Magnetron sputtering ring sand blasting device

Abstract

The utility model discloses a magnetron sputtering ring sand blasting device. The magnetron sputtering ring sand blasting device comprises a first sand blasting tool assembly and at least one second sand blasting tool assembly, the device disclosed by the utility model can be used for sand blasting of a magnetron sputtering titanium ring, and sand blasting of mounting convex bodies with different shapes and sizes of a titanium metal sputtering ring piece can be realized. By combining calculation of the outer diameter of the mounting convex body Pin and the outer diameter of the ring body welding area and arranging the mounting convex body positioning ring, the deviation risk existing in manual alignment and alignment is avoided, precise positioning of the ring piece sand blasting area is achieved, the sand blasting contactable area is effectively increased by arranging the mounting convex body mounting hole and the electrode mounting hole into conical holes, and the sand blasting efficiency is improved. The sand blasting difficulty is reduced, the sand blasting efficiency and the stability of the sand blasting roughness quality are improved, and the problem that the roughness value of the connecting position of the end of a conventional straight-edge-shaped sand blasting installation convex body is low is solved. According to the magnetron sputtering ring sand blasting device disclosed by the utility model, the mounting convex body positioning ring is designed to be a nylon ring, so that the mounting convex body can be prevented from being scratched during dismounting.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor sputtering target material sandblasting devices, and in particular relates to a magnetron sputtering ring sandblasting device. Background Art

[0002] Taking magnetron sputtering titanium ring as an example, during the sputtering process of the target, titanium metal atoms are mainly separated from the target surface in a diffuse reflection state after being hit. In order to improve the collimation of atomic deposition and improve the deep hole filling ability of titanium atoms after sputtering, it is necessary to constrain the atomic sputtering direction, place a sputtering ring of the same material between the target and the substrate, and apply radio frequency power to the sputtering ring to form a high-density plasma zone to ionize the sputtered neutral atoms. In this way, most of the target ions can fill deep holes at a vertical angle under the action of the electric field applied between the target and the substrate. Improve the uniformity of sputtering coating and the ability to fill deep holes, and at the same time absorb large particles that may appear during the sputtering process.

[0003] Usually, the surface roughness of the magnetron sputtering ring can be improved by knurling to increase the adsorption capacity of atoms during sputtering. However, the mounting protrusion welded on the ring cannot be processed by knurling. In addition, during use, the surface of the mounting protrusion and the welding position between the mounting protrusion and the ring are prone to accumulation of particles. Excessive accumulation of particles poses a risk of peeling. During sputtering, the smooth surface of the mounting protrusion will gradually accumulate metal ions and easily peel off, resulting in poor quality of the wafer after coating. Therefore, it is necessary to improve the surface roughness of the relevant area, increase the adsorption capacity, and improve the coating yield. Utility Model Content

[0004] In view of the problems existing in the prior art, the utility model provides a magnetron sputtering ring sandblasting device, which specifically includes the following contents:

