Metal mask foil and manufacturing device thereof

Abstract

According to the metal mask plate foil and the manufacturing device thereof, the metal mask plate foil comprises at least two sub-foils, the sub-foils are arranged side by side in the width direction, and the connected long edges of every two adjacent sub-foils are welded into a whole; the target width T of the metal mask plate foil and the average value t of the initial widths of the sub-foils meet the condition that t is larger than or equal to T / n and smaller than T, and n is the number of the sub-foils forming the metal mask plate foil. According to the technical scheme, the raw material foil with the conventional width is spliced and manufactured into the metal mask foil with the larger width in a welding mode, and the situation that large-width metal masks produced in traditional modes such as continuous casting and rolling are limited by equipment, and the input cost is huge is avoided; the technical bottleneck that the edge of the raw material is easy to have poor plate shape due to widening of the width of the raw material is solved, and low-cost and high-quality production of the large-width metal mask plate foil is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of metal mask plates, in particular to a metal mask plate foil material and a manufacturing device thereof. Background Art

[0002] The metal mask is an important tool in the preparation process of AMOLED display panels. It is mainly used to limit the deposition area of ​​film materials during the evaporation of organic materials. According to the type of deposited film, the metal mask can be divided into three categories: precision metal mask (FMM), common metal mask (CMM) and packaging layer metal mask (CVD Mask). The main body of CMM and CVD Mask consists of two parts: the metal mask frame and the full-plate mask mesh. The combination method is as follows: Figure 1 As shown, the mesh surface is made through exposure, etching and other steps to form openings at fixed positions on a whole metal raw material, so as to achieve the above-mentioned function of limiting material deposition.

[0003] The whole sheet of metal raw material currently used in mass production of G6H generation lines is usually about 1m wide. With the rise of large-generation lines (G8.5 and above) AMOLED production lines, the demand for larger metal masks has emerged, which requires the relevant industry to prepare wider metal raw materials. However, due to the size limitations of existing raw material rolling equipment, the preparation of whole large-size metal raw materials cannot be matched, and the investment amount for adding special wide-width rolling equipment is extremely high. In addition, the widening of the raw material width will make it easier for the edges of the raw material to have poor plate shape (commonly known as "edge waves").

[0004] The above factors undoubtedly limit the pace of the AMOLED industry's development towards higher-generation lines. How to achieve the preparation of large-size metal raw materials with a low-cost solution has become an urgent problem to be solved. Summary of the invention

[0005] In order to solve or improve the technical problems existing in the prior art, the first aspect of the present disclosure provides a metal mask foil material, which can at least be used to make a metal mask used in the production of an OLED panel. The metal mask foil material includes:

[0006] At least two sub-foils, each sub-foil is arranged in parallel along the width direction, and the long sides of the two adjacent sub-foils are welded together;

[0007] The target width T of the metal mask foil and the average value t of the initial widths of the sub-foils satisfy the following relationship: T / n≤t<T, where n is the number of sub-foils constituting the metal mask foil.

[0008] The metal mask foil in the above scheme adopts multiple sub-foils with smaller widths to be welded together to form a large-width foil with a target width, avoiding the technical bottlenecks of producing large-width metal masks by traditional methods such as continuous casting and rolling, which are limited by huge investment costs of equipment, and the widening of the width of the raw material will lead to poor plate shape at the edge of the raw material. It realizes low-cost and high-quality production of large-width metal mask foil.

[0009] As one of the optional solutions, the target width T of the metal mask foil is ≥1m, and the thickness is 0.02mm-0.5mm.

[0010] As one of the optional solutions, the metal mask foil is formed into a sheet, a strip or a coil.

