High-voltage probe station

Abstract

The high-voltage probe station comprises a probe plate, a ceramic disc, a vacuum suction cup and an air path switch assembly, the ceramic disc and a circular hole groove arranged in the middle of the probe plate are concentrically arranged, the ceramic disc is provided with the vacuum suction cup, the vacuum suction cup comprises a lower disc body and an upper disc body, the lower disc body is provided with a plurality of vacuum air paths, and the upper disc body is provided with a plurality of vacuum air paths. And adsorption holes which are distributed in a sealing manner are formed in the positions, corresponding to the vacuum air channels, of the upper disc body. Modularized design is adopted, the whole assembly can be detached and replaced, the number of air paths and switches can be conveniently modified according to the size of a machined part, and meanwhile the size of a vacuum cavity groove in the vacuum suction cup is optimized so that the adsorption force of the vacuum suction cup to a sample can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a high-voltage probe station. Background Art

[0002] Probe stations are mainly used in the semiconductor industry, optoelectronics industry, and integrated circuit field. During chip testing, probe stations are usually used to fix samples and place probe holders. The testing process mainly involves observing the chip through a magnifying glass and touching the chip's electrodes with probes to test it. Depending on the product being tested, different probe stations are used. Most probe stations are not equipped with insulating ceramic plates, which is very dangerous when using high voltage electricity. In addition, the probe plates of most probe stations are relatively small in size, which is inconvenient when operating the probe holder. The vacuum suction cup has insufficient suction when fixing larger samples. Utility Model Content

[0003] In order to solve the above problems, the utility model proposes a high-voltage probe station to more accurately solve the above problems.

[0004] The utility model is realized by the following technical solutions:

[0005] The utility model proposes a high-voltage probe station, comprising a probe plate, a ceramic disk, a vacuum suction cup and an air circuit switch assembly, wherein an air circuit switch assembly is arranged on one side of the probe plate, and the air circuit switch assembly is fixed to the probe plate by bolts, a circular hole groove is opened in the middle of the probe plate, the ceramic disk is concentrically arranged with the circular hole groove set in the middle of the probe plate, and the ceramic disk is fixed to the probe plate by insulating bolts, a vacuum suction cup is arranged on the ceramic disk, and the vacuum suction cup is fixed to the ceramic disk by insulating bolts, the vacuum suction cup comprises a lower disk body and an upper disk body, the upper disk body is tightly fitted on the lower disk body, and the upper disk body and the lower disk body are fixed by insulating bolts, a plurality of vacuum air ducts are arranged on the lower disk body, and sealed adsorption holes are arranged on the upper disk body and corresponding to the positions of the vacuum air ducts, each vacuum air duct in the lower disk body is respectively extended with an air pipe interface to one side of the lower disk body, and the air pipe interface is connected to the air circuit switch assembly through a silicone hose.

[0006] Furthermore, the vacuum air passages are arranged and opened according to the required shape of the workpiece, and each vacuum air passage is an independent channel.

[0007] Furthermore, the air circuit switch assembly is composed of independent units whose number of air circuit switches can be replaced and modified. The number of air circuit switches is consistent with the number of vacuum air ducts provided on the lower disk body, and each air circuit switch is connected to the air pipe interface of the corresponding vacuum air duct through a silicone hose.

[0008] Furthermore, a sealing groove is provided at the bottom of the upper disk body and between every two vacuum air passages, and a sealing strip is provided in the sealing groove.

[0009] Furthermore, the bottom surface of the sealing strip is a concave surface of the suction cup, and the concave surface of the suction cup is attracted to the surface of the lower plate body.

[0010] Beneficial effects of the utility model:

[0011] 1. The utility model adopts modular design, and the components can be disassembled and replaced as a whole, which is convenient for modifying the number of gas paths and switches according to the size of the workpiece. At the same time, the size of the vacuum cavity groove inside the vacuum suction cup is optimized to enhance the suction force of the vacuum suction cup on the sample.

[0012] 2. The utility model adds a ceramic plate under the vacuum suction cup, which is safer when using high voltage electricity for testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0014] Figure 2 It is a schematic diagram of the overall three-dimensional structure of the utility model;

[0015] Figure 3 It is a top view of the structure of the utility model;

[0016] Figure 4 for Figure 3 Sectional view at AA in the middle;

[0017] Figure 5 for Figure 4 Enlarged view of point B in the middle.

[0018] In the figure: 1. probe plate; 101. circular hole groove; 2. ceramic plate; 3. vacuum suction cup; 301. lower plate body; 3011. vacuum air channel; 302. upper plate body; 3021. adsorption hole; 303. sealing strip; 3031. suction cup concave surface; 4. air path switch assembly. DETAILED DESCRIPTION

[0019] In order to more clearly and completely illustrate the technical solution of the present invention, the present invention is further described below in conjunction with the accompanying drawings.

