Silicon tetrachloride vaporization device
By designing a vertical silicon tetrachloride vaporization device, using spring-bent heating rods and heat insulation plates, the problem of uneven temperature under traditional electric heating methods is solved, the vaporization efficiency is improved, and efficient tetrachloride is achieved through real-time detection. Preparation of silicone gaseous state.
Patent Information
- Application Number
- CN202420912022.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-29
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-04-29
AI Technical Summary
The traditional horizontal silicon tetrachloride vaporizer adopts electric heating method, and the contact area between the electrolytic heat rod and the silicon tetrachloride is small, resulting in uneven temperature and affecting the vaporization efficiency.
Design a silicon tetrachloride vaporization device including base structure, material storage structure, exhaust structure and steam collection structure, adopt a vertical storage cylinder and a spring-bent heating rod, combines a heat insulation plate and a sealing box, and utilizes temperature and liquid The position detector monitors the heating process in real time to ensure uniform heating and gas-liquid separation.
The uniform heating vaporization of silicon tetrachloride is achieved, the vaporization efficiency is improved, and the vaporization raw materials are facilitated through a vertical storage barrel, and the temperature and liquid level are detected in real time, ensuring a safe and efficient process flow.
Smart Images
Figure CN222257874U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chemical processing equipment, in particular to a silicon tetrachloride vaporizing device. Background Art
[0002] Silicon tetrachloride (SiCl 4 ) is an inorganic compound composed of silicon and chlorine elements. It is a colorless liquid with a pungent odor at room temperature. Here is some information about silicon tetrachloride: Physical properties: Silicon tetrachloride is a volatile liquid with a boiling point of about 57°C and a melting point of -70°C. It has a high density and a low viscosity. Chemical properties: Silicon tetrachloride is a strong oxidant that reacts with water to release a large amount of heat and produce hydrogen chloride gas. It also reacts with water vapor in the air to form white smoke, so it must be handled with care.
[0003] Silicon tetrachloride vaporization device is a kind of device used to vaporize silicon tetrachloride (SiCl 4 ) into a gaseous state. Silicon tetrachloride is a commonly used inorganic chemical substance, widely used in semiconductor manufacturing, solar cells, optical fiber manufacturing and other fields.
[0004] Traditional horizontal vaporizers use electric heating for vaporization. Although the purpose of vaporization can be achieved, the contact area between the electrolytic heating rod and silicon tetrachloride is small, and the temperature is uneven, which affects the efficiency of vaporization. Therefore, it is necessary to design corresponding technical solutions to solve the existing technical problems. Utility Model Content
[0005] 1. Technical issues to be resolved
[0006] In view of the shortcomings of the prior art, the utility model provides a silicon tetrachloride vaporization device, which solves the problem that the traditional horizontal vaporizer adopts electric heating to vaporize, although it can achieve the purpose of vaporization, the contact area between the electrolytic heating rod and the silicon tetrachloride is small, the temperature is uneven, and the efficiency of vaporization is affected.
[0007] (II) Technical solution
[0008] To achieve the above purpose, the utility model is implemented through the following technical scheme: a silicon tetrachloride vaporization device, including a base structure, a storage structure arranged on the top of the base structure, an exhaust structure arranged on the top of the storage structure and a steam collecting structure arranged on the back of the storage structure, the storage structure includes two vertical storage cylinders, a feed pipe is arranged on the outer wall of one side of the top of the storage cylinder, and a heating box is arranged at the bottom of the storage cylinder, and a heating rod in a spring-bent shape is connected to the top of the heating box, the top of the storage cylinder is connected to the exhaust structure, the exhaust structure includes a sealing box, the top of the sealing box is provided with a gas collecting tank in a circular arc shape, and the top of the gas collecting tank is connected to a sealing block, and a plurality of exhaust pipes are connected to the sealing block.
[0009] As a further preferred embodiment of the utility model, the base structure includes a base plate, two heat insulation plates are arranged on the top of the base plate, and a slot box is connected to the top of the heat insulation plate, a groove is opened in the slot box, and a plurality of insertion rods are arranged inside the groove, and the bottom of the heating box is inserted into the slot box.
[0010] As a further preferred embodiment of the present invention, a gas-liquid separation plate is provided inside the sealing box.
[0011] As a further preferred embodiment of the utility model, the steam collecting structure includes a ventilation pipe, a valve pipe is arranged on the ventilation pipe, a support plate is arranged on the back side of the storage tube, a storage tank is arranged in the middle of the top of the support plate, and the storage tank is connected to the ventilation pipe.
[0012] As a further preferred embodiment of the present invention, a temperature detection instrument is provided on the front of the storage tube, and a liquid level detection instrument is provided on the lower right side of the detection instrument.