[0011] A second aspect of the present disclosure provides a device for manufacturing a metal mask foil as described in the first aspect, comprising:

[0012] A welding platform having a gap in the middle thereof for avoiding air during welding; and

[0013] Alignment mechanisms, multiple alignment mechanisms are arranged on both sides of the welding platform, used to push the sub-foils toward each other for splicing, ensuring that the seams are tight and located exactly in the gap; and

[0014] A lamination-promoting component is used to make the sub-foils laminarly fit with the surface of the welding platform and ensure that the sub-foils are evenly spliced ​​in the thickness direction; and

[0015] Inspection lenses to check the fit of the stitching at the stitching seams; and

[0016] Welding heat source, used for welding sub-foils.

[0017] As one of the optional solutions, the flatness of the welding platform is ≤0.05mm;

[0018] The width of the gap is 1 mm to 5 mm.

[0019] As one of the optional solutions, the adhesion promoting component includes at least one or more of the following components:

[0020] A pressure roller, arranged above the welding platform;

[0021] A magnet is disposed in the welding platform and is distributed at least on two sides of the gap;

[0022] The vacuum device is arranged in the welding platform and is used to create a negative pressure environment between the sub-foil and the surface of the welding platform.

[0023] In summary, the aforementioned technical solutions and their optional solutions have resolved the constraints of existing processing methods on the development of large-width metal mask foil production technology to higher-generation lines (G8.5 and above), and can achieve low-cost production of large-width foils suitable for high-generation line metal masks. At the same time, it can achieve the same technical effect as metal mask foils produced by traditional continuous casting, rolling and other methods.

[0024] In addition, other additional aspects and advantages of the present disclosure will be given in part in the following description, and in part will be obvious from the following description, or will be learned through the practice of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the utility model or the background technology, the drawings required for use in the embodiments of the utility model or the background technology will be described below.

[0026] Figure 1 It is a schematic diagram of the structure of CMM and CVD Mask in the prior art;

[0027] Figure 2 A schematic diagram of the structure of the metal mask foil material of the utility model;

[0028] Figure 3 It is a schematic diagram of the processing steps of the metal mask foil material of the utility model, wherein: Figure 3 (a) schematically shows two sub-foils and the portion to be cut off on the adjacent side. Figure 3 (b) shows the welding of two sub-foils to form a weld. Figure 3 (c) shows the parts to be cut off on both sides after the two sub-foils are welded into one;

[0029] Figure 4 It is a schematic diagram of processing the middle sub-foil when the metal mask foil of the utility model includes more than three sub-foils;

[0030] Figure 5 This is a schematic diagram of the structure of the metal mask foil of the utility model including three sub-foils;

[0031] Figure 6 It is a schematic diagram of welding and rolling of the metal mask foil of the utility model;

[0032] Figure 7 It is a schematic diagram of a manufacturing device for a metal mask foil material of the utility model;

[0033] Figure 8 It is a schematic diagram of a welding stage in a manufacturing device for a metal mask foil of the utility model configured with a magnet;

[0034] Note in the figure:

[0035] 1 / 1a / 1b / 1c, sub-foil; 11, welding seam; 101 / 102 / 103, cutting line;

[0036] 2. welding platform; 21. magnet; 201. gap;

[0037] 3. Alignment mechanism; 4. Pressure roller; 5. Inspection lens; 6. Welding heat source. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical scheme and advantages of the utility model clearer, the utility model will be further described in detail in conjunction with the accompanying drawings. Obviously, the embodiments described below are only part of the embodiments of the utility model, rather than all of the embodiments. For reference, the following records and drawings are brief examples to help understand the utility model, and are not used to limit the technical scope of the utility model. In other words, the embodiments described below may have a variety of variations, which fall within the scope of the technical ideas of the utility model. Ordinary technicians in the technical field to which the utility model belongs can easily understand the technical ideas of the utility model through the following description. The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0039] At present, due to factors such as production equipment, process and cost, the width of mass-produced whole raw foil is insufficient and can only be used to make whole metal masks (CMM or CVD Mask) for G6H generation lines and below, but cannot meet the requirements of large-generation lines such as G8.5 generation and above for the width of metal mask foil.

