Automatic support plate cleaning device and coating equipment

Abstract

The utility model discloses an automatic cleaning device for a support plate and coating equipment. The automatic cleaning device for the carrier plate comprises a detection mechanism, a multi-directional moving mechanism, an air blowing mechanism and a dust collection mechanism, the detection mechanism is used for detecting the position of dirt on the carrier plate in a coating chamber, and the multi-directional moving mechanism is used for being arranged in the coating chamber and connected with the air blowing mechanism; the multidirectional moving machine moves the air blowing mechanism to the position above the dirty position according to the dirty position detected by the detection mechanism, the air blowing mechanism is used for blowing air to a carrier plate in the film coating chamber, and the dust collection mechanism is installed on the film coating chamber and used for sucking dirty in the film coating chamber. According to the automatic cleaning device for the carrier plate, the specific position of dirt is determined after the carrier plate is detected through the detection mechanism, and the dirt cleaning effect of the carrier plate and the cleaning efficiency can be improved in cooperation with cleaning of the air blowing mechanism and the air suction mechanism.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to an automatic cleaning device for a carrier plate and a coating device. Background Art

[0002] During the coating process of solar cell preparation, when the substrate carrying the silicon wafer enters and exits the coating chamber, the silicon wafer is easily adhered to film debris, dust and other dirt, resulting in poor coating of the cell, which greatly reduces the conversion efficiency of the cell. To address the above problems, traditional technology generally detects the location of the dirt and manually opens the machine to clean the substrate by manually wiping the substrate. However, manually wiping the substrate dirty poses a safety hazard and increases the coating process time. Moreover, opening the machine to wipe the substrate will inevitably cause new dirt to fall into it, which may cause secondary pollution to the coating chamber and seriously affect the efficiency of the production line. Utility Model Content

[0003] Based on this, it is necessary to provide an automatic carrier cleaning device. The automatic carrier cleaning device of the utility model can improve the cleaning effect of the dirty carrier and improve the cleaning efficiency, reduce labor costs, and improve the efficiency of the battery cells and the production line.

[0004] An embodiment of the present application provides an automatic cleaning device for a carrier.

[0005] A carrier plate automatic cleaning device comprises a detection mechanism, a multi-directional moving mechanism, a blower mechanism and a dust suction mechanism, wherein the detection mechanism is used to detect a dirty position on the carrier plate in a coating chamber, the multi-directional moving mechanism is used to be arranged in the coating chamber and connected to the blower mechanism, the multi-directional moving mechanism moves the blower mechanism to the dirty position according to the dirty position detected by the detection mechanism, the blower mechanism is used to blow air toward the dirty position of the carrier plate in the coating chamber, and the dust suction mechanism is installed on the coating chamber to absorb the dirt in the coating chamber.

[0006] In some embodiments, the multi-directional moving mechanism includes a first guide rail, a second guide rail vertically slidably connected to the first guide rail, a first driving component and a second driving component, the first guide rail is installed in the coating chamber, the extension direction of the second guide rail is different from the extension direction of the first guide rail, the air blowing mechanism is slidably connected to the second guide rail, the first driving component is connected to the second guide rail to drive the second guide rail to move along the first guide rail, and the second driving component is connected to the air blowing mechanism to drive the dust collection mechanism to move along the second guide rail.

[0007] In some embodiments, the extension direction of the second guide rail is perpendicular to the extension direction of the first guide rail.

[0008] In some embodiments, the number of the first guide rails is at least two, wherein the two first guide rails are arranged opposite to each other and at intervals, a first slide groove is arranged on the first guide rail, and both ends of the second guide rail are slidably connected to the first slide groove via pulleys.

[0009] In some embodiments, a second slide groove is provided on the second guide rail, and the air blowing mechanism is slidably connected in the second slide groove via a pulley.

[0010] In some embodiments, the hair drying mechanism includes a retractable tube and a hair drying head, one end of the retractable tube is slidably connected to the second guide rail, the other end of the retractable tube is connected to the hair drying head, and the retractable tube is externally connected to the hair drying device.

[0011] In some of the embodiments, the blowing mechanism further includes a blowing device, which is connected to the retractable tube, and the blowing device is used for blowing air through the retractable tube and the blowing head.

[0012] In some embodiments, the dust suction mechanism includes a dust suction nozzle and a dust collector. The dust suction nozzle is installed on the inner wall of the coating chamber. The dust collector is used to be arranged outside the coating chamber and connected to the dust suction nozzle. The dust collector is used to collect the dirt collected by the dust suction nozzle.

[0013] In some embodiments, there are multiple dust suction nozzles, and the multiple dust suction nozzles are distributed at intervals on the inner wall of the coating chamber.

