Test head for electrical test and electrical test circuit board

Abstract

Some embodiments of the present application disclose a test head for an electrical test. The test head for an electrical test comprises: a first adjustment element; a first probe fixing block and a second probe fixing block, wherein the first adjusting element is connected with the first probe fixing block and the second probe fixing block; the relative position of the first probe fixing block and the second probe fixing block is adjusted through the first adjusting element, so that the distance between the probe containing hole of the first probe fixing block and the probe containing hole of the second probe fixing block is changed. The test head for the electrical test provided by the utility model can at least adapt to the electrical test with different probe spacing requirements. The utility model also provides an electrical test circuit board.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and more specifically, provides a test head for electrical testing and an electrical testing circuit board. Background Art

[0002] In the manufacture of semiconductor structures, it is necessary to perform electrical tests on semiconductor structures at different stages. At present, for different objects to be tested, special probe cards or sockets are required for electrical tests. The probe card is used to detect wafers, while the socket is used to detect packages. Even when the objects to be tested are all packages, the test head of large-size packages cannot be applied to the test of small-size packages. For example, due to the incompatibility of the test software for testing different packages, the same socket cannot be used for electrical tests of different packages; in addition, due to the different patterns of different packages, that is, the pitch of the connection points (such as solder balls, pins) on the package for electrical testing is different, which will cause contact issues between the socket and the connection points of the package. Therefore, even when different packages are electrically tested, different sockets are still required. Therefore, a specific probe card or socket must be made for each package or wafer, which will result in high costs and is not environmentally friendly.

[0003] Although the probe cards or sockets used for electrical testing have different names, their components are roughly the same. Figure 1 The probe card is used as an example for explanation. Figure 1 FIG. 1 is a top view of a probe card 10 used for electrical testing in the prior art. Figure 1 As shown, the probe card 10 includes a load board 12, a test head 14 and a probe 16. One end of the probe 16 contacts the pin of the load board 12, and the other end contacts the connection point of the object to be tested. At present, the production cost of a single probe card 10 or a socket is relatively high. Now it costs hundreds of millions of dollars to produce a probe card every year, and the main cost is mainly used to produce the test head part. Therefore, a test head that can adapt to various electrical test requirements is urgently needed to replace the specific test head in the prior art to reduce the production cost. Utility Model Content

[0004] In view of the above problems existing in the prior art, the present application proposes a test head, which can adapt to electrical tests with different probe spacing requirements.

[0005] According to one aspect of the present application, a test head for electrical testing is provided, the test head comprising: a first adjustment element; a first probe fixing block and a second probe fixing block, the first adjustment element being connected to the first probe fixing block and the second probe fixing block; wherein the relative position of the first probe fixing block and the second probe fixing block is adjusted by the first adjustment element to change the spacing between the probe accommodating hole of the first probe fixing block and the probe accommodating hole of the second probe fixing block.

[0006] In one or more embodiments, the first adjustment element is used to adjust the relative position of the first probe fixing block and the second probe fixing block arranged along the first direction in the first direction.

[0007] In one or more embodiments, the test head for electrical testing also includes a second adjustment element and a third probe fixing block connected to the second adjustment element, the third probe fixing block and the first probe fixing block are arranged along a second direction different from the first direction, wherein the second adjustment element is used to adjust the relative position of the first probe fixing block and the third probe fixing block in the second direction.

[0008] In one or more embodiments, a cross-sectional area of ​​the probe receiving hole of the first probe fixing block and a cross-sectional area of ​​the probe receiving hole of the second probe fixing block are different from each other.

[0009] In one or more embodiments, the test head for electrical testing further includes a knob, wherein the knob is used to adjust the diameter of the probe receiving hole of the first probe fixing block.

[0010] In one or more embodiments, the test head for electrical testing also includes a third adjustment element and a fourth probe fixing block, and the first probe fixing block, the second probe fixing block and the fourth probe fixing block are arranged sequentially along the first direction, wherein the third adjustment element is used to adjust the relative position of the fourth probe fixing block and the second probe fixing block in the first direction.

[0011] In one or more embodiments, the test head for electrical testing also includes a fourth adjustment element and a fifth probe fixing block, and the third probe fixing block, the first probe fixing block and the fifth probe fixing block are arranged sequentially along the second direction, wherein the fourth adjustment element is used to adjust the relative position of the fifth probe fixing block and the first probe fixing block in the second direction.

[0012] In one or more embodiments, the first adjustment element includes a telescopic spring shaft, and the relative positions of the first probe fixing block and the second probe fixing block are adjusted by the telescopic spring shaft being extended or retracted.

[0013] In one or more embodiments, the probe receiving hole of the first probe fixing block and the probe receiving hole of the second probe fixing block are both round holes and have the same diameter as each other.

