Plate taking manipulator for silicon nitride substrate production
By designing a plate picking robot with a telescopic mechanism and pneumatic components, the problem of damage during gripping of thermal silicon nitride substrates in the prior art is solved, and efficient and safe substrate grabbing is achieved, and production costs are reduced.
Patent Information
- Application Number
- CN202421133482.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-23
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2034-05-23
AI Technical Summary
The existing plate picking robots are prone to damage when grabbing the thermal silicon nitride substrate, and increase production costs, which cannot meet the production needs of high-strength, high-thermal conductivity, silicon nitride substrates.
A plate picking robot is designed including a longitudinal fixing frame, a threaded rod, a motor, a telescopic mechanism and a suction cup. The lifting and adjustment of the robot arm is achieved through coupling and threaded connection, and the substrate is grasped through a negative pressure suction cup using a pneumatic assembly to reduce the Damage to the substrate.
It effectively avoids damage to the thermal silicon nitride substrate during the gripping process, improves production efficiency and device convenience, and reduces production costs.
Smart Images
Figure CN222270302U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon nitride substrate production, in particular to a plate-taking robot for silicon nitride substrate production. Background Art
[0002] Neither alumina ceramic substrates nor aluminum nitride ceramic substrates can fully meet the requirements of high-power components. The various technical parameters of silicon nitride high thermal conductivity ceramic substrates can fully meet this requirement. Currently, the size of high-strength and high thermal conductivity silicon nitride substrates produced is mainly a square with a side length of 100mm-200mm and a board thickness of 0.3-0.7mm.
[0003] The existing thermal silicon nitride substrate is relatively thin. When grabbing the thermal silicon nitride substrate, the existing plate-taking robot will apply force from both sides to hold it tightly, which may easily cause damage to the thermal silicon nitride substrate and increase production costs. Therefore, in order to solve the above problem, a plate-taking robot for silicon nitride substrate production is proposed. Utility Model Content
[0004] In order to solve the above technical problems, the utility model provides the following technical solutions:
[0005] A plate-taking robot for producing silicon nitride substrates comprises a longitudinal fixing frame, a threaded rod is arranged inside the longitudinal fixing frame, the top of the threaded rod is connected to the output end of a first motor through a coupling, the first motor is installed at the top of the longitudinal fixing frame, the bottom of the longitudinal fixing frame is fixedly connected to the top of a base frame, the threaded hole at the bottom of the base frame is connected to the outer side of the bottom threaded rod through a thread, the bottom threaded rod is installed inside the bottom fixing frame, the left end of the bottom threaded rod is connected to the output end of a second motor through a coupling, the second motor is installed at the left end of the bottom fixing frame, the outer side of the threaded rod is connected to the rear end of a telescopic mechanism, a substrate grabbing mechanism is arranged at the bottom of the front end of the telescopic mechanism, the substrate grabbing mechanism comprises a connecting rod, the top of the connecting rod is connected to the bottom of the front end of the telescopic mechanism, the bottom of the connecting rod is vertically connected to the top of the middle end of a lifting plate, bases are arranged at the bottoms of both ends of the lifting plate, suction cups are arranged below the bases, the tops of the suction cups are connected to the internal chambers of the bases and are connected to the pneumatic components through air pipes.
[0006] Preferably, the telescopic mechanism includes a rear fixed arm, a rear end threaded hole of the rear fixed arm is threadedly connected to the outer side of the threaded rod, the interior of the rear fixed arm is slidingly connected to the outer side of the front movable arm, a positioning hole is provided inside the top end of the front movable arm, the front end top of the rear fixed arm is welded to the bottom of the fixing sleeve, the bottom of the positioning pin passes through the fixing sleeve and is connected to the interior of the positioning hole, and the front end bottom of the front movable arm is vertically connected to the top of the connecting rod.
[0007] Preferably, a protruding rod is provided on one side of the positioning pin, and the side surface of the protruding rod is closely connected to the side wall of the fixing sleeve hole groove.
[0008] Preferably, the rear end of the rear fixing arm is fixedly connected to the front side of the middle end of the back fixing plate.
[0009] Preferably, the cross-section of the locking hole in top view is a circular structure.
