Material feeding and discharging device for microwave plasma chemical vapor deposition

Abstract

The utility model relates to the field of microwave plasma vapor deposition (MPCVD) system equipment, and discloses a device for MPCVD materials to enter and exit from a warehouse, which comprises a lifting motor, a lifting screw rod assembly and a translation screw rod assembly, the driving end of the lifting motor is divided into two directions through a T-shaped speed reducer and is respectively connected with a commutator, and the translation screw rod assembly is connected with the lifting screw rod assembly. A movement bearing plate vertically slides on the two lifting lead screw assemblies, and a translation sliding block assembly and a base table cavity are installed on the top side of the movement bearing plate. According to the utility model, the material base station and the microwave resonant cavity are separated and combined by utilizing a combined mechanism which moves in freedom degrees in two directions through automatic control, servo motor driving and combination of lifting motion and horizontal motion, and a material operation position is transferred to the outside of the cavity; and the seed wafers are placed and arranged at the sampling opening in the outer side of the cavity, so that the operation convenience is greatly improved.

Description

Technical Field

[0001] The utility model relates to the field of microwave plasma vapor deposition (MPCVD) system equipment, in particular to a device for MPCVD material in and out of a bin. Background Art

[0002] Artificial diamond is a material that combines excellent chemical, physical and mechanical properties. Microwave plasma chemical vapor deposition (MPCVD) technology has gradually become the mainstream technology in the field of artificial diamond. This technology is based on high-power microwave technology to produce highly stable plasma fireballs to achieve the growth of artificial diamonds.

[0003] MPCVD equipment is mainly divided into three categories according to the energy feeding form, namely, top energy feeding form, bottom energy feeding form and side energy feeding form. For the top energy feeding form, due to the airtightness of the cavity and the rigid connection of the microwave system, most cylindrical reaction cavities are installed in the equipment and are fixed, so the material is entered and exited through a small window on the side of the cavity. In operation, the material seed wafers are arranged neatly on the carrier plate outside the cavity, and then put in as a whole. Due to limited space, the operation is sometimes prone to tilting and shaking, resulting in displacement of the seed wafers, which need to be rearranged, which is very inconvenient; after each growth is completed, the inner wall of the chamber needs to be cleaned. The material inlet and outlet are small, and the operation is not convenient. Some positions are not cleaned in place, affecting the growth quality. At the same time, a larger material inlet and outlet window is opened on the side of the microwave resonant cavity. Due to processing and installation errors, it is easy to affect the electric field distribution of the microwave resonant cavity. Utility Model Content

[0004] The purpose of the utility model is to solve the shortcomings existing in the prior art, and to propose a device for MPCVD material in and out of the warehouse, aiming to solve the problem of inconvenient material in and out of the warehouse operation in the existing top feeding form, and provide a new type of in and out method, that is, a combined mechanism of two-directional freedom movement is adopted, through automatic control, servo motor drive, through the combination of lifting movement and horizontal movement, to realize the separation and combination of the material base and the microwave resonant cavity, transfer the material operation position to the outside of the cavity, and place and arrange the seed wafers at the sampling port outside the cavity, which greatly improves the convenience of operation, does not affect the electric field distribution of the resonant cavity, and is conducive to maintaining the stability of microwave plasma.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A material in-and-out device for microwave plasma chemical vapor deposition (MPCVD) comprises a lifting motor, a lifting screw assembly and a translation screw assembly, wherein the driving end of the lifting motor is divided into two directions by a T-type reducer and is respectively connected with a commutator, two groups of the lifting screw assemblies are vertically slid with a moving bearing plate, and a translation slider assembly and a base cavity are installed on the top side of the moving bearing plate; the lifting guide column and the guide sleeve are hoisted in the bearing plate and connected with the moving bearing plate by the guide sleeve; the moving bearing plate is positioned at the limit position of the up and down movement by an upper limit sensor and a lower limit sensor; the translation motor is comprised, and the driving end of the translation motor is used to drive the moving bearing plate to slide horizontally through the translation screw assembly and the translation slider assembly; the horizontal movement of the moving bearing plate is respectively positioned at the limit position of the horizontal movement by a rear limit sensor and a front limit sensor; the base cavity and the microwave resonant cavity are separated and combined by lifting and lowering and horizontal directions; the base cavity and the microwave resonant cavity are sealed and connected by pressing an O-ring by lifting and lowering movement.