[0014] According to another aspect of the present application, an electrical test circuit board is provided, which includes: an electrical connection base plate; a test head, located above the electrical connection base plate, the test head includes a first probe fixing block and a second probe fixing block, and the spacing between the probe accommodating hole of the first probe fixing block and the probe accommodating hole of the second probe fixing block is adjustable; and a first probe and a second probe, which respectively and one-to-one pass through the probe accommodating hole of the first probe fixing block and the probe accommodating hole of the second probe fixing block to be electrically connected to the electrical connection base plate, the electrical connection base plate is a first carrier plate, the first carrier plate has a first pin and a second pin, and the first pin and the second pin have a first spacing between them, wherein the first probe and the second probe respectively form an electrical connection with the electrical connection base plate with the first pin and the second pin.

[0015] In one or more embodiments, the electrical test circuit board also includes a cover plate, the cover plate includes a first through hole and a second through hole, the first probe and the second probe respectively have protruding sections protruding from the probe accommodating hole of the first probe fixing block and the probe accommodating hole of the second probe fixing block, wherein the protruding section of the first probe and the protruding section of the second probe pass through the first through hole and the second through hole, respectively.

[0016] In one or more embodiments, the test head further includes a frame for supporting the first probe fixing block and the second probe fixing block, and the electrically connecting base plate and the frame of the test head are fixed by screws.

[0017] In one or more embodiments, the footprint of the electrical connection base plate is larger than the footprint of the test head.

[0018] According to another aspect of the present application, a test head for electrical testing is provided, which includes: a plurality of probe fixing blocks, wherein the spacing between at least an adjacent pair of probe fixing blocks among the plurality of probe fixing blocks is adjustable, and the diameter of the probe accommodating hole of at least one probe fixing block among the plurality of probe fixing blocks is adjustable.

[0019] In one or more embodiments, the test head for electrical testing further includes a first adjustment element, and the first adjustment element is used to adjust the distance between the pair of probe fixing blocks.

[0020] In one or more embodiments, the first adjustment element adjusts the pitch with an accuracy of 10 micrometers.

[0021] In one or more embodiments, the plurality of probe fixing blocks are arranged in a rectangular array.

[0022] The above technical solution of the present application enables the test head to adapt to electrical tests with different probe spacing requirements by making the spacing between the probe fixing blocks adjustable. In addition, by making the spacing between at least one adjacent pair of probe fixing blocks adjustable and the diameter of the probe receiving hole of at least one probe fixing block adjustable, the test head can at least be adapted to various types of electrical tests. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings required for use in the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can also be obtained based on these drawings without creative work. It is worth noting that according to the standard practice of the industry, the various components are not drawn to scale and are only used for illustration purposes. In fact, for the clarity of discussion, the size of each component can be arbitrarily increased or reduced.

[0024] Figure 1 A schematic top view of a probe card used for electrical testing in the prior art is shown.

[0025] Figure 2 A partial three-dimensional schematic diagram of a test head for electrical testing according to an embodiment of the present application is shown.

[0026] Figure 3 A partial top view schematically shows a plurality of probe fixing blocks according to an embodiment of the present application.

[0027] Figure 4 A partial three-dimensional schematic diagram of a test head for electrical testing according to another embodiment of the present application is shown.

[0028] Figure 5 A partial top view of a plurality of probe fixing blocks according to another embodiment of the present application is shown.

[0029] Figure 6 shows the first adjustment element adjustment Figure 2 Schematic diagram of the spacing between the probe accommodating holes of the probe fixing block in the area.

[0030] Figure 7 shows the first adjustment element adjustment Figure 2 A schematic diagram of the position of a probe receiving hole of a probe fixing block in another area.

[0031] Figure 8 shows the first adjustment element adjustment Figure 4 Schematic diagram of the spacing between the probe accommodating holes of the probe fixing block in the area.

[0032] Fig. 9 shows the first adjustment element adjustment Figure 4 A schematic diagram of the position of a probe receiving hole of a probe fixing block in another area.

[0033] Fig.10 and Fig.11 Schematic diagrams of a first adjustment element according to an embodiment of the present application are respectively shown.

[0034] Fig.12 A partial three-dimensional schematic diagram of a test head for electrical testing according to another embodiment of the present application is shown.

[0035] Fig.13 and Fig.14 Schematic diagrams of a knob according to an embodiment of the present application are respectively shown.

[0036] Fig.15 A partial three-dimensional schematic diagram of an electrical test circuit board according to some embodiments of the present application is shown.

[0037] Figures 16 to 23 Schematic diagrams are shown at various stages of an electrical test using a test head according to an embodiment of the present application. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application belong to the scope of protection of this application.

[0039] The following disclosure provides many different embodiments or examples for realizing different features of the provided subject matter. Specific examples of components and arrangements will be described below to simplify the present invention. Of course, these are merely examples and are not intended to limit the present invention. For example, in the following description, forming a first component above or on a second component may include an embodiment in which the first component and the second component are in direct contact, and may also include an embodiment in which an additional component is formed between the first component and the second component so that the first component and the second component may not be in direct contact. Moreover, the present invention may repeatedly refer to numbers and / or letters in various examples. This repetition is only for simplicity and clarity, and does not itself represent the relationship between the various embodiments and / or configurations discussed.