[0020] Please refer to Figure 1-Figure 5 The utility model provides a high-voltage probe station, including a probe plate 1, a ceramic plate 2, a vacuum suction cup 3 and an air circuit switch assembly 4, combined with Figure 1 and Figure 2As shown, a circular hole 101 is opened in the middle of the probe plate 1, the ceramic disk 2 is concentrically arranged with the circular hole 101 in the middle of the probe plate 1, and the ceramic disk 2 is fixed to the probe plate 1 by insulating bolts. A vacuum suction cup 3 is provided on the ceramic disk 2, and the vacuum suction cup 3 is fixed to the ceramic disk 2 by insulating bolts. The vacuum suction cup 3 includes a lower disk body 301 and an upper disk body 302, the upper disk body 302 fits tightly on the lower disk body 301, and the upper disk body 302 and the lower disk body 301 are fixed by insulating bolts. A ceramic disk 2 is added under the vacuum suction cup 3, which is safer when testing with high voltage electricity.

[0021] An air circuit switch assembly 4 is provided on one side of the probe plate 1, and the air circuit switch assembly 4 is fixed to the probe plate 1 by bolts. A plurality of vacuum air channels 3011 are provided on the lower disk body 301, and sealed adsorption holes 3021 are arranged on the upper disk body 302 at positions corresponding to the vacuum air channels 3011. Each vacuum air channel 3011 in the lower disk body 301 is respectively extended with an air pipe interface to one side of the lower disk body 301, and the air pipe interface is connected to the air circuit switch assembly 4 through a silicone hose. The air circuit switch assembly 4 is connected to the vacuum pump through the silicone hose, and the vacuum pump is started to make the vacuum suction cup 3 work normally, wherein the air circuit switch assembly 4 is composed of independent units whose number of air circuit switches can be replaced and modified, and the number of air circuit switches is consistent with the number of vacuum air channels 3011 provided on the lower disk body 301, and each air circuit switch is respectively connected to the air pipe interface of the corresponding vacuum air channel 3011 through a silicone hose, and the vacuum air channel 3011 is arranged and opened according to the required shape of the workpiece, and each vacuum air channel 3011 is an independent channel. The gas circuit switch assembly 4 adopts a modular design, and the assembly can be completely disassembled and replaced, which is convenient for modifying the gas circuit and the number of switches according to the size of the workpiece. At the same time, the size of the vacuum cavity groove inside the vacuum suction cup 3 is optimized to enhance the suction force of the vacuum suction cup on the sample.

[0022] Combination Figure 4 and Figure 5 As shown, a sealing groove is opened at the bottom of the upper plate body 302 and between every two vacuum air passages 3011, and a sealing strip 303 is provided in the sealing groove. The bottom surface of the sealing strip 303 is a suction cup concave surface 3031, and the suction cup concave surface 3031 is attracted to the surface of the lower plate body 301 to maintain the independence of the vacuum air passage 3011, thereby avoiding insufficient suction caused by air leakage.

[0023] Of course, the present utility model may have many other implementations. Based on the present implementation, other implementations obtained by ordinary technicians in this field without any creative work are all within the scope of protection of the present utility model.

Claims

1. A high-voltage probe station, comprising a probe plate (1), a ceramic plate (2), a vacuum suction cup (3) and an air circuit switch assembly (4), characterized in that: A gas circuit switch assembly (4) is provided on one side of the probe plate (1), and the gas circuit switch assembly (4) is fixed to the probe plate (1) by bolts. A circular hole groove (101) is provided in the middle of the probe plate (1), and the ceramic plate (2) is concentrically arranged with the circular hole groove (101) provided in the middle of the probe plate (1), and the ceramic plate (2) is fixed to the probe plate (1) by insulating bolts. A vacuum suction cup (3) is provided on the ceramic plate (2), and the vacuum suction cup (3) is fixed to the ceramic plate (2) by insulating bolts. The vacuum suction cup (3) includes a lower plate body (301) and an upper plate body (30 2), the upper plate body (302) is tightly fitted on the lower plate body (301), and the upper plate body (302) and the lower plate body (301) are fixed by insulating bolts, and a plurality of vacuum air ducts (3011) are provided on the lower plate body (301), and sealingly distributed adsorption holes (3021) are arranged on the upper plate body (302) and at positions corresponding to the vacuum air ducts (3011), and each vacuum air duct (3011) in the lower plate body (301) is extended with an air pipe interface to one side of the lower plate body (301), and the air pipe interface is connected to the air circuit switch assembly (4) through a silicone hose.

2. A high voltage probe station according to claim 1, characterized in that: The vacuum air passages (3011) are arranged and opened according to the required shape of the workpiece, and each vacuum air passage (3011) is an independent passage.

3. A high voltage probe station according to claim 1, characterized in that: The air circuit switch assembly (4) is composed of independent units whose number of air circuit switches can be replaced and modified. The number of air circuit switches is consistent with the number of vacuum air ducts (3011) provided on the lower plate (301), and each air circuit switch is connected to the air pipe interface of the corresponding vacuum air duct (3011) through a silicone hose.

4. A high voltage probe station according to claim 1, characterized in that: A sealing groove is provided at the bottom of the upper disk (302) and between every two vacuum air passages (3011), and a sealing rubber strip (303) is provided in the sealing groove.

5. A high voltage probe station according to claim 4, characterized in that: The bottom surface of the sealing rubber strip (303) is a suction cup concave surface (3031), and the suction cup concave surface (3031) is attracted to the surface of the lower plate body (301).

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