Device for reducing hydrogen content on surface of particle silicon

Abstract

The utility model provides a device for reducing the surface hydrogen content of particle silicon, which comprises a feeding device, a dehydrogenation device and a discharging device, one end of the dehydrogenation device is connected with the feeding device, the other end of the dehydrogenation device is connected with the discharging device, and the dehydrogenation device can drive the particle silicon to roll, so that the hydrogen-removed particle silicon enters the discharging device. The device has the beneficial effects that the hydrogen removal efficiency of the surface of the particle silicon is improved, the hydrogen removal effect is ensured, the pollution of the particle silicon is avoided, the survival rate of single crystals is improved, the quality of the single crystals is ensured, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of removing hydrogen from the surface of granular silicon, and in particular relates to a device for reducing the hydrogen content on the surface of granular silicon. Background Art

[0002] Granular silicon has gradually become the raw material for pulling single crystals due to its low energy consumption and low cost. However, due to its preparation process, hydrogen will remain on the surface of granular silicon. In the process of pulling single crystals, hydrogen-silicon bonds will break and cause silicon jumping, which can easily cause abnormal single crystal formation and low single crystal survival rate.

[0003] Chinese patent publication CN116002690A provides a method and device for removing hydrogen atoms from the surface of granular silicon, but has the following problems:

[0004] (1) The granular silicon is stacked in a flat manner, and it is impossible to avoid overlap between the granular silicon. During the laser irradiation process, some granular silicon cannot be irradiated, resulting in a low hydrogen removal rate, which affects the hydrogen removal effect.

[0005] (2) The patent does not mention the requirements for the processing environment and processing tooling, which may easily cause silicon material contamination and affect its use. Utility Model Content

[0006] In order to solve the above technical problems, the utility model provides a device for reducing the hydrogen content on the surface of granular silicon, which effectively solves the problem of low hydrogen removal efficiency on the surface of granular silicon and easy pollution of granular silicon, and overcomes the shortcomings of the prior art.

[0007] The technical solution adopted by the utility model is: a device for reducing the hydrogen content on the surface of granular silicon, including a feeding device, a dehydrogenation device and a discharging device, one end of the dehydrogenation device is connected to the feeding device, and the other end is connected to the discharging device, and the dehydrogenation device can drive the granular silicon to roll, so that the granular silicon after dehydrogenation enters the discharging device.

[0008] Furthermore, the dehydrogenation device includes a laser dehydrogenation device and a heating dehydrogenation device, one end of the laser dehydrogenation device is connected to the feeding device, and the other end is connected to one end of the heating dehydrogenation device, and the end of the heating dehydrogenation device away from the laser dehydrogenation device is connected to the discharging device.

[0009] Further, the laser dehydrogenation device comprises:

[0010] A first track, for placing the granular silicon, one end of which is connected to the feeding device, and the other end of which is connected to the heating dehydrogenation device, wherein the end connected to the feeding device is higher than the end connected to the heating dehydrogenation device;

[0011] A first vibration motor is arranged on the first track;

[0012] The laser transmitter is arranged along the first track.

[0013] Furthermore, the laser emitters are arranged in a ring shape at equal intervals along the first track.

[0014] Further, the heating dehydrogenation device comprises:

[0015] The second track is used to place the granular silicon, one end of which is connected to the laser dehydrogenation device, and the other end of which is connected to the discharge device, and the end connected to the laser dehydrogenation device is higher than the end connected to the discharge device;

[0016] a second vibration motor, disposed on the second track;

[0017] A heater is disposed along the second track.

[0018] Furthermore, the laser dehydrogenation device is provided with an outlet valve, and the heating dehydrogenation device is provided with an inlet valve, which are used to introduce circulating inert gas into the laser dehydrogenation device and the heating dehydrogenation device.

[0019] Furthermore, a water cooling device is provided at the connection end between the laser dehydrogenation device and the heating dehydrogenation device.