[0040] In addition, the embodiments in the present application and the features in the embodiments may be combined with each other in the absence of conflicts. The present application will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments. It should be understood that the specific structures shown in the drawings are only for the sake of convenience of explanation and are not intended to limit the present application. When describing a specific figure, other structures not described in the drawings may be provided according to actual needs and are not intended to limit the present application.

[0041] Figure 2 FIG. 1 is a partial three-dimensional schematic diagram of a test head 100 for electrical testing according to an embodiment of the present application. Figure 2 As shown, the test head 100 for electrical testing includes a first adjustment element 102A1, a first probe fixing block 104A1, and a second probe fixing block 104A2. The first adjustment element 102A1 is connected to the first probe fixing block 104A1 and the second probe fixing block 104A2. The first probe fixing block 104A1 has a probe accommodating hole, and the second probe fixing block 104A2 has a probe accommodating hole. The relative position of the first probe fixing block 104A1 and the second probe fixing block 104A2 is adjusted by the first adjustment element 102A1 to change the distance between the probe accommodating hole of the first probe fixing block 104A1 and the probe accommodating hole of the second probe fixing block 104A2. Therefore, the test head 100 of the electrical test of the embodiment of the present application can change the spacing between the probe receiving hole of the first probe fixing block 104A1 and the probe receiving hole of the second probe fixing block 104A2 through the first adjustment element 102A1, so that at least the test head 100 can replace multiple specific test heads with the same spacing in the prior art to adapt to electrical tests with different probe spacing requirements. In addition, since the test head 100 of the embodiment of the present application can adapt to electrical tests with different probe spacing requirements, the cost of manufacturing the test head is reduced.

[0042] Figure 3 FIG. 1 is a partial top view of a plurality of probe fixing blocks 104 according to an embodiment of the present application. According to another aspect of the present application, another test head 100 for electrical testing is provided. Figure 2 and Figure 3, the test head 100 includes a plurality of probe fixing blocks 104, the spacing between at least a pair of adjacent probe fixing blocks among the plurality of probe fixing blocks 104 is adjustable, and the diameter of the probe receiving hole of at least one probe fixing block among the plurality of probe fixing blocks 104 is adjustable. Accordingly, the test head 100 for electrical testing of this embodiment of the present application can be universal by making the spacing between at least a pair of adjacent probe fixing blocks 104 among the plurality of probe fixing blocks 104 adjustable, and making the diameter of the probe receiving hole of at least one probe fixing block 104 among the plurality of probe fixing blocks 104 adjustable, and it can replace a plurality of test heads in the prior art (for example, replacing a plurality of package-level and wafer-level test heads) to be applicable to various types of electrical tests with different spacing sizes and different diameter size requirements. In some embodiments, the plurality of probe fixing blocks 104 are arranged in a rectangular array. In some embodiments, the test head 100 may include a first adjustment element 102A1 for adjusting the spacing between the pair of probe fixing blocks. In this embodiment, the pair of probe fixing blocks of the plurality of probe fixing blocks 104 may be a first probe fixing block 104A1 and a second probe fixing block 104A2 .

[0043] In some embodiments, the first probe fixing block 104A1 and the second probe fixing block 104A2 are arranged along the first direction X, and the first adjustment element 102A1 is used to adjust the relative position of the first probe fixing block 104A1 and the second probe fixing block 104A2 in the first direction X. It can be understood that, according to the different probe spacings required by the DUT to be electrically tested, the first adjustment element 102A1 can adjust the relative position of the first probe fixing block 104A1 and the second probe fixing block 104A2 in the first direction X, so as to increase or decrease the spacing between the probe accommodating holes of the first probe fixing block 104A1 and the probe accommodating holes of the second probe fixing block 104A2, so as to adapt to electrical tests with different probe spacing requirements in the first direction X.

[0044] Figure 4 FIG. 1 is a partial three-dimensional schematic diagram of a test head 100 for electrical testing according to another embodiment of the present application. For simplicity, Figure 4 The first adjustment element 102A1 is omitted. Figure 3 and Figure 4In some embodiments, the test head 100 further includes a second adjustment element 102A2 and a third probe fixing block 104A3 connected to the second adjustment element 102A2. The third probe fixing block 104A3 and the first probe fixing block 104A1 are arranged along a second direction Y different from the first direction X. The second adjustment element 102A2 is used to adjust the relative position of the first probe fixing block 104A1 and the third probe fixing block 104A3 in the second direction Y. In some embodiments, the first direction X is orthogonal to the second direction Y. Accordingly, according to the different probe spacings required by the DUT to be electrically tested, the second adjustment element 102A2 can adjust the relative position of the third probe fixing block 104A3 and the first probe fixing block 104A1 in the second direction Y, so as to increase or decrease the spacing between the probe receiving holes of the third probe fixing block 104A3 and the probe receiving holes of the first probe fixing block 104A1, so as to adapt to electrical tests with different probe spacing requirements in the second direction Y.