[0005] A magnetron sputtering ring sandblasting device comprises a first sandblasting tooling assembly and at least one second sandblasting tooling assembly which are separately arranged, wherein the first sandblasting tooling assembly comprises a first mounting frame and a first fastening bolt; the first mounting frame comprises a first outer plate, a first inner plate, and a first horizontal connecting plate, wherein the first outer plate and the first inner plate are arranged opposite to each other and the bottoms of the two plates are connected by a first horizontal connecting plate, wherein the inner wall of the first outer plate is an arc-shaped concave wall which is recessed toward its outer wall, and the arc radius of the arc-shaped concave wall is equal to or slightly larger than the outer diameter of the magnetron sputtering ring, and two electrode mounting conical holes are arranged on the first outer plate. When in use, the first sandblasting tooling assembly is sleeved on the outside of the electrode of the magnetron sputtering ring, and two electrode connectors of the electrode are respectively sleeved in the two electrode mounting conical holes. The purpose of setting the electrode mounting hole as a conical hole is to reduce the obstruction of the hole wall to the side of the electrode located in the hole during sandblasting, so as to ensure that the side of the electrode connector can also be sandblasted evenly. The inner wall of the first inner plate is an arc-shaped convex wall protruding toward the first outer plate, and a first fastening through hole is arranged on the first inner plate; one end of the first fastening bolt passes through the first fastening through hole and is arranged on the inner side of the first inner plate, and the other end is arranged on the outer side of the first inner plate. The function of the first fastening bolt is to fasten the magnetron sputtering ring when in use. When fastening, the first fastening bolt can directly or indirectly resist the magnetron sputtering ring. In order to prevent damage to the surface of the magnetron sputtering ring, the preferred solution is to add a fastening protection gasket between the first fastening bolt and the magnetron sputtering ring. The second sandblasting tooling assembly includes a second mounting frame and a second fastening bolt; the second mounting frame includes a second outer plate, a second inner plate, and a second horizontal connecting plate, the second outer plate and the second inner plate are arranged opposite to each other and the bottoms of the two are connected by a second horizontal connecting plate, the inner wall of the second outer plate is an arc-shaped concave wall recessed toward its outer wall, the arc radius of the arc-shaped concave wall is equal to or slightly larger than the outer diameter of the magnetron sputtering ring, and a mounting protrusion mounting conical hole is provided on the second outer plate. When in use, the second sandblasting tooling assembly is sleeved on the mounting protrusion of the magnetron sputtering ring, and the mounting protrusion is sleeved in the mounting protrusion mounting conical hole. The purpose of setting the mounting protrusion mounting hole as a conical hole is to reduce the obstruction of the hole wall to the side of the mounting protrusion located in the hole during sandblasting, so as to ensure that the side of the electrode joint can also be sandblasted evenly. In actual application, if it is required to perform sandblasting on a circle of the magnetron sputtering ring body at the connection between the mounting protrusion and the magnetron sputtering ring body, the diameter of the minimum cross-section of the mounting conical hole of the mounting protrusion can be set larger than the diameter of the mounting protrusion as required. During installation, the central axis of the mounting protrusion is made to coincide with the center line of the mounting conical hole of the mounting protrusion. In this way, a circle of the magnetron sputtering ring body around the mounting protrusion can be exposed during sandblasting, and the corresponding parts of the mounting protrusion and the magnetron sputtering ring body can be sandblasted synchronously during sandblasting.The inner wall of the second inner plate is an arc-shaped convex wall protruding toward the second outer plate, and a second fastening through hole is arranged on the second inner plate; one end of the second fastening bolt passes through the second fastening through hole and is arranged on the inner side of the second inner plate, and the other end is arranged on the outer side of the second inner plate. The function of the second fastening bolt is to fasten the magnetron sputtering ring when in use. When fastening, the second fastening bolt can directly or indirectly resist the magnetron sputtering ring. In order to prevent damage to the surface of the magnetron sputtering ring, the preferred solution is to add a fastening protection gasket between the second fastening bolt and the magnetron sputtering ring.

[0006] Preferably, the diameter of the electrode mounting conical hole gradually decreases along the direction from the outer wall of the first outer plate to the inner wall of the first outer plate. When in use, the electrode connector of the magnetron sputtering ring is sleeved in the electrode mounting conical hole. Since the electrode mounting hole is a conical hole, an angle will be left between the inner wall of the hole and the electrode connector. The angle of the angle is reasonably set according to the actual situation to ensure that the side of the electrode connector is fully sandblasted.

[0007] Preferably, the aperture of the mounting protrusion mounting conical hole gradually decreases along the direction from the outer wall of the second outer plate to the inner wall of the second outer plate. When in use, the mounting protrusion of the magnetron sputtering ring is sleeved in the mounting protrusion mounting conical hole. Since the mounting protrusion mounting hole is a conical hole, an angle will be left between the inner wall of the hole and the mounting protrusion. The angle of the angle is reasonably set according to the actual situation to ensure that the side of the mounting protrusion is fully sandblasted.

[0008] Preferably, a conical cylindrical gasket is also provided in the conical hole of the mounting protrusion, and the conical cylindrical gasket is arranged close to the inner wall of the conical hole of the mounting protrusion. The device described in the utility model is supported by nylon material as a whole, and the conical cylindrical gasket is made of metal material, which can prevent sand from causing wear to key parts of the tooling during sandblasting and increase the service life of the entire device.

