Mounting structure of vacuum probe seat

Abstract

The utility model relates to the technical field of vacuum probe seats, in particular to an installation structure of a vacuum probe seat, which comprises a base, one end of the base is fixedly connected with an installation mechanism, and the bottom of the base is fixedly connected with a shockproof mechanism. One side of the base is fixedly connected with a vacuum mechanism, the lower end of the vacuum mechanism is fixedly connected with a sealing mechanism, and the other side of the base is fixedly connected with a probe mechanism. The mounting mechanism comprises a mounting seat, a connecting column, a fixing plate and a screw hole, the vacuum mechanism comprises a vacuum pump, a vacuum cavity and a vacuum seat, the sealing mechanism comprises a communicating hole, a sealing seat and a sealing ring, and the probe mechanism comprises a fixing seat, a probe body, a spring and a probe seat. According to the installation structure of the vacuum probe seat, through the arrangement of the communication hole, the sealing seat and the sealing ring, when the installation structure is used, impurities and gas molecules in air can be prevented from entering the installation structure through the separation blade fixedly connected in the sealing seat, and the surface of a sample can be prevented from being polluted through the sealing ring in contact with the sample.

Description

Technical Field

[0001] The utility model relates to the technical field of a vacuum probe seat, in particular to an installation structure of a vacuum probe seat. Background Art

[0002] The probe holder is mainly used in the probe, semiconductor industry and optoelectronic industry testing. In order to detect the performance of semiconductor devices, the probe holder is used to detect the semiconductor. In the process of testing existing semiconductors, in order to facilitate the installation of the probe holder, the probe holder is usually installed on a magnetic metal workbench by magnetic suction. In the semiconductor and electronics industries, circuit boards are often used because various components and circuits need to be inserted on the board, and the normal operation of the circuit must be guaranteed after installation. Therefore, probes are often used for testing.

[0003] A manual vacuum probe holder is disclosed in the Chinese utility model patent application disclosure specification CN 219348959 U. When the manual vacuum probe holder is installed, the side of the holder away from the probe holder body contacts the workbench, and an external vacuum device performs a vacuum treatment on the vacuum channel. At this time, the external vacuum device will vacuum the adsorption hole through the vacuum channel. Since the adsorption hole is located on the side away from the probe holder body, the vacuum device performs a vacuum treatment between the holder body and the workbench to form a vacuum at the contact point between the holder body and the workbench. Under the action of atmospheric pressure, the manual vacuum probe holder is fixed on the workbench, thereby reducing the installation time of the manual vacuum probe holder. Secondly, since the manual vacuum probe holder is fixed on the workbench by vacuuming, the manual vacuum probe holder is more firmly installed on the workbench.

[0004] However, the device is not equipped with a shockproof mechanism. When the probe is in use, the operating space is very narrow, so it is inconvenient to operate during testing. If the installation is unstable, the probe seat will shake during use, resulting in inaccurate test results. The operating components cannot be protected from slipping. The device is not equipped with a sealing mechanism to prevent oxidation and corrosion by air, and cannot perform close measurements, so the accuracy and reliability of the test results cannot be ensured. Utility Model Content

[0005] The purpose of the utility model is to provide a mounting structure of a vacuum probe seat to solve the problems raised in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A mounting structure of a vacuum probe seat comprises a base, one end of the base is fixedly connected with a mounting mechanism, and the bottom of the base is fixedly connected with a shockproof mechanism, so as to achieve the effect of simple operation and stable installation;

[0008] A vacuum mechanism is fixedly connected to one side of the base, a sealing mechanism is fixedly connected to the lower end of the vacuum mechanism, and a probe mechanism is fixedly connected to the other side of the base to prevent air from invading the vacuum part, thereby making the detection result accurate and reliable.

[0009] Preferably, the mounting mechanism includes a mounting seat, a connecting column, a fixing plate and screw holes. One end of the base is fixedly connected to the mounting seat, one end of the mounting seat is fixedly connected to the connecting column, the other end of the connecting column is fixedly connected to the fixing plate, and screw holes are provided on the surface of the fixing plate, so that the installation equipment is stable, the shaking of components during operation is avoided, and the error of detection results is reduced.

[0010] Preferably, the vacuum mechanism includes a vacuum pump, a vacuum chamber and a vacuum seat. The base is fixedly connected to the inside of the vacuum pump, one end of the vacuum pump is fixedly connected to the vacuum seat, and a vacuum chamber is opened at the bottom of the vacuum seat, thereby protecting the integrity of the sample, improving measurement accuracy, and ensuring the accuracy of the test results.

[0011] Preferably, the sealing mechanism includes a connecting hole, a sealing seat and a sealing ring. The sealing seat is fixedly connected to the bottom of one side of the base. A connecting hole is opened inside the sealing seat. A vacuum cavity is inserted inside the connecting hole. A sealing ring is fixedly connected to the bottom of the vacuum cavity, which can prevent contamination of the sample surface, improve surface purity, and prevent oxidation and corrosion of the sample.