[0020] Furthermore, the feed inlet of the laser dehydrogenation device is provided with a first sealing valve, and the discharge port of the heating dehydrogenation device is provided with a second sealing valve, which are used to seal the dehydrogenation device.

[0021] Furthermore, observation windows are provided on the tops of the feeding device and the discharging device.

[0022] Furthermore, an isolation layer is provided inside the feeding device and the discharging device.

[0023] The advantages and positive effects of the utility model are: due to the adoption of the above technical scheme, the dehydrogenation efficiency of the granular silicon surface is improved, the dehydrogenation effect is guaranteed, the pollution of the granular silicon is avoided, the single crystal survival rate is improved, the single crystal quality is guaranteed, and the production efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of a device for reducing the hydrogen content on the surface of granular silicon according to an embodiment of the utility model.

[0025] Figure 2 It is a schematic diagram of the internal structure of a dehydrogenation device for reducing the hydrogen content on the surface of granular silicon in an embodiment of the utility model.

[0026] Figure 3 This is a first track cross-sectional view of a device for reducing the hydrogen content on the surface of granular silicon according to an embodiment of the utility model.

[0027] Figure 4 It is a top view of the laying tracks of the first track and the second track of a device for reducing the hydrogen content on the surface of granular silicon according to an embodiment of the utility model.

[0028] Figure 5 This is a ring-shaped arrangement diagram of laser emitters of a device for reducing the hydrogen content on the surface of granular silicon in an embodiment of the utility model.

[0029] Figure 6 This is a second track cross-sectional view of a device for reducing the hydrogen content on the surface of granular silicon according to an embodiment of the utility model.

[0030] Figure 7 It is a side view of a water cooling device for reducing the hydrogen content on the surface of granular silicon according to an embodiment of the utility model.

[0031] In the figure:

[0032] 10. Feeding device 11. Feeding bin 12. Feeding port

[0033] 13. First observation window 14. Flow control valve 15. Third sealing valve

[0034] 16. third vibration motor 20. laser dehydrogenation device 21. first cavity

[0035] 22. First track 23. First vibration motor 24. Laser transmitter

[0036] 25, first sealing valve 30, heating dehydrogenation device 31, second chamber

[0037] 32. Second track 33. Second vibration motor 34. Heater

[0038] 35. Second sealing valve 40. Discharging device 41. Discharging box

[0039] 42. Material taking port 43. Second observation window 44. Fourth sealing valve

[0040] 50. Water cooling device 51. Water inlet 52. Water outlet

[0041] 60, first pipeline 70, second pipeline 80, intake valve

[0042] 90. Exhaust valve DETAILED DESCRIPTION

[0043] The embodiment of the utility model provides a device for reducing the hydrogen content on the surface of granular silicon. The embodiment of the utility model is described below in conjunction with the accompanying drawings.

[0044] In the description of the embodiments of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "set" and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood by specific circumstances.

[0045] like Figure 1 As shown, the present invention provides a device for reducing the hydrogen content on the surface of granular silicon, comprising a feeding device 10, a dehydrogenation device and a discharging device 40, wherein one end of the dehydrogenation device is connected to the feeding device 10, and the other end is connected to the discharging device 40. Granular silicon enters the dehydrogenation device from the feeding device 10, and the dehydrogenation device removes hydrogen on the surface of the granular silicon. During the dehydrogenation process, the dehydrogenation device can drive the granular silicon to roll, so that the dehydrogenated granular silicon enters the discharging device 40.

[0046] Preferably, the dehydrogenation device includes a laser dehydrogenation device 20 and a heating dehydrogenation device 30. One end of the laser dehydrogenation device 20 is connected to the feeding device 10, and the other end is connected to one end of the heating dehydrogenation device 30. The end of the heating dehydrogenation device 30 away from the laser dehydrogenation device 20 is connected to the discharging device 40. The granular silicon first enters the laser dehydrogenation device 20 from the feeding device 10, and is dehydrogenated for the first time by laser irradiation, and then enters the heating dehydrogenation device 30, and is dehydrogenated for the second time by high-temperature heating. The dehydrogenation efficiency is improved by the two dehydrogenations.

