Cooling device for coated electrode plate

Abstract

The utility model relates to the technical field of electrode plate coating, in particular to a cooling device after electrode plate coating, which comprises a cooling bin, two movable plates are arranged in the cooling bin, a plurality of fixed pulleys are movably connected to the opposite surfaces of the two movable plates, chutes are formed in the two movable plates, and the fixed pulleys are movably connected to the opposite surfaces of the two movable plates. Two limiting grooves are formed in the inner walls of the multiple sliding grooves, springs are fixedly connected to the tops of the inner walls of the multiple sliding grooves, sliding blocks are fixedly connected to the bottoms of the springs, limiting blocks are fixedly connected to the outer walls of the two sides of the sliding blocks, the limiting blocks are located in the limiting grooves, and movable pulleys are movably connected to the outer walls of the sliding blocks; the rear side of the inner wall of the cooling bin is movably connected with a two-way screw, the outer walls of the two ends of the two-way screw are in threaded connection with the two movable plates respectively, and the other end of the two-way screw is fixedly connected with a knob. According to the cooling device, electrode plates with different widths and thicknesses can be cooled after being coated, so that the applicability of the device is improved.

Description

Technical Field

[0001] The utility model relates to the field of electrode plate coating, in particular to a post-coating cooling device for an electrode plate. Background Art

[0002] With the advancement of science and technology and economic development, semiconductor process technology has become increasingly mature, making semiconductor products smaller and smaller and more powerful. Various etching and deposition technologies have been developed one after another, among which plasma etching technology and plasma thin film deposition technology are currently the most commonly used and most popular technologies.

[0003] After coating, the electrode plate needs to be cooled again by a cooling device. In the existing device, when cooling the electrode plate, due to the different thicknesses and widths of different electrode plates, each electrode plate can only be clamped and fixed by a fixing mechanism of corresponding size, which limits the applicability of the entire device and cannot be applied to electrode plates of different specifications. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes a post-coating cooling device for an electrode plate.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a cooling device for electrode plate after coating, comprising a cooling bin, a movable plate is arranged inside the cooling bin, and there are two movable plates, the opposite surfaces of the two movable plates are movably connected with fixed pulleys, and the number of fixed pulleys is respectively multiple, the two movable plates are provided with slide grooves inside, and the number of slide grooves is respectively multiple, the inner walls of the multiple slide grooves are provided with limiting grooves, and the number of limiting grooves is respectively two, the tops of the inner walls of the multiple slide grooves are fixedly connected with springs, the bottoms of the springs are fixedly connected with sliders, the outer walls on both sides of the sliders are fixedly connected with limiting blocks, the limiting blocks are located inside the limiting grooves, the outer walls of the sliders are movably connected with movable pulleys, and the rear side of the inner wall of the cooling bin is movably connected with a bidirectional screw rod, the outer walls at both ends of the bidirectional screw rod are respectively threadedly connected to the two movable plates, and the other end of the bidirectional screw rod is fixedly connected with a knob.

[0006] As a further description of the above technical solution:

[0007] The knob is located outside the cooling bin, and the upper and lower inner walls of the cooling bin are provided with movable grooves, and there are two movable grooves respectively. The upper and lower outer walls of the two movable plates are fixedly connected with movable blocks, and there are two movable blocks respectively. The movable blocks are located inside the movable grooves.

[0008] As a further description of the above technical solution:

[0009] A condenser tube is installed inside the outer wall of the cooling bin, and there are two condenser tubes. The two condenser tubes are respectively located inside the upper and lower outer walls of the cooling bin.

[0010] As a further description of the above technical solution:

[0011] The bottom of the cooling bin is fixedly connected with a connecting plate, and there are two connecting plates. The bottom of the cooling bin is provided with a base, the top of the base is fixedly connected with a fixing block, and both ends of the fixing block are respectively fixedly connected with a rotating shaft.