[0013] (III) Beneficial effects
[0014] The utility model provides a silicon tetrachloride vaporization device, which has the following beneficial effects:
[0015] The silicon tetrachloride vaporizing device of the utility model has a base structure that can be used as a supporting installation and heat-insulating component, and the heating box at the bottom end of the material storage structure on the top is connected to a power source, and a heating rod in the shape of a spring bend inside the heating box is used to heat and vaporize the liquid silicon tetrachloride in the storage cylinder, so that the internal liquid is heated more evenly, and the vaporized raw material passes through the sealing box and enters the gas collecting tank for temporary storage, and then the valve pipe is opened to enter the storage tank through the ventilation pipe.
[0016] The storage cylinder of the utility model adopts a vertical shape, which is convenient for conducting vaporized raw materials. At the same time, the temperature detection instrument on the front of the storage cylinder can detect the temperature in real time, the liquid level detector can detect the height of the liquid inside it, and the feed pipe on the top side wall of the storage cylinder can cooperate with other injection structures to inject raw materials, which is more practical. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;
[0018] Figure 2 It is a structural schematic diagram of the utility model in a front view;
[0019] Figure 3 It is a schematic diagram of the structure of the utility model from a side view;
[0020] Figure 4 It is a structural schematic diagram of the heating rod of the utility model.
[0021] In the figure, 1. storage tube; 2. feed pipe; 3. heating box; 4. heating rod; 5. sealing box; 6. gas collecting tank; 7. sealing block; 8. exhaust pipe; 9. base plate; 10. insulation board; 11. slot box; 12. plug rod; 13. ventilation pipe; 14. valve pipe; 15. support plate; 16. storage tank; 17. temperature detection instrument; 18. liquid level detector. DETAILED DESCRIPTION
[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0023] See also Figure 1-4 The embodiment of the utility model provides a technical solution: a silicon tetrachloride vaporization device, comprising a base structure, a storage structure arranged on the top of the base structure, an exhaust structure arranged on the top of the storage structure and a steam collecting structure arranged on the back of the storage structure, the storage structure comprises two vertical storage cylinders 1, the storage cylinder 1 can be in the shape of a rectangular parallelepiped or a cylinder, a feed pipe 2 is arranged on the outer wall of one side of the top of the storage cylinder 1, and a heating box 3 is arranged at the bottom of the storage cylinder 1, and a heating rod 4 in a spring-bent shape is connected to the top of the heating box 3, the top of the storage cylinder 1 is connected to the exhaust structure, the exhaust structure comprises a sealing box 5, a gas collecting tank 6 in a circular arc shape is arranged on the top of the sealing box 5, and a sealing block 7 is connected to the top of the gas collecting tank 6, and a plurality of exhaust pipes 8 are connected to the sealing block 7.
[0024] The base structure includes a base plate 9, two heat insulation plates 10 are arranged on the top of the base plate 9, and a slot box 11 is connected to the top of the heat insulation plate 10, a groove is opened in the slot box 11, and a plurality of plug rods 12 are arranged inside the groove. The bottom of the heating box 3 is inserted into the slot box 11, and heat insulation is performed by using the heat insulation plate 10. At the same time, the slot box 11 can quickly plug and install the heating box 3 for fixed support, so that the entire storage structure can be placed vertically.
[0025] A gas-liquid separation plate is provided inside the sealing box 5, and the gaseous silicon tetrachloride and liquid residue can be effectively separated by using the gas-liquid separation plate.
[0026] The steam collecting structure includes a ventilation pipe 13, on which a valve pipe 14 is arranged, a support plate 15 is arranged on the back side of the storage tube 1, a storage tank 16 is arranged in the middle of the top of the support plate 15, and the storage tank 16 is connected to the ventilation pipe 13. When the valve pipe 14 is opened, the gas in the gas collecting tank 6 can enter the storage tank 16 through the ventilation pipe 13.
[0027] A temperature detection instrument 17 is provided on the front of the storage cylinder 1, and a liquid level detection instrument 18 is provided on the lower right side of the detection instrument. The temperature detection instrument 17 is used to detect the temperature inside the storage cylinder 1, and the liquid level detection instrument 18 is used to detect the internal liquid height, and raw materials are injected in real time.