[0007] Furthermore, the driving end of the lifting motor utilizes an automatic control program to execute an exiting action to perform downward movement, the base cavity is separated from the microwave resonant cavity, the moving bearing plate is used to trigger a lower limit sensor, and performs a horizontal forward movement when the descent stops.

[0008] Furthermore, the translation motor driving end is used to execute the forward movement of the moving carrier plate, and when the moving carrier plate triggers the front limit sensor, the moving carrier plate stops moving, and the stop position is exactly located at the sampling port of the carrier plate.

[0009] Furthermore, the translation motor executes the warehouse entry action through an automatic control program, and is used to perform the backward movement. After the motion support plate triggers the rear limit sensor, the motion support plate will stop moving and rise vertically.

[0010] Furthermore, the lifting motor driving end is used to execute the upward movement of the moving bearing plate. When the moving bearing plate triggers the upper limit sensor, it stops rising, and the base cavity is butt-jointed and sealed with the microwave resonant cavity.

[0011] The utility model has the following beneficial effects:

[0012] 1. In the utility model, a combined mechanism of two-directional freedom of movement is utilized, through automatic control, servo motor drive, and a combination of lifting movement and horizontal movement to realize the separation and combination of the material base and the microwave resonant cavity, transfer the material operation position to the outside of the cavity, and place and arrange the seed crystal sheets at the sampling port outside the cavity, which greatly improves the convenience of operation.

[0013] 2. In the utility model, the integrity of the microwave resonant cavity is maintained, the electric field distribution of the resonant cavity is not affected, and it is beneficial to maintain the stability of the microwave plasma. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the front structure of a device for MPCVD material in and out of the bin proposed by the utility model;

[0015] Figure 2 This is a side structural diagram of a device for MPCVD material in and out of a bin proposed by the utility model;

[0016] Figure 3 This is a schematic diagram of the exit position of an MPCVD material entry and exit device proposed in the utility model.

[0017] Legend:

[0018] 1. Lifting motor; 2. T-type reducer; 3. Commutator; 4. Lifting screw assembly; 5. Translation motor; 6. Translation screw assembly; 7. Lifting guide column; 8. Guide bushing; 9. Translation slider assembly; 10. Base cavity; 11. Microwave resonant cavity; 12. Carrying plate; 13. Rear limit sensor; 14. Front limit sensor; 15. Lower limit sensor; 16. Upper limit sensor; 17. Motion bearing plate. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] Reference Figure 1-3 , an embodiment provided by the utility model:

[0021] like Figure 1 As shown, a device for microwave plasma chemical vapor deposition (MPCVD) material in and out of a bin comprises a lifting motor 1, a T-type reducer 2, a commutator 3, a lifting screw assembly 4, a translation motor 5, a translation screw assembly 6, a lifting guide column 7, a guide sleeve 8, a translation slider assembly 9 and a base cavity 10;

[0022] The lifting guide column 7 is hoisted in the bearing plate 12 and connected to the moving bearing plate 17 through the guide sleeve 8;

[0023] The translation slider assembly 9 and the base cavity 10 are mounted on the motion bearing plate 17;

[0024] This mechanism can realize operation in two directions: lifting and translation;

[0025] The lifting motor 1 is driven by a T-type reducer 2 and is divided into two directions, which are respectively connected to the commutator 3 to drive two sets of lifting screw rod assemblies 4 to act simultaneously, so as to realize the lifting movement of the moving bearing plate 17 in the up and down directions;

[0026] The moving bearing plate 17 moves up and down and the upper limit position of the upper and lower limit position sensor 16 and the lower limit sensor 15 are respectively positioned;

[0027] The translation motor 5 drives the translation screw assembly 6 and the translation slider assembly 9 to realize the horizontal translation movement of the moving bearing plate 17;

[0028] The horizontal movement of the moving bearing plate 17 is respectively determined by the rear limit sensor 13 and the front limit sensor 14 to determine the limit position of the horizontal movement;

[0029] The base cavity 10 and the microwave resonant cavity 11 are lifted and lowered and separated and combined in the horizontal direction to realize the movement of materials entering and exiting the warehouse;

[0030] The base cavity 10 and the microwave resonant cavity 11 are sealed and connected by pressing an O-ring through lifting and lowering movements, and other components are connected by bolts.

