Cleaning structure for winding coating film

Abstract

The utility model relates to the technical field, and discloses a cleaning structure for winding coating, which comprises a mounting plate, a film releasing mechanism, a coating conveying roller and a film collecting mechanism, the film releasing mechanism, the coating conveying roller and the film collecting mechanism are rotatably mounted on the mounting plate, and the film releasing mechanism, the coating conveying roller and the film collecting mechanism are in transmission connection through a coiled material to be coated. By means of the design of the radio frequency rotating cathodes, the surface of a film is cleaned in the film placing process, film cleaning on a film coating conveying roller is not needed, the target loading number can be increased, the radio frequency rotating cathodes are rotary magnetic control targets, closed magnetic fields are arranged in the radio frequency rotating cathodes, and the radio frequency rotating cathodes are not prone to being damaged. The surface of the film can be effectively cleaned, attachment of floating dust is greatly reduced, then the adhesive force of the film is improved, energy is convenient to control, a large amount of heat is not generated during film coating, the appearance of the film is not affected, and the energy utilization rate is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a cleaning structure for winding coating. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense on the surface of the plated object (metal, semiconductor or insulator) to form a thin film. It uses physical or chemical methods and absorbs a series of new technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetron to provide a new process for thin film preparation for scientific research and actual production.

[0003] During the vacuum coating process, the dust on the surface of the coil to be coated needs to be removed.

[0004] At present, vacuum coating cleaning technology mainly bombards the workpiece. The electrode generates plasma to bombard high voltage, medium frequency, radio frequency, etc. to clean the surface of the coil to be coated. However, the current cleaning method is difficult to control the energy during cleaning, and a large amount of heat will be generated, which not only affects the appearance of the coil (thermal deformation), but also reduces the energy utilization rate. The cleaning effect on the surface of the coil is not good, and there is still floating dust remaining, which reduces the adhesion of the film. Therefore, we need to propose a cleaning structure for coil coating. Utility Model Content

[0005] The purpose of the utility model is to provide a cleaning structure for wound coating. Through the design of radio frequency rotating cathode, the film surface is cleaned during the film release process. There is no need to clean the film on the coating conveyor roller, which can increase the number of targets. The radio frequency rotating cathode is a rotating magnetron target with a closed magnetic field, which can effectively clean the film surface and greatly reduce the adhesion of floating dust, thereby improving the adhesion of the film. It is also easy to control energy, does not generate a lot of heat during coating, does not affect the appearance of the film, and improves energy utilization, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a cleaning structure for winding coating, comprising a mounting plate, a film-releasing mechanism rotatably mounted on the mounting plate, a coating conveying roller and a film-collecting mechanism, wherein the film-releasing mechanism, the coating conveying roller and the film-collecting mechanism are connected by a transmission of the to-be-coated coil, the film-releasing mechanism comprising a film-releasing cylinder, a tensioning guide shaft and two radio frequency rotating cathodes, the tensioning guide shaft being located between the two radio frequency rotating cathodes, a hollow fixed shaft being connected to the mounting plate, the radio frequency rotating cathode being rotatably mounted on the fixed shaft, a magnetic core capable of generating a closed magnetic field being installed inside the fixed shaft, a cooling chamber for storing cooling water being provided on the side wall of the radio frequency rotating cathode, and an intermediate frequency rotating target and a column arc target being also installed on the mounting plate.

[0007] Preferably, the film collecting mechanism is located at the upper end of the film releasing mechanism, and the film collecting mechanism comprises a rotatably arranged film collecting cylinder and two tensioning guide shafts.

[0008] Preferably, the magnetic core is limited inside the fixed shaft by a first end plate, one end of the first end plate is connected to a limiting column, a side wall at one end of the fixed shaft is provided with a limiting groove, and the limiting column is slidably inserted inside the limiting groove.

[0009] Preferably, one end of the magnetic core abuts against the side of the first end plate, a slider is connected to the side of the magnetic core, a sliding groove is provided on the inner wall of the fixed shaft, and the slider is slidably installed inside the sliding groove.

[0010] Preferably, one end of the RF rotating cathode is threadedly connected to a second end plate, one end of the RF rotating cathode is installed with a threaded ring, one end of the second end plate is connected to a threaded sleeve, and the threaded ring is threadedly connected inside the threaded sleeve.

[0011] Preferably, one end of the second end plate is connected to a limiting assembly that abuts against the first end plate, and the limiting assembly comprises an elastic telescopic rod, one end of which is rotatably connected to a contact plate.