[0047] Specifically, Figure 2As shown, the laser dehydrogenation device 20 includes a first track 22, a first vibration motor 23 and a laser emitter 24. One end of the first track 22 is connected to the feeding device 10, and the other end is connected to the heating dehydrogenation device 30. The connection end with the feeding device 10 is higher than the connection end with the heating dehydrogenation device 30. The first vibration motor 23 is arranged on the first track 22, driving the first track 22 to vibrate, so that the granular silicon can roll from the connection end of the first track 22 and the feeding device 10 to the connection end of the first track 22 and the heating dehydrogenation device 30. There is no specific restriction on the installation position of the first vibration motor 23, which can be set on the side of the first track 22 or at the bottom of the first track 22. There is no restriction on the number of first vibration motors 23. A laser emitter 24 is installed along the first track 22, and the laser emitter 24 emits a laser to irradiate the surface of the granular silicon for dehydrogenation. The granular silicon rolls and irradiates the dehydrogenation, which is conducive to laser irradiation of each surface of the granular silicon, avoiding overlapping of the granular silicon and affecting the dehydrogenation efficiency. In this embodiment, the laser dehydrogenation device 20 includes a first cavity 21 with openings at both ends, and a first track 22 is fixedly installed along the length of the first cavity 21. The first track 22 is tilted, and the end of the first track 22 close to the feeding device 10 is higher than the end of the first track 22 close to the heating dehydrogenation device 30. The cross section of the first track 22 is set to be a groove shape with an upper opening, such as Figure 3 As shown. First vibration motors 23 are installed on the outside of both sides of the first track 22, and the first vibration motors 23 are arranged at equal intervals along the length of the first track 22. In order to prevent the first track 22 from blocking the laser and affecting the laser irradiation of the granular silicon, the first track 22 is set to a transparent quartz material. The laser can irradiate the granular silicon through the quartz material. The laser emitter 24 is set along the length of the first track 22 to irradiate the granular silicon.

[0048] Preferably, Figure 4 As shown, in order to ensure the irradiation time of the granular silicon and the dehydrogenation effect, the laying track of the first track 22 can be set as a curve. Compared with setting the laying track of the first track 22 as a straight line, the curved first track 22 allows the granular silicon to roll longer in the laser dehydrogenation device 20, and the laser irradiation time is longer, which is more conducive to the dehydrogenation of the granular silicon surface. In this embodiment, the laying track of the first track 22 is set to be Z-shaped.

[0049] Preferably, Figure 5 As shown, in order to make the laser irradiation more uniform, the laser emitters 24 are arranged in a ring shape at equal intervals along the first track 22. The laser emitters 24 are arranged at the top, bottom and side of the first cavity 21, forming a ring-shaped laser emitter group on the cross section of the first cavity 21. Along the first track 22, the ring-shaped laser emitter group is arranged at equal intervals on the inner wall of the first cavity 21.

[0050] Specifically, Figure 2As shown, the heating dehydrogenation device 30 includes a second track 32, a second vibration motor 33 and a heater 34. One end of the second track 32 is connected to the laser dehydrogenation device 20, and the other end is connected to the discharge device 40. The connection end with the laser dehydrogenation device 20 is higher than the connection end with the discharge device 40. The second vibration motor 33 is arranged on the second track 32, driving the second track 32 to vibrate, so that the granular silicon can roll from the connection end of the second track 32 and the laser dehydrogenation device 20 to the connection end of the second track 32 and the discharge device 40. There is no specific restriction on the installation position of the second vibration motor 33, which can be set on the side of the second track 32 or at the bottom of the second track 32. There is no restriction on the number of second vibration motors 33. The heater 34 is arranged along the second guide rail to heat the granular silicon. In this embodiment, the heating and dehydrogenation device 30 includes a second cavity 31 with openings at both ends, and a second rail 32 is fixedly installed along the length of the second cavity 31. One end of the second rail is connected to the end of the first rail away from the feeding device 10, and the other end of the second rail is connected to the discharging device 40. The second rail 32 is arranged at an angle, and the end of the second rail 32 close to the first rail 22 is higher than the end of the second rail 32 close to the discharging device 40. Second vibration motors 33 are installed on the outside of both sides of the second rail 32, and the second vibration motors 33 are arranged at equal intervals along the length of the second rail 32. The fixing method, laying track and material of the second rail 32 are the same as those of the first rail 22, and are not repeated here. Heaters 34, specifically graphite heaters 34, are fixedly installed at the top and bottom of the second cavity 31 corresponding to the second rail 32 to heat and dehydrogenate the granular silicon.