[0010] Compared with the prior art, the beneficial effects of the utility model are: (1) when the device grasps the thermal silicon nitride substrate, the suction cup is attached to the surfaces of both ends of the thermal silicon nitride substrate, and the pneumatic component extracts the gas from the internal chamber of the base, and the thermal silicon nitride substrate is sucked by negative pressure, so that the thermal silicon nitride substrate is not easily damaged when grasped.
[0011] (2) To adjust the length of the robotic arm, first lift the positioning pin, then rotate the positioning pin, and clamp the positioning pin on the fixed sleeve through the protruding rod. After the position of the front movable arm inside the rear fixed arm is adjusted, rotate the positioning pin, and put the protruding rod into the hole groove of the fixed sleeve. The bottom of the positioning pin is fixed inside the clamping hole, thereby conveniently adjusting the length of the robotic arm and increasing the convenience of using the device. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0013] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;
[0014] Figure 2 This is a schematic diagram of the three-dimensional structure of the telescopic mechanism of the utility model;
[0015] Figure 3 This is a front cross-sectional structural diagram of the telescopic mechanism of the utility model;
[0016] Figure 4 It is a left view structural schematic diagram of the substrate grabbing mechanism of the utility model.
[0017] Explanation of the reference numerals in the figure: longitudinal fixed frame 1, threaded rod 11, first motor 12, base frame 13, rear fixed arm 21, front movable arm 22, positioning hole 23, fixing sleeve 24, positioning pin 25, protruding rod 26, back fixing plate 27, connecting rod 31, lifting plate 32, to pneumatic component 33, base 34, suction cup 35, bottom fixed frame 41, bottom threaded rod 42, second motor 43. DETAILED DESCRIPTION
[0018] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0019] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0020] See also Figure 1-4 The utility model provides an embodiment: a plate-taking robot for producing silicon nitride substrates, including a longitudinal fixed frame 1, a threaded rod 11 is installed inside the longitudinal fixed frame 1, the top of the threaded rod 11 is connected to the output end of the first motor 12 through a coupling, the first motor 12 can drive the threaded rod 11 to rotate, and when the threaded rod 11 rotates, it can drive the telescopic mechanism to rise and fall, the first motor 12 is installed on the top of the longitudinal fixed frame 1, the bottom of the longitudinal fixed frame 1 is fixedly connected to the top of the base frame 13, the bottom threaded hole of the base frame 13 is connected to the outer side of the bottom threaded rod 42 through a threaded connection, the bottom threaded rod 42 is installed inside the bottom fixed frame 41, the left end of the bottom threaded rod 42 is connected to the output end of the second motor 43 through a coupling, the second motor 43 can drive the bottom threaded rod 42 to rotate, and the rotation of the bottom threaded rod 42 can drive the bottom The frame 13 moves left and right with the longitudinal fixed frame 1, the second motor 43 is installed at the left end of the bottom fixed frame 41, the outer side of the threaded rod 11 is connected to the rear end of the telescopic mechanism, and a substrate grabbing mechanism is installed at the bottom of the front end of the telescopic mechanism. The substrate grabbing mechanism includes a connecting rod 31, the top of the connecting rod 31 is connected to the bottom of the front end of the telescopic mechanism, and the bottom of the connecting rod 31 is vertically connected to the top of the middle end of the lifting plate 32. A base 34 is provided at the bottom of both ends of the lifting plate 32, and a suction cup 35 is installed under the base 34. The top of the suction cup 35 is connected to the internal chamber of the base 34 and is connected to the pneumatic component 33 through an air pipe. When grabbing the thermal silicon nitride substrate, the suction cup 35 is attached to the surfaces of both ends of the thermal silicon nitride substrate, and the pneumatic component 33 extracts the gas in the internal chamber of the base 34, and sucks the thermal silicon nitride substrate by negative pressure, so that it is not easy to cause damage to the thermal silicon nitride substrate.