[0040] In view of this, the embodiment of the present disclosure provides a metal mask foil material, aiming to provide a low-cost, high-quality, wide-format metal mask foil material, so as to meet the demand for a wide-format metal mask foil material for low-cost production of a whole metal mask suitable for G8.5 generation and above large-scale production lines. Figure 2 As shown in , this metal mask foil specifically includes:

[0041] The sub-foil 1 can be a conventional wide metal mask raw material foil in the prior art. Here, the raw material foil with smooth long edges without edge waves or with acceptable edge wave fluctuation can be directly used as the sub-foil 1; when the raw material foil with edge waves is used as the sub-foil 1, the edge wave parts on both sides need to be cut off to ensure that the produced metal mask foil has a better plate shape.

[0042] The metal mask foil provided in the embodiment of the present disclosure is composed of at least two aforementioned sub-foils 1, each sub-foil 1 is arranged in parallel along the width direction, and the long sides of two adjacent sub-foils 1 are welded together to form a whole foil with a larger width.

[0043] The target width of the metal mask foil provided by the present disclosure is T, and the average value t of the initial width of each sub-foil 1 constituting the metal mask foil satisfies the target width T: T / n≤t<T, where n is the number of sub-foils 1 constituting the metal mask foil. In other words, after being welded together, each sub-foil 1 can directly form a large-width foil having the target width; or a large-width foil having a width exceeding the target width can be formed, and then the portions on both sides of the large-width foil exceeding the target width are cut off to obtain the target width. For example, see Figure 2 As shown in the figure, the widths of the retained portions of the two sub-foils 1 constituting the metal mask foil in the figure are t1 and t2 respectively, t1+ t2=T, and the initial width of the raw material foil used as the sub-foil 1 should be greater than or equal to the width of its final retained portion.

[0044] It should be understood that no matter which of the above methods is used to obtain the target width of the metal mask foil provided by the present disclosure, the final metal mask foil should be flat in the middle and at the edges, or the shape is sufficient to meet the metal mask's requirement for the flatness of the raw foil.

[0045] The target width of the metal mask foil provided by the present disclosure is greater than or equal to 1m, and the aforementioned target width is the final width of the foil product. For example, the width can be 1.2m, 1.5m, 1.7m, 2m, 2.5m, etc. The thickness of the metal mask foil of the present disclosure is 0.02mm-0.5mm, and for example, the thickness can be 0.03mm, 0.05mm, 0.1mm, 0.15mm, 0.2mm, 0.3mm, etc. The thickness of the aforementioned sub-foil 1 used is consistent with the thickness of the final foil product.

[0046] In an optional embodiment, considering the magnetic attraction requirements in actual application scenarios, the material of the metal mask foil provided by the present disclosure can be selected as Invar36 or SUS420 or SUS304.

[0047] In an optional embodiment, the finished product of the metal mask foil provided by the present disclosure may be a sheet, a strip, or a coil. Here, the aforementioned sheet refers to a finished metal mask foil with an aspect ratio of less than or equal to 5, the strip refers to a finished metal mask foil with an aspect ratio of more than 5, and the coil is a metal mask foil coil formed by winding a sheet or a strip through a winding machine.

[0048] In a typical embodiment, the metal mask foil in the present disclosure is manufactured by the following steps:

[0049] Step 1. Take at least two sub-foils 1.

[0050] The selected sub-foil 1 is a conventional wide-width metal mask raw foil in the prior art, which can be a sheet, a strip or a coil. The thickness of the raw foil is selected according to the thickness of the metal mask foil to be produced, and the two should be consistent.

[0051] Step 2. Cut off the edge wave portion of at least one long side edge of each sub-foil 1.

[0052] Here, the premise for performing the operation of cutting off the edge wave part in this step is that the long side edges of the sub-foil material 1 on both sides have edge waves with an unacceptable degree of fluctuation. In other words, if the long side edges of the sub-foil material 1 on both sides do not have edge waves with an unacceptable degree of fluctuation, the step of cutting off the edge wave part may not be performed. Therefore, the above two situations should be regarded as the implementation methods included in this step 2.