[0045] Figure 5 A partial top view of a plurality of probe fixing blocks 104 according to another embodiment of the present application is shown. Figure 3 The top view shown is similar, except that, after adjustment by the first adjustment element 102A1 and the second adjustment element 102A2 , the spacing between the plurality of probe fixing blocks 104 is changed so that the spacing between the probe receiving holes of adjacent probe fixing blocks 104 becomes larger.

[0046] In some embodiments, the first adjustment element 102A1 can adjust the pitch with an accuracy of 10 microns. Figure 2 , Figure 3 , Figure 6 and Figure 7 To explain in detail, for simplicity, Figure 6 and Figure 7 Only the probe receiving hole is shown. Figure 6 The first adjustment element 102A1 adjusts Figure 2 Schematic diagram of the distance between the probe receiving hole a of the first probe fixing block 104A1 and the probe receiving hole b of the second probe fixing block 104A2 in the area 116. Figure 2 , Figure 3 and Figure 6As shown, in the first direction X, the first adjusting element 102A1 can move the second probe fixing block 104A2 toward (or away from) the first probe fixing block 104A1, or the first probe fixing block 104A1 can move toward (or away from) the second probe fixing block 104A2, or the first probe fixing block 104A1 and the second probe fixing block 104A2 (not shown) can be moved at the same time, so that the distance between the probe receiving hole a of the first probe fixing block 104A1 and the probe receiving hole b of the second probe fixing block 104A2 becomes smaller (or larger). In some embodiments, the first adjusting element 102A1 can adjust the relative positions of all the probe fixing blocks 104 in the first direction X, Figure 7 The first adjustment element 102A1 is shown in FIG. Figure 2 FIG. 1 is a schematic diagram showing the position of a probe receiving hole c of a probe fixing block 104 in the region 118 in the first direction X. Figure 2 , Figure 3 and Figure 7 , the probe receiving hole c of the probe fixing block 104 is moved from the first position 150 to the second position 152 by the first adjusting element 102A1, and the distance between the first position 150 and the second position 152 is D1 (e.g., 1 mm). The probe receiving hole c of the probe fixing block 104 can also be moved from the third position 154 to the fourth position 156 by the first adjusting element 102A1, and the distance between the third position 154 and the fourth position 156 is D2 (e.g., 1.5 mm). In the process of moving the probe receiving hole c of the probe fixing block 104 from the first position 150 to the second position 152 (or from the third position 154 to the fourth position 156), each time the sound of the first adjusting element 102A1 is heard, the first adjusting element 102A1 can move the probe receiving hole c of the probe fixing block 104 in the area 118 by 10 microns, that is, the precision of adjusting the spacing by the first adjusting element 102A1 is 10 microns.

[0047] In some other embodiments, the second adjustment element 102A2 may also adjust the spacing with an accuracy of 10 microns. Figure 3 , Figure 4 , Figure 8 and Fig. 9 To explain in detail, for simplicity, Figure 8 and Fig. 9 In some embodiments, the second adjustment element 102A2 can adjust the relative positions of all the probe fixing blocks 104 in the second direction Y. Figure 8 The second adjustment element 102A2 adjusts Figure 4The schematic diagram of the distance between the probe receiving holes d and e of a pair of probe fixing blocks 104 adjacent to each other in the second direction Y in the region 120 shown. In the second direction Y, the second adjustment element 102A2 can move one probe fixing block of the pair of probe fixing blocks 104 toward (or away from) the other probe fixing block, or can also move the pair of probe fixing blocks 104 at the same time (not shown), so that the distance between the probe receiving holes d and e of the pair of probe fixing blocks 104 becomes smaller (or larger). Fig. 9 The second adjustment element 102A2 adjusts Figure 4 Schematic diagram of the position of the probe receiving hole f of a probe fixing block 104 in the area 122 in the second direction Y. Figure 3 , Figure 4 and Fig. 9 , the probe receiving hole f of the probe fixing block 104 is moved from the fifth position 158 to the sixth position 160 by the second adjusting element 102A2, and the distance between the fifth position 158 and the sixth position 160 is D3 (e.g., 1 mm). The probe receiving hole f of the probe fixing block 104 can also be moved from the seventh position 162 to the eighth position 164 by the second adjusting element 102A2, and the distance between the seventh position 162 and the eighth position 164 is D4 (e.g., 1.5 mm). In the process of moving the probe receiving hole f of the probe fixing block 104 from the fifth position 158 to the sixth position 160 (or from the seventh position 162 to the eighth position 164), each time the sound of the tenon of the second adjusting element 102A2 is heard, the probe receiving hole f of the probe fixing block 104 in the area 122 can be moved by 10 microns by the second adjusting element 102A2, that is, the precision of the second adjusting element 102A2 in adjusting the spacing is 10 microns.