[0009] Preferably, the second sandblasting tooling assembly also includes a mounting protrusion positioning ring, the outer diameter of the mounting protrusion positioning ring is equal to the minimum inner diameter of the conical cylindrical gasket, the inner diameter is equal to or slightly larger than the outer diameter of the mounting protrusion, one end of the mounting protrusion positioning ring is arranged in the mounting conical hole of the mounting protrusion and is sleeved on the minimum inner diameter of the conical cylindrical gasket, and the other end is arranged on the outside of the second outer plate. Preferably, the mounting protrusion positioning ring is a nylon ring to prevent the mounting protrusion from being scratched during disassembly. In actual use, since it is necessary to sandblast the magnetron sputtering ring body around the mounting protrusion, the minimum aperture of the mounting protrusion mounting conical hole will be larger than the outer diameter of the mounting protrusion, so it will be difficult to make the central axis of the mounting protrusion coincide with the center line of the mounting conical hole of the mounting protrusion during the installation process. The purpose of setting the mounting protrusion positioning ring is to assist in the installation of the mounting protrusion so that it can be centered. Before sandblasting, first insert the mounting protrusion into the mounting protrusion positioning ring, then tighten the second positioning bolt to complete the installation of the second sandblasting tooling assembly on the magnetron sputtering ring, and finally remove the mounting protrusion positioning ring to perform post-rough sandblasting.

[0010] Preferably, a slot is provided on the outer wall of the first outer plate, and the two electrode mounting conical holes are provided in the slot; the first sandblasting tooling assembly further comprises an outer wall gasket, which is provided in the slot, and a reserved hole is provided at the position corresponding to the two electrode mounting conical holes on the outer wall gasket, and the diameter of the reserved hole is not less than the hole diameter of the electrode mounting conical hole on the outer wall of the first outer plate. The outer wall gasket and the slot can be connected by one or more sets of bolts, or by other reasonable methods, which are not limited here.

[0011] Preferably, the first sandblasting tooling assembly further includes a first fastening and protective gasket, which is an arc-shaped gasket, and is movably disposed between the first outer plate and the first inner plate; one end of the first fastening bolt passes through the first fastening through hole and is disposed in contact with the first fastening and protective gasket. The outer diameter of the arc-shaped gasket is equal to or slightly smaller than the inner diameter of the magnetron sputtering ring. When in use, the magnetron sputtering ring is disposed between the inner wall of the first outer plate and the first fastening and protective gasket. By adjusting the first fastening bolt, the first fastening and protective gasket can be made to be in close contact with the inner wall of the magnetron sputtering ring, thereby ensuring a stable installation without causing damage to the magnetron sputtering ring.

[0012] Preferably, the second sandblasting tooling assembly further includes a second fastening and protective gasket, which is an arc-shaped gasket, and is movably disposed between the second outer plate and the second inner plate; one end of the second fastening bolt passes through the second fastening through hole and is disposed in contact with the second fastening and protective gasket. The outer diameter of the arc-shaped gasket is equal to or slightly smaller than the inner diameter of the magnetron sputtering ring. When in use, the magnetron sputtering ring is disposed between the inner wall of the second outer plate and the second fastening and protective gasket. By adjusting the second fastening bolt, the second fastening and protective gasket can be made to be in close contact with the inner wall of the magnetron sputtering ring, thereby ensuring a stable installation without causing damage to the magnetron sputtering ring.

[0013] Preferably, the first sandblasting tool also includes two groups of electrode end protection components separately arranged from the first mounting frame, the electrode end protection components include an electrode end protection cap and a first protection bolt, the electrode end protection cap is provided with a threaded through hole, and one end of the first protection bolt is connected to the threaded through hole of the electrode end protection cap by a thread. The diameter of the electrode end protection cap is equal to the diameter of the electrode end of the magnetron sputtering ring, the specification of the threaded through hole on the electrode end protection cap is the same as the specification of the threaded hole of the electrode end, and the specification of the first protection bolt matches the threaded through hole and the specification of the threaded hole of the electrode end. When in use, first install the first mounting frame and other components on the magnetron sputtering ring, then place the electrode end protection cap on the electrode end, align the threaded holes of the two, and then screw one end of the first protection bolt inward from the threaded through hole of the electrode end protection cap until the electrode end protection cap is tightened at the electrode end position. The function of the electrode end protection cap is to protect the electrode end and prevent it from being damaged during sandblasting.

