same time, it is easy to disassemble the limit unit 3, so that the conveying unit 2 can convey different objects without affecting the normal use of the conveying unit 2.

[0042] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A characteristic size electron microscope transmission system, comprising a microscope body (1) and an observation head (101) at the bottom, wherein a transmission unit (2) is arranged at the bottom of the microscope body (1), characterized in that: A limiting unit (3) is provided on one side of the top end of the transmission unit (2), and the limiting unit (3) comprises: Limiting plates (301), which are located on both sides of the top of the limiting unit (3); An auxiliary plate (302) is located at the top of the limiting plate (301), and the auxiliary plate (302) has the function of assisting wafer unloading; A bidirectional screw (3031) is provided on one side of the limit plates (301) on both sides, and the limit plates (301) are connected to the bidirectional screw (3031). The bidirectional screw (3031) rotates to drive the limit plates (301) on both sides to approach each other, and the inner walls of the limit plates (301) on both sides are in contact with the outer wall of the wafer.

2. A characteristic size electron microscope transmission system according to claim 1, characterized in that: The outer peripheral walls on both sides of the bidirectional screw rod (3031) are slidably connected to the driving member (3032), and the outer wall on one side of the driving member (3032) is fixedly connected to the connecting rod (3033).

3. A characteristic size electron microscope transmission system according to claim 2, characterized in that: The outer wall of the connecting rod (3033) is fixedly connected to one end of the limiting plate (301), and the auxiliary plate (302) is fixedly mounted on the top end surface of the limiting plate (301).

4. A characteristic size electron microscope transmission system according to claim 3, characterized in that: One end of the bidirectional screw rod (3031) is fixedly connected to a rotating member (3034).

5. A characteristic size electron microscope transmission system according to claim 1, characterized in that: The transmission unit (2) comprises: A workbench (201), which is located directly below the observation head (101); A conveyor belt (202) is installed on the top of a workbench (201), and a mounting frame (303) is fixedly installed on one side of the top of the workbench (201).

6. A characteristic size electron microscope transmission system according to claim 4, characterized in that: The bidirectional screw (3031) is rotatably connected to the interior of the installation frame (303), and the rotating member (3034) is located on an outer wall at one end of the installation frame (303).

7. A characteristic size electron microscope transmission system according to claim 6, characterized in that: The outer walls at both ends of the installation frame (303) are fixedly connected to connecting plates (304), and a positioning piece (3041) is provided at the top of the connecting plate (304).

8. A characteristic size electron microscope transmission system according to claim 7, characterized in that: The bottom end of the positioning member (3041) passes through the connecting plate (304), and the positioning member (3041) is plugged into the interior of the workbench (201).

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