Auxiliary cooling device for probe station

Abstract

The utility model relates to the technical field of cooling equipment, in particular to an auxiliary cooling device for a probe station, which comprises a working table, a first supporting seat and a second supporting seat are arranged on the upper side of the working table at intervals, and auxiliary cooling pipes are horizontally fixed on the upper sides of the first supporting seat and the second supporting seat. One end of the auxiliary cooling pipe is connected with an air inlet connector, and the other end of the auxiliary cooling pipe is provided with a cooling structure for cooling air in the auxiliary cooling pipe. And air outlet holes are formed in the sides, close to the workbench, of the auxiliary cooling pipes. By the adoption of the technical scheme, blast cooling can be conducted on the Prober machine table, and the time spent on cooling the machine table from 85 DEG C to the normal temperature state is greatly shortened.

Description

Technical Field

[0001] The utility model relates to the technical field of cooling equipment, in particular to an auxiliary cooling device for a probe station. Background Art

[0002] The prober is a device used to test chips. During chip testing, high temperature testing and normal temperature testing are required. The high temperature testing requires the device to be heated to 85 degrees, while during normal temperature testing, the device needs to be cooled down to normal temperature before testing can be performed. In the prior art, when controlling the prober to switch from 85 degrees high temperature testing to normal temperature testing, it is done by free heat dissipation cooling. This method takes a long time for the machine to cool down from 85 degrees to normal temperature, which is very wasteful of machine time. Utility Model Content

[0003] 1. Technical issues to be resolved

[0004] In view of the deficiencies of the prior art, the utility model provides a probe station auxiliary cooling device, which can cool the Prober machine by blowing air, greatly reducing the time spent on reducing the machine from 85 degrees to normal temperature.

[0005] (II) Technical solution

[0006] To achieve the above-mentioned purpose, an embodiment of the present application provides a probe station auxiliary cooling device, including a workbench, on the upper side of which a first support seat and a second support seat are spaced apart, an auxiliary cooling pipe is horizontally fixed on the upper side of the first support seat and the second support seat, one end of the auxiliary cooling pipe is connected to an air inlet joint, and the other end is provided with a cooling structure for cooling the air in the auxiliary cooling pipe; an air outlet is provided on the side of the auxiliary cooling pipe close to the workbench.

[0007] Preferably, the cooling structure includes a water inlet pipe and a water outlet pipe, and an air supply hole is formed in the middle of the auxiliary cooling pipe; a cooling interlayer with a "C"-shaped cross-section is formed inside the auxiliary cooling pipe and located on the outside of the air supply hole; the water inlet pipe is connected to the end of the auxiliary cooling pipe and is communicated with the cooling interlayer; the water outlet pipe is connected to a side of the auxiliary cooling pipe away from the workbench and is communicated with the cooling interlayer.

[0008] Preferably, a plurality of the air outlet holes are arranged at intervals along the length direction of the auxiliary cooling pipe, and the air outlet holes are not connected to the cooling interlayer.

[0009] Preferably, a connecting shaft is fixed at the bottom of the first support seat, the connecting shaft is vertically arranged, and the first support seat is rotatably connected to the workbench through the connecting shaft; the air inlet joint is located at one end of the auxiliary cooling pipe close to the first support seat; the second support seat is slidably connected to the workbench.

[0010] Preferably, a permanent magnet is fixedly provided on one side of the second support seat close to the workbench, and a positioning ring is fixedly provided on the upper side of the workbench and on the rotating track of the second support seat, and the positioning ring is made of ferromagnetic material.

[0011] (III) Beneficial effects

[0012] The utility model provides an auxiliary cooling device for a probe station. By setting an auxiliary cooling tube on the upper side of the first support seat and the second support seat, when working, gas is supplied to the auxiliary cooling tube, and the equipment on the lower side of the auxiliary cooling tube is cooled by blowing air to achieve the purpose of cooling. At the same time, a cooling interlayer is arranged around the outer side of the air supply hole of the auxiliary cooling tube, and the gas in the air supply hole is cooled by the cooling interlayer, thereby further improving the efficiency of air blast cooling. The time taken for the machine to be cooled from 85 degrees to normal temperature is greatly reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the structure of a probe station auxiliary cooling device of the utility model;

[0014] Figure 2 This is a cross-sectional view of a probe station auxiliary cooling device of the utility model;

[0015] Figure 3 It is a cross-sectional view of a protruding auxiliary cooling tube in an auxiliary cooling device for a probe station of the utility model.