[0051] Preferably, Figure 6 As shown, the second track 32 is configured as a tubular structure. The graphite heater 34 at the top will generate impurities during the heating process. The second track 32 is configured as a tubular structure to prevent impurities from entering the second track 32 and reduce the contamination of the granular silicon. In this embodiment, the second track 32 is configured as a pipe with a quadrilateral cross section.

[0052] Preferably, a temperature controller is installed in the heating dehydrogenation device 30 to monitor the temperature in the heating dehydrogenation device 30. In this embodiment, a temperature controller is installed on the side wall of the second cavity 31, which is not shown in the figure.

[0053] Preferably, in order to prevent the granular silicon from reacting with oxygen at high temperature during the dehydrogenation process and to ensure the cleanliness of the granular silicon, a high-purity inert gas is introduced into the dehydrogenation device. The type of inert gas is not limited and may be argon or helium. Figure 1As shown, in this embodiment, an inlet valve 80 is installed on the second cavity 31 of the heating dehydrogenation device 30, and an outlet valve 90 is installed on the first cavity 21 of the laser dehydrogenation device 20, and argon gas is introduced into the heating dehydrogenation device 30 and the laser dehydrogenation device 20. The argon gas protects the granular silicon, and at the same time, the granular silicon in the laser dehydrogenation device 20 can be preheated through the flow of gas. The outlet valve 90 is connected to the external dust removal and filtering device through a pipeline. The specific form of the dust removal and filtering device is not limited, and it can be a bag dust removal or an electrostatic dust removal, which is not shown in the figure. Pressure gauges can be set on the inlet valve 80 and the outlet valve 90 to monitor the pressure inside the dehydrogenation device, which is not shown in the figure.

[0054] Preferably, Figure 1 and Figure 7 As shown, since the laser dehydrogenation device 20 is connected to the heating dehydrogenation device 30, in order to avoid the excessive temperature in the heating dehydrogenation device 30 and affect the laser emitter 24, a water cooling device 50 is provided at the connection end of the laser dehydrogenation device 20 and the heating dehydrogenation device 30. In this embodiment, a water cooling jacket is fixedly installed at the connection between the first cavity 21 and the second cavity 31. The water cooling jacket is a closed annular cavity, and a water inlet 51 and a water outlet 52 are provided on the annular cavity. When the gas enters the laser dehydrogenation device 20 from the heating dehydrogenation device 30 through the annular cavity, the circulating cooling water is injected into the annular cavity to cool the gas flowing through, thereby reducing the influence of the high-temperature gas on the laser emitter 24.

[0055] Preferably, Figure 1 As shown, in order to achieve continuous production, the feed device 10 and the discharge device 40 are detachably connected to the dehydrogenation device and can be separated and replaced. The feed port of the laser dehydrogenation device 20 is provided with a first sealing valve 25, and the discharge port of the heating dehydrogenation device 30 is provided with a second sealing valve 35. When replacing the feed device 10 and the discharge device 40, close the first sealing valve 25 and the second sealing valve 35 to seal the entire dehydrogenation device to reduce pollution to the granular silicon.