[0012] As a further description of the above technical solution:

[0013] The left outer wall of the cooling bin is fixedly connected with a U-shaped frame, and the inner walls on both sides of the U-shaped frame are movably connected with electric push rods. A push rod groove is opened on the left side of the interior of the base, and the outer wall of the other end of the electric push rod is movably connected with the inner wall of the push rod groove.

[0014] As a further description of the above technical solution:

[0015] The right side of the cooling bin is movably connected with a bin door, and the bottom of the bin door is fixedly connected with a handle.

[0016] The utility model has the following beneficial effects:

[0017] 1. Two movable plates are arranged inside the cooling chamber, and the two-way screw rod is driven to rotate by turning the knob, so that the two movable plates move relative to or away from each other, so as to adapt to electrode plates of corresponding widths. After the spacing between the two movable plates is adjusted, the two side edges of the electrode plate are respectively inserted into the middle of the fixed pulley and the movable pulley of the two movable plates, so that the movable pulley and the slider move upward together. During this process, the spring is in a compressed state, and the spring reacts to the slider at the same time, so that the slider drives the movable pulley to apply a certain pressure to the electrode plate, so that the device can be applied to the cooling of electrode plates after coating with different thicknesses, thereby improving the applicability of the device. In the existing device, when cooling the electrode plates, due to the different thicknesses and widths of different electrode plates, each type of electrode plate can only be clamped and fixed by a fixing mechanism of corresponding size, which limits the applicability of the entire device and cannot be applied to electrode plates of different specifications. The device can perform cooling operations on electrode plates of different widths and thicknesses after coating, thereby improving the applicability of the device.

[0018] 2. In the initial state, the left end of the cooling bin is lower than the right end. After the bin door is opened and the electrode plate is placed in, the electrode plate will slide directly and completely into the interior of the cooling bin due to the lower left side of the cooling bin. At the same time, the bin door is closed, and the condenser tube works to lower the internal temperature of the cooling bin and cool the electrode plate. After the cooling is completed, the top of the electric push rod moves upward, driving the U-shaped frame upward, thereby causing the left side of the cooling bin to rise and the right side to fall. Due to its own gravity, the electrode plate will push the bin door outward and naturally slide out of the cooling bin, making it easy and quick to take out. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the overall structure of a post-coating cooling device for an electrode plate proposed by the utility model from a first perspective;

[0020] Figure 2 This is a second-view overall structural schematic diagram of a post-coating cooling device for an electrode plate proposed by the utility model;

[0021] Figure 3 This is a schematic diagram of the structure of a movable plate of a post-coating cooling device for an electrode plate proposed by the utility model;

[0022] Figure 4 The utility model provides a cooling device for electrode plate after coating. Figure 3 A schematic diagram of the enlarged structure in the middle;

[0023] Figure 5 The utility model provides a schematic diagram of the internal structure of a cooling device for electrode plates after coating.

[0024] Legend:

[0025] 1. Cooling bin; 2. Moving plate; 3. Fixed pulley; 4. Slide groove; 5. Limiting groove; 6. Spring; 7. Sliding block; 8. Limiting block; 9. Moving pulley; 10. Bidirectional screw rod; 11. Knob; 12. Moving groove; 13. Moving block; 14. Condenser; 15. Connecting plate; 16. Base; 17. Fixed block; 18. Rotating shaft; 19. U-shaped frame; 20. Electric push rod; 21. Push rod groove; 22. Bin door; 23. Handle. DETAILED DESCRIPTION

