Ellipse polarization spectrometer for TOPCon battery experiment

Abstract

The utility model discloses an ellipse polarization spectrometer for TOPCon cell experiments, which belongs to the technical field of TOPCon solar cells, and comprises a bottom plate, a sample table, a polarizer and a polarization analyzer, the sample table is fixedly mounted on the bottom plate, the polarizer and the polarization analyzer are respectively positioned on two sides of the sample table, the ellipse polarization spectrometer further comprises a fixing seat, a light source module, a light source module and a light source module, a mounting groove is formed in the fixed seat, a first support and a second support are rotatably connected to the interior of the mounting groove, the first support and the second support are rotatably connected to the same mandrel, the polarizer is fixedly mounted on the first support, and the polarization analyzer is fixedly mounted on the second support. Compared with the prior art, the angle adjusting device can synchronously adjust the angle of the polarizer and the angle of the polarization analyzer at the same time, is simple and convenient to operate, ensures that no deviation is generated when the angle of the polarizer and the angle of the polarization analyzer are adjusted, improves the use precision of the ellipsometer, and ensures the accuracy of a TOPCon battery experiment result.

Description

Technical Field

[0001] The utility model belongs to the technical field of TOPCon solar cells, and in particular relates to an ellipsometric spectrometer for TOPCon battery experiments. Background Art

[0002] In the experiment of characterizing the film damage caused by laser scanning of TOPCon solar cells through systematic experimental testing methods, it is necessary to use a spectroscopic ellipsometer (ellipsometer for short) to test the SiNx film thickness on the front side of the cell before and after the experiment, so as to obtain the damage to the SiNx film thickness of the cell caused by different bias voltages.

[0003] At present, the ellipsometer is mainly composed of components such as a polarizer, an analyzer and a sample stage. In order to optimize the test sensitivity of the ellipsometer to the greatest extent and adapt to different film structures to be tested, the incident angle, that is, the angle of the polarizer, must be flexibly adjusted according to the needs, and the reflection angle, that is, the angle of the analyzer, must be adjusted accordingly. However, in the actual adjustment process, there are often deviations in the adjustment of the polarizer and analyzer, which leads to a reduction in the accuracy of the ellipsometer and affects the accuracy of the experimental results.

[0004] Therefore, in view of the above technical problems, it is necessary to provide an ellipsometer for TOPCon battery experiments.

[0005] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0006] The utility model aims to provide an ellipsometer for TOPCon battery experiments, which can solve the problem that the accuracy of the ellipsometer is reduced due to the deviation in the adjustment of the polarizer and the analyzer, thereby affecting the accuracy of the experimental results.

[0007] In order to achieve the above-mentioned object, a specific embodiment of the utility model provides an ellipsometric spectrometer for TOPCon battery experiments, comprising a base plate, a sample stage, a polarizer and an analyzer, wherein the sample stage is fixedly mounted on the base plate, the polarizer and the analyzer are respectively located on both sides of the sample stage, and further comprising: a fixing seat;

[0008] The fixing seat is provided with a mounting groove, the first bracket and the second bracket are rotatably connected inside the mounting groove, the first bracket and the second bracket are rotatably connected on the same core shaft, the polarizer is fixedly mounted on the first bracket, and the analyzer is fixedly mounted on the second bracket;

[0009] The interior of the installation groove is slidably connected with a lifting seat, and the lifting seat is rotatably connected with a pair of connecting rods, and one end of the pair of connecting rods is rotatably connected to the first bracket and the second bracket respectively;

[0010] The fixing seat is fixedly connected with a top frame, and a lifting drive assembly is installed on the top frame. The lifting drive assembly is used to drive the lifting seat to move up and down.

[0011] The lifting seat can push and pull the first bracket and the second bracket to rotate concentrically at the same time through a pair of connecting rods, so that the angles of the polarizer and the analyzer can be adjusted accordingly at the same time. The operation is simple and convenient, ensuring that no deviation will occur when adjusting the angles of the polarizer and the analyzer, thereby improving the use accuracy of the ellipsometer and ensuring the accuracy of the TOPCon battery experiment results.

[0012] In one or more embodiments of the present invention, the first bracket and the second bracket are symmetrically arranged about a vertical midline of the fixing base on the Z axis.

[0013] Ensure that the first bracket and the second bracket can be rotated and adjusted synchronously to avoid deviation.

[0014] In one or more embodiments of the present invention, two ends of the lifting seat are respectively in close contact with the inner wall of the installation groove.

[0015] The lifting seat can be smoothly slid and lifted along the inner wall of the installation groove, thereby preventing the lifting seat from shaking and improving the stability of the structure.

[0016] In one or more embodiments of the present utility model, the lifting drive assembly includes a screw rod, the screw rod is rotatably connected to the top frame, a screw hole matching the screw rod is formed on the lifting seat, and the screw rod passes through the screw hole.

[0017] By rotating the screw rod, the lifting seat can be driven by the thread to slide and lift, and the operation is simple and convenient.

[0018] In one or more embodiments of the present invention, the top end of the screw rod passes through the top of the top frame and is fixedly connected with a knob.