[0053] Step 3. The sub-foils 1 are joined together along the long sides, and the sub-foils 1 are arranged side by side along the width direction, and the two sub-foils are joined tightly without any gap.

[0054] During the splicing process, if the wave portion of one side edge of the sub-foil 1 is not cut off and the undulation of the wave portion is unacceptable, the sub-foil 1 should be spliced ​​on the outermost side, and the edge with the wave portion is used as the outer edge of the whole after splicing to ensure that the part spliced ​​to the middle of the foil is flat.

[0055] Step 4. Weld the joints to form a whole foil.

[0056] Step 5. Cut off the excess portions of the long edges on both sides of the overall foil material to reach the target width T.

[0057] Here, if after welding, the long edges of both sides of the overall foil still have edge wave portions with unacceptable undulation, at least these edge wave portions should be completely removed in this step to ensure that the edge shape of the final product is flat or the undulation is acceptable.

[0058] As a preferred embodiment, if the long sides of the sub-foil 1 constituting the middle part of the whole foil and the long sides of the sub-foil 1 near the inner side constituting the edge part of the whole foil have edge waves, the edge wave parts at these places are pre-cut off before splicing. In other words, if the edge where the sub-foil 1 is spliced ​​with another sub-foil 1 has edge waves, the edge wave parts of the spliced ​​edge should be pre-cut off before splicing to ensure the flatness of the plate shape at the joint.

[0059] In an optional embodiment, if the long side of the sub-foils 1 constituting the edge portion of the overall foil has edge waves near the outside, the edge waves therein are pre-cut off before splicing or are cut off after welding. It is worth noting that if this part of the edge waves is chosen to be pre-cut off, when splicing, it should be ensured that at least the sum of the widths of the sub-foils 1 is not less than the aforementioned target width T.

[0060] In an optional embodiment, before welding, the joint seam is inspected to ensure that the joint seam is well joined at all locations. Here, the reference factor for judging whether the joint seam is well joined should at least include whether the joint seam has poor contact in its extending direction so that light can pass through.

[0061] In an optional embodiment, in the welding step, welding is performed by using one or a mixture of laser welding, electron beam welding, resistance welding, and argon arc welding.

[0062] The present disclosure provides a specific embodiment of a metal mask foil as follows.

[0063] See attached Figure 2 As shown in the figure, the metal mask foil in this example is composed of two sub-foils 1, and the widths of the two sub-foils 1 are t1 and t2 respectively. The thickness and material of the two sub-foils 1 are the same, wherein: the material is selected from Invar36 or SUS420 or SUS304, and the thickness is between 0.02mm and 0.5mm. Figure 3 The steps for making the metal mask foil are as follows:

[0064] Step 1. Select two sub-foils 1, marked as sub-foils 1a and sub-foils 1b, see attached Figure 3 (a) Wherein: the initial width of the sub-foil 1a is greater than t1, and the initial width of the sub-foil 1b is greater than t2.

[0065] Step 2. See attached Figure 3 (a), the edge portions of the sub-foil 1a and the sub-foil 1b are cut off along the cutting line 101, and after the cutting, a new edge is formed along the cutting line 101. Moreover, after this cutting, the width of the sub-foil 1a is still greater than t1, and the width of the sub-foil 1b is still greater than t2.

[0066] Step 3. The sub-foil 1a and the sub-foil 1b are joined together along the cutting line 101 , and then the joint seams are inspected to ensure that the joint seams are well joined at all locations and are tight without gaps.

[0067] Step 4. Weld the joint seam between the sub-foil 1a and the sub-foil 1b to form Figure 3 The weld 11 shown in (b) combines the sub-foil 1a and the sub-foil 1b to form an integral foil.