[0048] In some embodiments, the configuration of the second tuning element 102A2 may be the same as the configuration of the first tuning element 102A1. Figure 2 , Fig.10 and Fig.11 The first adjustment element 102A1 is taken as an example for description. Fig.10 and Fig.11 Schematic diagrams of a first adjustment element 102A1 according to an embodiment of the present application are shown respectively, Fig.10 is a schematic diagram of the first rotating disk 108 of the first adjusting element 102A1 rotating clockwise, and Fig.11 FIG. 1 is a schematic diagram of the first rotating disk 108 of the first adjusting element 102A1 rotating counterclockwise. For simplicity, the first rotating disk 108 is omitted. Fig.10 and Fig.11In some embodiments, the first adjustment element 102A1 includes a telescopic spring shaft 110, and the relative positions of the first probe fixing block 104A1 and the second probe fixing block 104A2 are adjusted by the telescopic spring shaft 110. For details, see Fig.10 and Fig.11 As shown, in some embodiments, the first adjustment element 102A1 includes a first turntable 108, a telescopic spring shaft 110, and a first transmission bearing 109 wound by the telescopic spring shaft. In this embodiment, the probe fixing block is located between the spring coils of the telescopic spring shaft 110 and is connected to the first transmission bearing 109. When the first turntable 108 is manually rotated clockwise, the first transmission bearing 109 will drive the telescopic spring shaft 110 to reduce the spacing between the probe fixing blocks, thereby reducing the spacing between the probes. When the first turntable 108 is manually rotated counterclockwise, the transmission bearing 109 will drive the telescopic spring shaft 110 to enlarge the spacing between the probe fixing blocks, thereby enlarging the spacing between the probes. After the spacing between the probe fixing blocks is adjusted, the measurement probe can be installed to perform measurement. However, the structure of the first adjustment element 102A1 is not limited to this, and any structure that can adjust the spacing between multiple probe fixing blocks is acceptable. When the precision of the first transmission bearing 109 is 5 microns, the first rotating disk 108 is set to a scale of 5 microns, and then adjusted according to the spacing of the samples to be tested for electrical properties.

[0049] Return to reference Figures 2 to 4 In the following description, for simplicity, the arrangement along the first direction X is referred to as a row, and the arrangement along the second direction Y is referred to as a column. In some embodiments, the first adjustment element 102A1 can adjust the relative positions between the probe fixing blocks 104 in all rows arranged along the first direction X. In some embodiments, the second adjustment element 102A2 can adjust the relative positions between the probe fixing blocks 104 in all columns arranged along the second direction Y. In other embodiments, the probe fixing blocks can be controlled in sections or partitions, that is, multiple adjustment elements are provided to achieve more different spacing configurations.

[0050] Specifically, in some embodiments, the test head 100 may further include a third adjustment element (not shown) and a fourth probe fixing block 104A4, and the first probe fixing block 104A1, the second probe fixing block 104A2 and the fourth probe fixing block 104A4 are sequentially arranged along the first direction X, and the third adjustment element is used to adjust the relative position of the fourth probe fixing block 104A4 and the second probe fixing block 104A2 in the first direction X. That is, by setting the first adjustment element 102A1 and the third adjustment element to respectively change the spacing between the probe accommodating holes of the first probe fixing block 104A1 and the probe accommodating holes of the second probe fixing block 104A2, and the spacing between the probe accommodating holes of the fourth probe fixing block 104A4 and the probe accommodating holes of the second probe fixing block 104A2, the probe fixing blocks 104 may be controlled in sections to achieve different spacing configurations in the first direction X.

[0051] In some embodiments, the test head 100 may further include a fourth adjustment element (not shown) and a fifth probe fixing block 104A5, and the third probe fixing block 104A3, the first probe fixing block 104A1 and the fifth probe fixing block 104A5 are sequentially arranged along the second direction Y, wherein the fourth adjustment element is used to adjust the relative position of the fifth probe fixing block 104A5 and the first probe fixing block 104A1 in the second direction Y. That is, the second adjustment element 102A2 and the fourth adjustment element are used to respectively change the spacing between the probe accommodating holes of the first probe fixing block 104A1 and the probe accommodating holes of the third probe fixing block 104A3, and the spacing between the probe accommodating holes of the fifth probe fixing block 104A5 and the probe accommodating holes of the first probe fixing block 104A1, so that the probe fixing blocks 104 can be controlled in sections to achieve different spacing configurations in the second direction Y.

[0052] In some embodiments, the cross-sectional area of ​​the probe receiving hole of the first probe fixing block 104A1 and the cross-sectional area of ​​the probe receiving hole of the second probe fixing block 104A2 are the same as each other, see Figure 3 and Figure 5 As shown. However, the present application is not limited thereto, and in other embodiments, the cross-sectional area of ​​the probe accommodating hole of the first probe fixing block 104A1 and the cross-sectional area of ​​the probe accommodating hole of the second probe fixing block 104A2 are different from each other (not shown). In one embodiment, the probe accommodating hole of the first probe fixing block 104A1 and the probe accommodating hole of the second probe fixing block 104A2 are both circular holes, in which case the diameter of the probe accommodating hole of the first probe fixing block 104A1 and the diameter of the probe accommodating hole of the second probe fixing block 104A2 may be the same as or different from each other. Fig.12 FIG. 1 is a partial three-dimensional schematic diagram of a test head 100 for electrical testing according to another embodiment of the present application. For simplicity, Fig.12The first adjustment element 102A1 and the second adjustment element 102A2 are omitted. Fig.12 In some embodiments, the test head 100 may further include a knob 106 for adjusting the diameter of the probe receiving hole of the first probe fixing block 104A1. In some embodiments, the knob 106 may also be used to adjust the diameter of the probe receiving holes of multiple probe fixing blocks.

