Flexible clamping jaw for silicon wafer transmission mechanical arm

Abstract

The utility model discloses a flexible clamping jaw for a silicon wafer transmission robotic arm, which belongs to the technical field of flexible clamping jaws, and comprises a robotic arm, and the end part of the robotic arm is fixedly connected with a mounting disc; according to the utility model, when a silicon wafer needs to be transferred in the transmission process, the flexible clamping jaws are driven by the robotic arm to move towards the silicon wafer, when the silicon wafer is clamped, the hydraulic rod extends to drive the telescopic frame to move towards the right side, when the telescopic frame moves, the clamping jaws on the four sides are driven by the transmission rod to rotate at the same time, and the clamping jaws drive the flexible chucks at the ends to get close to each other; according to the flexible clamping jaw for the mechanical arm, the clamping jaws on the four sides can be driven to be close to or far away from the flexible clamping head at the same time through stretching and retracting of the single hydraulic rod, a workpiece is clamped or loosened, the structure is simple, complexity of an oil way of the hydraulic rod is reduced, and the working efficiency is improved. And the production and maintenance cost of the flexible clamping jaw is effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of flexible clamping claws, in particular to a flexible clamping claw used for a silicon wafer transmission machine arm. Background Art

[0002] Chips made of silicon wafers are famous "magic calculators" with amazing computing power. During the production process of silicon wafers, when the silicon wafers are transmitted, the robot arm needs to clamp and transfer the silicon wafers through flexible grippers.

[0003] Although the flexible gripper used in the silicon wafer transfer robot arm can flexibly clamp the silicon wafer when in use, the number of grippers is generally three or more, and a single gripper needs to be controlled by a single hydraulic rod. Therefore, the flexible gripper needs to use multiple hydraulic rods to control multiple grippers, which makes the oil circuit control of the flexible gripper more complicated, resulting in high production and maintenance costs and inconvenience in use. Therefore, we propose a flexible gripper for a silicon wafer transfer robot arm to solve the problem raised. Utility Model Content

[0004] The purpose of the utility model is to provide a flexible clamping claw for a silicon wafer transmission robot arm, which achieves the purpose of the flexible clamping claw for the robot arm. Through the extension and retraction of a single hydraulic rod, the four-side clamping claws and the flexible chuck can be driven to move closer or farther away from each other at the same time to complete the clamping or release of the workpiece. The structure is simple, the complexity of the hydraulic rod oil circuit is reduced, and the production and maintenance costs of the flexible clamping claw are effectively reduced.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a flexible clamp for a silicon wafer transfer robot arm, comprising a robot arm, an end of the robot arm is fixedly connected to a mounting plate, and a mounting seat is installed on a side of the mounting plate away from the robot arm, wherein:

[0006] A cylinder is fixedly connected to one side of the mounting seat away from the mounting plate, and clamping claws are symmetrically arranged on four sides of the cylinder. The end of the cylinder is rotatably connected with the clamping claw through a bracket, and a flexible chuck is installed at the end of the clamping claw. A connecting groove is opened on the side wall of the cylinder corresponding to the clamping claw.

[0007] A hydraulic rod is installed at the inner end of the cylinder close to the mounting seat, a telescopic frame is installed at the end of the hydraulic rod, a transmission rod is rotatably connected between the telescopic frame and the clamping claw, and the mounting seat is detachably connected to the mounting plate through a quick disassembly mechanism.

[0008] Preferably, a clamping groove is formed at one end of the clamping jaw close to the flexible clamping head, and a clamping block is fixedly connected to one side of the flexible clamping head corresponding to the clamping groove.

[0009] Preferably, the clamping block is in the shape of a rectangular column, and both the clamping block and the flexible clamping head are made of rubber material.

[0010] Preferably, the quick disassembly and assembly mechanism includes a mounting groove, a mounting groove is formed on one side of the mounting plate close to the mounting seat, a mounting bracket is fixedly connected to the side of the mounting seat close to the mounting groove, fixing rod grooves are symmetrically formed on the inner walls on both sides of the mounting groove, and a fixing groove is formed on the mounting bracket at a position corresponding to the fixing rod groove, a spring is installed in the fixing rod groove, a fixing rod is installed on the open side of the spring close to the fixing rod groove, a pull rod is fixedly connected to one end of the fixing rod away from the mounting groove, and the pull rod passes through the interior of the mounting plate and extends to the outside at one end of the pull rod away from the fixing rod.