[0019] In one or more embodiments of the present invention, the knob surface has anti-slip textures.

[0020] The knob with anti-slip texture makes it easy to manually rotate the screw.

[0021] In one or more embodiments of the present invention, an angle line is provided at the front end of the fixing seat.

[0022] In one or more embodiments of the present invention, a pointer is fixedly connected to the first bracket and the second bracket, and the pointer points to the angle line.

[0023] During the angle adjustment process, by observing the front and rear positions of the pointers on the first bracket and the second bracket on the angle line, the specific value of the angle adjustment can be intuitively obtained, which facilitates the precise adjustment of the angle.

[0024] In one or more embodiments of the present invention, an industrial camera is fixedly mounted on the front end of the top frame.

[0025] In one or more embodiments of the present invention, the industrial camera is located directly above the sample stage.

[0026] The industrial camera can be used to obtain images of TOPCon battery samples on the sample stage, making it easier to conduct multiple experimental tests on the TOPCon battery samples.

[0027] Compared with the prior art, the utility model can simultaneously and synchronously adjust the angles of the polarizer and the analyzer accordingly, and the operation is simple and convenient, ensuring that no deviation will occur when adjusting the angles of the polarizer and the analyzer, thereby improving the use accuracy of the ellipsometer and ensuring the accuracy of the TOPCon battery test results. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0029] Figure 1 This is a structural diagram of an ellipsometer for TOPCon battery experiments in one embodiment of the utility model;

[0030] Figure 2 It is a front view of an ellipsometer for TOPCon battery experiment in one embodiment of the utility model;

[0031] Figure 3 A cross-sectional view of an ellipsometer for TOPCon battery experiments in one embodiment of the utility model;

[0032] Figure 4 It is a side view of an ellipsometer for TOPCon battery experiment in one embodiment of the utility model;

[0033] Figure 5 A TOPCon battery experiment ellipsometric spectrometer in one embodiment of the utility model Figure 1 Enlarged view of point A in the middle.

[0034] Description of main reference numerals:

[0035] 1. Base plate; 2. Sample stage; 3. First bracket; 4. Polarizer; 5. Second bracket; 6. Analyzer; 7. Industrial camera; 8. Fixed seat; 801. Mounting slot; 802. Angle line; 9. Top frame; 10. Screw; 1001. Knob; 11. Lifting seat; 1101. Screw hole; 12. Connecting rod; 13. Pointer. DETAILED DESCRIPTION

[0036] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0037] like Figures 1 to 5 As shown, an ellipsometer for TOPCon battery experiment in one embodiment of the utility model comprises a base plate 1 and a fixing seat 8, a sample stage 2 is fixedly mounted on the top of the base plate 1, and the sample stage 2 is used to place the TOPCon battery sample to be tested.

[0038] The fixing seat 8 is fixedly mounted on the top of the bottom plate 1, and the fixing seat 8 is located directly behind the sample stage 2. The fixing seat 8 is provided with a mounting groove 801, and a core shaft is fixedly mounted inside the mounting groove 801, and the first bracket 3 and the second bracket 5 are rotatably connected to the core shaft, and the first bracket 3 and the second bracket 5 are symmetrically arranged about the vertical midline of the fixing seat 8 on the Z axis.

[0039] A polarizer 4 is fixedly mounted on the first bracket 3, and is used to emit a light beam with a polarization state to the sample to be tested. An analyzer 6 is fixedly mounted on the second bracket 5, and is used to measure the polarization state of light reflected by the sample to be tested.

[0040] The interior of the installation groove 801 is slidably connected with a lifting seat 11, and the two ends of the lifting seat 11 are respectively in close contact with the inner wall of the installation groove 801, so that the lifting seat 11 can slide and rise and fall along the inner wall of the installation groove 801. A pair of connecting rods 12 are rotatably connected to the two sides of the lifting seat 11, and the other ends of the pair of connecting rods 12 are rotatably connected to the first bracket 3 and the second bracket 5 respectively.

[0041] The top of the fixing seat 8 is fixedly connected to a top frame 9, and the front end of the top frame 9 is fixedly installed with an industrial camera 7. The industrial camera 7 is located directly above the sample stage 2, and the industrial camera 7 is used to obtain an image of the TOPCon battery sample on the sample stage 2.

[0042] A lifting drive assembly is installed on the top frame 9, and the lifting drive assembly includes a screw 10, which is rotatably connected to the top of the top frame 9. A screw hole 1101 matching the screw 10 is opened on the lifting seat 11, and the screw 10 passes through the screw hole 1101. By rotating the screw 10, the lifting seat 11 can be slid and lifted under the drive of the thread.

[0043] The top end of the screw rod 10 penetrates to the top of the top frame 9 and is fixedly connected with a knob 1001, and the surface of the knob 1001 has anti-skid patterns. The knob 1001 with anti-skid patterns facilitates manual rotation of the screw rod 10.