[0053] Fig.13 and Fig.14 Schematic diagrams of the knob 106 according to an embodiment of the present application are shown respectively, Fig.13 is a schematic diagram of the second dial 112 of the knob 106 rotating clockwise, and Fig.14 FIG. 1 is a schematic diagram of the second dial 112 of the knob 106 rotating counterclockwise, which is simplified for simplicity. Fig.13 and Fig.14 For details, see Fig.13 and Fig.14 As shown, in some embodiments, the knob 106 includes a second turntable 112, a second transmission bearing 113 connected to the second turntable 112, and a gear tenon 114 connected to the second transmission bearing 113. Taking the first probe fixing block 104A1 as an example, in this embodiment, the first probe fixing block 104A1 is a fixture tenon, and the fixture tenon is located between the gear tenons 114 and connected to the second transmission bearing 113. When the second turntable 112 is manually rotated clockwise, the second transmission bearing 113 will drive the gear tenon 114 to enlarge the diameter of the probe receiving hole of the probe fixing block, and when the second turntable 112 is manually rotated counterclockwise, the second transmission bearing 113 will drive the gear tenon 114 to reduce the diameter of the probe receiving hole of the first probe fixing block 104A1. After the diameter of the probe receiving hole of the probe fixing block is adjusted, the measuring probe device can be mounted and locked so as not to shake. However, the structure of the knob 106 is not limited thereto, and any structure that can adjust the diameter of the probe receiving holes of the plurality of probe fixing blocks is acceptable. In some embodiments, the second turntable 112 of the knob 106 is a detachable turntable. When the precision of the second transmission bearing 113 is 5 microns, the second turntable 112 is set to a scale of 5 microns, and then adjusted in accordance with the spacing of the samples to be tested for electrical properties.

[0054] According to another aspect of the present application, an electrical test circuit board is also provided, Fig.15 Provide detailed explanation. Fig.15 FIG. 2 shows a partial three-dimensional schematic diagram of an electrical test circuit board 200 according to some embodiments of the present application. Fig.15As shown, the electrical test circuit board 200 includes an electrical connection base plate 202, a test head 100 located above the electrical connection base plate 202, and a first probe 204A1 and a second probe 204A2. The test head 100 includes a first probe fixing block 104A1 and a second probe fixing block 104A2, and the spacing between the probe receiving hole of the first probe fixing block 104A1 and the probe receiving hole of the second probe fixing block 104A2 is adjustable, and the first probe 204A1 and the second probe 204A2 pass through the first probe fixing block 104A1 and the second probe 204A2 respectively and one by one. The probe receiving hole of the fixed block 104A1 and the probe receiving hole of the second probe fixing block 104A2 are provided with the first probe 204A1 and the second probe 204A2 electrically connected to the electrically connected base plate 202. The electrically connected base plate 202 is a first carrier plate. The first carrier plate has a first pin and a second pin. The first carrier plate has a first pin and a second pin (not shown). The first pin and the second pin have a first spacing. The first probe 204A1 and the second probe 204A2 respectively form an electrical connection with the electrically connected base plate 202 with the first pin and the second pin. Compared with the probe card or socket with a specific test head in the prior art, the spacing between the probe fixing blocks of the test head 100 in the electrical test circuit board 200 of the embodiment of the present application is adjustable, so that the test head 100 can replace multiple specific test heads with the same spacing, thereby at least reducing the manufacturing cost of manufacturing the electrical test circuit board 200.

[0055] In some embodiments, the electrical connection base plate 202 may be a second carrier plate different from the first carrier plate, and the spacing between adjacent pins (not shown) of the second carrier plate is different from the spacing between adjacent pins (not shown) of the first carrier plate, and the adjacent pins of the first carrier plate and the adjacent pins of the second carrier plate are respectively used to electrically connect with the first probe 204A1 and the second probe 204A2. Accordingly, according to the different objects to be tested, the probe fixing block of the test head 100 can be adjusted to meet the requirements of the objects to be tested, and the first carrier plate or the second carrier plate and the probes with pins of corresponding spacing are selected to perform electrical testing on the objects to be tested.

[0056] In some embodiments, the electrical test circuit board 200 may further include a cover plate 206, the cover plate 206 includes a first through hole 208A1 and a second through hole 208A2, the first probe 204A1 and the second probe 204A2 respectively have protruding sections protruding from the probe receiving hole of the first probe fixing block 104A1 and the probe receiving hole of the second probe fixing block 104A2, and the protruding section of the first probe 204A1 and the protruding section of the second probe 204A2 respectively pass through the first through hole 208A1 and the second through hole 208A2. In some embodiments, the electrical test circuit board 200 may include a plurality of probes 204, and the plurality of probes 204 correspond one-to-one to the plurality of through holes of the cover plate 206 and the plurality of probe receiving holes of the plurality of probe fixing blocks 104. By passing the protruding sections of the probes 204 through the multiple through holes of the cover plate 206 one by one, the cover plate 206 can make the probes 204 more stable, thereby protecting the probes 204 from damage during the electrical test.