[0068] Step 5. See attached Figure 3 (c) Cut off the redundant parts of the edges of the whole foil along the cutting lines 102 on both sides of the whole foil obtained in the above steps, and keep the width of the remaining part as the target width T, T= t1+ t2. Then, the metal mask foil with a large width in the present disclosure can be obtained.

[0069] Another specific embodiment of the metal mask foil is provided as follows.

[0070] The difference between this specific embodiment and the above specific embodiment is that the metal mask foil in this specific embodiment is composed of three sub-foils 1, see the attached Figure 5 As shown in , the widths of the three sub-foils 1 are t1, t2 and t3 respectively. The steps for making the metal mask foil are as follows:

[0071] Step 1. Select three sub-foils 1, marked as sub-foil 1a, sub-foil 1b and sub-foil 1c, see attached Figure 3 (a) and attached Figure 4 . Among them: the initial width of the sub-foil 1a is greater than t1, the initial width of the sub-foil 1c is greater than t2, and the initial width of the sub-foil 1b is greater than t3.

[0072] Step 2. See attached Figure 3 (a), the sub-foil 1a and the sub-foil 1b are respectively cut off from their edge portions along the cutting line 101; see the attached Figure 4 , the edge portions of the sub-foil 1 c are cut off along the cutting lines 103 on both sides.

[0073] After cutting, new edges of the sub-foil 1a and the sub-foil 1b are formed along the respective cutting lines 101, and a new edge of the sub-foil 1c is formed along the cutting line 103. Moreover, after this cutting, the width of the sub-foil 1a is still greater than t1, the width of the sub-foil 1b is still greater than t3, and the width of the sub-foil 1c is equal to t2.

[0074] Step 3. The sub-foils 1a, 1b and 1c are sequentially joined together along the width direction. The sub-foils 1a and 1b are joined on both sides of the sub-foil 1c, and the edges of the sub-foils 1a and 1b that have not been cut off in the previous step serve as the outer edges of both sides after joining. Then the joining seams are checked to ensure that the joining seams are well joined at all places and are tight and have no gaps.

[0075] Step 4. Weld the joint seams between the sub-foil 1a, the sub-foil 1b and the sub-foil 1c to combine the sub-foil 1a, the sub-foil 1b and the sub-foil 1c to form an integral foil.

[0076] Step 5. Cut off the redundant parts of both sides of the whole foil obtained in the above steps, and the width of the remaining part is the target width T, wherein the widths of the remaining parts of the sub-foil 1a and the sub-foil 1b are t1 and t3 respectively, T= t1+ t2+ t3. The metal mask foil with a large width in the present disclosure can be obtained.

[0077] In this specific embodiment, when executing step 3 and step 4, the sub-foils 1a and 1c may be first joined and welded together on one side, and then the sub-foils 1b and 1c may be joined and welded together on the other side.

[0078] In a typical embodiment, the metal mask foil of the present disclosure is manufactured using the following apparatus. Figure 7 and Figure 8 As shown in , the manufacturing device of the metal mask foil comprises:

[0079] The welding platform 2 is used to carry the sub-foil 1 during welding, and has a gap 201 in the middle for avoiding air during welding. Figure 7 As shown in , the welding platform 2 is composed of two sub-platforms, and the gap 201 is a gap reserved between the sub-platforms. In some embodiments, multiple sub-platforms can be set according to the number of sub-foils to be welded, ensuring that the number of sub-platforms is consistent with the number of sub-foils.

[0080] The alignment mechanism 3, a plurality of alignment mechanisms 3 are arranged on both sides of the welding platform 2, and are used to push the two sub-foils 1 toward each other to ensure that the joint is tight and located exactly at the gap 201. In a specific embodiment, the alignment mechanism 3 includes a push block and a power unit for driving the push block to move, and the power unit can be a motor or a cylinder. Figure 7 Only the push block is shown.