[0012] Preferably, a plurality of the intermediate frequency rotating targets and the cylindrical arc targets are provided, and the intermediate frequency rotating targets and the cylindrical arc targets are arranged alternately.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] The utility model adopts the design of radio frequency rotating cathode to clean the film surface during the film placing process. There is no need to clean the film on the coating conveyor roller, which can increase the number of installed targets. The radio frequency rotating cathode is a rotating magnetron target with a closed magnetic field, which can effectively clean the film surface and greatly reduce the attachment of floating dust, thereby improving the adhesion of the film. It is also easy to control energy, does not generate a lot of heat during coating, does not affect the appearance of the film, and improves energy utilization. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the fixed shaft and the radio frequency rotating cathode of the utility model;

[0017] Figure 3 It is an exploded view of the fixed shaft and the radio frequency rotating cathode of the utility model;

[0018] Figure 4 It is a structural schematic diagram of the magnetic core of the utility model.

[0019] In the figure: 1. Mounting plate; 2. Coating conveyor roller; 3. Film placing mechanism; 31. Film placing cylinder; 32. RF rotating cathode; 33. Tensioning guide shaft one; 4. Film collecting mechanism; 41. Film collecting cylinder; 42. Tensioning guide shaft two; 5. Medium frequency rotating target; 6. Column arc target; 7. Fixed shaft; 71. Limiting groove; 72. Slide groove; 73. First end plate; 74. Limiting column; 8. Magnetic core; 81. Slider; 9. Cooling chamber; 10. Threaded ring; 11. Second end plate; 12. Threaded sleeve; 13. Limiting assembly. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1-4 The utility model provides a technical solution: a cleaning structure for winding coating, comprising a mounting plate 1, a film-releasing mechanism 3 rotatably mounted on the mounting plate 1, a coating conveying roller 2 and a film-collecting mechanism 4, wherein the film-releasing mechanism 3, the coating conveying roller 2 and the film-collecting mechanism 4 are connected by a transmission of a coil to be coated, and the film-releasing mechanism 3 is driven to rotate, and the movement of the coil is realized under the transmission of the coating conveying roller 2 and the film-collecting mechanism 4, the film-releasing mechanism 3 comprises a film-releasing cylinder 31, a tensioning guide shaft 33 and two radio frequency rotating cathodes 32, the rotating film-releasing cylinder 31 can be driven by a motor, and the tensioning guide shaft 33 is located between the two radio frequency rotating cathodes 32, and radio frequency (RF) magnetron sputtering is adopted to generate a self-bias effect on the target material, and the breakdown voltage and the discharge voltage are significantly reduced.

[0022] A hollow fixed shaft 7 is connected to the mounting plate 1, and a radio frequency rotating cathode 32 is rotatably mounted on the fixed shaft 7. A magnetic core 8 capable of generating a closed magnetic field is mounted inside the fixed shaft 7. Under the action of the magnetic field and the electric field, the metal target material (i.e., the coil) is impacted or bombarded against the metal surface at high speed to achieve the effect of surface cleaning and preparation of high-precision thin films. A cooling chamber 9 for storing cooling water is provided on the side wall of the radio frequency rotating cathode 32, which can realize cooling during the coating process, reduce heat transfer to the film, and reduce the impact on the coating process. A medium frequency rotating target 5 and a column arc target 6 are also mounted on the mounting plate 1.

[0023] The film collecting mechanism 4 is located at the upper end of the film releasing mechanism 3, and comprises a rotatably arranged film collecting cylinder 41 and two tensioning guide shafts 42. The tensioning guide shaft 1 33 and the tensioning guide shaft 2 42 play a role in tensioning the film during movement.

[0024] The magnetic core 8 is limited inside the fixed shaft 7 by the first end plate 73 . One end of the first end plate 73 is connected to a limiting post 74 . A limiting groove 71 is provided on one end side wall of the fixed shaft 7 . The limiting post 74 is slidably inserted inside the limiting groove 71 .

[0025] One end of the magnetic core 8 abuts against the side of the first end plate 73 to prevent the magnetic core 8 from moving. A slider 81 is connected to the side of the magnetic core 8. A slide groove 72 is provided on the inner wall of the fixed shaft 7. The slider 81 is slidably installed inside the slide groove 72 to facilitate the installation of the magnetic core 8.

[0026] One end of the RF rotating cathode 32 is threadedly connected to the second end plate 11, one end of the RF rotating cathode 32 is installed with a threaded ring 10, one end of the second end plate 11 is connected to a threaded sleeve 12, and the threaded ring 10 is threadedly connected to the inside of the threaded sleeve 12 to seal the magnetic core 8.

