Device for manually and precisely adjusting verticality of lens cone

Abstract

The utility model belongs to the technical field of proximity mask photoetching equipment, and discloses a device for manually and precisely adjusting the verticality of a lens barrel, which comprises a fixed seat, connecting blocks are symmetrically arranged at two ends of one side of the fixed seat, a fixed block is mounted on one side of each of a pair of connecting blocks, a fixed groove is arranged between each pair of connecting blocks and fixed block, and a plurality of fixed grooves are formed in the fixed groove. Connecting seats are clamped in the two pairs of fixing grooves, X shafts are rotationally connected to one sides of the pair of connecting seats, a first adjusting mechanism is installed in one of the pair of connecting seats, the first adjusting mechanism is in transmission connection with the X shafts, a mounting seat is fixedly connected between the pair of X shafts, and a Y shaft is rotationally installed in the mounting seat; and an adjusting mechanism II is mounted in the mounting seat and is in transmission connection with the Y shaft. Through cooperative use of the first adjusting mechanism and the second adjusting mechanism, adjustment of longitudinal and transverse angles of the lens cone body can be precisely controlled, overlay errors are eliminated, and the machining precision requirement and the assembling and adjusting difficulty are greatly reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of proximity mask photolithography equipment, and more specifically, particularly relates to a device for manually and precisely adjusting the verticality of a lens barrel. Background Art

[0002] Proximity mask lithography equipment means that a tiny gap (Gap) needs to be retained between the mask plate and the photoresist base layer. The Gap is about 0 to 200μm, which can effectively avoid damage to the mask plate caused by direct contact with the photoresist, so that the mask and photoresist base can be used for a long time; the mask has a long life (can be increased by more than 10 times) and few graphic defects. Proximity mask lithography equipment is the most widely used in modern lithography processes.

[0003] Since proximity mask exposure requires precise adjustment of the gap between the mask and the wafer, the accuracy requirement for the worktable is relatively high, and generally multiple exposures are required. In multiple exposures, the previous pattern and the next need to be aligned, which is called overlay alignment. Overlay alignment is completed by two alignment vision components. The mutual parallelism between the two lenses and the verticality of the lenses relative to the wafer determine the overlay error. If there is an angular error between the two lenses, the mask mark and the wafer mark in the picture are not on the same layer, which will cause outward expansion or inward shrinkage, affecting the overlay accuracy. Therefore, the processing accuracy and assembly technology requirements are relatively high.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a device for manually precisely adjusting the verticality of the lens barrel is provided, in order to achieve a more practical purpose. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides a device for manually and precisely adjusting the verticality of the lens barrel, which is achieved by the following specific technical means:

[0006] A device for manually and precisely adjusting the verticality of a lens barrel comprises a fixing seat, connecting blocks are symmetrically provided at both ends of one side of the fixing seat, a pair of fixing blocks are installed on one side of each of the connecting blocks, a fixing groove is provided between each pair of the connecting blocks and the fixing blocks, a connecting seat is clamped inside the two pairs of fixing grooves, an X-axis is rotatably connected to one side of a pair of the connecting seats, an adjusting mechanism 1 is installed inside one of the pair of the connecting seats, and the adjusting mechanism 1 is transmission-connected to the X-axis, a mounting seat is fixedly connected between the pair of the X-axes, a Y-axis is rotatably installed inside the mounting seat, an adjusting mechanism 2 is installed inside the mounting seat, and the adjusting mechanism 2 is transmission-connected to the Y-axis, one end of the Y-axis extends to the outside of one side of the mounting seat and is fixedly connected with a mounting block 1, a mounting block 2 is installed on one side of the mounting block 1, a clamping groove is provided between the mounting block 1 and the mounting block 2, and the lens barrel body is clamped inside the clamping groove.

[0007] Furthermore, the adjustment mechanism 1 includes gear 1, gear 2 and an adjustment knob, wherein gear 1 is fixedly connected to one end of the X-axis located inside the connecting seat, the adjustment knob is installed on the outside of the connecting seat, one end of the adjustment knob extends to the inside of the connecting seat and is fixedly connected to gear 2, and gear 2 is meshed with one side of gear 1.

