Detection tray

Abstract

The utility model provides a detection tray, which relates to the field of substrate detection and comprises an electrostatic plate and a bearing jig, the bearing jig is made of insulating materials, a bearing table top used for bearing a substrate is arranged on the surface of one side of the bearing jig, the electrostatic plate is made of conductive materials, and the electrostatic plate is made of conductive materials. The static electricity eliminating device is detachably attached to the side, away from the bearing table top, of the bearing jig and used for eliminating static electricity around the bearing jig. Compared with the prior art, the utility model adopts the insulating material to bear the substrate so as to reduce the generation of static electricity, and the electrostatic plate is additionally arranged so as to eliminate the static electricity around the jig, thereby avoiding the influence on devices on the substrate caused by electrostatic breakdown when the substrate is checked.

Description

Technical Field

[0001] The utility model relates to the field of substrate detection, in particular to a detection tray. Background Art

[0002] With the rapid development of the semiconductor industry, after the substrate is prepared, it is usually necessary to detect whether there are defects on the front side of the substrate and the back side of the substrate. In the prior art, a detection tray is usually used to carry and place the defects on the detection substrate. However, the existing detection tray is made of metal material, which is easy to generate static electricity around and on the surface of the metal material, thereby causing the chip / device on the substrate to fail due to static electricity breakdown, affecting the safety and reliability of the substrate. Utility Model Content

[0003] The utility model aims to provide a detection tray, which can reduce the generation of static electricity and eliminate the static electricity around the fixture, so as to avoid the components on the substrate being affected by static electricity breakdown when inspecting the substrate.

[0004] The embodiment of the utility model is achieved as follows:

[0005] In the first aspect, the utility model provides a detection tray, including an electrostatic plate and a carrying jig, the carrying jig is made of insulating material, and a carrying table for carrying a substrate is provided on one side surface of the carrying jig, the electrostatic plate is made of conductive material, and is detachably attached to a side of the carrying jig away from the carrying table, so as to eliminate static electricity around the carrying jig.

[0006] In an optional embodiment, the detection tray further includes a grounding connector, which is detachably disposed through the electrostatic plate and connected to a side of the carrying fixture away from the carrying table.

[0007] In an optional embodiment, the detection tray also includes a base jig, which is made of an insulating material and is arranged on a side of the electrostatic plate away from the carrier jig, and the grounding connector is detachably arranged on the base jig to connect the base jig, the electrostatic plate and the carrier jig as a whole.

[0008] In an optional embodiment, the grounding connector includes a grounding nut, a first connection hole is opened on the base fixture, a second connection hole is opened on the electrostatic plate, and an electrostatic blind hole is provided on the supporting fixture. The grounding nut passes through the first connection hole and the second connection hole in sequence and is assembled in the electrostatic blind hole.

[0009] In an optional embodiment, the distance between the electrostatic blind hole and the bearing table is between 1 mm and 10 mm.

[0010] In an optional embodiment, there are multiple grounding connectors, and the multiple grounding connectors are arranged at the top corners of the base fixture, and at least one of the grounding connectors is used to connect to a grounding wire.

[0011] In an optional embodiment, an electrostatic groove is formed on a side of the carrying fixture away from the carrying table, and the electrostatic plate is correspondingly mounted in the electrostatic groove.

[0012] In an optional embodiment, an electrostatic groove is formed on a side of the base fixture close to the supporting fixture, and the electrostatic plate is correspondingly mounted in the electrostatic groove.

[0013] In an optional embodiment, the depth of the electrostatic groove is less than or equal to the thickness of the electrostatic plate.

[0014] In an optional embodiment, a substrate placement groove is provided on the carrying table, and two ends of the substrate placement groove pass through the carrying table.

[0015] The beneficial effects of the embodiments of the utility model include:

[0016] The embodiment of the utility model provides a detection tray, which is made of insulating material to make a carrying fixture to reduce static electricity. At the same time, a carrying table is set on one side of the carrying fixture, and the static plate is made of conductive material and detachably attached to the bottom side of the carrying fixture, which can eliminate static electricity around the carrying fixture. Compared with the prior art, the utility model can reduce the generation of static electricity by using insulating material to carry the substrate, and the static plate is added to eliminate static electricity around the fixture, thereby avoiding static electricity breakdown during inspection of the substrate, which may affect the devices on the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 A schematic diagram of the exploded structure of the detection tray provided by an embodiment of the utility model at a first viewing angle;

[0019] Figure 2 A schematic diagram of the assembly structure of a detection tray provided in an embodiment of the utility model;

[0020] Figure 3This is a schematic diagram of the exploded structure of the detection tray provided by an embodiment of the utility model at a second viewing angle.