[0081] The pressing roller 4 is used to press the sub-foil 1 onto the welding platform 2, so that it fits the surface of the welding platform 2 and ensures that the sub-foils 1 are spliced ​​flush in the thickness direction. In a specific embodiment, the pressing roller 4 is a non-powered free roller. In this case, the movement of the sub-foil 1 is driven by an external force, for example, see the attached Figure 6 As shown in FIG. 1 , the external force driving the sub-foil 1 to move is generated when the coiler coils the foil. In addition, in another specific embodiment, the pressure roller 4 is a driving roller driven by a power mechanism, see FIG. Figure 7 , only the pressing roller 4 is shown, and the aforementioned power mechanism is a roller drive mechanism in the prior art, which will not be described in detail here. Figure 6 and attached Figure 7 In the figure, the M direction is the moving direction of the sub-foil 1 , the W direction is the welding direction, and the P direction is the rotating direction of the pressing roller 4 .

[0082] The inspection lens 5 is used to inspect the splicing condition of the splicing seam. For example, before welding, it is checked whether the splicing seam is tight, whether there is sheet deformation at the seam position, and other abnormalities that may affect the welding effect. In a specific embodiment, the inspection lens 5 is set at a position directly opposite to the gap 201, and the gap 201 is used to check whether there is light leakage at the seam position, so as to determine whether the sub-foil 1 is well spliced.

[0083] The welding heat source 6 is used to weld the sub-foil 1. In a specific embodiment, one or more heat source devices such as laser welding, electron beam welding, resistance welding, argon arc welding, etc. can be used as the welding heat source 6. In a specific embodiment, the pressure roller 4 can be linked with the welding heat source 6 so that its pressing position is as close to the welding area as possible to play the role of flattening the sub-foil 1 at the welding position, and the length of the pressure roller 4 should be at least wider than the gap 201 on the aforementioned welding carrier 2.

[0084] In an optional embodiment, in order to ensure the welding effect, the flatness of the aforementioned welding carrier 2 should be ensured to be within 0.05 mm, and the width of the aforementioned gap 201 should be selected to be between 1 mm and 5 mm.

[0085] Based on the aforementioned metal mask foil manufacturing device, the welding operation steps are as follows:

[0086] Step 1. Loading: Place the sub-foil 1 to be welded flat on the welding carrier 2, and splice the sub-foil 1 in the gap 201 and suspend it in the air;

[0087] Step 2. Alignment: start the alignment mechanism 3 to align the seams of the sub-foil 1;

[0088] Step 3. Laminating: the pressing roller 4 locally presses the seam;

[0089] Step 4. Inspection: Start the inspection camera 5 to determine whether the sub-foil 1 is well spliced ​​by checking whether there is light leakage at the seam;

[0090] Step 5. Welding: Start the welding heat source 6 and weld along the seam between the sub-foils 1 from one end to the other end to complete the welding.

[0091] In another typical embodiment, the difference from the above embodiment is that in the manufacturing device of the metal mask foil in the present disclosure, the sub-foil 1 is placed flat on the welding stage 2 without moving, and the above-mentioned pressure roller 4, inspection lens 5, and welding heat source 6 are configured to move along the seam between the sub-foils 1, and the pressure roller 4 can perform a downward pressing action under the drive of the driving device. The driving device for driving movement and downward pressing is a prior art and will not be described in detail here. The welding operation steps are:

[0092] Step 1. Loading: Place the sub-foil 1 to be welded flat on the welding platform 2, and splice the sub-foil 1 in the gap 201 and suspend it in the air;

[0093] Step 2. Alignment: start the alignment mechanism 3 to align the seams of the sub-foil 1;

[0094] Step 3. Inspection before welding: Use the inspection lens 5 to inspect from one end of the joint of the sub-foil 1 to the other end, and determine whether the sub-foil 1 is well spliced ​​by checking whether there is light leakage at the joint;

[0095] Step 4. Welding: The pressure roller 4 is pressed down to locally tighten the seam, and the welding heat source 6 moves synchronously with the pressure roller 4 along the welding direction, and the welding is completed from one end of the seam of the sub-foil 1 to the other end.