[0012] Preferably, the probe mechanism includes a fixed seat, a needle body, a spring and a needle seat. A lower mounting plate is fixedly connected to one side of the base, a fixed seat is fixedly connected to the upper side of the lower mounting plate, a needle seat is fixedly connected to the bottom of the fixed seat, a needle body is fixedly connected to the bottom of the needle seat, and a spring is sleeved on the outside of the needle body, thereby achieving the effect of convenient installation and fixation.

[0013] Preferably, the shockproof mechanism includes a shockproof mounting seat, and the bottom of the base is fixedly connected with the shockproof mounting seat, which can improve the test success rate, protect the components, prevent them from falling off, and extend the service life of the device.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The installation structure of the vacuum probe seat is provided with a connecting hole, a sealing seat and a sealing ring. When in use, after the vacuum pump draws air, the baffle fixedly connected inside the sealing seat can prevent impurities and gas molecules in the air from entering, thereby isolating the air. The sealing ring in contact with the sample can prevent contamination of the sample surface, improve the surface purity, and prevent oxidation and corrosion of the sample.

[0016] 2. The installation structure of the vacuum probe seat has a certain amount of floating through the setting of the shockproof mounting seat, which facilitates the contact between the probe and the object to be tested, reduces the test time, and can improve the test success rate, protect the components, prevent them from falling off, and extend the service life of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model on the right side;

[0018] Figure 2 It is a schematic diagram of the overall structure of the utility model on the left side;

[0019] Figure 3 It is a cross-sectional schematic diagram of the probe mechanism of the utility model;

[0020] Figure 4 It is a cross-sectional schematic diagram of the vacuum mechanism and the sealing mechanism of the utility model.

[0021] In the figure: 11, base; 21, mounting seat; 22, connecting column; 23, fixing plate; 24, screw hole; 31, vacuum pump; 32, vacuum chamber; 33, vacuum seat; 41, connecting hole; 42, sealing seat; 43, sealing ring; 51, fixing seat; 52, needle body; 53, spring; 54, needle seat; 61, shockproof mounting seat. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-Figure 4 As shown, a technical solution provided by the utility model:

[0024] A mounting structure of a vacuum probe seat includes a base 11, one end of the base 11 is fixedly connected to a mounting mechanism, and the bottom of the base 11 is fixedly connected to a shockproof mechanism. Through the arrangement of the base 11, the mounting mechanism and the shockproof mechanism, when in use, an operator brings the mounting device into contact with a workbench of a detection mechanism, and inserts a bolt into a screw hole 24 for threaded installation, thereby achieving the effect of simple operation and stable installation;

[0025] A vacuum mechanism is fixedly connected to one side of the base 11, a sealing mechanism is fixedly connected to the lower end of the vacuum mechanism, and a probe mechanism is fixedly connected to the other side of the base 11. Through the setting of the vacuum mechanism and the sealing mechanism, when in use, the vacuum equipment performs vacuum treatment between the base body and the workbench to form a vacuum at the contact point between the base body and the workbench, and the sealing device can prevent air from invading the vacuum part, so that the detection result is accurate and reliable.

[0026] In the present embodiment, preferably, the mounting mechanism includes a mounting seat 21, a connecting column 22, a fixing plate 23 and a screw hole 24, one end of the base 11 is fixedly connected to the mounting seat 21, one end of the mounting seat 21 is fixedly connected to the connecting column 22, the other end of the connecting column 22 is fixedly connected to the fixing plate 23, and a screw hole 24 is provided on the surface of the fixing plate 23. Through the arrangement of the mounting seat 21, the connecting column 22, the fixing plate 23 and the screw hole 24, when in use, the operator makes the mounting mechanism accurately contact with the detection platform by adjusting the connecting column 22 and fixing the fixing plate 23 with bolts, thereby making the installation equipment stable, avoiding the shaking of components during operation, and reducing the error of the detection result.

[0027] In this embodiment, preferably, the vacuum mechanism includes a vacuum pump 31, a vacuum chamber 32 and a vacuum seat 33. The vacuum pump 31 is fixedly connected to the inside of the base 11, and one end of the vacuum pump 31 is fixedly connected to the vacuum seat 33. Through the arrangement of the vacuum pump 31, the vacuum chamber 32 and the vacuum seat 33, when in use, the vacuum pump 31 extracts the air between the base body and the workbench, and a vacuum chamber 32 is provided at the bottom of the vacuum seat 33. The vacuum environment can prevent gases such as oxygen in the air from reacting with the sample, thereby protecting the integrity of the sample, improving the measurement accuracy, and ensuring the accuracy of the test results.

[0028] In the present embodiment, preferably, the sealing mechanism includes a connecting hole 41, a sealing seat 42 and a sealing ring 43. The sealing seat 42 is fixedly connected to the bottom of one side of the base 11. The sealing seat 42 is provided with a connecting hole 41. The vacuum chamber 32 is plugged into the connecting hole 41. The sealing ring 43 is fixedly connected to the bottom of the vacuum chamber 32. Through the arrangement of the connecting hole 41, the sealing seat 42 and the sealing ring 43, when in use, after the vacuum pump 31 draws air, the baffle fixedly connected to the sealing seat 42 can prevent impurities and gas molecules in the air from entering and isolate the air. The sealing ring 43 in contact with the sample can prevent contamination of the sample surface, improve surface purity, and prevent oxidation and corrosion of the sample.