[0056] Specifically, the feeding device 10 includes a funnel-shaped feeding bin 11, a feeding port 12 is provided at the top of the feeding bin 11, and a bin door is installed at the feeding port 12. A first observation window 13 is installed on the bin door for observing the feeding of granular silicon. In order to facilitate feeding, a third vibration motor 16 is installed on the outside of the bottom bin wall of the feeding bin 11. A flow control valve 14 is installed on the discharge port of the feeding bin 11, which can be a ball valve to control the feeding speed. A third sealing valve 15 is installed at the bottom of the flow control valve 14. In this embodiment, in order to facilitate connection, a first pipeline 60 is connected to the discharge port of the feeding bin 11, and the third sealing valve 15 is detachably connected to the first pipeline 60. One end of the first pipeline 60 away from the feeding bin 11 is connected to the laser dehydrogenation device 20. Granular silicon can enter the first track 22 of the laser dehydrogenation device 20 through the first pipeline 60.

[0057] Specifically, the discharge device 40 includes a discharge box 41, a material taking port 42 is provided at the top of the discharge box 41, a box door is installed at the material taking port 42, and a second observation window 43 is installed on the box door for observing the collection height of the granular silicon. When the granular silicon in the discharge box 41 reaches the set collection height, a vacuum extraction device is used to extract the granular material at the material taking port 42. A second pipeline 70 is provided between the heating dehydrogenation device 30 and the discharge box 41. A fourth sealing valve 44 is provided on the feed port of the discharge device 40, and the fourth sealing valve 44 is detachably connected to the second pipeline 70.

[0058] Preferably, since the feed bin 11 and the discharge box 41 are usually made of metal, in order to reduce the contamination of the granular silicon by the metal, an isolation layer is fixedly installed on the inner wall of the feed bin 11 and the discharge box 41, which is not shown in the figure, and the thickness of the isolation layer is not limited. In this embodiment, an isolation layer is bonded and fixed on the inner wall of the feed bin 11 and the discharge box 41, specifically a 3 mm thick polyurethane skin.

[0059] The laser dehydrogenation device 20 and the heating dehydrogenation device 30 are sealed and connected. The first sealing valve 25, the second sealing valve 35, the third sealing valve 15 and the fourth sealing valve 44 can be set to isolate the dehydrogenation device from the feeding device 10 and the discharging device 40. By replacing the feeding device 10 and the discharging device 40, continuous production can be achieved. In the actual working process, the entire device is under negative pressure. When the first sealing valve 25, the second sealing valve 35, the third sealing valve 15 and the fourth sealing valve 44 are closed, the feeding device 10 and the discharging device 40 are isolated and separated from the dehydrogenation device. The feeding device 10 and the discharging device 40 are under negative pressure. At this time, the warehouse door or the box door cannot be opened. Therefore, an air inlet valve 80 is set on the feeding bin 11 of the feeding device 10 and the discharging box 41 of the discharging device 40, which is used to inflate the feeding device 10 and the discharging device 40 to fill the feeding device 10 and the discharging device 40 to normal pressure, so as to facilitate the opening of the warehouse door or the box door.

[0060] When the replaced feed device 10 and discharge device 40 are connected, in order to prevent the internal gas of the feed device 10 and the discharge device 40 from contaminating the granular silicon, an outlet valve 90 is set on the feed bin 11 and the discharge box 41. Before connecting the feed device 10 and the discharge device 40 to the dehydrogenation device, it is necessary to evacuate the feed bin 11 and the discharge box 41, and fill in inert gas through the inlet valve 80 to keep the feed device 10 and the discharge device 40 at the same pressure as the dehydrogenation device, and then open the first sealing valve 25, the second sealing valve 35, the third sealing valve 15 and the fourth sealing valve 44 to connect the entire device. In order to facilitate pressure monitoring, a pressure gauge can be set on the inlet valve 80 and the outlet valve 90, which is not shown in the figure.