[0008] Furthermore, the adjustment mechanism 2 includes gear 3, gear 4 and an adjusting wheel, the gear 3 is fixedly sleeved on the outer side of the Y-axis, a control groove is opened at the top of the mounting seat, the adjusting wheel is rotatably mounted inside the control groove, and the top of the adjusting wheel extends to the top of the control groove, one side of the adjusting wheel is fixedly connected to gear 4, and gear 4 and gear 3 are meshed with each other.

[0009] Furthermore, a pair of threaded holes 1 are symmetrically provided on one side of the connecting block, a pair of fixing bolts 1 are symmetrically provided on one side of the fixing block, and the pair of fixing bolts 1 respectively penetrate the fixing block and engage with the threaded holes 1.

[0010] Furthermore, the mounting block 1 is symmetrically provided with a pair of threaded holes 2 at positions on both sides of the clamping groove, and one side of the mounting block 2 is symmetrically provided with two pairs of fixing bolts 2, and the fixing bolts 2 penetrate the mounting block 2 and engage with the threaded holes 2.

[0011] Furthermore, the mounting seat is provided with a mounting groove between a pair of the connecting blocks, and the mounting groove is adapted to the size of the mounting seat.

[0012] Furthermore, the fixing seat is provided with a pair of mounting plates on one side away from the mounting seat, and a pair of mounting holes are provided on one side of the pair of mounting plates.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] The utility model discloses a device for manually and precisely adjusting the verticality of a lens barrel. By using an adjusting mechanism one and an adjusting mechanism two in cooperation, an adjusting knob is used to control the rotation of gear two, and the meshing of gear two and gear one drives gear one to rotate synchronously, so that the rotation of the X-axis can be manually and precisely adjusted, thereby controlling the adjustment of the longitudinal angle of the lens barrel body. An adjusting wheel is used to control the rotation of gear four, and the meshing of gear four and gear three drives gear three to rotate synchronously, thereby controlling the rotation of the Y-axis can be manually and precisely adjusted, thereby controlling the adjustment of the lateral angle of the lens barrel body, thereby greatly reducing the processing accuracy requirements and the difficulty of assembly and adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a three-dimensional schematic diagram of the utility model.

[0016] Figure 2 It is a three-dimensional unfolding schematic diagram of the utility model.

[0017] Figure 3 It is a partial structural side plane sectional view of the utility model.

[0018] Figure 4 It is a partial structural front plan sectional view of the utility model.

[0019] In the figure, the corresponding relationship between the component names and the figure numbers is as follows:

[0020] 1. Fixing seat; 101. Mounting hole; 102. Mounting slot; 103. Connecting block; 104. Threaded hole one; 2. Fixing block; 201. Fixing slot; 202. Fixing bolt one; 3. Connecting seat; 301. X-axis; 302. Gear one; 303. Adjusting knob; 304. Gear two; 4. Mounting seat; 401. Y-axis; 402. Gear three; 403. Control slot; 404. Adjusting wheel; 405. Gear four; 5. Mounting block one; 501. Threaded hole two; 6. Mounting block two; 601. Clamping slot; 602. Fixing bolt two; 7. Lens barrel body. DETAILED DESCRIPTION

[0021] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0022] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0023] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] Example:

[0025] As attached Figure 1 To Attachment Figure 4 As shown:

[0026] The utility model provides a device for manually precisely adjusting the verticality of a lens barrel, comprising a fixing seat 1, two ends of one side of the fixing seat 1 are symmetrically provided with connecting blocks 103, one side of a pair of connecting blocks 103 is provided with a fixing block 2, a fixing groove 201 is provided between each pair of connecting blocks 103 and the fixing block 2, the insides of the two pairs of fixing grooves 201 are both clamped with a connecting seat 3, one side of a pair of connecting seats 3 is rotatably connected with an X-axis 301, an adjusting mechanism 1 is installed inside one of the pair of connecting seats 3, and the adjusting mechanism 1 is connected to the X-axis 301. 301 is transmission connected, a mounting seat 4 is fixedly connected between a pair of X axes 301, a Y axis 401 is rotatably installed inside the mounting seat 4, an adjusting mechanism 2 is installed inside the mounting seat 4, and the adjusting mechanism 2 is transmission connected to the Y axis 401, one end of the Y axis 401 extends to the outside of one side of the mounting seat 4 and is fixedly connected to a mounting block 1 5, a mounting block 2 6 is installed on one side of the mounting block 1 5, a clamping groove 601 is provided between the mounting block 1 5 and the mounting block 2 6, and the inside of the clamping groove 601 clamps the lens barrel body 7.