[0021] icon:

[0022] 100 - detection tray; 110 - electrostatic plate; 111 - second connection hole; 130 - carrying fixture; 131 - electrostatic blind hole; 133 - electrostatic groove; 135 - substrate placement slot; 150 - bottom fixture; 151 - first connection hole; 170 - grounding connector. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0026] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0027] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] As disclosed in the background technology, in the prior art, for testing substrates, a metal test tray is usually used to carry and place the substrate. However, static electricity is easily generated during the use of the tray, and the metal tray may cause the chip or device on the substrate to be broken down by static electricity and fail, affecting the safety and reliability of the substrate. Furthermore, simply replacing the metal tray with a plastic tray can reduce the generation of static electricity, but static electricity will also accumulate on the surface of the tray and cannot be dissipated. In some special cases, the accumulation may also break down the device, affecting the safety and reliability of the substrate.

[0030] In order to solve the above problems, the utility model provides a novel detection tray, and the structure of the detection tray is described in detail below.

[0031] Please refer to Figures 1 to 3 The inspection tray 100 provided in this embodiment can reduce the generation of static electricity and eliminate static electricity around the fixture, thereby avoiding static electricity breakdown during inspection of the substrate, which may affect the devices on the substrate.

[0032] The detection tray 100 provided in this embodiment includes an electrostatic plate 110 and a carrying jig 130. The carrying jig 130 is made of insulating material, and a carrying table for carrying a substrate is provided on one side of the carrying jig 130. The electrostatic plate 110 is made of conductive material and is detachably attached to a side of the carrying jig 130 away from the carrying table to eliminate static electricity around the carrying jig 130.

[0033] In actual use, the electrostatic plate 110 can be installed on the bottom side of the carrier jig 130, and then the top side of the carrier jig 130 is used to support the substrate. Since the carrier jig 130 is made of insulating material, static electricity can be greatly reduced. At the same time, an additional electrostatic plate 110 is designed. The electrostatic plate 110 is made of conductive material and is detachably attached to the bottom side of the carrier jig 130. It can eliminate static electricity around the carrier jig 130 without affecting the substrate, thereby avoiding static electricity breakdown during inspection of the substrate, which may affect the devices on the substrate.

[0034] It should be noted that the material of the jig 130 in this embodiment includes non-metallic materials such as PE (polyethylene), PP (polypropylene), PVC (polyvinyl chloride), anti-static acrylic board, anti-static PVC board (anti-static polyvinyl chloride board), etc., to avoid using metal materials to generate electrostatic conductivity and breakdown of devices on the substrate. In addition, the electrostatic plate 110 in this embodiment can be made of metal materials or conductive polymers, which can dissipate static electricity around the jig, thereby avoiding static electricity breakdown of devices on the substrate when inspecting the substrate.

[0035] Furthermore, the detection tray 100 also includes a grounding connector 170, which is detachably inserted into the electrostatic plate 110 and connected to the side of the carrier jig 130 away from the carrier table. Specifically, the grounding connector 170 can realize a detachable connection between the electrostatic plate 110 and the carrier jig 130, ensuring that the electrostatic plate 110 can be attached to the bottom surface of the carrier jig 130. Of course, in other preferred embodiments of the utility model, the grounding connector 170 may not be provided, and the electrostatic plate 110 may be bonded and fixed to the bottom surface of the carrier jig 130, which can also achieve the effect of eliminating static electricity.

[0036] Furthermore, the detection tray 100 also includes a base fixture, which is made of insulating material and is arranged on the side of the electrostatic plate 110 away from the carrier fixture 130, and the grounding connector 170 is detachably arranged on the base fixture so that the base fixture, the electrostatic plate 110 and the carrier fixture 130 are connected in one piece. Specifically, the grounding connector 170 sequentially connects the base fixture, the electrostatic plate 110 and the carrier fixture 130 in series to achieve fixation, and the setting of the base fixture can ensure the fixed limit of the electrostatic plate 110, avoiding the grounding connector 170 directly applying force to the electrostatic plate 110 and causing the electrostatic plate 110 to deform and fail.

[0037] It should be noted that the material of the grounding connector 170 here can be the same as that of the electrostatic plate 110. Preferably, the grounding connector 170 can be made of metal material, which can fix and contact the electrostatic plate 110, thereby further improving the static electricity elimination function of the electrostatic plate 110.

[0038] In this embodiment, the grounding connector 170 includes a grounding nut, a first connection hole 151 is provided on the base fixture, a second connection hole 111 is provided on the electrostatic plate 110, and an electrostatic blind hole 131 is provided on the supporting fixture 130. The grounding nut passes through the first connection hole 151 and the second connection hole 111 in sequence and is assembled in the electrostatic blind hole 131. Specifically, the first connection hole 151 and the second connection hole 111 are both through holes, and the electrostatic blind hole 131 does not directly penetrate the supporting fixture 130, thereby preventing the grounding connector 170 from directly contacting the substrate. In addition, the electrostatic blind hole 131 is a screw hole, and the grounding nut is threadedly assembled in the electrostatic blind hole 131 to achieve fixation.

[0039] In this embodiment, the distance between the electrostatic blind hole 131 and the bearing table is between 1mm and 10mm. Preferably, the distance between the electrostatic blind hole 131 and the bearing table is 5mm, which can avoid the grounding connector 170 being too close to the substrate as much as possible while ensuring the installation depth.

