Electrode leading-out structure of ceramic heating plate

Abstract

The utility model discloses a ceramic heating plate electrode leading-out structure, which comprises a body assembly and an electrode leading-out assembly, the body assembly comprises a ceramic plate and a lower shell, the ceramic plate is arranged on the lower shell, and a cavity is formed between the ceramic plate and the lower shell; a pair of electrode leading-out assemblies are arranged, the pair of electrode leading-out assemblies are installed in a cavity between the ceramic disc and the lower shell, each electrode leading-out assembly comprises a threaded pipe, and the threaded pipes are installed on the side wall of the bottom of the ceramic disc. The threaded pipe is connected with the heating plate, and the notch is axially reserved in the threaded pipe, so that expansion stress generated when the threaded pipe is heated can be absorbed, and the heating plate is prevented from bursting due to thermal stress after the threaded pipe is connected; meanwhile, the threaded pipe and the threaded groove are connected without a closed space, air pressure inside and outside the threaded groove is balanced, air pressure difference is avoided, and expansion of the heating disc is avoided; the connecting structure is firm in connection, high in drawing resistance, replaceable and convenient to maintain in the later period.

Description

Technical Field

[0001] The utility model belongs to the technical field of ceramic heating discs, and in particular relates to an electrode lead-out structure of a ceramic heating disc. Background Art

[0002] Ceramic heaters are widely used in semiconductor preparation processes such as coating and developing due to their corrosion resistance, high thermal conductivity, and low linear expansion coefficient. Among them, screen printing technology has become the mainstream process for preparing ceramic heater heating wires due to its process flexibility and precision.

[0003] The wire lead-out wiring of the screen-printed heating wire electrode is mainly in the following ways:

[0004] 1. Direct printing connection: The electrodes and lead wires are formed into one piece by printing once or multiple times using screen printing technology.

[0005] 2. Welding connection: The electrode and the metal part of the lead wire are welded by resistance welding, ultrasonic welding, laser welding, etc.

[0006] 3. Mechanical connection: reserve threaded holes at the printed electrode positions on the ceramic disk, use studs to connect to the ceramic threaded holes, and lead out the electrodes for wiring.

[0007] However, the above-mentioned lead-out wiring method has the following problems during use: welding or printing connection has low tensile strength, and the connection position is prone to breakage during use, and the fusion welding connection is non-detachable and difficult to maintain and replace; the mechanical connection uses a metal stud and ceramic through a threaded connection. Due to the different thermal expansion coefficients of metal and ceramic, thermal stress is generated during the heating process, and the deformation of the stud and ceramic is not coordinated, which can easily cause the ceramic to crack; in addition, after the stud is connected to the ceramic threaded hole, a closed cavity will be formed at the bottom of the threaded hole. After heating, the air in the cavity expands, forming a pressure difference between the inside and the outside, and there is a risk of the ceramic cracking.

[0008] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0009] The utility model aims to provide a ceramic heating disk electrode lead-out structure, which can solve the problems existing in the existing screen-printed heating wire electrode lead-out wiring method.

[0010] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0011] A ceramic heating plate electrode lead-out structure, comprising:

[0012] The main body component includes a ceramic disk and a lower shell. The ceramic disk is installed on the lower shell, and a cavity is formed between the ceramic disk and the lower shell. The ceramic disk is a heating disk, and a cavity is formed between the ceramic disk and the lower shell for installing components.

[0013] The electrode lead-out assembly is provided with a pair, and the pair of electrode lead-out assemblies are both installed in the cavity between the ceramic disk and the lower shell, and a pair of electrode lead-out assemblies are installed in the cavity between the ceramic disk and the lower shell, and the electrodes on the heating disk are led out through the pair of electrode lead-out assemblies; the electrode lead-out assembly includes a threaded tube, and the threaded tube is installed on the bottom side wall of the ceramic disk, and the bottom of the ceramic disk is installed with a screen-printed electrode by printing, and the screen-printed electrode is installed with an O-type terminal. The O-type terminal is used to connect to an external power line, so the O-type terminal is set below the screen-printed electrode to facilitate the transmission of power to the screen-printed electrode, and then the screen-printed electrode is transmitted to the ceramic disk, so that the ceramic disk converts electrical energy into heat energy.

[0014] In one or more embodiments of the present invention, a printed heating wire is disposed at the bottom of the ceramic disk, and the screen-printed electrode is used to provide electrical energy to the printed heating wire, and the lower shell is made of stainless steel.