[0096] In another typical embodiment, the difference from the above embodiment is that in the manufacturing device of the metal mask foil in the present disclosure, the pressing roller 4 in the above embodiment is replaced by a magnet 21. The magnet 21 is arranged in the welding stage 2, see the attached Figure 8 As shown in , the magnets 21 should be distributed at least on both sides of the gap 201. In a specific embodiment, the magnets 21 are permanent magnets.

[0097] In another typical embodiment, the difference from the above embodiment is that in the manufacturing device of the metal mask foil in the present disclosure, the pressure roller 4 in the above embodiment is replaced by a vacuum device. The vacuum device is arranged in the welding stage 2, and is used to create a negative pressure environment between the sub-foil 1 and the surface of the welding stage 2. The vacuum device used to create a negative pressure or vacuum environment is a prior art and will not be described in detail here.

[0098] In another typical embodiment, different from the aforementioned embodiment, in the manufacturing device of the metal mask foil in the present disclosure, in addition to the pressure roller 4 in the aforementioned embodiment, the aforementioned magnet 21 and / or the aforementioned vacuum device are also provided.

[0099] In another typical embodiment, different from the above-mentioned embodiment, in the manufacturing device of the metal mask foil in the present disclosure, the above-mentioned vacuum device is also provided in addition to the magnet 21 in the above-mentioned embodiment.

[0100] The above is only a specific implementation of the embodiment of the utility model, but the protection scope of the embodiment of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or replacements within the technical scope disclosed in the embodiment of the utility model, which should be included in the protection scope of the embodiment of the utility model. Therefore, the protection scope of the embodiment of the utility model should be based on the protection scope of the claims.

Claims

1. A metal mask foil, characterized in that: At least it can be used to make metal masks used in OLED panel production, including: At least two sub-foils (1), each sub-foil (1) being arranged in parallel along the width direction, and the long sides of two adjacent sub-foils (1) being welded together; The target width T of the metal mask foil and the average value t of the initial widths of each sub-foil (1) satisfy the following relationship: T / n≤t<T, where n is the number of sub-foils (1) constituting the metal mask foil.

2. The metal mask foil material according to claim 1, characterized in that: The target width T of the metal mask foil is ≥1m, and the thickness is 0.02mm-0.5mm.

3. The metal mask foil material according to claim 1, characterized in that: The metal mask foil is formed into a sheet, a strip or a coil.

4. A device for manufacturing a metal mask foil, used for manufacturing the metal mask foil as claimed in any one of claims 1 to 3, characterized in that: include: A welding platform (2), wherein the center thereof has a gap (201) for avoiding air during welding; as well as A positioning mechanism (3), wherein a plurality of positioning mechanisms (3) are arranged on both sides of the welding platform (2) and are used to push the sub-foils (1) towards each other for splicing, thereby ensuring that the joints are tightly sealed and exactly located at the gap (201); and A lamination-promoting component, used to make the sub-foils (1) laminarly fit with the surface of the welding carrier (2), and to ensure that the sub-foils (1) are evenly spliced ​​in the thickness direction; and An inspection lens (5) for inspecting the splicing condition of the spliced ​​joints; and A welding heat source (6) is used for welding the sub-foil (1).

5. The device for manufacturing a metal mask foil according to claim 4, characterized in that: The flatness of the welding platform (2) is ≤0.05 mm; The width of the gap (201) is 1 mm to 5 mm.

6. The device for manufacturing a metal mask foil according to claim 5, characterized in that: The adhesion promoting component includes at least one or more of the following components: A pressure roller (4) is arranged above the welding platform (2); A magnet (21) is arranged in the welding carrier (2) and is distributed at least on two sides of the gap (201); A vacuum device is arranged in the welding platform (2) and is used to create a negative pressure environment between the sub-foil material (1) and the surface of the welding platform (2).

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