[0027] Among them, the adjustment mechanism 1 includes gear 1 302, gear 2 304 and an adjustment knob 303. Gear 1 302 is fixedly connected to one end of the X-axis 301 located inside the connecting seat 3. The adjustment knob 303 is installed on the outside of the connecting seat 3. One end of the adjustment knob 303 extends to the inside of the connecting seat 3 and is fixedly connected to gear 2 304. Gear 2 304 is meshed with one side of gear 1 302. Through the setting of the adjustment mechanism 1, it is convenient to precisely control the rotation of the X-axis 301, thereby controlling the longitudinal angle adjustment of the lens barrel body 7.

[0028] Among them, the adjustment mechanism two includes gear three 402, gear four 405 and an adjustment wheel 404. The gear three 402 is fixedly sleeved on the outer side of the Y-axis 401. A control slot 403 is provided at the top of the mounting seat 4. The adjustment wheel 404 is rotatably installed inside the control slot 403, and the top of the adjustment wheel 404 extends to the top of the control slot 403. One side of the adjustment wheel 404 is fixedly connected to the gear four 405, and the gear four 405 is meshed with the gear three 402. Through the setting of the adjustment mechanism two, it is convenient to precisely control the rotation of the Y-axis 401, thereby controlling the lens barrel body 7 to adjust the lateral angle.

[0029] Among them, a pair of threaded holes 104 are symmetrically provided on one side of the connecting block 103, and a pair of fixing bolts 202 are symmetrically provided on one side of the fixing block 2, and the pair of fixing bolts 202 respectively penetrate the fixing block 2 and engage with the threaded holes 104. Through the coordinated use of the threaded holes 104 and the fixing bolts 202, the connecting block 103 and the fixing block 2 are easily fixedly connected.

[0030] Among them, the mounting block 1 5 is symmetrically provided with a pair of threaded holes 2 501 at the positions on both sides of the clamping groove 601, and one side of the mounting block 2 6 is symmetrically provided with two pairs of fixing bolts 2 602, and the fixing bolts 2 602 penetrate the mounting block 2 6 and engage with the threaded holes 2 501. Through the coordinated use of the threaded holes 2 501 and the fixing bolts 2 602, it is convenient to achieve a fixed connection between the mounting block 1 5 and the mounting block 2 6.

[0031] The mounting seat 4 is provided with a mounting groove 102 between a pair of connecting blocks 103 , and the mounting groove 102 is adapted to the size of the mounting seat 4 .

[0032] The fixing seat 1 is provided with a pair of mounting plates at one side away from the mounting seat 4 , and a pair of mounting holes 101 are respectively opened at one side of the pair of mounting plates.

[0033] The working principle of this embodiment is as follows: through the coordinated use of the adjustment mechanism 1 and the adjustment mechanism 2, the adjustment knob 303 is used to control the rotation of the gear 2 304, and the meshing of the gear 2 304 and the gear 1 302 drives the gear 1 302 to rotate synchronously, so that the rotation of the X-axis 301 can be manually and precisely adjusted, thereby controlling the adjustment of the longitudinal angle of the lens barrel body 7, and the adjustment wheel 404 is used to control the rotation of the gear 4 405, and the meshing of the gear 4 405 and the gear 3 402 drives the gear 3 402 to rotate synchronously, so that the rotation of the Y-axis 401 can be manually and precisely adjusted, thereby controlling the adjustment of the lateral angle of the lens barrel body 7, thereby being able to eliminate the overlay error, greatly reducing the processing accuracy requirements and the difficulty of assembly and adjustment.