[0015] In one or more embodiments of the utility model, a connecting ring is integrally formed on the lower shell, and the ceramic disk is mounted on the connecting ring. The ceramic disk is mounted on the lower shell through the connecting ring to form a cavity.

[0016] In one or more embodiments of the utility model, the ceramic disk is provided with a plurality of first threaded holes, and the lower shell and the connecting ring are provided with a plurality of second threaded holes matching the first threaded holes. Through the first threaded holes and the second threaded holes, the ceramic disk and the lower shell can be fixedly connected together by installing threaded rods on the ceramic disk and the lower shell.

[0017] In one or more embodiments of the present invention, a through hole is provided on the lower shell, and the through hole is provided at the center of the lower shell, so that an external power line can be introduced into the cavity through the through hole.

[0018] In one or more embodiments of the present invention, the threaded tube is made of a hollow tube, so that the hollow threaded tube is used to connect with the ceramic disk, and a notch is opened in the side wall of the threaded tube in the axial direction. The expansion stress generated by the threaded tube when heated can be absorbed through the notch, thereby preventing the threaded tube from cracking the ceramic disk due to thermal stress.

[0019] In one or more embodiments of the utility model, a thread groove is provided on the bottom side wall of the ceramic disk, and the threaded tube is threadedly connected to the bottom side wall of the ceramic disk through the thread groove. Since the threaded tube is a hollow tube, the hollow tube is connected to the ceramic disk through the thread groove, so that the connection does not produce a closed space, the air pressure inside and outside the thread groove is balanced, and no air pressure difference is generated, thereby avoiding the expansion and cracking of the ceramic.

[0020] In one or more embodiments of the present invention, the screen-printed electrode and the O-type terminal are both provided with socket holes, and the screen-printed electrode and the O-type terminal are respectively socketed on the outer side wall of the threaded tube through the socket holes.

[0021] In one or more embodiments of the utility model, the upper end of the threaded tube is placed in the thread groove, and the lower end of the threaded tube is placed in the cavity between the ceramic plate and the lower shell. The threaded tube facilitates the installation of the screen-printed electrode and the O-type terminal, thereby facilitating the connection of the external power supply to the O-type terminal.

[0022] In one or more embodiments of the utility model, a nut is threadedly connected to the side wall of the lower end of the screen-printed electrode, and the upper end of the nut abuts against the bottom of the O-type terminal. The screen-printed electrode and the O-type terminal can be fixed to the bottom of the ceramic plate by the nut, ensuring stability during use, so that the electrode lead-out assembly is firmly connected and has strong pull-out resistance. At the same time, the nut is easy to disassemble and assemble, thereby making it easy to disassemble and assemble the screen-printed electrode and the O-type terminal, so that the electrode lead-out assembly can be replaced, which is convenient for later maintenance.

[0023] Compared with the prior art, the utility model is connected to the heating plate through a threaded tube, and a notch is left in the axial direction of the threaded tube, which can absorb the expansion stress generated by the threaded tube when heated, and avoid the heating plate from bursting due to thermal stress after the threaded tube is connected; at the same time, the connection between the threaded tube and the threaded groove on the heating plate will not produce a closed space, and the air pressure inside and outside the threaded groove is balanced, and no air pressure difference is generated, thereby avoiding the heating plate from bursting; and the connection structure is firm, has strong pull-out resistance, and can be replaced, which is convenient for later maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 A three-dimensional diagram of a ceramic heating plate electrode lead-out structure in one embodiment of the utility model Figure 2 ;

[0026] Figure 2 It is a cross-sectional view of an electrode lead-out structure of a ceramic heating disk in one embodiment of the utility model;

[0027] Figure 3 In one embodiment of the utility model Figure 2 The enlarged view of point A in the middle;

[0028] Figure 4 A cross-sectional view of an electrode lead-out structure of a ceramic heating disk in one embodiment of the utility model;

[0029] Figure 5 This is a schematic diagram of the lower housing in one embodiment of the utility model;

[0030] Figure 6 It is a schematic diagram of the internal components in one embodiment of the utility model.

[0031] Description of main reference numerals:

[0032] 1-body assembly, 11-ceramic disc, 12-lower shell, 13-first threaded hole, 14-connecting ring, 15-second threaded hole, 16-through hole, 2-electrode lead assembly, 21-threaded tube, 22-screen printed electrode, 23-O-type terminal, 24-nut, 25-threaded groove. DETAILED DESCRIPTION

[0033] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0034] like Figure 2 and Figure 3 As shown, a ceramic heating disk electrode lead-out structure in one embodiment of the utility model comprises a body component 1 and an electrode lead-out component 2.