[0014] An embodiment of the present application also provides a coating device.

[0015] A coating device comprises a coating chamber and an automatic carrier cleaning device, wherein a detection mechanism of the automatic carrier cleaning device is installed in the coating chamber for detecting the dirty position on the carrier in the coating chamber, the multi-directional movable mechanism is arranged in the coating chamber, and the dust suction mechanism is installed on the inner wall of the coating chamber.

[0016] The above-mentioned automatic carrier cleaning device can improve the cleaning effect of the carrier dirt and improve the cleaning efficiency, reduce labor costs, and improve the efficiency of the battery cells and production lines. The above-mentioned automatic carrier cleaning device detects the dirt position on the carrier in the coating chamber by setting a detection mechanism. According to the detected dirt position, the multi-directional displacement motor moves the air blowing mechanism to the top of the dirt position, and then controls the air blowing mechanism to blow air to the dirty position of the carrier in the coating chamber, so that the dirt at the dirty position of the carrier is blown up, and then controls the dust suction mechanism to absorb the floating dirt in the coating chamber, and completes the cleaning of the carrier dirt in the coating chamber. The cleaning efficiency is high and no manual intervention is required. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without creative work.

[0018] In order to more completely understand the present application and its beneficial effects, the following description will be given in conjunction with the accompanying drawings. In the following description, the same reference numerals represent the same parts.

[0019] FIG1 is a schematic diagram of an automatic cleaning device for a carrier according to an embodiment of the present utility model;

[0020] FIG2 is a partial structural diagram of an automatic carrier cleaning device according to an embodiment of the present utility model;

[0021] FIG3 is a schematic diagram of the air suction mechanism of the automatic cleaning device for a carrier plate according to an embodiment of the present utility model.

[0022] Description of Reference Numerals

[0023] 10. Automatic cleaning device for carrier plate; 100. Multi-directional moving mechanism; 110. First guide rail; 120. Second guide rail; 200. Blowing mechanism; 210. Retractable cylinder; 220. Blowing head; 300. Dust suction mechanism; 310. Dust suction nozzle; 320. Dust collector; 20. Coating chamber; 30. Carrier plate. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0026] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0028] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0030] The embodiment of the present application provides an automatic carrier cleaning device 10 to solve the problem that the conventional technology of manually cleaning the dirty carrier in the coating chamber has certain safety hazards, increases time cost, causes secondary pollution inside the machine, and seriously affects the production line efficiency. The automatic carrier cleaning device 10 will be described below in conjunction with the accompanying drawings.

[0031] The automatic carrier cleaning device 10 provided in the embodiment of the present application is exemplified in FIG1 , which is a schematic diagram of the structure of the automatic carrier cleaning device 10 provided in the embodiment of the present application. The automatic carrier cleaning device 10 of the present application can be used for cleaning dirt on the carrier 30 in the coating chamber 20.

[0032] In order to more clearly illustrate the structure of the automatic carrier cleaning device 10 , the automatic carrier cleaning device 10 will be introduced below with reference to the accompanying drawings.

[0033] For example, please refer to FIG. 1 , which is a schematic diagram of the structure of an automatic cleaning device 10 for a carrier provided in an embodiment of the present application. An automatic cleaning device 10 for a carrier includes a detection mechanism, a multi-directional moving mechanism 100, an air blowing mechanism 200, and a dust suction mechanism 300. The detection mechanism is used to detect the dirty position on the carrier 30 in the coating chamber 20. The multi-directional moving mechanism 100 is arranged in the coating chamber 20 and is connected to the air blowing mechanism 200. The multi-directional moving mechanism 100 moves the air blowing mechanism 200 to the top of the dirty position according to the dirty position detected and identified by the detection mechanism; the air blowing mechanism 200 is used to blow air to the dirty position on the carrier 30; the dust suction mechanism 300 is installed on the coating chamber 20 to absorb the dirt in the coating chamber 20 that is blown into the air by the air blowing structure 200.

[0034] The above-mentioned automatic carrier cleaning device 10 identifies the dirty position on the carrier 30 by setting up a detection mechanism. According to the above-identified dirty position, the multi-directional moving mechanism 100 moves the air blowing mechanism 200 to the top of the dirty position, and then controls the air blowing mechanism 200 to blow air to the dirty position on the carrier 30, so that the dirt at the dirty position is blown up and floats, and then controls the dust suction mechanism 300 to absorb the floating dirt in the coating chamber 20, thereby completing the cleaning of the dirt on the carrier 30 in the coating chamber 20. The coating machine does not need to stop running to complete the cleaning work of the dirt, and the automatic cleaning efficiency is high.

