Novel substrate frame

Abstract

The utility model relates to a novel substrate frame, which comprises a substrate frame, an insulating unit and locking plates, the insulating unit is mounted on one side of the top or the bottom of the substrate frame, a substrate mounting cavity for mounting a substrate is arranged in the middle of the substrate frame, and a plurality of locking plates are arranged on the substrate frame on the outer side of the substrate mounting cavity; a locking plate is mounted in the upper arc-shaped cavity and is of a cam structure, and locking plate guide grooves are formed in the top and the bottom of the inner side of the locking plate; the insulation unit comprises a plurality of insulation block assemblies, each insulation block assembly comprises two insulation blocks from top to bottom, and insulation protection assemblies are arranged on the two sides of each insulation block assembly in the X-axis direction. Through the structure of the locking plate, the problem that in the prior art, a locking plate part on a substrate frame excessively protrudes out of the surface of the substrate frame, and the substrate is damaged is solved.

Description

Technical Field

[0001] The utility model relates to the technical field related to PVD equipment, in particular to a novel substrate rack. Background Art

[0002] PVD physical vapor deposition technology refers to the technology of using physical methods under vacuum conditions to vaporize the surface of the material source (solid or liquid) into gaseous atoms or molecules, or partially ionize it into ions, and deposit a thin film with certain special functions on the surface of the substrate through a low-pressure gas (or plasma) process. Physical vapor deposition is one of the main surface treatment technologies.

[0003] After massive searches, it was found that the prior art publication number is CN210367893U, which discloses a substrate rack for physical vapor deposition coating equipment, and relates to the technical field of vacuum coating equipment. The substrate rack includes a substrate rack body and an ejector mechanism. The substrate rack body is a vertically arranged square frame structure. At least one clamp assembly is installed on both sides of the substrate rack body for fixing the glass plate. The clamp assembly is provided with a functional hole. The ejector mechanism is located on one side of the substrate rack body, and is arranged one-to-one with the clamp assembly. The output end of the ejector mechanism is arranged corresponding to the functional hole, and is used to control the clamp assembly to fix the glass plate. The substrate rack of the utility model inserts the ejector mechanism into the functional hole and realizes the fixing and loosening of the clamp assembly by moving it in the functional hole. It has high accuracy and low wear. It can accurately and stably control the clamp assembly to ensure the stability and accuracy of the upper and lower glass sheets of the substrate rack.

[0004] At present, in the vacuum sputtering coating production line, the existing continuous vacuum coating device generally includes a plurality of vacuum chambers connected in sequence, and a transmission device is arranged at the bottom of the vacuum chamber; usually the transmission device carries an upright substrate rack for fixing the substrate, and the substrate rack is provided with insulating components, and these insulating components are generally provided with protective covers; however, in actual application, since the protective covers mostly protrude from the surface of the substrate rack, in the process of conveying the substrate, it will affect the uniformity of the film layer due to being too protruding from the surface of the substrate rack, and it is easy to cause a short circuit between the substrate and the cavity.

[0005] On the other hand, the substrate rack is provided with locking components for fixing the substrate, and these locking components are tightly in contact with the edge of the substrate; however, in actual application, since most of the locking components protrude from the surface of the substrate rack, during the process of conveying the substrate, the substrate may be damaged due to protruding too much from the surface of the substrate rack.

[0006] In view of the above-mentioned defects, the designer actively conducts research and innovation in order to create a new type of substrate rack to make it more valuable for industrial use. Utility Model Content

[0007] In order to solve the above technical problems, the purpose of the utility model is to provide a new substrate rack.

[0008] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0009] A novel substrate rack comprises a substrate rack, an insulating unit and a locking piece, wherein the insulating unit is installed on one side of the top or bottom of the substrate rack, a substrate mounting cavity for mounting a substrate is arranged in the middle of the substrate rack, and a plurality of locking pieces are arranged on the substrate rack outside the substrate mounting cavity;

[0010] A plurality of upper arc-shaped cavities are evenly opened on the substrate frame above the substrate installation cavity along the X-axis direction, the opening of the upper arc-shaped cavity is arranged downward, a locking piece is installed in the upper arc-shaped cavity, the locking piece is a cam structure, and the top and bottom of the inner side of the locking piece are provided with locking piece guide grooves;

[0011] The insulating unit includes several groups of insulating block assemblies, each group of insulating block assemblies includes two insulating blocks from top to bottom, insulating protection assemblies are arranged on both sides of the insulating block assemblies along the X-axis direction, the insulating protection assemblies include insulating protection outer covers, and a U-shaped frame is arranged in the middle position of the inner side of the insulating protection outer cover, and the U-shaped frame separates the upper and lower insulating blocks.