[0014] Preferably, the second sandblasting tool also includes a mounting protrusion end protection assembly separately provided from the second mounting frame, the mounting protrusion end protection assembly includes a mounting protrusion end protection cap and a second protection bolt, the mounting protrusion end protection cap is an annular structure, the annular structure includes a first section and a second section, the outer diameter of the first section is larger than the outer diameter of the second section, the inner diameter of the first section is smaller than the inner diameter of the second section, the inner wall of the first section is provided with threads, and one end of the second protection bolt is connected to the first section of the annular structure by threads. The end of the mounting protrusion is provided with an inner ring and an outer ring, an annular groove is formed between the inner ring and the outer ring, and the inner wall of the inner ring is provided with threads. The outer diameter of the first section of the mounting protrusion end protection cap is equal to the outer diameter of the outer ring of the mounting protrusion end, the outer diameter of the second section is equal to or slightly smaller than the inner diameter of the outer ring of the mounting protrusion end, and the inner diameter of the second section is equal to or slightly larger than the outer diameter of the inner ring of the mounting protrusion end. When in use, first install the second mounting frame and other components on the magnetron sputtering ring, then set the second section of the mounting convex end protection cap in the annular groove of the mounting convex end, and align the first section with the mounting convex end. At this time, the threaded hole on the first section of the mounting convex end protection cap is just aligned with the threaded hole of the inner ring of the mounting convex end, and then screw one end of the second protection bolt into the threaded hole of the first section of the mounting convex end protection cap and the threaded hole of the inner ring of the mounting convex end in turn until the mounting convex end protection cap is tightened on the mounting convex end. The function of the mounting convex end protection cap is to protect the mounting convex end and prevent it from being damaged during sandblasting.

[0015] Beneficial effects of the utility model: The magnetron sputtering ring sandblasting device disclosed in the utility model can be used in the sandblasting of magnetron sputtering titanium rings, and can realize the sandblasting of mounting protrusions of different shapes and sizes of titanium metal sputtering rings. In combination with the calculation of the outer diameter of the mounting protrusion Pin and the outer diameter of the ring body welding area, the installation protrusion positioning ring is set to solve the risk of deviation in manual alignment and alignment, and realize the precise positioning of the sandblasting area of ​​the ring. By setting the mounting protrusion mounting hole and the electrode mounting hole as conical holes, the sandblasting contact area is effectively increased, the difficulty of sandblasting is reduced, the sandblasting efficiency and the stability of the sandblasting roughness quality are improved, and the problem of low roughness value of the connection position of the end of the conventional straight-edge sandblasting mounting protrusion is solved. The magnetron sputtering ring sandblasting device disclosed in the utility model designs the mounting protrusion positioning ring as a nylon ring, which can prevent the mounting protrusion from being scratched during disassembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the magnetron sputtering titanium ring structure;

[0017] Figure 2 It is a schematic diagram of the structure for installing the convex body;

[0018] Figure 3 A cross-sectional view of the installation convex body;

[0019] Figure 4 is a schematic diagram of the structure of the electrode;

[0020] Figure 5 is a cross-sectional view of the electrode;

[0021] Figure 6 is a schematic structural diagram of a second sandblasting tooling assembly;

[0022] Figure 7 It is a schematic diagram of the installation of the second sandblasting tooling assembly;

[0023] Figure 8 It is a schematic diagram of the structure for installing the convex end protection assembly;

[0024] Fig. 9 A cross-sectional view of installing a protective cap on the end of a protruding body;

[0025] Fig.10 is a structural schematic diagram of a first sandblasting tooling assembly;

[0026] Fig.11 The schematic diagram of the structure of the first sandblasting tooling assembly

[0027] Fig.12 It is a schematic diagram of the installation of the first sandblasting tooling assembly;

[0028] Fig.13 It is a structural schematic diagram of the electrode end protection assembly;

[0029] Fig.14 This is a schematic diagram of the installation of the electrode end protection assembly;

[0030] Fig.15 This is a schematic diagram of the overall installation of the magnetron sputtering ring sandblasting device;

[0031] Fig.16 The figure is a comparison between the sandblasting effect of installing a protrusion or an electrode when using the device described in the utility model and the sandblasting effect of using the device in the prior art. DETAILED DESCRIPTION

[0032] The utility model is described in detail below in conjunction with the accompanying drawings and specific implementation methods. The embodiments shown below do not limit the contents of the utility model described in the claims. In addition, the entire contents of the structures represented by the following embodiments are not limited to those necessary as solutions to the utility model described in the claims.