[0034] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific purposes.

Claims

1. A device for manually and precisely adjusting the verticality of a lens barrel, comprising a fixing seat (1), characterized in that: The two ends of one side of the fixed seat (1) are symmetrically provided with connecting blocks (103); one side of a pair of the connecting blocks (103) is installed with a fixing block (2); a fixing groove (201) is provided between each pair of the connecting blocks (103) and the fixing block (2); the insides of the two pairs of the fixing grooves (201) are clamped with a connecting seat (3); one side of the pair of the connecting seats (3) is rotatably connected with an X-axis (301); an adjusting mechanism (1) is installed inside one of the pair of the connecting seats (3); the adjusting mechanism (1) is transmission-connected to the X-axis (301); the X-axis (301) is connected to the connecting seat (3) by a plurality of adjusting mechanisms (201); A mounting seat (4) is fixedly connected therebetween, a Y-axis (401) is rotatably mounted inside the mounting seat (4), an adjusting mechanism 2 is mounted inside the mounting seat (4), and the adjusting mechanism 2 is transmission-connected to the Y-axis (401), one end of the Y-axis (401) extends to the outside of one side of the mounting seat (4) and is fixedly connected to a mounting block 1 (5), a mounting block 2 (6) is mounted on one side of the mounting block 1 (5), a clamping groove (601) is provided between the mounting block 1 (5) and the mounting block 2 (6), and the inside of the clamping groove (601) clamps the lens barrel body (7).

2. The device for manually precisely adjusting the verticality of a lens barrel as claimed in claim 1, characterized in that: The adjustment mechanism 1 comprises a gear 1 (302), a gear 2 (304) and an adjustment knob (303); the gear 1 (302) is fixedly connected to one end of the X-axis (301) located inside the connecting seat (3); the adjustment knob (303) is installed on the outside of the connecting seat (3); one end of the adjustment knob (303) extends to the inside of the connecting seat (3) and is fixedly connected to the gear 2 (304); and the gear 2 (304) is meshed with one side of the gear 1 (302).

3. The device for manually precisely adjusting the verticality of a lens barrel as claimed in claim 1, characterized in that: The adjusting mechanism 2 comprises a gear 3 (402), a gear 4 (405) and an adjusting wheel (404); the gear 3 (402) is fixedly sleeved on the outer side of the Y axis (401); a control groove (403) is provided at the top of the mounting seat (4); the adjusting wheel (404) is rotatably mounted inside the control groove (403); and the top of the adjusting wheel (404) extends to the top of the control groove (403); one side of the adjusting wheel (404) is fixedly connected to the gear 4 (405), and the gear 4 (405) and the gear 3 (402) are meshed with each other.

4. The device for manually precisely adjusting the verticality of a lens barrel as claimed in claim 1, characterized in that: A pair of threaded holes (104) are symmetrically provided on one side of the connecting block (103), and a pair of fixing bolts (202) are symmetrically provided on one side of the fixing block (2), and the pair of fixing bolts (202) respectively penetrate the fixing block (2) and engage with the threaded holes (104).

5. The device for manually precisely adjusting the verticality of a lens barrel as claimed in claim 1, characterized in that: The mounting block 1 (5) is symmetrically provided with a pair of threaded holes 2 (501) at positions on both sides of the clamping groove (601), and one side of the mounting block 2 (6) is symmetrically provided with two pairs of fixing bolts 2 (602), and the fixing bolts 2 (602) pass through the mounting block 2 (6) and engage with the threaded holes 2 (501).

6. The device for manually precisely adjusting the verticality of a lens barrel as claimed in claim 1, characterized in that: The mounting seat (4) is provided with a mounting groove (102) between a pair of the connecting blocks (103), and the mounting groove (102) is adapted to the size of the mounting seat (4).

7. The device for manually precisely adjusting the verticality of a lens barrel as claimed in claim 1, characterized in that: The fixing seat (1) is provided with a pair of mounting plates on a side away from the mounting seat (4), and a pair of mounting holes (101) are provided on one side of the pair of mounting plates.

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