[0021] The telescopic mechanism includes a rear fixed arm 21, a rear end threaded hole of the rear fixed arm 21 is threadedly connected to the outer side of the threaded rod 11, the interior of the rear fixed arm 21 is slidably connected to the outer side of the front movable arm 22, and the front movable arm 22 can adjust its position inside the rear fixed arm 21 to change the length of the connection between the front movable arm 22 and the rear fixed arm 21, a positioning hole 23 is provided inside the top of the front movable arm 22, the front end top of the rear fixed arm 21 is welded to the bottom of the fixing sleeve 24, the bottom of the positioning pin 25 passes through the fixing sleeve 24 and is connected to the inside of the positioning hole 23, the front end bottom of the front movable arm 22 is vertically connected to the top of the connecting rod 31, and a convex rod 26 is provided on one side of the locating pin 25, and the side surface of the convex rod 26 is fitted and connected with the side wall of the hole groove of the fixing sleeve 24. The rear end of the rear fixed arm 21 is fixedly connected to the front side of the middle end of the back fixing plate 27. The back fixing plate 27 can increase the stability of the rear fixed arm 21 and the front movable arm 22 during the lifting process. The top view of the positioning hole 23 has a circular structure. When the length between the front movable arm 22 and the rear fixed arm 21 needs to be adjusted, the positioning pin 25 is first lifted, and then the positioning pin 25 is rotated, and the positioning pin 25 is clamped on the fixing sleeve 24 through the protruding rod 26. After the position of the front movable arm 22 inside the rear fixed arm 21 is adjusted, the positioning pin 25 is rotated, and the protruding rod 26 is placed in the hole groove of the fixing sleeve 24. The bottom of the positioning pin 25 is fixed inside the positioning hole 23, so that the length of the mechanical arm can be easily adjusted, which increases the convenience of using the device.
[0022] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technicians in this field can understand and implement it without paying creative labor.
[0023] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.
Claims
1. A plate-taking robot for producing silicon nitride substrates, characterized in that: The invention comprises a longitudinal fixing frame (1), wherein a threaded rod (11) is installed inside the longitudinal fixing frame (1), the top of the threaded rod (11) is connected to the output end of a first motor (12) via a coupling, the first motor (12) is installed on the top of the longitudinal fixing frame (1), the bottom of the longitudinal fixing frame (1) is fixedly connected to the top of a base frame (13), the threaded hole at the bottom of the base frame (13) is connected to the outer side of a bottom threaded rod (42) via a thread, the bottom threaded rod (42) is installed inside a bottom fixing frame (41), the left end of the bottom threaded rod (42) is connected to the output end of a second motor (43) via a coupling, and the second motor (43) is connected to the output end of the second motor (43) via a coupling. The machine (43) is installed at the left end of the bottom fixed frame (41), the outer side of the threaded rod (11) is connected to the rear end of the telescopic mechanism, and the bottom of the front end of the telescopic mechanism is provided with a substrate grabbing mechanism, and the substrate grabbing mechanism comprises a connecting rod (31), the top of the connecting rod (31) is connected to the bottom of the front end of the telescopic mechanism, the bottom of the connecting rod (31) is vertically connected to the top of the middle end of the lifting plate (32), and the bottoms of both ends of the lifting plate (32) are provided with bases (34), and a suction cup (35) is installed below the base (34), and the top of the suction cup (35) is connected to the internal chamber of the base (34) and is connected to the pneumatic component (33) through an air pipe.
2. The plate-taking robot for producing silicon nitride substrates according to claim 1, characterized in that: The telescopic mechanism comprises a rear fixed arm (21), a rear end threaded hole of the rear fixed arm (21) being threadedly connected to the outer side of the threaded rod (11), the interior of the rear fixed arm (21) being slidably connected to the outer side of the front movable arm (22), a locking hole (23) being provided inside the top end of the front movable arm (22), the front end top of the rear fixed arm (21) being welded to the bottom of the fixing sleeve (24), the bottom of the positioning pin (25) passing through the fixing sleeve (24) being connected to the inside of the locking hole (23), and the front end bottom of the front movable arm (22) being vertically connected to the top of the connecting rod (31).
3. The plate-taking robot for producing silicon nitride substrates according to claim 2, characterized in that: A protruding rod (26) is provided on one side of the positioning pin (25), and the side surface of the protruding rod (26) is closely connected to the side wall of the hole groove of the fixing sleeve (24).
4. The plate-taking robot for producing silicon nitride substrates according to claim 2, characterized in that: The rear end of the rear fixing arm (21) is fixedly connected to the front side of the middle end of the back fixing plate (27).
5. The plate-taking robot for producing silicon nitride substrates according to claim 2, characterized in that: The locking hole (23) has a circular structure in a top view cross section.