[0027] Optionally, a magnetic fluid seal may be used between one end of the RF rotating cathode 32 and the second end plate 11 .

[0028] One end of the second end plate 11 is connected to a limit assembly 13 that abuts on the first end plate 73. The limit assembly 13 includes an elastic telescopic rod, one end of which is rotatably connected to a resistance plate. The elastic telescopic rod includes a telescopic connecting rod. The outer portion of the connecting rod is provided with a spring connected between the resistance plate and the second end plate 11, and the resistance plate abuts on the first end plate 73.

[0029] A plurality of intermediate frequency rotating targets 5 and a plurality of cylindrical arc targets 6 are provided, and the intermediate frequency rotating targets 5 and the cylindrical arc targets 6 are arranged alternately.

[0030] When in use, turn on the RF power supply (frequency is 13.56MHz or 40.68MHz, not shown in the figure), and drive the film collecting cylinder 41 to rotate through the motor (not shown in the figure), and the film collecting cylinder 41 rotates to drive the coil to be coated to move through the coating conveyor roller 2 and the film unwinding mechanism 3. During this process, the magnetic core 8 is fixed, the RF rotating cathode 32 rotates slowly, and the magnetic core 8 generates a closed magnetic field. Under the action of the magnetic field and the electric field, the metal target (i.e., the coil) is hit or bombarded against the metal surface at high speed to achieve the effect of surface cleaning and preparation of high-precision thin films. This coil coating method can clean the film during the coating process (before the coil reaches the coating conveyor roller 2), reduce the adhesion of floating dust on the film surface, and thereby improve the adhesion of the film.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cleaning structure for coiled coating, comprising a mounting plate (1), a film placing mechanism (3) rotatably mounted on the mounting plate (1), a coating conveying roller (2) and a film collecting mechanism (4), wherein the film placing mechanism (3), the coating conveying roller (2) and the film collecting mechanism (4) are connected by a transmission of a coiled material to be coated, and characterized in that: The film placing mechanism (3) comprises a film placing cylinder (31), a tensioning guide shaft (33) and two radio frequency rotating cathodes (32); the tensioning guide shaft (33) is located between the two radio frequency rotating cathodes (32); a hollow fixed shaft (7) is connected to the mounting plate (1); the radio frequency rotating cathode (32) is rotatably mounted on the fixed shaft (7); a magnetic core (8) capable of generating a closed magnetic field is mounted inside the fixed shaft (7); a cooling chamber (9) for storing cooling water is provided on the side wall of the radio frequency rotating cathode (32); and a medium frequency rotating target (5) and a column arc target (6) are also mounted on the mounting plate (1).

2. A cleaning structure for roll-to-roll coating according to claim 1, characterized in that: The film collecting mechanism (4) is located at the upper end of the film releasing mechanism (3), and the film collecting mechanism (4) comprises a rotatably arranged film collecting cylinder (41) and two tensioning guide shafts (42).

3. The cleaning structure for roll-to-roll coating according to claim 1, characterized in that: The magnetic core (8) is limited inside the fixed shaft (7) by a first end plate (73); one end of the first end plate (73) is connected to a limiting column (74); a limiting groove (71) is provided on a side wall at one end of the fixed shaft (7); and the limiting column (74) is slidably inserted inside the limiting groove (71).

4. A cleaning structure for roll-to-roll coating according to claim 3, characterized in that: One end of the magnetic core (8) abuts against the side of the first end plate (73), a slider (81) is connected to the side of the magnetic core (8), a slide groove (72) is provided on the inner wall of the fixed shaft (7), and the slider (81) is slidably installed inside the slide groove (72).

5. A cleaning structure for roll-to-roll coating according to claim 4, characterized in that: One end of the radio frequency rotating cathode (32) is threadedly connected to a second end plate (11), one end of the radio frequency rotating cathode (32) is installed with a threaded ring (10), one end of the second end plate (11) is connected to a threaded sleeve (12), and the threaded ring (10) is threadedly connected to the inside of the threaded sleeve (12).

6. The cleaning structure for roll-to-roll coating according to claim 5, characterized in that: One end of the second end plate (11) is connected to a limit assembly (13) that abuts against the first end plate (73), and the limit assembly (13) comprises an elastic telescopic rod, one end of which is rotatably connected to a contact plate.

7. The cleaning structure for roll-to-roll coating according to claim 1, characterized in that: A plurality of the intermediate frequency rotating targets (5) and the cylindrical arc targets (6) are provided, and the intermediate frequency rotating targets (5) and the cylindrical arc targets (6) are arranged in an alternating manner.

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