[0033] A magnetron sputtering ring sandblasting device can be used for sandblasting of a magnetron sputtering ring 1. The structure of the magnetron sputtering ring 1 is shown in FIG. Figure 1-5 The structure of the magnetron sputtering ring sandblasting device is shown in Figure 6-15, including a first sandblasting tooling assembly 5 and at least one second sandblasting tooling assembly 4 which are separately arranged, the first sandblasting tooling assembly 5 including a first mounting frame, and a first fastening bolt 51; the first mounting frame including a first outer plate 52, a first inner plate 53, and a first horizontal connecting plate 54, the first outer plate 52 and the first inner plate 53 are arranged opposite to each other and the bottoms of the two are connected by a first horizontal connecting plate 54, the inner wall of the first outer plate 52 is an arc-shaped concave wall which is recessed toward its outer wall, the arc radius of the arc-shaped concave wall is equal to or slightly larger than the outer diameter of the magnetron sputtering ring, and two electrode mounting conical holes 56 are arranged on the first outer plate 52. When in use, the first sandblasting tooling assembly 5 is sleeved on the outside of the electrode of the magnetron sputtering ring, and the two electrode connectors 3 of the electrode are respectively sleeved in the two electrode mounting conical holes 56, the purpose of setting the electrode mounting hole as a conical hole is to reduce the obstruction of the hole wall to the side of the electrode located in the hole during sandblasting, so as to ensure that the side of the electrode connector 3 can also be sandblasted evenly. The inner wall of the first inner plate 53 is an arc-shaped convex wall protruding toward the first outer plate 52, and a first fastening through hole is arranged on the first inner plate 53; one end of the first fastening bolt 51 passes through the first fastening through hole and is arranged on the inner side of the first inner plate 53, and the other end is arranged on the outer side of the first inner plate 53. The function of the first fastening bolt 51 is to fasten the magnetron sputtering ring 1 when in use. When fastening, the first fastening bolt 51 can directly or indirectly resist the magnetron sputtering ring 1. In order to prevent damage to the surface of the magnetron sputtering ring 1, the preferred solution is to add a fastening protection gasket between the first fastening bolt 51 and the magnetron sputtering ring. The second sandblasting tooling assembly 4 includes a second mounting frame and a second fastening bolt 41; the second mounting frame includes a second outer plate 42, a second inner plate 43, and a second horizontal connecting plate 44, the second outer plate 42 and the second inner plate 43 are arranged opposite to each other and the bottoms of the two are connected by a second horizontal connecting plate 44, the inner wall of the second outer plate 42 is an arc-shaped concave wall recessed toward its outer wall, the arc radius of the arc-shaped concave wall is equal to or slightly larger than the outer diameter of the magnetron sputtering ring 1, and a mounting protrusion 2 mounting conical hole 45 is provided on the second outer plate 42. When in use, the second sandblasting tooling assembly 4 is sleeved on the outside of the mounting protrusion 2 of the magnetron sputtering ring 1, and the mounting protrusion 2 is sleeved in the mounting protrusion mounting conical hole 45. The purpose of setting the mounting protrusion mounting hole as a conical hole is to reduce the obstruction of the hole wall to the side of the mounting protrusion located in the hole during sandblasting, so as to ensure that the side of the electrode joint 3 can also be sandblasted evenly.In actual application, if it is required to perform sandblasting on a circle of the magnetron sputtering ring body at the connection between the mounting protrusion 2 and the magnetron sputtering ring 1 body, the diameter of the minimum cross-section of the mounting protrusion mounting conical hole 45 can be set larger than the diameter of the mounting protrusion as required, and the central axis of the mounting protrusion is made to coincide with the center line of the mounting protrusion mounting conical hole 45 during installation, so that a circle of the magnetron sputtering ring body around the mounting protrusion can be exposed during sandblasting, and the synchronous sandblasting of the corresponding parts of the mounting protrusion and the magnetron sputtering ring body can be achieved during sandblasting. The inner wall of the second inner plate 43 is an arc-shaped convex wall protruding toward the second outer plate 42, and a second fastening through hole is arranged on the second inner plate 43; one end of the second fastening bolt 41 passes through the second fastening through hole and is arranged on the inner side of the second inner plate 43, and the other end is arranged on the outer side of the second inner plate 43. The function of the second fastening bolt 41 is to fasten the magnetron sputtering ring when in use. When fastening, the second fastening bolt 41 can directly or indirectly resist the magnetron sputtering ring. In order to prevent damage to the surface of the magnetron sputtering ring, the preferred solution is to add a fastening protection gasket between the second fastening bolt 41 and the magnetron sputtering ring.

[0034] In one embodiment of the utility model, the aperture of the electrode mounting tapered hole 56 gradually decreases along the direction from the outer wall of the first outer plate 52 to the inner wall of the first outer plate 52. When in use, the electrode connector 3 of the magnetron sputtering ring 1 is sleeved in the electrode mounting tapered hole 56. Since the electrode mounting hole is a tapered hole, an angle is left between the inner wall of the hole and the electrode connector 3. The angle of the angle is reasonably set according to the actual situation to ensure that the side of the electrode connector 3 is fully sandblasted.

