Oblique angle standing transfer trolley for quartz furnace tube production

Abstract

The utility model provides an oblique angle standing transfer trolley for quartz furnace tube production, which comprises a bottom frame, moving wheels and an oblique angle frame, the moving wheels are arranged at the bottom of the bottom frame, and the oblique angle frame is obliquely arranged on the bottom frame; the oblique angle frame is of a U-shaped structure and is provided with a first supporting arm, a second supporting arm and a bottom arm, the first supporting arm and the second supporting arm are arranged on the two sides of the bottom arm in parallel, and the bottom arm is lower than the U-shaped opening end of the oblique angle frame. A plurality of V-shaped supporting arms are arranged between the first supporting arm and the second supporting arm, and rotatable supporting wheels are arranged on the two sides of each V-shaped supporting arm respectively. The transfer trolley is simple and light in structure, easy to master and operate, capable of achieving standing and draining after the quartz furnace tube is cleaned, enabling the quartz furnace tube to be rapidly aired and facilitating transfer operation of the quartz furnace tube, suitable for quartz furnace tubes of different models and high in use flexibility.

Description

Technical Field

[0001] The utility model relates to the field of devices for process furnace production, in particular to an oblique-angle static transfer vehicle for quartz furnace tube production. Background Art

[0002] The equipment used to dope silicon wafers with phosphorus is a high-temperature diffusion furnace. The most widely used high-temperature diffusion furnace is a tubular furnace, which is mainly used for gas phase diffusion. Quartz is resistant to high temperatures, acids and alkalis, so it is widely used in tubular high-temperature diffusion furnaces. After the quartz furnace tube is manufactured, it needs to be cleaned. After cleaning, the tube body needs to be tilted and left to stand for drainage. The traditional method is to manually move the cleaned tube body to a stationary station for drainage. After the tube body is dried, it is manually moved to the next process. The labor intensity is high, and the tube body may be bumped during the transportation process, affecting product quality. Utility Model Content

[0003] The utility model aims to solve the shortcomings in the prior art and proposes an angled static transfer vehicle for quartz furnace tube production, which is convenient for rapid drying and rapid transfer of the tube body.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] An angled static transfer vehicle for producing quartz furnace tubes comprises a base frame, moving wheels and an angled frame, wherein the moving wheels are arranged at the bottom of the base frame, and the angled frame is arranged obliquely on the base frame; the angled frame is a U-shaped structure, and the angled frame has a first support arm, a second support arm and a bottom arm, the first support arm and the second support arm are arranged parallel to each other on both sides of the bottom arm, and the bottom arm is lower than the U-shaped opening end of the angled frame; a plurality of V-shaped support arms are arranged between the first support arm and the second support arm.

[0006] Preferably, rotatable support wheels are respectively provided on both sides of the V-shaped support arm, and the central axis of the support wheel is parallel to the length direction of the first support arm.

[0007] Preferably, the support wheels on both sides of each V-shaped support arm are symmetrically arranged.

[0008] Preferably, the support wheel is rotatably disposed on the V-shaped support arm via a bearing seat.

[0009] Preferably, surfaces of the first support arm, the second support arm and the bottom arm are all covered with buffer material.

[0010] Preferably, a lifting mechanism is provided on the base frame, the bevel frame is arranged on the lifting mechanism, and the lifting mechanism is used to drive the bevel frame to move up and down.

[0011] Preferably, the lifting mechanism comprises a lifting cylinder, and the bevel frame is connected to a piston rod of the lifting cylinder.

[0012] Preferably, the angle between the first arm and the horizontal plane is 20° to 60°.

[0013] Preferably, the angle between the first arm and the horizontal plane is 30°.

[0014] Preferably, four V-shaped arms are provided between the first arm and the second arm, and the four V-shaped arms are evenly spaced.

[0015] Compared with the prior art, the beneficial effects of the utility model are as follows: the angled static transfer vehicle for quartz furnace tube production of the utility model has a simple and light structure, is easy to control and operate, and can not only realize the static drainage of the quartz furnace tube after cleaning, so that the quartz furnace tube can be quickly dried and the quartz furnace tube transfer operation is convenient, but also can be suitable for different models of quartz furnace tubes, and has strong flexibility in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic structural diagram of an oblique angle static transfer vehicle according to one embodiment of the utility model.

[0017] Figure 2 It is a cross-sectional view of an oblique angle static transfer vehicle according to one embodiment of the utility model.