[0040] In this embodiment, there are multiple grounding connectors 170, and the multiple grounding connectors 170 are arranged at the top corners of the base fixture, and at least one grounding connector 170 is used to connect to the ground wire. Preferably, there can be four grounding connectors 170, and the four grounding connectors 170 are respectively arranged at the four top corners of the base fixture to ensure the fixing effect. And one of the grounding connectors 170 can be connected to the working ground wire, so as to further play the role of static dissipation.

[0041] In this embodiment, an electrostatic groove 133 is provided on one side of the carrying fixture 130 away from the carrying table, and the electrostatic plate 110 is correspondingly assembled in the electrostatic groove 133. Specifically, the shape of the electrostatic groove 133 is adapted to the shape of the electrostatic plate 110, so that the electrostatic plate 110 can be correspondingly adapted in the electrostatic groove 133 to achieve pre-fixation, and ensure that the second connection hole 111 on the electrostatic plate 110 can be accurately aligned with the electrostatic blind hole 131 on the carrying fixture 130.

[0042] Of course, in other preferred embodiments of the present invention, the electrostatic groove 133 can also be set on the base jig, that is, the electrostatic groove 133 is opened on the side of the base jig close to the supporting jig 130, and the electrostatic plate 110 is correspondingly assembled in the electrostatic groove 133. This setting method can make the second connection hole 111 and the first connection hole 151 accurately aligned.

[0043] Further, the depth of the electrostatic groove 133 is less than or equal to the thickness of the electrostatic plate 110. Preferably, the depth of the electrostatic groove 133 is equal to the thickness of the electrostatic plate 110, so that the electrostatic plate 110 can be just accommodated in the electrostatic groove 133, ensuring that the electrostatic plate 110 is flush with the bottom surface of the supporting fixture 130, and the base fixture can be fitted with the bottom surface of the supporting fixture 130.

[0044] In this embodiment, a substrate placement groove 135 is provided on the carrying table, and both ends of the substrate placement groove 135 pass through the carrying table. Specifically, the substrate placement groove 135 is used to place the limiting substrate, and the bottom wall of the substrate placement groove 135 is also spaced apart from the electrostatic blind hole 131.

[0045] In summary, the detection tray 100 provided in this embodiment uses an insulating material to make the supporting fixture 130 to reduce static electricity. At the same time, a supporting table is provided on one side surface of the supporting fixture 130, and the electrostatic plate 110 is made of a conductive material and is detachably attached to the bottom side of the supporting fixture 130, which can eliminate static electricity around the supporting fixture 130. The setting of the grounding connector 170 and the bottom fixture 150 can limit the electrostatic plate 110 and further improve the static electricity dissipation capability. Compared with the prior art, this embodiment can reduce the generation of static electricity by using an insulating material to support the substrate, and the addition of the electrostatic plate 110 can eliminate static electricity around the fixture, thereby avoiding the devices on the substrate being affected by static electricity breakdown when inspecting the substrate.

[0046] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A detection tray, characterized in that: It includes an electrostatic plate and a carrying jig, wherein the carrying jig is made of insulating material, and a carrying table for carrying a substrate is arranged on one side of the carrying jig; the electrostatic plate is made of conductive material and is detachably attached to a side of the carrying jig away from the carrying table to eliminate static electricity around the carrying jig.

2. The detection tray according to claim 1, characterized in that: The detection tray further includes a grounding connector, which is detachably disposed through the electrostatic plate and connected to a side of the carrying fixture away from the carrying table.

3. The detection tray according to claim 2, characterized in that: The detection tray also includes a base jig, which is made of insulating material and is arranged on a side of the electrostatic plate away from the carrying jig. The grounding connector is detachably arranged on the base jig to connect the base jig, the electrostatic plate and the carrying jig into one body.

4. The detection tray according to claim 3, characterized in that: The grounding connector includes a grounding nut, a first connection hole is opened on the base fixture, a second connection hole is opened on the electrostatic plate, and an electrostatic blind hole is arranged on the supporting fixture. The grounding nut passes through the first connection hole and the second connection hole in sequence and is assembled in the electrostatic blind hole.

5. The detection tray according to claim 4, characterized in that: The distance between the electrostatic blind hole and the bearing table is between 1 mm and 10 mm.

6. The detection tray according to claim 3, characterized in that: There are multiple grounding connectors, which are arranged at the top corners of the base fixture, and at least one of the grounding connectors is used to connect to a grounding wire.

7. The detection tray according to claim 3, characterized in that: An electrostatic groove is provided on a side of the carrying fixture away from the carrying table, and the electrostatic plate is correspondingly mounted in the electrostatic groove.

8. The detection tray according to claim 3, characterized in that: An electrostatic groove is provided on one side of the base fixture close to the carrying fixture, and the electrostatic plate is correspondingly mounted in the electrostatic groove.

9. The detection tray according to claim 7 or 8, characterized in that: The depth of the electrostatic groove is less than or equal to the thickness of the electrostatic plate.

10. The detection tray according to claim 1, characterized in that: The carrying table is provided with a substrate placement groove, and both ends of the substrate placement groove penetrate the carrying table.

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