[0035] In one embodiment of the utility model, the aperture of the mounting protrusion mounting conical hole 45 gradually decreases along the direction from the outer wall of the second outer plate 42 to the inner wall of the second outer plate 42. When in use, the mounting protrusion of the magnetron sputtering ring is sleeved in the mounting protrusion mounting conical hole 45. Since the mounting protrusion mounting hole is a conical hole, an angle will be left between the inner wall of the hole and the mounting protrusion. The angle of the angle is reasonably set according to the actual situation to ensure that the side of the mounting protrusion is fully sandblasted.

[0036] In one embodiment of the utility model, a conical cylindrical gasket is further provided in the mounting protrusion mounting conical hole 45, and the conical cylindrical gasket is arranged close to the inner wall of the mounting protrusion mounting conical hole 45. The device described in the utility model is preferably made of nylon material as a whole, and the conical cylindrical gasket is preferably made of metal material, which can prevent sand from causing wear to the inner wall of the mounting protrusion mounting conical hole 45 at the key part of the device during sandblasting.

[0037] In one embodiment of the utility model, the second sandblasting tooling assembly 4 also includes a mounting convex body positioning ring 46, the outer diameter of the mounting convex body positioning ring 46 is equal to the minimum inner diameter of the conical cylindrical gasket, the inner diameter is equal to or slightly larger than the outer diameter of the mounting convex body 2, one end of the mounting convex body positioning ring 46 is arranged in the mounting convex body mounting conical hole 45 and is sleeved at the minimum inner diameter of the conical cylindrical gasket, and the other end is arranged on the outer side of the second outer plate 42. Preferably, the mounting convex body positioning ring 46 is a nylon ring, which can prevent the mounting convex body from being scratched during disassembly. In actual use, since it is necessary to sandblast a circle of magnetron sputtering ring bodies around the mounting convex body 2, the minimum aperture of the mounting convex body mounting conical hole 45 will be larger than the outer diameter of the mounting convex body, so it will be difficult to make the central axis of the mounting convex body coincide with the center line of the mounting convex body mounting conical hole 45 during the installation process. The purpose of setting the mounting convex body positioning ring 46 is to assist in the installation of the mounting convex body 2 so that it can be centered. Before sandblasting, first insert the mounting protrusion 2 into the mounting protrusion positioning ring 46, then tighten the second fastening bolt 41 to complete the installation of the second sandblasting tooling assembly 4 on the magnetron sputtering ring 1, and finally remove the mounting protrusion positioning ring 46 to perform post-rough sandblasting.

[0038] In one embodiment of the utility model, a slot body is provided on the outer wall of the first outer plate 52, and the two electrode mounting conical holes 56 are provided in the slot body; the first sandblasting tooling assembly 5 also includes an outer wall gasket, and the outer wall gasket is provided in the slot body, and a reserved hole is provided at the position corresponding to the two electrode mounting conical holes 56 on the outer wall gasket, and the diameter of the reserved hole is not less than the aperture of the electrode mounting conical hole 56 on the outer wall of the first outer plate 52. The outer wall gasket and the slot body can be connected by one or more sets of bolts, or by other reasonable methods, which are not limited here. The device described in the utility model is preferably made of nylon material as a whole, and the outer wall gasket described here is preferably made of metal material, which can prevent sand from causing wear to the key parts of the device during sandblasting.

[0039] In one embodiment of the utility model, the first sandblasting tooling assembly 5 further includes a first fastening and protective gasket 55, which is an arc-shaped gasket, and is movably arranged between the first outer plate 52 and the first inner plate 53; one end of the first fastening bolt 51 passes through the first fastening through hole and is arranged in contact with the first fastening and protective gasket 55. The outer diameter of the arc-shaped gasket is equal to or slightly smaller than the inner diameter of the magnetron sputtering ring 1. When in use, the magnetron sputtering ring 1 is arranged between the inner wall of the first outer plate 52 and the first fastening and protective gasket 55. By adjusting the first fastening bolt 51, the first fastening and protective gasket 55 can be made to be in close contact with the inner wall of the magnetron sputtering ring 1, ensuring a stable installation without causing damage to the magnetron sputtering ring 1.