[0012] As a further improvement of the utility model, a plurality of lower arc-shaped cavities are evenly opened along the X-axis direction on the substrate rack below the substrate mounting cavity, the openings of the lower arc-shaped cavities are arranged upward, and guide wheels are installed in the lower arc-shaped cavities.

[0013] As a further improvement of the present invention, the locking plate is rotatably mounted in the upper arc-shaped cavity via a locking plate rotating shaft in the middle.

[0014] As a further improvement of the utility model, a locking piece contact layer protruding toward the outside is provided on the locking piece inside the locking piece guide groove, and the locking piece contact layer is an elastic contact layer.

[0015] As a further improvement of the utility model, the elastic contact layer is a silicone layer or a rubber layer.

[0016] As a further improvement of the utility model, the elastic contact layer is attached to the locking piece on the inner side of the locking piece guide groove.

[0017] As a further improvement of the utility model, the locking plate is an involute cam structure.

[0018] As a further improvement of the utility model, insulating units are installed on one side of the top and the bottom of the substrate rack.

[0019] By means of the above solution, the utility model has at least the following advantages:

[0020] The utility model uses the structure of the locking piece to solve the problem in the prior art that the locking piece component on the substrate rack protrudes too much from the surface of the substrate rack and causes damage to the substrate.

[0021] The utility model uses the structure of the insulating unit to solve the problem in the prior art that the insulating protection component on the substrate frame protrudes too much from the surface of the substrate frame, causing uneven film layer on the substrate and easily causing short circuit between the substrate and the cavity.

[0022] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 This is a structural schematic diagram of a novel substrate rack of the utility model;

[0025] Figure 2 yes Figure 1 A schematic diagram of the structure of the middle insulation unit;

[0026] Figure 3 yes Figure 2 Schematic diagram of the internal structure;

[0027] Figure 4 yes Figure 2 Schematic diagram of the structure of the insulation protection component;

[0028] Figure 5 yes Figure 1 A schematic diagram of the structure of the middle locking piece;

[0029] Figure 6 yes Figure 5 Schematic diagram of the side structure.

[0030] The meanings of the various reference numerals in the figures are as follows.

[0031] Substrate frame 1, substrate 2, insulation unit 3, upper arc-shaped cavity 4, locking piece 5, lower arc-shaped cavity 6, guide wheel 7, insulation protection component 8, insulation block 9, insulation protection outer cover 10, U-shaped frame 11, locking piece shaft 12, locking piece guide groove 13, locking piece contact layer 14. DETAILED DESCRIPTION

[0032] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0033] In order to make the technical personnel in the technical field better understand the scheme of the utility model, the technical scheme in the embodiment of the utility model will be clearly and completely described below in combination with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, rather than all the embodiments. The components of the embodiment of the utility model usually described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model for protection, but only represents the selected embodiment of the utility model. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the utility model.

[0034] Example

[0035] like Figure 1 to Figure 6 As shown,

[0036] A novel substrate rack comprises a substrate rack 1, an insulating unit 3 and a locking piece 5. The insulating unit 3 is installed on one side of the top or bottom of the substrate rack 1. A substrate mounting cavity for mounting a substrate 2 is arranged in the middle of the substrate rack 1. A plurality of locking pieces 5 are arranged on the substrate rack 1 outside the substrate mounting cavity.

[0037] 1. Structural description of locking piece 5:

[0038] A plurality of upper arc-shaped cavities 4 are evenly opened on the substrate frame 1 above the substrate mounting cavity along the X-axis direction, and the opening of the upper arc-shaped cavity 4 is set to face downward. A locking plate 5 is installed in the upper arc-shaped cavity 4, and the locking plate 5 is rotatably installed in the upper arc-shaped cavity 4 through a locking plate rotating shaft 12 in the middle. The locking plate 5 is an involute cam structure, and the top and bottom of the inner side of the locking plate 5 are provided with locking plate guide grooves 13.