[0044] Specifically, the experimenter manually rotates the knob 1001 to rotate the screw 10 to drive the lifting seat 11 to slide and lift. During the sliding and lifting process, the lifting seat 11 will simultaneously drive the first bracket 3 and the second bracket 5 to rotate in opposite directions with the core axis as the center through a pair of connecting rods 12, thereby adjusting the angles of the first bracket 3 and the second bracket 5 at the same time, and adjusting the angles of the polarizer 4 and the analyzer 6 at the same time and synchronously, avoiding the situation where there is a deviation after the angle adjustment of the polarizer 4 and the analyzer 6. In this way, the corresponding adjustment of the incident angle and the reflection angle can be achieved conveniently and accurately, which is conducive to improving the test sensitivity of the ellipsometer.

[0045] like Figure 1 and Figure 5 As shown, the front end of the fixing seat 8 is provided with an angle line 802, and the first bracket 3 and the second bracket 5 are both fixedly connected with a pointer 13, and the pointer 13 points to the angle line 802. In the process of adjusting the angles of the polarizer 4 and the analyzer 6, the pointer 13 will rotate along with the first bracket 3 and the second bracket 5, and by observing the front and rear positions of the pointer 13 on the first bracket 3 and the second bracket 5 on the angle line 802, the specific value of the angle adjustment can be intuitively obtained, which is convenient for accurate adjustment of the angle.

[0046] When in use, place the TOPCon battery sample to be tested on the sample stage 2, and test the SiNx film thickness on the front of the TOPCon battery before and after the experiment through the cooperation of the polarizer 4 and the analyzer 6, so as to judge the damage of the film layer caused by laser scanning. When the incident angle needs to be adjusted, the experimenter can manually turn the knob 1001 to rotate the screw 10 to drive the lifting seat 11 to slide and lift. During the sliding and lifting process, the lifting seat 11 will simultaneously drive the first bracket 3 and the second bracket 5 to rotate in opposite directions with the core axis as the center through a pair of connecting rods 12, thereby adjusting the angles of the first bracket 3 and the second bracket 5 at the same time, so as to simultaneously and synchronously adjust the angles of the polarizer 4 and the analyzer 6. By observing the front and rear positions of the pointers 13 on the first bracket 3 and the second bracket 5 on the angle line 802, the specific value of the angle adjustment can be intuitively obtained.

[0047] The utility model can simultaneously and synchronously adjust the angles of the polarizer 4 and the analyzer 6 accordingly, and the operation is simple and convenient, ensuring that no deviation occurs when adjusting the angles of the polarizer 4 and the analyzer 6, thereby improving the use accuracy of the ellipsometer and ensuring the accuracy of the TOPCon battery test results.

[0048] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0049] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An ellipsometer for TOPCon battery experiment, comprising a base plate, a sample stage, a polarizer and an analyzer, wherein the sample stage is fixedly mounted on the base plate, and the polarizer and the analyzer are respectively located on both sides of the sample stage, characterized in that: Also includes: A fixing seat, with a mounting groove formed thereon, wherein a first bracket and a second bracket are rotatably connected inside the mounting groove, wherein the first bracket and the second bracket are rotatably connected on the same core shaft, the polarizer is fixedly mounted on the first bracket, and the analyzer is fixedly mounted on the second bracket; The interior of the installation groove is slidably connected with a lifting seat, and the lifting seat is rotatably connected with a pair of connecting rods, and one end of the pair of connecting rods is rotatably connected to the first bracket and the second bracket respectively; The fixing seat is fixedly connected with a top frame, and a lifting drive assembly is installed on the top frame. The lifting drive assembly is used to drive the lifting seat to move up and down.

2. The ellipsometer for TOPCon battery experiment according to claim 1, characterized in that: The first bracket and the second bracket are symmetrically arranged about a vertical midline of the fixing base on the Z axis.

3. The ellipsometer for TOPCon battery experiment according to claim 1, characterized in that: The two ends of the lifting seat are respectively in close contact with the inner wall of the installation groove.

4. The ellipsometer for TOPCon battery experiment according to claim 1, characterized in that: The lifting drive assembly comprises a screw rod, which is rotatably connected to the top frame. A screw hole matching the screw rod is provided on the lifting seat, and the screw rod passes through the screw hole.

5. The ellipsometer for TOPCon battery experiment according to claim 4, characterized in that: The top end of the screw rod penetrates to the top of the top frame and is fixedly connected with a knob.

6. The ellipsometer for TOPCon battery experiment according to claim 5, characterized in that: The knob surface has anti-slip textures.

7. The ellipsometer for TOPCon battery experiment according to claim 1, characterized in that: The front end of the fixing seat is provided with an angle line.

8. The ellipsometer spectrometer for TOPCon battery experiment according to claim 7, characterized in that: The first bracket and the second bracket are both fixedly connected with a pointer, and the pointer points to the angle line.

9. The ellipsometer for TOPCon battery experiment according to claim 1, characterized in that: An industrial camera is fixedly installed at the front end of the top frame.

10. The ellipsometer for TOPCon battery experiment according to claim 9, characterized in that: The industrial camera is located directly above the sample stage.

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