[0011] Preferably, the outer side of the end of the fixing rod away from the spring is a curved surface.

[0012] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0013] 1. In the utility model, when a robot arm is needed to transport silicon wafers during the transmission process, the robot arm drives the flexible clamping claw to move toward the silicon wafer. When clamping the silicon wafer, the hydraulic rod is extended to drive the telescopic frame to move to the right. When the telescopic frame moves, the transmission rod drives the four-side clamping claws to rotate at the same time, and the clamping claws drive the flexible chucks at the ends to move closer to each other, and the silicon wafer is clamped by the flexible chuck. When releasing the silicon wafer, the hydraulic rod is shortened to release the silicon wafer. The flexible clamping claw used by the robot arm can drive the four-side clamping claws and the flexible chuck to move closer or farther at the same time through the extension and contraction of a single hydraulic rod, so as to complete the clamping or release of the workpiece. The structure is simple, the complexity of the hydraulic rod oil circuit is reduced, and the production and maintenance costs of the flexible clamping claw are effectively reduced.

[0014] 2. According to the utility model, when the flexible clamping claw needs to be installed, the mounting seat drives the mounting frame to be inserted into the mounting groove. When the mounting frame is against the curved surface of the fixing rod, the fixing rod overcomes the elastic force of the spring and retracts into the fixing rod groove. When the mounting frame completely enters the mounting groove and the fixing rod groove and the fixing groove are aligned, the spring pushes the fixing rod to be inserted into the fixing groove, and the mounting frame is fixed in the mounting groove, thereby completing the installation of the flexible clamping claw. When the flexible clamping claw needs to be removed, the fixing rod is driven out of the fixing groove by the pull rod, and the flexible clamping claw can be removed. The quick disassembly and assembly mechanism facilitates the quick disassembly and assembly of the flexible clamping claw, and the replacement of the flexible clamping claw is convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of the utility model;

[0016] Figure 2 For this utility model Figure 1 A schematic diagram of the partially enlarged structure at center A;

[0017] Figure 3 For this utility model Figure 1 Schematic diagram of the local enlarged structure at point B in the middle.

[0018] In the figure: 1. Robot arm; 2. Mounting plate; 3. Mounting seat; 4. Cylinder; 5. Clamp; 6. Bracket; 7. Flexible chuck; 8. Slot; 9. Block; 10. Connecting slot; 11. Hydraulic rod; 12. Telescopic frame; 13. Transmission rod; 14. Mounting slot; 15. Mounting frame; 16. Fixed rod slot; 17. Fixed slot; 18. Spring; 19. Fixed rod; 20. Pull rod. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] Example:

[0021] See also Figures 1 to 3 The utility model provides a technical solution: a flexible clamp for a silicon wafer transmission robot arm, comprising a robot arm 1, a mounting plate 2, a mounting seat 3, a cylinder 4, a clamp 5, a bracket 6, a flexible chuck 7, a card slot 8, a card block 9, a connecting slot 10, a hydraulic rod 11, a telescopic frame 12, a transmission rod 13, a mounting slot 14, a mounting frame 15, a fixed rod slot 16, a fixed slot 17, a spring 18, a fixed rod 19, and a pull rod 20. The end of the robot arm 1 is fixedly connected with the mounting plate 2, and the mounting seat 3 is installed on the side of the mounting plate 2 away from the robot arm 1, wherein,

[0022] The mounting seat 3 is fixedly connected to a cylinder 4 on one side away from the mounting plate 2, and jaws 5 are symmetrically arranged on four sides of the cylinder 4. The end of the cylinder 4 is rotatably connected to the jaws 5 through a bracket 6, and a flexible clamp 7 is installed on the end of the jaw 5. A connecting groove 10 is opened on the side wall of the cylinder 4 corresponding to the jaw 5;

[0023] A hydraulic rod 11 is installed at the inner end of the cylinder 4 close to the mounting seat 3, and a telescopic frame 12 is installed at the end of the hydraulic rod 11. A transmission rod 13 is rotatably connected between the telescopic frame 12 and the clamping claw 5. The mounting seat 3 is detachably connected to the mounting plate 2 through a quick disassembly mechanism.