[0035] like Figure 2 and Figure 3 As shown, the main body component 1 includes a ceramic disk 11 and a lower shell 12. The ceramic disk 11 is installed on the lower shell 12, and a cavity is formed between the ceramic disk 11 and the lower shell 12. The ceramic disk 11 is a heating disk, and a cavity is formed between the ceramic disk 11 and the lower shell 12 for installing components.

[0036] Preferably, a printed heating wire is provided at the bottom of the ceramic plate 11, and the lower shell 12 is made of stainless steel.

[0037] like Figure 4 and Figure 5 As shown, a connecting ring 14 is integrally formed on the lower shell 12, and the ceramic disk 11 is mounted on the connecting ring 14. The ceramic disk 11 is mounted on the lower shell 12 through the connecting ring 14 to form a cavity.

[0038] like Figure 1 and Figure 5 As shown, the ceramic disk 11 is provided with a plurality of first threaded holes 13, and the lower shell 12 and the connecting ring 14 are both provided with a plurality of second threaded holes 15 that match the first threaded holes 13. Through the first threaded holes 13 and the second threaded holes 15, the ceramic disk 11 and the lower shell 12 can be fixedly connected together by installing threaded rods on the ceramic disk 11 and the lower shell 12.

[0039] like Figure 1 and Figure 5 As shown, a through hole 16 is provided on the lower shell 12, and the through hole 16 is provided at the center of the lower shell 12. Through the through hole 16, an external power line can be introduced into the cavity.

[0040] like Figure 2 to Figure 4 As shown, a pair of electrode lead-out assemblies 2 are provided, and the pair of electrode lead-out assemblies 2 are both installed in the cavity between the ceramic disk 11 and the lower shell 12. A pair of electrode lead-out assemblies 2 are installed in the cavity between the ceramic disk 11 and the lower shell 12, and the electrodes on the heating disk are led out through the pair of electrode lead-out assemblies 2; the electrode lead-out assembly 2 includes a threaded tube 21, and the threaded tube 21 is installed on the bottom side wall of the ceramic disk 11. The bottom of the ceramic disk 11 is installed with a screen-printed electrode 22 by printing. The screen-printed electrode 22 is used to provide electrical energy to the printed heating wire, and there is an O-type terminal on the screen-printed electrode 22. The O-type terminal 23 is used to connect to an external power line, so the O-type terminal 23 is set below the screen-printed electrode 22, so that the power is transmitted to the screen-printed electrode 22, and then the screen-printed electrode 22 is transmitted to the ceramic disk 11, so that the ceramic disk 11 converts electrical energy into heat energy.

[0041] Specifically, Figure 6 As shown, the threaded tube 21 is made of a hollow tube, so that the hollow threaded tube is used to connect with the ceramic disk 11, and a notch 26 is opened in the axial direction on the side wall of the threaded tube 21. The notch 26 can absorb the expansion stress generated by the threaded tube 21 when heated, thereby preventing the threaded tube 21 from cracking the ceramic disk 11 due to thermal stress.

[0042] like Figure 2 Combination Figure 3As shown, a thread groove 25 is provided on the bottom side wall of the ceramic plate 11, and the threaded tube 21 is threadedly connected to the bottom side wall of the ceramic plate 11 through the thread groove 25. Since the threaded tube 21 is a hollow tube, the hollow tube is connected to the ceramic plate 11 through the thread groove 25, so that no enclosed space is generated between the screw and the thread groove 25 after installation, and the air pressure inside and outside the thread groove 25 is balanced, and no air pressure difference is generated, thereby avoiding the expansion and cracking of the ceramic.

[0043] like Figure 6 As shown, the screen-printed electrode 22 and the O-type terminal 23 are both provided with sleeve holes, and the screen-printed electrode 22 and the O-type terminal 23 are respectively sleeved on the outer side wall of the threaded tube 21 through the sleeve holes.

[0044] like Figure 2 Combination Figure 3 As shown, the upper end of the threaded tube 21 is placed in the thread groove 25, and the lower end of the threaded tube 21 is placed in the cavity between the ceramic disk 11 and the lower shell 12. The threaded tube 21 facilitates the installation of the screen-printed electrode 22 and the O-type terminal 23, thereby facilitating the connection of the external power supply to the O-type terminal 23.