[0061] The advantages and positive effects of the utility model are:

[0062] 1. When the laser dehydrogenation device is performing laser irradiation, the granular silicon is in a rolling state, which is convenient for irradiating various positions of the granular silicon, avoiding insufficient irradiation and improving the dehydrogenation efficiency.

[0063] 2. By setting up a heating dehydrogenation device, the granular silicon is heated at high temperature for secondary dehydrogenation, which further improves the dehydrogenation efficiency, ensures the dehydrogenation effect, improves the single crystal survival rate, and ensures the single crystal quality.

[0064] 3. The feeding device, dehydrogenation device and discharging device form a closed device, and inert gas is introduced as a protective gas to avoid the reaction of granular silicon with oxygen at high temperature and ensure the cleanliness of granular silicon.

[0065] 4. By setting the first sealing valve, the second sealing valve, the third sealing valve and the fourth sealing valve, the air inlet device and the material discharge device can be replaced to achieve connected feeding and continuous material removal, thereby achieving continuous production and improving production efficiency.

[0066] The above is a detailed description of the embodiments of the utility model, but the contents are only preferred embodiments of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. A device for reducing the hydrogen content on the surface of granular silicon, characterized in that: It comprises a feeding device, a dehydrogenation device and a discharging device. One end of the dehydrogenation device is connected to the feeding device, and the other end is connected to the discharging device. The dehydrogenation device can drive the granular silicon to roll, so that the granular silicon after dehydrogenation enters the discharging device.

2. The device for reducing the hydrogen content on the surface of granular silicon according to claim 1, characterized in that: The dehydrogenation device comprises a laser dehydrogenation device and a heating dehydrogenation device. One end of the laser dehydrogenation device is connected to the feeding device, and the other end is connected to one end of the heating dehydrogenation device. The end of the heating dehydrogenation device away from the laser dehydrogenation device is connected to the discharging device.

3. The device for reducing the surface hydrogen content of granular silicon according to claim 2, characterized in that: The laser dehydrogenation device comprises: A first track, for placing the granular silicon, one end of which is connected to the feeding device, and the other end of which is connected to the heating dehydrogenation device, wherein the end connected to the feeding device is higher than the end connected to the heating dehydrogenation device; A first vibration motor is arranged on the first track; The laser transmitter is arranged along the first track.

4. The device for reducing the hydrogen content on the surface of granular silicon according to claim 3, characterized in that: The laser emitters are arranged in a ring shape at equal intervals along the first track.

5. A device for reducing the hydrogen content on the surface of granular silicon according to any one of claims 2 to 4, characterized in that: The heating dehydrogenation device comprises: A second track is used for placing the granular silicon, one end of which is connected to the laser dehydrogenation device, and the other end of which is connected to the discharge device, and the end connected to the laser dehydrogenation device is higher than the end connected to the discharge device; a second vibration motor, disposed on the second track; A heater is disposed along the second track.

6. The device for reducing the hydrogen content on the surface of granular silicon according to claim 5, characterized in that: The laser dehydrogenation device is provided with an outlet valve, and the heating dehydrogenation device is provided with an inlet valve, which are used to introduce circulating inert gas into the laser dehydrogenation device and the heating dehydrogenation device.

7. A device for reducing the hydrogen content on the surface of granular silicon according to any one of claims 2 to 4 and 6, characterized in that: A water cooling device is provided at the connection end between the laser dehydrogenation device and the heating dehydrogenation device.

8. The device for reducing the hydrogen content on the surface of granular silicon according to claim 7, characterized in that: The feed inlet of the laser dehydrogenation device is provided with a first sealing valve, and the discharge outlet of the heating dehydrogenation device is provided with a second sealing valve, which are used to seal the dehydrogenation device.

9. A device for reducing the hydrogen content on the surface of granular silicon according to any one of claims 1-4, 6 and 8, characterized in that: Observation windows are provided on the tops of the feeding device and the discharging device.

10. The device for reducing the hydrogen content on the surface of granular silicon according to claim 9, characterized in that: The feeding device and the discharging device are both provided with an isolation layer.

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