[0040] In one embodiment of the utility model, the second sandblasting tooling assembly 4 further includes a second fastening and protective gasket 47, which is an arc-shaped gasket, and is movably arranged between the second outer plate 42 and the second inner plate 43; one end of the second fastening bolt 41 passes through the second fastening through hole and is arranged in contact with the second fastening and protective gasket 47. The outer diameter of the arc-shaped gasket is equal to or slightly smaller than the inner diameter of the magnetron sputtering ring 1. When in use, the magnetron sputtering ring 1 is arranged between the inner wall of the second outer plate 42 and the second fastening and protective gasket 47. By adjusting the second fastening bolt 41, the second fastening and protective gasket 47 can be made to be close to the inner wall of the magnetron sputtering ring 1, ensuring a stable installation without causing damage to the magnetron sputtering ring 1.

[0041] In one embodiment of the utility model, the first sandblasting tool also includes two groups of electrode end protection components separately arranged from the first mounting frame, the electrode end protection components include an electrode end protection cap 57 and a first protection bolt 58, the electrode end protection cap 57 is provided with a threaded through hole, and one end of the first protection bolt 58 is connected to the threaded through hole of the electrode end protection cap 57 by threading. The diameter of the electrode end protection cap 57 is equal to the diameter of the electrode end of the magnetron sputtering ring, the specification of the threaded through hole on the electrode end protection cap 57 is the same as the specification of the threaded hole of the electrode end, and the specification of the first protection bolt 58 matches the specification of the threaded through hole and the threaded hole of the electrode end. When in use, first install the first mounting frame and other components on the magnetron sputtering ring, then place the electrode end protection cap 57 on the electrode end, align the threaded holes of the two, and then screw one end of the first protection bolt 58 inward from the threaded through hole of the electrode end protection cap 57 until the electrode end protection cap 57 is tightened at the electrode end position. The electrode end protection cap 57 is used to protect the electrode end to prevent it from being damaged during sandblasting.

[0042] In one embodiment of the utility model, the second sandblasting tool also includes a mounting protrusion end protection assembly separately provided from the second mounting frame, the mounting protrusion end protection assembly includes a mounting protrusion end protection cap 48 and a second protection bolt 49, the mounting protrusion end protection cap 48 is an annular structure, the annular structure includes a first section and a second section, the outer diameter of the first section is greater than the outer diameter of the second section, the inner diameter of the first section is less than the inner diameter of the second section, the inner wall of the first section is provided with a thread, and one end of the second protection bolt 49 is connected to the first section of the annular structure by a thread. The end of the mounting protrusion is provided with an inner ring and an outer ring, an annular groove is formed between the inner ring and the outer ring, and the inner wall of the inner ring is provided with a thread. The outer diameter of the first section of the mounting protrusion end protection cap 48 is equal to the outer diameter of the outer ring of the mounting protrusion end, the outer diameter of the second section is equal to or slightly smaller than the inner diameter of the outer ring of the mounting protrusion end, and the inner diameter of the second section is equal to or slightly larger than the outer diameter of the inner ring of the mounting protrusion end. When in use, first install the second mounting frame and other components on the magnetron sputtering ring, then set the second section of the mounting convex end protection cap 48 in the annular groove of the mounting convex end, and align the first section with the mounting convex end. At this time, the threaded hole on the first section of the mounting convex end protection cap 48 is just aligned with the threaded hole of the inner ring of the mounting convex end, and then screw one end of the second protection bolt 49 into the threaded hole of the first section of the mounting convex end protection cap 48 and the threaded hole of the inner ring of the mounting convex end in turn until the mounting convex end protection cap 48 is tightened on the mounting convex end. The function of the mounting convex end protection cap 48 is to protect the mounting convex end and prevent it from being damaged during sandblasting.