[0045] like Figure 3 and Figure 6 As shown, a nut 24 is threadedly connected to the side wall of the lower end of the screen-printed electrode 22, and the upper end of the nut 24 abuts against the bottom of the O-type terminal 23. The screen-printed electrode 22 and the O-type terminal 23 can be fixed to the bottom of the ceramic disk 11 by the nut 24, ensuring stability during use, so that the electrode lead-out assembly 2 is firmly connected and has strong pull-out resistance. At the same time, the nut 24 is easy to disassemble and assemble, so that the screen-printed electrode 22 and the O-type terminal 23 are easy to disassemble and assemble, so that the electrode lead-out assembly 2 can be replaced, which is convenient for later maintenance.

[0046] Preferably, the threaded tube 21 and the nut 24 are pressed together to make the screen-printed electrode 22 and the O-type terminal 21 in close contact, thereby facilitating the conduction of electrical energy.

[0047] When in use, the upper ends of a pair of threaded tubes 21 are respectively threadedly connected to the threaded grooves 25 opened at the bottom of the ceramic disk 11, the screen-printed electrodes 22 and the O-type terminals 23 are installed on the threaded tubes 21 in sequence, and the nuts 24 are threadedly connected to the lower ends of the threaded tubes 21. The screen-printed electrodes 22 and the O-type terminals 23 can be fixed to the bottom of the ceramic disk 11 through the nuts 24, and then the external power cord is passed through the through holes 16 on the lower shell 12 to connect the power cord to the O-type terminals 23. Finally, the ceramic disk 11 is covered on the lower shell 12, and the ceramic disk 11 and the second threaded holes 15 are fixed together using a threaded rod through the first threaded holes 13 and the second threaded holes 15.

[0048] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0049] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A ceramic heating plate electrode lead-out structure, characterized in that: include: A body assembly, comprising a ceramic disk and a lower shell, wherein the ceramic disk is mounted on the lower shell, and a cavity is formed between the ceramic disk and the lower shell; An electrode lead-out assembly, wherein a pair of electrode lead-out assemblies are provided, and each pair of electrode lead-out assemblies are installed in a cavity between a ceramic disk and a lower shell body, wherein the electrode lead-out assembly comprises a threaded tube, wherein the threaded tube is installed on the bottom side wall of the ceramic disk, and a screen-printed electrode is installed on the bottom of the ceramic disk by printing, and an O-type terminal is installed on the screen-printed electrode.

2. The electrode lead-out structure of a ceramic heating plate according to claim 1, characterized in that: A printed heating wire is arranged at the bottom of the ceramic plate, and the lower shell is made of stainless steel.

3. The electrode lead-out structure of a ceramic heating plate according to claim 1, characterized in that: A connecting ring is integrally formed on the lower shell body, and the ceramic disk is mounted on the connecting ring.

4. The electrode lead-out structure of a ceramic heating plate according to claim 2, characterized in that: The ceramic disk is provided with a plurality of first threaded holes, and the lower shell and the connecting ring are both provided with a plurality of second threaded holes matching the first threaded holes.

5. The electrode lead-out structure of a ceramic heating plate according to claim 1, characterized in that: The lower shell is provided with a through hole, and the through hole is opened at the center of the lower shell.

6. The electrode lead-out structure of a ceramic heating plate according to claim 1, characterized in that: The threaded tube is made of a hollow tube, and a notch is formed on the side wall of the threaded tube in the axial direction.

7. The electrode lead-out structure of a ceramic heating plate according to claim 1, characterized in that: A thread groove is provided on the bottom side wall of the ceramic disk, and the threaded pipe is threadedly connected to the bottom side wall of the ceramic disk through the thread groove.

8. The electrode lead-out structure of a ceramic heating plate according to claim 1, characterized in that: The screen-printed electrode and the O-type terminal are both provided with sleeve holes, and the screen-printed electrode and the O-type terminal are respectively sleeved on the outer side wall of the threaded tube through the sleeve holes.

9. The electrode lead-out structure of a ceramic heating plate according to claim 1, characterized in that: The upper end of the threaded tube is placed in the thread groove, and the lower end of the threaded tube is placed in the cavity between the ceramic disk and the lower shell.

10. The electrode lead-out structure of a ceramic heating plate according to claim 9, characterized in that: A nut is threadedly connected to the side wall of the lower end of the screen-printed electrode, and the upper end of the nut abuts against the bottom of the O-type terminal.

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