[0057] In some embodiments, the test head 100 may further include a frame 210 for supporting the first probe fixing block 104A1 and the second probe fixing block 104A2, and the frame 210 of the test head 100 is fixed to the electrical connection base plate 202 by screws 212. In some embodiments, the frame 210 may support all the probe fixing blocks 104. Figure 2 , Figure 4 as well as Fig.12 The first adjustment element 102A1, the second adjustment element 102A2 and the knob 106 are shown as being disposed on the frame 210, but the present application is not limited thereto, as long as the purpose of adjusting the plurality of probe fixing blocks 104 can be achieved. In some embodiments, the footprint of the electrical connection base plate 202 is larger than the footprint of the test head 100.

[0058] Figures 16 to 23 Schematic diagrams are shown at various stages of an electrical test using the test head 100 according to an embodiment of the present application.

[0059] Fig.16 The diagram shows a schematic diagram of the knob 106 adjusting the diameter size of the probe receiving holes of the plurality of probe fixing blocks 104 . Fig.16 The probe receiving holes of the probe fixing block 104 in the upper left corner and the lower right corner are magnified in the area 124 and the area 126, respectively, in order to clearly show the change in the diameter of the probe receiving holes of the probe fixing block 104. Fig.16 The probe 204 is also shown in the upper left corner. According to the different probe sizes required by the object to be tested for electrical testing, the knob 106 can adjust the diameter of the probe receiving holes of all the probe fixing blocks 104, for example Fig.16As shown in the upper left and lower right corners, the diameter 1 (e.g., 5 microns) of the probe accommodating hole of the probe fixing block 104 can be adjusted to a diameter 2 (e.g., 10 microns) that is larger than the diameter 1, or the diameter 2 of the probe accommodating hole of the probe fixing block 104 can be reduced to the diameter 1.

[0060] Fig.17 The schematic diagram shows that the second adjustment element 102A2 adjusts the relative positions between a plurality of probe fixing blocks 104 arranged in the second direction Y. Fig.17 The upper right corner and the lower left corner respectively magnify the probe receiving holes of the probe fixing block 104 in the area 122 and the area 120. According to the requirements of the object to be tested, the relative positions of all the probe fixing blocks 104 in the second direction Y can be adjusted by the second adjustment element 102A2 to change the spacing between the probe receiving holes of the plurality of probe fixing blocks 104. For example, referring to Fig.17 The probe receiving holes of the probe fixing block 104 in the area 122 and the area 120 shown in the upper right corner and the lower left corner of Fig. 9 and Figure 8 The contents described in are similar and will not be repeated here.

[0061] Fig.18 The schematic diagram of the first adjustment element 102A1 adjusting the relative positions between a plurality of probe fixing blocks 104 arranged in the first direction X is shown. Fig.18 The upper left corner and the lower right corner respectively magnify the probe receiving holes of the probe fixing block 104 in the area 118 and the area 116. According to the requirements of the object to be tested, the relative positions of all the probe fixing blocks 104 in the first direction X can be adjusted by the first adjustment element 102A1 to change the spacing between the probe receiving holes of the plurality of probe fixing blocks 104, for example Fig.18 The probe receiving holes of the probe fixing block 104 in the area 118 and the area 116 shown in the upper left corner and the lower right corner of Figure 7 and Figure 6 The contents described in are similar and will not be repeated here.

[0062] Fig.19 The schematic diagram shows that the probes are placed one by one in the probe receiving holes of the plurality of probe fixing blocks 104 . Fig.19 The upper right corner and the lower right corner of the diagram respectively magnify the probe fixing block 104 in the area 136 and the area 138 and the probes 204 located in the probe receiving holes of the probe fixing block 104. In some embodiments, the corresponding probes 204 are inserted one by one into the probe receiving holes of the plurality of probe fixing blocks 104 from top to bottom. In this process, an electrostatic finger set probe may be used. For example Fig.19 The upper right corner and the lower right corner of respectively show the use of the electrostatic finger set probe 204 and the probe 204 inserted into the probe receiving hole.

[0063] Fig. 20 A schematic diagram of placing the cover plate 206 is shown. After the probes 204 are inserted, the cover plate 206 with corresponding spacing can be placed from top to bottom to avoid damage to the probes during the electrical test.

[0064] Fig.21 A schematic diagram of aligning the test head 100 with the electrical connection base plate 202 is shown. After placing the cover plate 206, the probes 204 located in the test head 100 can be aligned with the pins (not shown) of the electrical connection base plate 202, and the test head 100 and the electrical connection base plate 202 can be locked with screws 140 (e.g., hexagonal screws) to form an electrical test circuit board 200. In some embodiments, the electrical connection base plate 202 can be a printed circuit board (PCB). Fig.21 The lower portion of the enlarged area 142 shows the locking of the screws 140 on the test head 100 and the electrical connection base plate 202 after the test head 100 and the electrical connection base plate 202 are aligned.

