Novel lifting rotating structure capable of transversely moving
The novel lifting and rotating structure addresses the lack of active drive in existing machines by enabling transverse movement and active rotation, enhancing lifting accuracy and adjusting to different materials, thus improving polishing efficiency and reducing surface damage.
Patent Information
- Application Number
- CN202420791438.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-16
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-04-16
AI Technical Summary
Existing polishing machines lack an active drive function for the upper plate, limiting the integrity and uniformity of material processing during chemical mechanical polishing, and result in surface damage and edge defects.
A novel lifting and rotating structure with a rotating seat, spline shaft, and driving motor, enabling transverse movement and active rotation, combined with a lifting cylinder and spline nut mechanism, to enhance lifting accuracy and adjust horizontal position for different materials.
The structure improves lifting and rotating actions, increases grinding and polishing line speed, enhances radial load bearing capacity, and adjusts to various workpieces, improving production efficiency and reducing surface damage.
Smart Images
Figure CN222244303U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of lifting and rotating structures, in particular to a novel lifting and rotating structure capable of moving laterally. Background Art
[0002] With the rapid development of the semiconductor industry, higher and higher requirements are put forward for the integrity, uniformity, surface quality, edge quality, etc. of materials. Single-sided polishing adopts chemical mechanical polishing. There is a thin layer of polishing liquid between the surface of the silicon wafer and the polishing cloth, which corrodes the surface of the silicon wafer and generates a chemical transition layer. Under the joint action of the polishing cloth and the polishing liquid, the surface process damage layer is continuously corroded and removed, and finally a smooth and undamaged edge surface is obtained to prevent problems such as edge collapse and edge defects after epitaxy. At present, most polishing machines use the lower plate to rotate actively, and the upper plate has no active drive function, which has limitations. Utility Model Content
[0003] The utility model aims to provide a novel lifting and rotating structure which can move laterally.
[0004] In order to solve the above technical problems, the purpose of the utility model is achieved as follows:
[0005] A novel lifting and rotating structure capable of transverse movement comprises: a rotating seat and a spline shaft; the rotating seat is slidably arranged on a linear sliding guide rail;
[0006] The spline shaft is rotatably and slidably arranged in the rotating seat, and the top end extends to the top of the rotating seat and is connected to the piston rod of the lifting cylinder fixedly arranged on the rotating seat, and the lifting cylinder is used to achieve up and down sliding;
[0007] The outer sleeve of the spline shaft is provided with a spline nut; the spline nut is rotatably arranged on the rotating seat and rotates synchronously with the spline shaft;
[0008] A driving motor is arranged on one side of the rotating seat; the driving motor is drivingly connected with the spline nut to drive the spline nut and the spline shaft to rotate.
[0009] On the basis of the above scheme and as a preferred scheme of the above scheme, a fixing rod is fixedly provided on the first side of the rotating seat; the fixing rod is arranged vertically, and a cylinder mounting plate is provided on the top of the fixing rod; the lifting cylinder is fixedly provided on the cylinder mounting plate.
[0010] On the basis of the above scheme and as a preferred scheme of the above scheme, it also includes a rotating spindle mounting plate; the rotating spindle mounting plate is fixedly sleeved on the outside of the top end of the spline shaft, and a bearing is arranged between the two to realize a rotational connection; one end of the rotating spindle mounting plate extends to the fixing rod and slidably cooperates with the fixing rod.
[0011] On the basis of the above scheme and as a preferred scheme of the above scheme, it is characterized in that a floating joint and a weighing sensor are arranged between the piston rod of the lifting cylinder and the top end of the spline shaft, and are connected to the rotating spindle mounting plate through a connecting rod.
[0012] On the basis of the above solution and as a preferred solution of the above solution, a mounting plate is fixedly provided on the second side of the rotating seat; and the driving motor is fixedly connected to the mounting plate.
[0013] On the basis of the above scheme and as a preferred scheme of the above scheme, a screw rod is arranged on one side of the linear sliding guide rail; the screw rod is threadedly connected to the bottom of the mounting plate, and one end is transmission-connected to a driving motor arranged on one side of the linear sliding guide rail.
[0014] On the basis of the above scheme and as a preferred scheme of the above scheme, a rotating gear is connected to the output shaft of the driving motor; a passive gear is arranged on the top of the spline nut, and the rotating gear is meshed with the passive gear.
[0015] On the basis of the above scheme and as a preferred scheme of the above scheme, the cross section of the spline shaft is circular, and a plurality of grooves are provided on its edge.