[0026] Reference Figure 1-5The utility model provides a post-coating cooling device for an electrode plate, comprising a cooling bin 1, wherein a movable plate 2 is arranged inside the cooling bin 1, and the number of the movable plates 2 is two, the opposite surfaces of the two movable plates 2 are movably connected with fixed pulleys 3, and the number of the fixed pulleys 3 is respectively multiple, the interiors of the two movable plates 2 are provided with slide grooves 4, and the number of the slide grooves 4 is respectively multiple, the inner walls of the multiple slide grooves 4 are provided with limiting grooves 5, and the number of the limiting grooves 5 is respectively two, the tops of the inner walls of the multiple slide grooves 4 are fixedly connected with springs 6, the bottoms of the springs 6 are fixedly connected with sliders 7, the outer walls of both sides of the sliders 7 are fixedly connected with limiting blocks 8, the limiting blocks 8 are located inside the limiting grooves 5, the outer walls of the sliders 7 are movably connected with movable pulleys 9, the rear side of the inner wall of the cooling bin 1 is movably connected with a bidirectional screw rod 10, and the outer walls of both ends of the bidirectional screw rod 10 are respectively threadedly connected with the two movable plates 2 Then, the other end of the bidirectional screw rod 10 is fixedly connected with a knob 11. In the initial state, the left side of the cooling chamber 1 is lower than the right side. The chamber door 22 is opened and the knob 11 is turned to drive the bidirectional screw rod 10 to rotate, thereby making the two movable plates 2 move relative to or away from each other, so as to adapt to the electrode plates of corresponding widths. After the spacing between the two movable plates 2 is adjusted, the two side edges of the electrode plates are respectively inserted into the middle of the fixed pulley 3 and the movable pulley 9 of the two movable plates 2, so that the movable pulley 9 and the slider 7 move upward together. During this process, the spring 6 is in a compressed state, and the spring 6 reacts to the slider 7, so that the slider 7 drives the movable pulley 9 to apply a certain pressure to the electrode plate, and then the chamber door 22 is closed. The electrode plate will directly and completely slide into the interior of the cooling chamber 1. At the same time, the chamber door 22 is closed, and the condenser 14 works to reduce the internal temperature of the cooling chamber 1, thereby cooling the electrode plate.

[0027] The knob 11 is located outside the cooling bin 1, and the upper and lower inner walls of the cooling bin 1 are provided with movable grooves 12, and there are two movable grooves 12 respectively. The upper and lower outer walls of the two movable plates 2 are fixedly connected with movable blocks 13, and there are two movable blocks 13 respectively. The movable blocks 13 are located inside the movable grooves 12, and the outer wall of the cooling bin 1 is installed with condenser tubes 14, and there are two condenser tubes 14. The two condenser tubes 14 are respectively located inside the upper and lower outer walls of the cooling bin 1.

[0028] A connecting plate 15 is fixedly connected to the bottom of the cooling bin 1, and there are two connecting plates 15. A base 16 is provided at the bottom of the cooling bin 1, and a fixing block 17 is fixedly connected to the top of the base 16. Both ends of the fixing block 17 are fixedly connected to a rotating shaft 18. A U-shaped frame 19 is fixedly connected to the left outer wall of the cooling bin 1, and both sides of the inner wall of the U-shaped frame 19 are movably connected to an electric push rod 20. A push rod groove 21 is provided on the left side of the base 16, and the outer wall of the other end of the electric push rod 20 is movably connected to the inner wall of the push rod groove 21. After the cooling is completed, the top of the electric push rod 20 moves upward, driving the U-shaped frame 19 upward, thereby causing the left side of the cooling bin 1 to rise and the right side to fall. Due to the action of its own gravity, the electrode plate will push the bin door 22 outward and naturally slide out of the cooling bin 1.

[0029] A door 22 is movably connected to the right side of the cooling bin 1 , and a handle 23 is fixedly connected to the bottom of the door 22 .