[0065] Fig. 22 FIG. 1 shows a schematic diagram of assembling the object under test 144 onto the electrical test circuit board 200. Specifically, the connection points for electrical testing of the object under test 144 are connected to the probes of the electrical test circuit board 200. Fig. 22 After the assembly is completed as shown, the sample is assembled with the socket board and moved to the test facility, such as Fig.23 Afterwards, according to the test sequence number of the electrical connection base plate 202, the cable 146 is plugged in, and the other end of the cable 146 is connected to the test machine 148 to perform electrical testing.

[0066] The test head provided by the utility model makes the spacing between the probe fixing blocks adjustable, so that at least the test head can adapt to a variety of electrical tests with different probe spacing requirements. In addition, by making the spacing between at least one adjacent pair of probe fixing blocks adjustable, and the diameter of the probe receiving hole of at least one probe fixing block adjustable, at least the test head is made common to be applicable to various types of various electrical tests. Accordingly, the test head provided by the utility model can adapt to a variety of electrical tests. For example, the test head can be used to detect different wafers and can also be used to detect different packages, thereby significantly reducing the cost of making the test head and reducing the cost of making the electrical test circuit board. The electrical test circuit board including the test head in the present application can be used with the corresponding software program to perform electrical testing to quickly transfer out the test file.

[0067] It should be understood that the various features of the various embodiments of the present application can be replaced and combined. The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any combination of the various embodiments within the spirit and principle of the present application, as well as any modification, equivalent replacement, improvement, etc. made to the embodiments, shall be included in the protection scope of the present application.

Claims

1. A test head for electrical testing, characterized in that: include: a first adjustment element; a first probe fixing block and a second probe fixing block, wherein the first adjustment element is connected to the first probe fixing block and the second probe fixing block; The relative positions of the first probe fixing block and the second probe fixing block are adjusted by the first adjusting element to change the distance between the probe accommodating hole of the first probe fixing block and the probe accommodating hole of the second probe fixing block.

2. The test head for electrical testing according to claim 1, characterized in that: The first adjusting element is used to adjust the relative position of the first probe fixing block and the second probe fixing block arranged along the first direction.

3. The electrical test head according to claim 2, characterized in that: It also includes a second adjustment element and a third probe fixing block connected to the second adjustment element, wherein the third probe fixing block and the first probe fixing block are arranged along a second direction different from the first direction, The second adjusting element is used to adjust the relative position of the first probe fixing block and the third probe fixing block in the second direction.

4. The test head for electrical testing according to claim 1, characterized in that: A cross-sectional area of ​​the probe accommodating hole of the first probe fixing block and a cross-sectional area of ​​the probe accommodating hole of the second probe fixing block are different from each other.

5. The test head for electrical testing according to claim 4, characterized in that: It also includes a knob, wherein the knob is used to adjust the diameter of the probe accommodating hole of the first probe fixing block.

6. The test head for electrical testing according to claim 2, characterized in that: It also includes a third adjustment element and a fourth probe fixing block, and the first probe fixing block, the second probe fixing block and the fourth probe fixing block are arranged in sequence along the first direction, The third adjusting element is used to adjust the relative position of the fourth probe fixing block and the second probe fixing block in the first direction.

7. The test head for electrical testing according to claim 3, characterized in that: It also includes a fourth adjustment element and a fifth probe fixing block, and the third probe fixing block, the first probe fixing block and the fifth probe fixing block are arranged in sequence along the second direction, The fourth adjusting element is used to adjust the relative position of the fifth probe fixing block and the first probe fixing block in the second direction.

8. The test head for electrical testing according to claim 1, characterized in that: The first adjustment element includes a telescopic spring shaft, and the relative positions of the first probe fixing block and the second probe fixing block are adjusted by the telescopic spring shaft.

9. An electrical test circuit board, characterized in that: include: Electrically connected to the base plate; A test head, located above the electrical connection base plate, the test head comprising a first probe fixing block and a second probe fixing block, and a distance between the probe receiving hole of the first probe fixing block and the probe receiving hole of the second probe fixing block is adjustable; as well as The first probe and the second probe respectively pass through the probe receiving hole of the first probe fixing block and the probe receiving hole of the second probe fixing block in a one-to-one correspondence to be electrically connected to the electrical connection base plate. The electrically connected base plate is a first carrier plate, the first carrier plate has a first pin and a second pin, and a first distance exists between the first pin and the second pin. The first probe and the second probe respectively form the electrical connection with the first pin and the second pin to form the electrical connection with the electrical connection base plate.

10. The electrical testing circuit board according to claim 9, characterized in that: The apparatus further includes a cover plate, the cover plate including a first through hole and a second through hole, the first probe and the second probe respectively having protruding sections protruding from the probe accommodating hole of the first probe fixing block and the probe accommodating hole of the second probe fixing block, The protruding section of the first probe and the protruding section of the second probe pass through the first through hole and the second through hole respectively.

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