[0016] The beneficial effects of the utility model are as follows: the utility model realizes lifting and rotating actions through the lifting cylinder and the driving motor, and can be adapted to various working conditions. Linear bearings are used between the spline shaft and the rotating seat for lifting and guiding, which improves the lifting accuracy and enhances the radial load bearing capacity; a separate small long cylinder is used for lifting and driving to reduce weight; a driving motor is added, an active rotation function is added, the grinding and polishing line speed is increased, and production efficiency is improved; a side screw structure is added to make the horizontal position of the lifting and rotating structure adjustable, and produce different speeds to adapt to workpieces of different materials. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is a cross-sectional schematic diagram of the utility model.
[0018] Figure 2 for Figure 1 A partial enlarged view.
[0019] Figure 3 for Figure 1 A partial enlarged view of point B.
[0020] Figure 4 It is a schematic cross-sectional view of a spline shaft of the utility model.
[0021] In the figure: 1. rotating seat; 2. spline shaft; 3. linear sliding guide; 4. lifting cylinder; 5. spline nut; 6. driving motor; 7. fixing rod; 8. cylinder mounting plate; 9. floating joint; 10. weighing sensor; 11. rotating spindle mounting plate; 12. mounting plate; 13. screw rod; 14. driving motor; 15. rotating gear; 16. groove; 17. bearing; 18. passive gear; 19. connecting rod. DETAILED DESCRIPTION
[0022] The utility model is further described below in conjunction with the accompanying drawings and specific embodiments.
[0023] like Figure 1 As shown, a novel lifting and rotating structure capable of transverse movement comprises: a rotating seat 1 and a spline shaft 2. The rotating seat 1 is slidably arranged on a linear sliding guide rail 3 to achieve horizontal movement.
[0024] Among them, Figure 4 As shown, the cross section of the spline shaft 2 is preferably circular, and a plurality of grooves 16 are provided on its edge.
[0025] The spline shaft 2 is rotatably and slidably arranged in the rotating seat 1, and the top end extends to the top of the rotating seat 1 and is connected to the piston rod of the lifting cylinder 4 fixedly arranged on the rotating seat 1, and slides up and down through the lifting cylinder 4. A bearing 17 is arranged between the spline shaft 2 and the rotating seat 1 to realize rotation.
[0026] A fixing rod 7 is fixedly arranged on the first side of the rotating seat 1. The fixing rod 7 is arranged vertically, and a cylinder mounting plate 8 is arranged on the top of the fixing rod 7. The lifting cylinder 4 is fixedly arranged on the cylinder mounting plate 8.
[0027] The structure also includes a rotating spindle mounting plate 11. The rotating spindle mounting plate 11 is fixedly sleeved on the outside of the top end of the spline shaft 2 and can be raised and lowered with the spline shaft 2. A bearing 17 is arranged between the rotating spindle mounting plate 11 and the spline shaft 2 to realize the rotation connection. One end of the rotating spindle mounting plate 11 extends to the fixed rod 7 and slides with the fixed rod 7. A guide sleeve is arranged between the rotating spindle mounting plate 11 and the fixed rod 7 to improve the sliding guidance and stability.
[0028] like Figure 1 and Figure 2 As shown, a floating joint 9 and a weighing sensor 10 are provided between the piston rod of the lifting cylinder 4 and the top of the spline shaft 2, and are connected to the rotating spindle mounting plate 11 through a connecting rod 19, driving the rotating spindle mounting plate 11 and the spline shaft 2 to rise and fall. The floating joint 9 is used to adjust the centering, processing error, and axis parallelism error caused by assembly error. The weighing sensor 10 is used to measure the accuracy of pressurization. The lifting cylinder 4 is fixedly connected to the rotating spindle mounting plate 11, which can drive the lifting without affecting the rotation of the spline shaft 2.
[0029] The spline shaft 2 is provided with a spline nut 5. The spline nut 5 is rotatably arranged on the rotating seat 1 and rotates synchronously with the spline shaft 2. The spline nut 5 is adapted to the spline shaft 2 and is in a circular ring structure. A protrusion is provided on the inner side to adapt to the groove 16 of the spline shaft 2, so that relative sliding can be achieved while ensuring that relative rotation is not possible, and torque can be transmitted.
[0030] A driving motor 6 is provided on one side of the rotating seat 1. The driving motor 6 is transmission-connected with the spline nut 5 to drive the spline nut 5 and the spline shaft 2 to rotate. Specifically, a mounting plate 12 is fixedly provided on the second side of the rotating seat 1, and the driving motor 6 is fixedly connected to the mounting plate 12. The mounting plate 12 moves along the linear sliding guide 3 with the rotating seat 1. Preferably, a screw rod 13 is provided on one side of the linear sliding guide 3, and the screw rod 13 is threadedly connected with the bottom of the mounting plate 12, and one end is transmission-connected with a driving motor 14 provided on one side of the linear sliding guide 3. The screw rod 13 is driven to rotate by the driving motor 14, and the screw rod 13 drives the mounting plate 12 and the rotating seat 1 to move horizontally along the linear sliding guide 3.