[0018] Figure 3 This is a schematic structural diagram of an oblique angle stationary transfer vehicle according to another embodiment of the present utility model.

[0019] In the figure, 10-base frame, 11-lifting mechanism, 20-moving wheel, 30-angle frame, 31-first support arm, 32-second support arm, 33-bottom wall, 34-V-shaped support arm, 35-support wheel, 36-bearing seat. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model. It can be understood that some technical means of the various embodiments described herein can be replaced or combined with each other without conflict.

[0021] In the description of the present invention, if there are terms such as "first", "second", etc., they are only used to distinguish the objects described, and do not have any order or technical meaning. Therefore, the objects defined as "first", "second", etc. may explicitly or implicitly include one or more of the objects. Moreover, "one" or "a" and similar words do not indicate a quantity limitation, but indicate the existence of at least one, and "multiple" means not less than two.

[0022] In the description of the utility model specification, reference to "one embodiment" or "some embodiments" etc. means that one or more embodiments of the utility model include specific features, structures or characteristics described in conjunction with the embodiment. Therefore, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in the specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways.

[0023] Please refer to Figure 1 and Figure 2 The utility model provides an angled static transfer vehicle for quartz furnace tube production, which includes a base frame 10, a moving wheel 20 and an angled frame 30. The moving wheel 20 is arranged at the bottom of the base frame 10, and the angled frame 30 is obliquely arranged on the base frame 10. Among them, the angled frame 30 is used to place the quartz furnace tube obliquely, and the moving wheel 20 can adopt a commercially available universal wheel with a brake function, etc., so as to realize the transportation of the quartz furnace tube and reduce the labor intensity.

[0024] The bevel frame 30 is a U-shaped structure, and has a first arm 31, a second arm 32 and a bottom arm 33. The first arm 31 and the second arm 32 are arranged parallel to each other on both sides of the bottom arm 33, and the bottom arm 33 is lower than the U-shaped opening end of the bevel frame 30. A plurality of V-shaped arms 34 are arranged between the first arm 31 and the second arm 32. The plurality of V-shaped arms 34 are used to support the quartz furnace tube, and the V-shaped design can adapt to quartz furnace tubes of different models and diameters, and has strong adaptability.

[0025] In the application, the cleaned quartz furnace tube is placed on the bevel frame 30, and a plurality of V-shaped arms 34 support the quartz furnace tube. The tube mouth of the quartz furnace tube is against the bottom arm 33, and the tube tail of the quartz furnace tube is at the U-shaped opening end of the bevel frame 30, so as to allow the quartz furnace tube to stand and drain. The beveled static transfer vehicle for quartz furnace tube production has a simple and light structure, is easy to control and operate, and can not only achieve static drainage of the quartz furnace tube after cleaning, so that the quartz furnace tube can be quickly dried, and facilitate the transfer operation of the quartz furnace tube, but also can be applied to different types of quartz furnace tubes, and has strong flexibility in use.

[0026] In a preferred embodiment of the utility model, rotatable support wheels 35 are respectively provided on both sides of the V-shaped support arm 34, the central axis of the support wheel 35 is parallel to the length direction of the first support arm 31, and the support wheels 35 on both sides of each V-shaped support arm 34 are symmetrically arranged. In this way, the support wheels 35 are used to support the tube wall of the quartz furnace tube, and the quartz furnace tube can also be easily rotated to adjust the angle of the quartz furnace tube according to production requirements.

[0027] Furthermore, the support wheel 35 can be made of graphite with a smooth surface. The graphite material is durable and fire-resistant and will not scratch or damage the quartz tube.

[0028] It should be understood that the inclination angle of the bevel bracket 30 can be reasonably set according to actual needs. In some embodiments, the angle between the first arm 31 and the horizontal plane is 20° to 60°.

[0029] Furthermore, in one embodiment, the angle between the first arm 31 and the horizontal plane is 30°. With this inclination angle, the quartz furnace tube can be quickly drained, thereby improving production efficiency.

[0030] like Figure 2 As shown, in some embodiments, the support wheel 35 can be rotatably disposed on the V-shaped support arm 34 through a bearing seat 36. However, the present invention is not limited thereto, and in other embodiments, the support wheel 35 can also adopt other reasonable rotatable installation methods.