[0030] Working principle: In the initial state, the left side of the cooling chamber 1 is lower than the right side. Open the chamber door 22, turn the knob 11 to drive the bidirectional screw 10 to rotate, and then the two movable plates 2 move relative to or away from each other, so as to adapt to the electrode plates of corresponding widths. After the spacing between the two movable plates 2 is adjusted, the two sides of the electrode plates are respectively inserted into the middle of the fixed pulley 3 and the movable pulley 9 of the two movable plates 2, so that the movable pulley 9 and the slider 7 move upward together. In this process, the spring 6 is in a compressed state, and the spring 6 reacts to the slider 7. The slider 7 drives the movable pulley 9 to apply a certain pressure to the electrode plate, and then the door 22 is closed. The electrode plate will directly slide completely into the interior of the cooling bin 1. At the same time, the door 22 is closed, and the condenser 14 works to reduce the internal temperature of the cooling bin 1, and the electrode plate is cooled. After the cooling is completed, the top of the electric push rod 20 moves upward, driving the U-shaped frame 19 upward, thereby causing the left side of the cooling bin 1 to rise and the right side to fall. Due to its own gravity, the electrode plate will push the door 22 outward and naturally slide out of the cooling bin 1. Repeat the above operation.

[0031] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A post-coating cooling device for an electrode plate, comprising a cooling chamber (1), characterized in that: The cooling bin (1) is provided with a movable plate (2) inside, and the number of movable plates (2) is two, the opposite surfaces of the two movable plates (2) are movably connected with fixed pulleys (3), and the number of fixed pulleys (3) is respectively multiple, the two movable plates (2) are provided with a slide groove (4) inside, and the number of slide grooves (4) is respectively multiple, the inner walls of the multiple slide grooves (4) are provided with a limiting groove (5), and the number of limiting grooves (5) is respectively two, and the tops of the inner walls of the multiple slide grooves (4) are fixedly connected with a spring (6), the bottom of the spring (6) is fixedly connected to a slider (7), the outer walls on both sides of the slider (7) are fixedly connected to limit blocks (8), the limit blocks (8) are located inside the limit groove (5), the outer wall of the slider (7) is movably connected to a movable pulley (9), the rear side of the inner wall of the cooling bin (1) is movably connected to a bidirectional screw rod (10), the outer walls at both ends of the bidirectional screw rod (10) are respectively threadedly connected to the two movable plates (2), and the other end of the bidirectional screw rod (10) is fixedly connected to a knob (11).

2. The post-coating cooling device for electrode plates according to claim 1, characterized in that: The knob (11) is located outside the cooling bin (1); the upper and lower inner walls of the cooling bin (1) are provided with movable grooves (12), and the number of the movable grooves (12) is two respectively; the upper and lower outer walls of the two movable plates (2) are fixedly connected with movable blocks (13), and the number of the movable blocks (13) is two respectively; the movable blocks (13) are located inside the movable grooves (12).

3. The post-coating cooling device for electrode plates according to claim 1, characterized in that: A condenser tube (14) is installed inside the outer wall of the cooling bin (1), and there are two condenser tubes (14). The two condenser tubes (14) are respectively located inside the upper and lower outer walls of the cooling bin (1).

4. The post-coating cooling device for electrode plates according to claim 1, characterized in that: The bottom of the cooling bin (1) is fixedly connected to a connecting plate (15), and the number of connecting plates (15) is two. The bottom of the cooling bin (1) is provided with a base (16), the top of the base (16) is fixedly connected to a fixing block (17), and both ends of the fixing block (17) are respectively fixedly connected to a rotating shaft (18).

5. The post-coating cooling device for electrode plates according to claim 4, characterized in that: A U-shaped frame (19) is fixedly connected to the left outer wall of the cooling bin (1), and electric push rods (20) are movably connected to the inner walls on both sides of the U-shaped frame (19). A push rod groove (21) is provided on the left inner side of the base (16), and the outer wall of the other end of the electric push rod (20) is movably connected to the inner wall of the push rod groove (21).

6. The post-coating cooling device for electrode plates according to claim 1, characterized in that: The right side of the cooling bin (1) is movably connected to a bin door (22), and the bottom of the bin door (22) is fixedly connected to a handle (23).

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