[0029] In the present embodiment, preferably, the probe mechanism includes a fixed seat 51, a needle body 52, a spring 53 and a needle seat 54; a lower mounting plate is fixedly connected to one side of the base 11; a fixed seat 51 is fixedly connected to the upper side of the lower mounting plate; a needle seat 54 is fixedly connected to the bottom of the fixed seat 51; a needle body 52 is fixedly connected to the bottom of the needle seat 54; a spring 53 is sleeved on the outer side of the needle body 52; through the arrangement of the fixed seat 51, the needle body 52, the spring 53 and the needle seat 54, when in use, the probe can realize the extension and retraction of the probe length by sleeve-connecting the spring 53 and the probe needle seat 54, thereby ensuring good contact of the probe needle tip; the probe assembly connects a plurality of single probes together through the fixed plate 23, which is convenient for installation and fixation.

[0030] In the present embodiment, preferably, the shockproof mechanism includes a shockproof mounting seat 61, and the shockproof mounting seat 61 is fixedly connected to the bottom of the base 11. Through the setting of the shockproof mounting seat 61, the shockproof mounting seat 61 has a certain amount of floating, thereby facilitating the contact between the probe and the object to be tested, reducing the test time, and being able to improve the test success rate, and being able to protect the components, prevent falling off, and extend the service life of the device.

[0031] When the mounting structure of a vacuum probe seat of this embodiment is used, through the arrangement of the base 11, the mounting mechanism and the shockproof mechanism, when in use, the operator contacts the mounting device with the workbench of the detection mechanism, inserts the bolts into the screw holes 24 for threaded installation, thereby achieving the effect of easy operation and stable installation, and through the arrangement of the vacuum mechanism and the sealing mechanism, when in use, the vacuum equipment performs vacuum treatment between the seat body and the workbench to form a vacuum at the contact point between the seat body and the workbench, the sealing device can prevent the vacuum part from invading the air, isolate the air, and the sealing ring 43 in contact with the sample can prevent the sample surface from being contaminated, improve the surface purity, and prevent the sample from being oxidized and corroded. Thus, the detection result is accurate and reliable.

[0032] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A vacuum probe seat installation structure, characterized in that: It comprises a base (11), one end of the base (11) is fixedly connected to a mounting mechanism, and the bottom of the base (11) is fixedly connected to a shockproof mechanism; A vacuum mechanism is fixedly connected to one side of the base (11), a sealing mechanism is fixedly connected to the lower end of the vacuum mechanism, and a probe mechanism is fixedly connected to the other side of the base (11).

2. The installation structure of a vacuum probe seat according to claim 1, characterized in that: The mounting mechanism comprises a mounting seat (21), a connecting column (22), a fixing plate (23) and a screw hole (24); one end of the base (11) is fixedly connected to the mounting seat (21); one end of the mounting seat (21) is fixedly connected to the connecting column (22); the other end of the connecting column (22) is fixedly connected to the fixing plate (23); and a screw hole (24) is provided on the surface of the fixing plate (23).

3. The mounting structure of a vacuum probe seat according to claim 1, characterized in that: The vacuum mechanism comprises a vacuum pump (31), a vacuum chamber (32) and a vacuum seat (33); the vacuum pump (31) is fixedly connected inside the base (11); one end of the vacuum pump (31) is fixedly connected to the vacuum seat (33); and the vacuum chamber (32) is provided at the bottom of the vacuum seat (33).

4. The installation structure of a vacuum probe seat according to claim 1, characterized in that: The sealing mechanism comprises a connecting hole (41), a sealing seat (42) and a sealing ring (43); the sealing seat (42) is fixedly connected to the bottom of one side of the base (11); the connecting hole (41) is provided inside the sealing seat (42); a vacuum chamber (32) is inserted into the connecting hole (41); and the sealing ring (43) is fixedly connected to the bottom of the vacuum chamber (32).

5. The installation structure of a vacuum probe seat according to claim 1, characterized in that: The probe mechanism comprises a fixed seat (51), a needle body (52), a spring (53) and a needle seat (54); one side of the base (11) is fixedly connected to a lower mounting plate; the upper side of the lower mounting plate is fixedly connected to the fixed seat (51); the bottom of the fixed seat (51) is fixedly connected to the needle seat (54); the bottom of the needle seat (54) is fixedly connected to the needle body (52); and the outer side of the needle body (52) is sleeved with a spring (53).

6. The installation structure of a vacuum probe seat according to claim 1, characterized in that: The anti-vibration mechanism comprises an anti-vibration mounting seat (61), and the bottom of the base (11) is fixedly connected to the anti-vibration mounting seat (61).

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