[0039] A locking piece contact layer 14 protruding outward is provided on the locking piece 5 inside the locking piece guide groove 13. The locking piece contact layer 14 is an elastic contact layer that can be attached to the locking piece 5 inside the locking piece guide groove 13. The elastic contact layer is a silicone layer or a rubber layer.

[0040] The locking piece 5 can be in a vertical state or a horizontal state by rotating. When the locking piece 5 is rotated to the vertical state, the substrate 2 is located in the locking piece guide groove 13 at the top or bottom, thereby clamping the glass substrate 2. The locking piece 5 adopts an involute cam structure and will not protrude too much from the substrate 2.

[0041] 2. Structural description of insulation unit 3:

[0042] The insulating unit 3 includes several groups of insulating block assemblies, each group of insulating block assemblies includes two insulating blocks 9 from top to bottom, and insulating protection assemblies 8 are arranged on both sides of the insulating block assemblies along the X-axis direction. The insulating protection assembly 8 includes an insulating protection outer cover 10, and a U-shaped frame 11 is arranged in the middle position of the inner side of the insulating protection outer cover 10. The U-shaped frame 11 separates the upper and lower insulating blocks 9.

[0043] The insulating protective cover 10 is installed on the insulating block 9 of the substrate frame 1, and double-layer insulation is more guaranteed.

[0044] In addition, a plurality of lower arc-shaped cavities 6 are evenly opened along the X-axis direction on the substrate rack 1 below the substrate mounting cavity. The openings of the lower arc-shaped cavities 6 are arranged upward, and guide wheels 7 are installed in the lower arc-shaped cavities 6 .

[0045] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly referring to the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0046] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood by specific circumstances.

[0047] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.

Claims

1. A novel substrate rack, comprising a substrate rack (1), an insulating unit (3) and a locking piece (5), wherein the insulating unit (3) is installed on one side of the top or bottom of the substrate rack (1), a substrate mounting cavity for mounting a substrate (2) is arranged in the middle of the substrate rack (1), and a plurality of locking pieces (5) are arranged on the substrate rack (1) outside the substrate mounting cavity; Features: A plurality of upper arc-shaped cavities (4) are evenly provided on the substrate frame (1) above the substrate installation cavity along the X-axis direction, the opening of the upper arc-shaped cavity (4) is arranged to face downward, a locking piece (5) is installed in the upper arc-shaped cavity (4), the locking piece (5) is a cam structure, and the top and bottom of the inner side of the locking piece (5) are both provided with locking piece guide grooves (13); The insulating unit (3) comprises a plurality of groups of insulating block assemblies, each group of the insulating block assemblies comprises two insulating blocks (9) from top to bottom, insulating protection assemblies (8) are arranged on both sides of the insulating block assemblies along the X-axis direction, the insulating protection assemblies (8) comprise insulating protection outer covers (10), a U-shaped frame (11) is arranged at the middle position inside the insulating protection outer covers (10), and the U-shaped frame (11) separates the upper and lower insulating blocks (9).

2. A novel substrate holder as claimed in claim 1, characterized in that: A plurality of lower arc-shaped cavities (6) are evenly provided on the substrate rack (1) below the substrate mounting cavity along the X-axis direction, the opening of the lower arc-shaped cavity (6) is arranged to face upward, and a guide wheel (7) is installed in the lower arc-shaped cavity (6).

3. A novel substrate holder as claimed in claim 1, characterized in that: The locking plate (5) is rotatably mounted in the upper arc-shaped cavity (4) via a locking plate rotating shaft (12) in the middle.

4. A novel substrate holder as claimed in claim 1, characterized in that: A locking piece contact layer (14) protruding toward the outside is provided on the locking piece (5) inside the locking piece guide groove (13), and the locking piece contact layer (14) is an elastic contact layer.

5. A novel substrate holder as claimed in claim 4, characterized in that: The elastic contact layer is a silicone layer or a rubber layer.

6. A novel substrate holder as claimed in claim 4, characterized in that: The elastic contact layer is attached to the locking plate (5) inside the locking plate guide groove (13).

7. A novel substrate holder as claimed in claim 1, characterized in that: The locking plate (5) is an involute cam structure.

8. A novel substrate holder as claimed in claim 1, characterized in that: Insulation units (3) are installed on one side of the top and bottom of the substrate rack (1).

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