[0031] like Figure 3 As shown, a rotating gear 15 is connected to the output shaft of the driving motor 6. A driven gear 18 is arranged on the top of the spline nut 5, and the rotating gear 15 meshes with the driven gear 18 to realize torque transmission.
[0032] Action process: The lifting cylinder 4 is installed on the uppermost cylinder mounting plate 8, and is installed on the rotating seat 1 through the fixing rod 7 for lifting and lowering drive. The lifting cylinder 4 is connected to the rotating spindle mounting plate 11 and the spline shaft 2 through the floating joint 9, the weighing sensor 10, and the connecting rod 19. According to the special structure of the spline pair, the spline shaft 2 cannot rotate relative to the spline nut 5, so it can bear the rotating load and radial load. The spline pair is installed in the rotating seat 1 as a whole, and is driven by the driving motor 6 and the rotating gear pair. The entire spline pair and the centering mechanism and grinding disc connected to the spline pair rotate accordingly to complete the rotation action. The servo reduction motor, ball screw pair, and linear sliding guide 3 are installed on the beam or gantry. The lifting and rotating mechanism is connected to the linear guide through the mounting plate 12 and driven by the driving motor 14. The lifting and rotating mechanism completes the horizontal movement.
[0033] The preferred specific embodiments of the utility model are described in detail above. It should be understood that ordinary technicians in this field can make many modifications and changes based on the concept of the utility model without creative work. Therefore, all technical solutions that can be obtained by technicians in this technical field based on the concept of the utility model through logical analysis, reasoning or limited experiments on the basis of the existing technology should be within the scope of protection determined by the claims.
Claims
1. A new type of lifting and rotating structure capable of laterally moving, characterized in that: include: A rotating seat (1) and a spline shaft (2); the rotating seat (1) is slidably arranged on a linear sliding guide rail (3); The spline shaft (2) is rotatably and slidably arranged in the rotating seat (1), and the top end extends to the top of the rotating seat (1) and is connected to the piston rod of the lifting cylinder (4) fixedly arranged on the rotating seat (1), so that the lifting cylinder (4) can slide up and down; The outer sleeve of the spline shaft (2) is provided with a spline nut (5); the spline nut (5) is rotatably arranged on the rotating seat (1) and rotates synchronously with the spline shaft (2); A driving motor (6) is provided on one side of the rotating seat (1); the driving motor (6) is drivingly connected to the spline nut (5) to drive the spline nut (5) and the spline shaft (2) to rotate.
2. A novel lifting and rotating structure capable of transverse movement according to claim 1, characterized in that: A fixing rod (7) is fixedly arranged on the first side of the rotating seat (1); the fixing rod (7) is arranged vertically, and a cylinder mounting plate (8) is arranged on the top of the fixing rod; the lifting cylinder (4) is fixedly arranged on the cylinder mounting plate (8).
3. A new type of lifting and rotating structure capable of transverse movement according to claim 2, characterized in that: It also includes a rotating spindle mounting plate (11); the rotating spindle mounting plate (11) is fixedly sleeved on the outside of the top end of the spline shaft (2), and a bearing (17) is arranged between the two to achieve a rotational connection; one end of the rotating spindle mounting plate (11) extends to the fixing rod (7) and is slidably matched with the fixing rod (7).
4. The novel lifting and rotating structure capable of transverse movement according to claim 3 is characterized in that: A floating joint (9) and a weighing sensor (10) are provided between the piston rod of the lifting cylinder (4) and the top end of the spline shaft (2), and are connected to the rotating spindle mounting plate (11) via a connecting rod (19).
5. The novel lifting and rotating structure capable of transverse movement according to claim 1 is characterized in that: A mounting plate (12) is fixedly arranged on the second side of the rotating seat (1); and the driving motor (6) is fixedly connected to the mounting plate (12).
6. The novel lifting and rotating structure capable of transverse movement according to claim 5 is characterized in that: A screw rod (13) is provided on one side of the linear sliding guide rail (3); the screw rod (13) is threadedly connected to the bottom of the mounting plate (12), and one end of the screw rod is drivingly connected to a driving motor (14) provided on one side of the linear sliding guide rail (3).
7. The novel lifting and rotating structure capable of transverse movement according to claim 1 is characterized in that: A rotating gear (15) is connected to the output shaft of the driving motor (6); a passive gear (18) is arranged on the top of the spline nut (5); and the rotating gear (15) is meshed with the passive gear (18).
8. The novel lifting and rotating structure capable of transverse movement according to claim 1 is characterized in that: The spline shaft (2) has a circular cross section and a plurality of grooves (16) are provided on its edge.