[0024] When the silicon wafer is being transported and a robot arm is needed to transport the silicon wafer, the robot arm drives the flexible clamp to move toward the silicon wafer. When clamping the silicon wafer, the hydraulic rod 11 is extended to drive the telescopic frame 12 to move to the right. When the telescopic frame 12 moves, the transmission rod 13 drives the four-side clamps 5 to rotate at the same time. The clamps 5 drive the flexible chucks 7 at the ends to move closer to each other, and the silicon wafer is clamped by the flexible chuck 7. When releasing the silicon wafer, the hydraulic rod 11 is shortened to release the silicon wafer. The flexible clamp used by the robot arm can drive the four-side clamps 5 and the flexible chuck 7 to move closer or farther at the same time through the extension and retraction of a single hydraulic rod 11, so as to complete the clamping or release of the workpiece. The structure is simple, the complexity of the oil circuit of the hydraulic rod 11 is reduced, and the production and maintenance costs of the flexible clamp are effectively reduced.

[0025] See also Figures 1 to 3 A slot 8 is provided at one end of the clamping jaw 5 close to the flexible clamping head 7, and a clamping block 9 is fixedly connected to the side of the flexible clamping head 7 corresponding to the slot 8. The clamping block 9 is in the shape of a rectangular column, and the clamping block 9 and the flexible clamping head 7 are both made of rubber material. The flexible clamping head 7 is detachably connected to the clamping jaw 5 through the clamping structure formed by the clamping block 9 and the slot 8, which facilitates the replacement of the flexible clamping head 7.

[0026] See also Figures 1 to 3 The quick disassembly and assembly mechanism includes a mounting groove 14, a mounting groove 14 is provided on one side of the mounting plate 2 close to the mounting seat 3, a mounting bracket 15 is fixedly connected to one side of the mounting seat 3 close to the mounting groove 14, fixing rod grooves 16 are symmetrically provided on the inner walls on both sides of the mounting groove 14, a fixing groove 17 is provided on the mounting bracket 15 at a position corresponding to the fixing rod groove 16, a spring 18 is installed in the fixing rod groove 16, a fixing rod 19 is installed on the opening side of the spring 18 close to the fixing rod groove 16, a pull rod 20 is fixedly connected to one end of the fixing rod 19 away from the mounting groove 14, an end of the pull rod 20 away from the fixing rod 19 passes through the interior of the mounting plate 2 and extends to the outside, and the fixing rod 19 is away from the end of the spring 18 The outer side is a curved surface. When the flexible clamp needs to be installed, the mounting seat 3 drives the mounting frame 15 to be inserted into the mounting groove 14. When the mounting frame 15 is against the curved surface of the fixing rod 19, the fixing rod 19 overcomes the elastic force of the spring 18 and retracts into the fixing rod groove 16. When the mounting frame 15 completely enters the mounting groove 14 and the fixing rod groove 16 and the fixing groove 17 are aligned, the spring 18 pushes the fixing rod 19 to be inserted into the fixing groove 17, and the mounting frame 15 is fixed in the mounting groove 14, and the installation of the flexible clamp is completed. When the flexible clamp needs to be removed, the fixing rod 19 is driven by the pull rod 20 to move out of the fixing groove 17, and the flexible clamp can be removed. Through the quick disassembly and assembly mechanism, the flexible clamp can be quickly disassembled and assembled, and the flexible clamp can be easily replaced.

[0027] Working principle: This is a flexible clamp for a silicon wafer transmission robot arm. When the silicon wafer is being transmitted and the robot arm is needed to transport the silicon wafer, the flexible clamp is driven by the robot arm to move toward the silicon wafer. When clamping the silicon wafer, the telescopic frame 12 is driven to move to the right by extending the hydraulic rod 11. When the telescopic frame 12 moves, the transmission rod 13 drives the four-side clamps 5 to rotate at the same time, and the clamps 5 drive the flexible chucks 7 at the ends to move closer to each other, and the silicon wafer is clamped by the flexible chuck 7. When the silicon wafer is released, the hydraulic rod 11 is shortened to release the silicon wafer. The flexible clamp for the robot arm can drive the four-side clamps 5 and the flexible chuck 7 to move closer or farther at the same time through the extension and contraction of a single hydraulic rod 11, so as to complete the clamping or release of the workpiece. The structure is simple, the complexity of the oil circuit of the hydraulic rod 11 is reduced, and the production and maintenance costs of the flexible clamp are effectively reduced. The flexible chuck 7 is detachably connected to the clamp 5 through the clamping structure formed by the clamping block 9 and the clamping groove 8, so that the flexible chuck 7 is convenient to replace.