[0031] In some embodiments, four V-shaped arms 34 are provided between the first arm 31 and the second arm 32, and the four V-shaped arms 34 are evenly spaced along the length direction of the first arm. The four V-shaped arms 34 are used to support the quartz furnace tube to ensure support strength and stability. Of course, the utility model is not limited to this. In other embodiments, the number of V-shaped arms 34 can be reasonably set according to actual needs.

[0032] In other embodiments, the surfaces of the first arm 31, the second arm 32, and the bottom arm 33 are all covered with a buffer material to prevent scratches or bumps on the quartz furnace tube. The buffer material can be a common buffer material on the market, such as rubber.

[0033] See also Figure 2 In some embodiments, a lifting mechanism 11 is provided on the base frame 10, and the bevel frame 30 is provided on the lifting mechanism 11, and the lifting mechanism 11 is used to drive the bevel frame 30 to move up and down.

[0034] In one embodiment, the lifting mechanism 11 includes a lifting cylinder, and the bevel frame 30 is connected to the piston rod of the lifting cylinder. Furthermore, lifting cylinders are respectively provided at the four corners of the base frame 10, and the two lifting cylinders at the same end are set to move synchronously, so that the height and tilt angle of the bevel frame 30 can be adjusted according to production requirements. Among them, the lifting cylinder can adopt a commercially available cylinder product, and its structure and control principle belong to the prior art and will not be repeated here. However, the utility model is not limited to this. In other embodiments, the lifting mechanism 11 can also adopt other reasonable products.

[0035] The utility model discloses an angled static transfer vehicle for quartz furnace tube production, which has a simple and light structure and is easy to control and operate. It can not only realize static drainage of the quartz furnace tube after cleaning, so that the quartz furnace tube can be quickly dried, but also facilitate the transfer operation of the quartz furnace tube and avoid collision and damage of the quartz furnace tube, but also can be applied to quartz furnace tubes of different models and has strong flexibility in use.

[0036] The present invention has been described by the above-mentioned relevant embodiments, however, the above-mentioned embodiments are only examples for implementing the present invention. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, any changes and modifications made without departing from the spirit and scope of the present invention are within the scope of patent protection of the present invention.

Claims

1. An oblique angle static transfer vehicle for quartz furnace tube production, characterized in that: It includes a base frame, a moving wheel and an angled frame, wherein the moving wheel is arranged at the bottom of the base frame, and the angled frame is obliquely arranged on the base frame; the angled frame is a U-shaped structure, and the angled frame has a first support arm, a second support arm and a base arm, the first support arm and the second support arm are arranged parallel to each other on both sides of the base arm, and the base arm is lower than the U-shaped opening end of the angled frame; a plurality of V-shaped support arms are arranged between the first support arm and the second support arm.

2. The oblique angle static transfer vehicle for quartz furnace tube production according to claim 1, characterized in that: Rotatable support wheels are respectively provided on both sides of the V-shaped support arm, and the central axis of the support wheel is parallel to the length direction of the first support arm.

3. The oblique angle static transfer vehicle for quartz furnace tube production according to claim 2, characterized in that: The supporting wheels on both sides of each V-shaped support arm are symmetrically arranged.

4. The oblique angle static transfer vehicle for quartz furnace tube production according to claim 2, characterized in that: The supporting wheel is rotatably arranged on the V-shaped supporting arm through a bearing seat.

5. The oblique angle static transfer vehicle for quartz furnace tube production according to claim 1, characterized in that: The surfaces of the first support arm, the second support arm and the bottom arm are all covered with buffer materials.

6. The oblique angle static transfer vehicle for quartz furnace tube production according to claim 1, characterized in that: The base frame is provided with a lifting mechanism, the bevel frame is arranged on the lifting mechanism, and the lifting mechanism is used for driving the bevel frame to move up and down.

7. The oblique angle static transfer vehicle for quartz furnace tube production according to claim 6, characterized in that: The lifting mechanism comprises a lifting cylinder, and the bevel frame is connected to the piston rod of the lifting cylinder.

8. The oblique angle static transfer vehicle for quartz furnace tube production according to claim 1, characterized in that: The included angle between the first arm and the horizontal plane is 20° to 60°.

9. The oblique angle static transfer vehicle for quartz furnace tube production according to claim 8, characterized in that: The included angle between the first arm and the horizontal plane is 30°.

10. The oblique angle static transfer vehicle for quartz furnace tube production according to claim 1, characterized in that: Four V-shaped supporting arms are arranged between the first supporting arm and the second supporting arm, and the four V-shaped supporting arms are evenly spaced.

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