[0035] In some embodiments, the detection mechanism can identify the coordinates of the dirt according to the shape and size of the carrier 30, for example, the carrier 30 is divided into coordinates in two vertical directions, as shown in FIG1, the carrier 30 is divided into coordinates C1 to C6 along the first direction, and the carrier 30 is divided into coordinates R1 to R9 along the second direction. The detection mechanism identifies the specific coordinate position (Cx, Ry) corresponding to the dirt on the carrier 30, and the multi-directional moving mechanism 100 moves the air blowing mechanism 200 to the position corresponding to the dirt according to the coordinate position (Cx, Ry). For example, the detection mechanism can be a visual system, an image acquisition system, etc.

[0036] In some of the embodiments, see FIG. 2 , which is a schematic diagram of a partial structure of an automatic cleaning device 10 for a carrier plate according to an embodiment of the utility model, the multi-directional moving mechanism 100 includes a first guide rail 110, a second guide rail 120, a first driving component, and a second driving component. The first guide rail 110 is installed in the coating chamber 20, and the second guide rail 120 is slidably connected to the first guide rail 110. The extension direction of the second guide rail 120 is different from the extension direction of the first guide rail 110. The blower mechanism 200 is slidably connected to the second guide rail 120. The first driving component is connected to the second guide rail 120 to drive the second guide rail 120 to move along the first guide rail 110. The second driving component is connected to the blower mechanism 200 to drive the dust collection mechanism 300 to move along the second guide rail 120.

[0037] In some embodiments, the extension direction of the second guide rail 120 is perpendicular to the extension direction of the first guide rail 110 .

[0038] In some embodiments, the first driving component and the second driving component can select a driving motor. The first driving component and the second driving component are not shown in the drawings.

[0039] In some embodiments, there are at least two first guide rails 110. The two first guide rails 110 are arranged opposite to each other and spaced apart, and a first slide groove is arranged on the first guide rail 110. Both ends of the second guide rail 120 are respectively slidably arranged in the first slide groove through pulleys. As shown in FIG. 2 , there are two first guide rails 110, and the two first guide rails 110 are arranged opposite to each other at the top of the inner wall of the coating chamber 20.

[0040] In some of the embodiments, a second slide groove is provided on the second guide rail 120, and the hair dryer mechanism 200 is slidably connected in the second slide groove via a pulley.

[0041] In some embodiments, the hair blowing mechanism 200 includes a telescopic cylinder 210 and a hair blowing head 220. One end of the telescopic cylinder 210 is slidably connected to the second guide rail 120. The other end of the telescopic cylinder 210 is connected to the hair blowing head 220, and the telescopic cylinder 210 is externally connected to the hair blowing device. The telescopic cylinder 210 can be extended or retracted to reset, and the telescopic cylinder 210 assists the hair blowing head 220 to descend to a surface closer to the carrier plate 30 to improve the hair blowing effect. Preferably, the telescopic cylinder 210 controls the extension and retraction of the hair blowing head 220 through an expandable and foldable movable part provided inside the telescopic cylinder 210, and through the cooperation of the detection mechanism, the multi-directional moving mechanism 100, and the hair blowing mechanism 200, directional cleaning of dirt at any coordinate position on the carrier plate 30 is achieved.

[0042] In some embodiments, the blower mechanism 200 further includes a blower. The blower is connected to the telescopic tube 210, and is used to blow air through the telescopic tube 210 and the blower head 220. The blower is used to blow away the stolen goods and sundries on the carrier plate 30. The power, wind speed, etc. of the blower can be adjusted according to actual needs.

[0043] In some of the embodiments, the blowing device may be a hair dryer, a blower, etc.

[0044] In some embodiments, referring to FIG. 3 , FIG. 3 is a schematic diagram of the suction mechanism of the automatic carrier cleaning device 10 according to an embodiment of the utility model, and the dust suction mechanism 300 includes a dust suction nozzle 310 and a dust collector 320. The dust suction nozzle 310 is installed on the inner wall of the coating chamber 20. The dust collector 320 is used to be arranged outside the coating chamber 20 and connected to the dust suction nozzle 310, and the dust collector 320 is used to collect the dirt collected by the dust suction nozzle 310. The dust collector 320 can be cleaned regularly as needed.

[0045] In some embodiments, as shown in FIG3 , there are multiple dust suction nozzles 310. The multiple dust suction nozzles 310 are spaced apart and distributed on the inner wall of the coating chamber 20. The multiple dust suction nozzles 310 can quickly absorb dirt in the coating chamber 20 in a short time, and prevent the dirt blown up by the air blowing mechanism 200 from falling on the carrier 30 again under the action of gravity.