[0028] When the flexible clamp needs to be installed, the mounting seat 3 drives the mounting frame 15 to be inserted into the mounting groove 14. When the mounting frame 15 is against the curved surface of the fixing rod 19, the fixing rod 19 overcomes the elastic force of the spring 18 and retracts into the fixing rod groove 16. When the mounting frame 15 completely enters the mounting groove 14 and the fixing rod groove 16 and the fixing groove 17 are aligned, the spring 18 pushes the fixing rod 19 to be inserted into the fixing groove 17, and the mounting frame 15 is fixed in the mounting groove 14, and the installation of the flexible clamp is completed. When the flexible clamp needs to be removed, the fixing rod 19 is driven to move out of the fixing groove 17 by the pull rod 20, and the flexible clamp can be removed. Through the quick disassembly and assembly mechanism, the flexible clamp can be quickly disassembled and assembled, and the flexible clamp can be easily replaced.

[0029] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A flexible gripper for a silicon wafer transfer robot arm, comprising a robot arm (1), characterized in that: The end of the robot arm (1) is fixedly connected to a mounting plate (2), and a mounting seat (3) is mounted on a side of the mounting plate (2) away from the robot arm (1), wherein: A cylinder (4) is fixedly connected to the side of the mounting seat (3) away from the mounting plate (2); four sides of the cylinder (4) are symmetrically provided with clamping jaws (5); the end of the cylinder (4) is rotatably connected to the clamping jaw (5) via a bracket (6); a flexible clamp (7) is installed at the end of the clamping jaw (5); and a connecting groove (10) is provided on the side wall of the cylinder (4) corresponding to the clamping jaw (5); A hydraulic rod (11) is installed at the inner end of the cylinder (4) close to the mounting seat (3), a telescopic frame (12) is installed at the end of the hydraulic rod (11), a transmission rod (13) is rotatably connected between the telescopic frame (12) and the clamping claw (5), and the mounting seat (3) is detachably connected to the mounting plate (2) via a quick disassembly mechanism.

2. The flexible gripper for a silicon wafer transfer robot arm according to claim 1, characterized in that: A clamping groove (8) is provided at one end of the clamping jaw (5) close to the flexible clamping head (7), and a clamping block (9) is fixedly connected to one side of the flexible clamping head (7) corresponding to the clamping groove (8).

3. The flexible gripper for a silicon wafer transfer robot arm according to claim 2, characterized in that: The clamping block (9) is in the shape of a rectangular column, and both the clamping block (9) and the flexible clamping head (7) are made of rubber material.

4. The flexible gripper for a silicon wafer transfer robot arm according to claim 1, characterized in that: The quick disassembly and assembly mechanism comprises a mounting groove (14), a mounting groove (14) is provided on a side of the mounting plate (2) close to the mounting seat (3), a mounting frame (15) is fixedly connected to a side of the mounting seat (3) close to the mounting groove (14), fixing rod grooves (16) are symmetrically provided on the inner walls of both sides of the mounting groove (14), a fixing groove (17) is provided on the mounting frame (15) at a position corresponding to the fixing rod groove (16), a spring (18) is installed in the fixing rod groove (16), a fixing rod (19) is installed on the opening side of the spring (18) close to the fixing rod groove (16), a pull rod (20) is fixedly connected to one end of the fixing rod (19) away from the mounting groove (14), and the end of the pull rod (20) away from the fixing rod (19) passes through the interior of the mounting plate (2) and extends to the outside.

5. The flexible gripper for a silicon wafer transfer robot arm according to claim 4, characterized in that: The outer side of the end of the fixing rod (19) away from the spring (18) is a curved surface.

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