[0028] Working principle: The base structure can be used as a supporting installation and heat-insulating component, and the heating box 3 at the bottom of the top storage structure is connected to the power supply, and the spring-bent heating rod 4 inside it is used to heat and vaporize the liquid silicon tetrachloride in the storage cylinder 1, so that the internal liquid is heated more evenly, and the vaporized raw material passes through the sealing box 5 and enters the gas collecting tank 6 for temporary storage, and then the valve tube 14 is opened and enters the storage tank 16 through the ventilation pipe 13. The storage cylinder 1 adopts a vertical shape to facilitate the conduction of the vaporized raw material. At the same time, the temperature detection instrument 17 on the front of the storage cylinder 1 can detect the temperature in real time, and the liquid level detector 18 can detect the height of the liquid inside it. And the feed pipe 2 on the top side wall of the storage cylinder 1 can cooperate with other injection structures to inject raw materials, which is more practical.
[0029] The utility model includes 1, a storage tube; 2, a feed pipe; 3, a heating box; 4, a heating rod; 5, a sealing box; 6, a gas collecting tank; 7, a sealing block; 8, an exhaust pipe; 9, a base plate; 10, a heat insulation board; 11, a slot box; 12, a plug rod; 13, a vent pipe; 14, a valve pipe; 15, a support plate; 16, a storage tank; 17, a temperature detection instrument; 18, a liquid level detector. All the components are common standard parts or components known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or conventional experimental methods. The utility model solves the problem that the traditional horizontal vaporizer adopts electric heating for vaporization. Although the purpose of vaporization can be achieved, the contact area between the electrolytic heating rod and silicon tetrachloride is small, the temperature is uneven, and the efficiency of vaporization is affected. The utility model solves the problem that the traditional horizontal vaporizer adopts electric heating for vaporization. Although the purpose of vaporization can be achieved, the contact area between the electrolytic heating rod and silicon tetrachloride is small, the temperature is uneven, and the efficiency of vaporization is affected. The above-mentioned components are combined with each other. In the silicon tetrachloride vaporization device of the utility model, the base structure can be used as a supporting installation and insulation component, and the heating box at the bottom end of the top storage structure is connected to the power supply, and the spring-bent heating rod inside it is used to heat and vaporize the liquid silicon tetrachloride in the storage tube, so that the internal liquid is heated more evenly, and the vaporized raw material passes through the sealing box and enters the gas collecting tank for temporary storage, and then the valve pipe is opened and enters the storage tank through the ventilation pipe. The storage tube of the utility model adopts a vertical shape, which is convenient for conducting the vaporized raw material. At the same time, the temperature detection instrument on the front of the storage tube can detect the temperature in real time, and the liquid level detector can detect the height of the liquid inside it. In addition, the feed pipe on the top side wall of the storage tube can cooperate with other injection structures to inject raw materials, which is more practical.
[0030] The above shows and describes the basic principles and main features of the utility model and the advantages of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, and it is intended to include all changes within the meaning and scope of the equivalent elements of the claims. Any figure mark in the claims should not be regarded as limiting the claims involved.
[0031] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.
Claims
1. A silicon tetrachloride vaporization device, comprising a base structure, a material storage structure arranged on the top of the base structure, a steam exhaust structure arranged on the top of the material storage structure, and a steam collecting structure arranged on the back of the material storage structure, characterized in that: The material storage structure comprises two storage cylinders (1) maintained vertically, a feeding pipe (2) is arranged on the outer wall of one side of the top of the storage cylinder (1), a heating box (3) is arranged at the bottom of the storage cylinder (1), and a heating rod (4) in a spring-bent shape is connected to the top of the heating box (3), the top of the storage cylinder (1) is connected to an exhaust structure, the exhaust structure comprises a sealing box (5), a gas collecting tank (6) in a circular arc shape is arranged at the top of the sealing box (5), and a sealing block (7) is connected to the top of the gas collecting tank (6), and a plurality of exhaust pipes (8) are connected to the sealing block (7).
2. A silicon tetrachloride vaporizing device according to claim 1, characterized in that: The base structure comprises a base plate (9), two heat insulation plates (10) are arranged on the top of the base plate (9), and a slot box (11) is connected to the top of the heat insulation plate (10), a groove is opened in the slot box (11), and a plurality of insertion rods (12) are arranged inside the groove, and the bottom of the heating box (3) is inserted into the slot box (11).
3. A silicon tetrachloride vaporizing device according to claim 1, characterized in that: A gas-liquid separation plate is arranged inside the sealing box (5).
4. A silicon tetrachloride vaporizing device according to claim 1, characterized in that: The steam collecting structure comprises a vent pipe (13), a valve pipe (14) is arranged on the vent pipe (13), a support plate (15) is arranged on the back side of the storage cylinder (1), a storage tank (16) is arranged in the middle of the top of the support plate (15), and the storage tank (16) is connected to the vent pipe (13).
5. A silicon tetrachloride vaporizing device according to claim 1, characterized in that: A temperature detection instrument (17) is arranged on the front side of the storage cylinder (1), and a liquid level detection instrument (18) is arranged on the lower right side of the detection instrument.