[0043] In the description of the present application, it should be noted that the terms "upper", "lower", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", etc., are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0044] Unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0045] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A magnetron sputtering ring sandblasting device, characterized in that: The invention comprises a first sandblasting tooling assembly and at least one second sandblasting tooling assembly which are separately arranged, wherein the first sandblasting tooling assembly comprises a first mounting frame and a first fastening bolt; the first mounting frame comprises a first outer plate, a first inner plate, and a first horizontal connecting plate, wherein the first outer plate and the first inner plate are arranged opposite to each other and the bottoms of the two are connected by a first horizontal connecting plate, the inner wall of the first outer plate is an arc-shaped concave wall which is recessed toward the outer wall thereof, and two electrode mounting conical holes are arranged on the first outer plate; the inner wall of the first inner plate is an arc-shaped convex wall which is protruded toward the first outer plate, and a first fastening through hole is arranged on the first inner plate; one end of the first fastening through hole is arranged on the inner side of the first inner plate, The other end is arranged on the outer side of the first inner plate; the second sandblasting tooling assembly includes a second mounting frame and a second fastening bolt; the second mounting frame includes a second outer plate, a second inner plate, and a second horizontal connecting plate, the second outer plate and the second inner plate are arranged opposite to each other and the bottoms of the two are connected by a second horizontal connecting plate, the inner wall of the second outer plate is an arc-shaped concave wall recessed toward its outer wall, and a mounting convex mounting conical hole is arranged on the second outer plate; the inner wall of the second inner plate is an arc-shaped convex wall protruding toward the second outer plate, and a second fastening through hole is arranged on the second inner plate; one end of the second fastening bolt passes through the second fastening through hole and is arranged on the inner side of the second inner plate, and the other end is arranged on the outer side of the second inner plate.

2. A magnetron sputtering ring sandblasting device according to claim 1, characterized in that: The diameter of the electrode mounting tapered hole gradually decreases along the direction from the outer wall of the first outer plate to the inner wall of the first outer plate.

3. A magnetron sputtering ring sandblasting device according to claim 2, characterized in that: The diameter of the mounting conical hole of the mounting protrusion gradually decreases along the direction from the outer wall of the second outer plate to the inner wall of the second outer plate.

4. A magnetron sputtering ring sandblasting device according to claim 3, characterized in that: A conical cylindrical gasket is also arranged in the mounting conical hole of the mounting protrusion, and the conical cylindrical gasket is arranged closely against the inner wall of the mounting conical hole of the mounting protrusion.

5. A magnetron sputtering ring sandblasting device according to claim 4, characterized in that: The second sandblasting tooling assembly also includes a mounting protrusion positioning ring, the outer diameter of the mounting protrusion positioning ring is equal to the minimum inner diameter of the conical cylindrical gasket, one end of the mounting protrusion positioning ring is arranged in the mounting protrusion mounting conical hole and is sleeved on the smallest inner diameter of the conical cylindrical gasket, and the other end is arranged on the outside of the second outer plate.

6. The magnetron sputtering ring sandblasting device according to claim 1, characterized in that: A groove body is opened on the outer wall of the first outer plate, and the two electrode mounting conical holes are arranged in the groove body; the first sandblasting tooling assembly also includes an outer wall gasket, and the outer wall gasket is arranged in the groove body. A reserved hole is respectively arranged at the position corresponding to the two electrode mounting conical holes on the outer wall gasket, and the diameter of the reserved hole is not less than the hole diameter of the electrode mounting conical hole on the outer wall of the first outer plate.

7. The magnetron sputtering ring sandblasting device according to claim 1, characterized in that: The first sandblasting tooling assembly also includes a first fastening and protective gasket, which is an arc-shaped gasket and is movably arranged between the first outer plate and the first inner plate; one end of the first fastening bolt passes through the first fastening through hole and is arranged in contact with the first fastening and protective gasket.

8. The magnetron sputtering ring sandblasting device according to claim 1, characterized in that: The second sandblasting tooling assembly also includes a second fastening and protective gasket, which is an arc-shaped gasket and is movably arranged between the second outer plate and the second inner plate; one end of the second fastening bolt passes through the second fastening through hole and is arranged in contact with the second fastening and protective gasket.

9. The magnetron sputtering ring sandblasting device according to any one of claims 1 to 8, characterized in that: The first sandblasting tool also includes two groups of electrode end protection components separately arranged from the first mounting frame, the electrode end protection components include an electrode end protection cap and a first protection bolt, the electrode end protection cap is provided with a threaded through hole, and one end of the first protection bolt is threadedly connected to the threaded through hole of the electrode end protection cap.

10. The magnetron sputtering ring sandblasting device according to claim 9, characterized in that: The second sandblasting tool also includes a mounting protrusion end protection assembly separately provided from the second mounting frame, the mounting protrusion end protection assembly includes a mounting protrusion end protection cap and a second protection bolt, the mounting protrusion end protection cap is an annular structure, the annular structure includes a first section and a second section, the outer diameter of the first section is greater than the outer diameter of the second section, the inner diameter of the first section is smaller than the inner diameter of the second section, the inner wall of the first section is provided with threads, and one end of the second protection bolt is connected to the first section of the annular structure by threads.

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