[0031] The lifting motor 1 and the translation motor 5 are both servo motors, and are equipped with absolute encoders and brakes.

[0032] When the warehouse exit operation is required, the warehouse exit action is executed through the automatic control program, the lifting motor 1 is driven, and the downward movement is performed first, the base cavity 10 is separated from the microwave resonant cavity 11, and when the moving carrier plate 17 triggers the lower limit sensor 15, it stops descending and then moves forward horizontally. The translation motor 5 is driven to perform forward movement, and when the moving carrier plate 17 triggers the front limit sensor 14, it stops moving, and the stop position is exactly at the sampling port position of the carrier plate 12.

[0033] When the material is placed, the automatic control program executes the warehouse entry action, the translation motor 5 is driven to perform the backward movement, and when the moving bearing plate 17 triggers the rear limit sensor 13, the movement stops, and then the ascending action is performed. The lifting motor 1 is driven to perform the upward movement first, and when the moving bearing plate 17 triggers the upper limit sensor 16, the ascending stops, and the base cavity 10 and the microwave resonant cavity 11 are docked and sealed, that is, the warehouse entry is in place.

[0034] Through the combined movement of the mechanism, the base cavity 10 where the material is placed is transferred to the outside of the microwave resonant cavity 11, and the material is taken and placed at the sampling port position of the carrier plate 12. Finally, it should be noted that the above is only a preferred embodiment of the utility model, and is not used to limit the utility model. Although the utility model is described in detail with reference to the aforementioned embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A material inlet and outlet device for microwave plasma chemical vapor deposition, characterized in that: It comprises a lifting motor (1), a lifting screw assembly (4) and a translation screw assembly (6); the driving end of the lifting motor (1) is divided into two directions by a T-type reducer (2), and is respectively connected to a commutator (3); two groups of the lifting screw assemblies (4) are vertically slid with a moving bearing plate (17); the top side of the moving bearing plate (17) is installed with a translation slider assembly (9) and a base cavity (10); It comprises a lifting guide column (7) and a guide shaft sleeve (8), wherein the lifting guide column (7) is hoisted in a bearing plate (12) and connected to a moving bearing plate (17) via the guide shaft sleeve (8); The movable bearing plate (17) is positioned at the limit position of the up and down movement through an upper limit sensor (16) and a lower limit sensor (15); It comprises a translation motor (5), wherein the driving end of the translation motor (5) is used to drive the moving bearing plate (17) to slide horizontally through the translation screw rod assembly (6) and the translation slider assembly (9); The horizontal movement of the moving bearing plate (17) is respectively located at the limit position of the horizontal movement through the rear limit sensor (13) and the front limit sensor (14); The base cavity (10) and the microwave resonant cavity (11) are separated and combined in the lifting and horizontal directions; The base cavity (10) and the microwave resonance cavity (11) are sealed and connected by pressing an O-ring through lifting and lowering movements.

2. The material inlet and outlet device for microwave plasma chemical vapor deposition according to claim 1, characterized in that: The driving end of the lifting motor (1) uses an automatic control program to execute an exit action to perform downward movement, the base cavity (10) is separated from the microwave resonance cavity (11), and the moving support plate (17) is used to trigger the lower limit sensor (15), and performs a horizontal forward movement when the descent stops.

3. The material inlet and outlet device for microwave plasma chemical vapor deposition according to claim 1, characterized in that: The driving end of the translation motor (5) is used to execute the forward movement of the moving carrier plate (17), and when the moving carrier plate (17) triggers the front limit sensor (14), the moving carrier plate (17) stops moving, and the stop position is exactly located at the sampling port of the carrier plate (12).

4. The material inlet and outlet device for microwave plasma chemical vapor deposition according to claim 1, characterized in that: The translation motor (5) performs a warehouse entry action through an automatic control program and is used to perform a backward movement. After the motion support plate (17) triggers the rear limit sensor (13), the motion support plate (17) stops moving and rises vertically.

5. The material inlet and outlet device for microwave plasma chemical vapor deposition according to claim 1, characterized in that: The driving end of the lifting motor (1) is used to execute the upward movement of the moving support plate (17); when the moving support plate (17) triggers the upper limit sensor (16), the moving support plate (17) stops rising, and the base cavity (10) and the microwave resonant cavity (11) are butt-jointed and sealed.

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