[0046] In some embodiments, the automatic carrier cleaning device 10 further includes a control mechanism. The control mechanism is electrically connected to the detection mechanism, the multi-directional moving mechanism 100, the blower mechanism 200, and the dust collecting mechanism 300. Specifically, the control mechanism is electrically connected to the detection mechanism, the first driving component, the second driving component, the blower device, and the dust collector 320.

[0047] In some embodiments, the control mechanism may be a PLC programmable logic controller, and the control mechanism may be configured with a corresponding control program as required.

[0048] An embodiment of the present application also provides a coating device.

[0049] A coating device includes a coating chamber 20 and an automatic carrier cleaning device 10. The detection mechanism of the automatic carrier cleaning device 10 is installed in the coating chamber 20 to identify the dirty position on the carrier 30, the multi-directional moving mechanism 100 is arranged in the coating chamber 20, and the dust suction mechanism 300 is installed on the inner wall of the coating chamber 20.

[0050] In summary, the automatic carrier cleaning device 10 of the present application, through the detection mechanism to determine the specific location of the dirt on the carrier 30, cooperates with the blower mechanism 200 and the dust suction mechanism 300, can improve the cleaning effect and efficiency of the dirt on the carrier 30, realize automatic and efficient cleaning of the dirt on the carrier 30, and thereby improve the yield of the battery cell.

[0051] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0052] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A carrier plate automatic cleaning device, characterized in that: The invention comprises a detection mechanism, a multi-directional moving mechanism (100), a blower mechanism (200) and a dust suction mechanism (300); the detection mechanism is used to detect the dirty position on the carrier plate (30) in the coating chamber (20); the multi-directional moving mechanism (100) is arranged in the coating chamber (20) and connected to the blower mechanism (200); the multi-directional moving mechanism moves the blower mechanism (200) to the dirty position according to the dirty position identified by the detection mechanism; the blower mechanism (200) is used to blow air toward the dirt on the carrier plate (30); and the dust suction mechanism (300) is installed on the coating chamber (20) to suck the dirt in the coating chamber (20).

2. The automatic cleaning device for carrier according to claim 1, characterized in that: The multi-directional moving mechanism (100) comprises a first guide rail (110), a second guide rail (120) vertically slidably connected to the first guide rail (110), a first driving component and a second driving component, wherein the first driving component is connected to the second guide rail (120) for driving the second guide rail (120) to move along the first guide rail (110), and the second driving component is connected to the hair blowing mechanism (200) for driving the dust collecting mechanism (300) to move along the second guide rail (120).

3. The automatic cleaning device for carrier according to claim 2, characterized in that: At least two of the first guide rails (110) disposed at intervals are also provided with a first sliding groove, and both ends of the second guide rail (120) are respectively slidably connected in the first sliding groove via pulleys.

4. The automatic carrier cleaning device according to claim 2, characterized in that: The second guide rail (120) is also provided with a second slide groove, and the hair dryer mechanism (200) is slidably connected in the second slide groove via a pulley.

5. The automatic carrier cleaning device according to any one of claims 2 to 4, characterized in that: The hair blowing mechanism (200) comprises a retractable tube (210) externally connected to the hair blowing device and a hair blowing head (220), one end of the retractable tube (210) is slidably connected to the second guide rail (120), and the other end of the retractable tube (210) is connected to the hair blowing head (220).

6. The automatic carrier cleaning device according to claim 5, characterized in that: The hair blowing mechanism (200) further comprises a blowing device, wherein the blowing device is connected to the telescopic tube (210) and blows air through the telescopic tube (210) and the blowing head (220).

7. The automatic carrier cleaning device according to any one of claims 1 to 4 and 6, characterized in that: The dust collection mechanism (300) comprises a dust collection nozzle (310) installed on the inner wall of the coating chamber (20), and a dust collector (320), wherein the dust collector (320) is arranged outside the coating chamber (20) and connected to the dust collection nozzle (310) for collecting dirt collected by the dust collection nozzle (310).

8. The automatic carrier cleaning device according to claim 7, characterized in that: There are a plurality of the dust suction nozzles (310), and the plurality of dust suction nozzles (310) are distributed at intervals on the inner wall of the coating chamber (20).

9. A coating device, characterized in that: It comprises a coating chamber (20) and the automatic carrier cleaning device according to any one of claims 1 to 8.

10. The coating device according to claim 9, characterized in that: The detection mechanism of the automatic carrier cleaning device is installed in the coating chamber to detect the location of dirt on the carrier (30) in the coating chamber (20), the multi-directional moving mechanism (100) of the automatic carrier cleaning device (10) is arranged in the coating chamber, the blowing mechanism (200) can blow air toward the dirt on the carrier (30) in the coating chamber, and the dust suction mechanism (300) is installed on the inner wall of the coating chamber.

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