[0016] Markings in the accompanying drawings:

[0017] 100, workbench; 110, positioning ring; 200, first support seat; 210, connecting shaft;

[0018] 300, second support seat; 310, permanent magnet; 400, auxiliary cooling pipe; 410, air outlet; 420, air supply hole; 500, air inlet joint; 600, cooling structure; 610, water inlet pipe; 620, water outlet pipe; 630, cooling interlayer. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] Example 1

[0021] The utility model provides a probe station auxiliary cooling device, see Figure 1-Figure 3 , including a workbench 100, a first support seat 200 and a second support seat 300 are arranged at intervals on the upper side of the workbench 100, an auxiliary cooling pipe 400 is horizontally fixed on the upper side of the first support seat 200 and the second support seat 300, and one end of the auxiliary cooling pipe 400 is connected to an air inlet connector 500, and the air inlet connector 500 is used to connect an external air supply device. Gas is provided to the auxiliary cooling pipe 400 through the air supply device. A cooling structure 600 for cooling the air in the auxiliary cooling pipe 400 is arranged at the other end of the auxiliary cooling pipe 400; an air outlet 410 is opened on the side of the auxiliary cooling pipe 400 close to the workbench 100. When in use, the air in the auxiliary cooling pipe 400 is cooled by the cooling structure 600 to keep it at a low temperature. The cooled gas is discharged from the air outlet 410 to cool the equipment to be cooled.

[0022] Specifically, the cooling structure 600 includes a water inlet pipe 610 and a water outlet pipe 620. An air supply hole 420 is formed in the middle of the auxiliary cooling pipe 400. A cooling interlayer 630 with a "C"-shaped cross section is formed inside the auxiliary cooling pipe 400 and outside the air supply hole 420. The water inlet pipe 610 is connected to the end of the auxiliary cooling pipe 400 and communicated with the cooling interlayer 630. The water outlet pipe 620 is connected to a side of the auxiliary cooling pipe 400 away from the workbench 100 and communicated with the cooling interlayer 630.

[0023] One end of the water inlet pipe 610 is connected to the water inlet tank through a water pump, and the other end of the water outlet pipe 620 is placed in the water inlet tank. The water pump forms circulating water in the cooling interlayer 630 to achieve the purpose of cooling and lowering the temperature.

[0024] A plurality of air outlet holes 410 are arranged at intervals along the length direction of the auxiliary cooling pipe 400 , and the air outlet holes 410 are not connected to the cooling interlayer 630 .

[0025] A connecting shaft 210 is fixed at the bottom of the first support seat 200, and the connecting shaft 210 is vertically arranged. The first support seat 200 is rotatably connected to the workbench 100 through the connecting shaft 210; the air inlet joint 500 is located at one end of the auxiliary cooling pipe 400 close to the first support seat 200; the second support seat 300 is slidably connected to the workbench 100.

[0026] A permanent magnet 310 is fixedly arranged on one side of the second support seat 300 close to the workbench 100, and a positioning ring 110 is fixedly arranged on the upper side of the workbench 100 and on the rotating track of the second support seat 300. The positioning ring 110 is made of ferromagnetic material. By rotating the first support seat 200 and the permanent magnet arranged on the lower side of the second support seat 300, the position and angle of the auxiliary cooling pipe 400 can be adjusted during operation, and then the position of the air supply can be changed during use, thereby increasing the cooling speed.

[0027] The utility model provides an auxiliary cooling device for a probe station. By setting an auxiliary cooling tube on the upper side of the first support seat and the second support seat, when working, gas is supplied to the auxiliary cooling tube, and the equipment on the lower side of the auxiliary cooling tube is cooled by blowing air to achieve the purpose of cooling. At the same time, a cooling interlayer is arranged around the outer side of the air supply hole of the auxiliary cooling tube, and the gas in the air supply hole is cooled by the cooling interlayer, thereby further improving the efficiency of air blast cooling. The time taken for the machine to be cooled from 85 degrees to normal temperature is greatly reduced.

[0028] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0029] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection, a mechanical connection, an electrical connection, a direct connection, or an indirect connection through an intermediate medium, or the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In the absence of conflict, the embodiments of the present utility model and the features in the embodiments can be combined with each other.

[0030] The above-mentioned embodiments only express the implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A probe station auxiliary cooling device, characterized in that: It comprises a workbench (100), wherein a first support seat (200) and a second support seat (300) are arranged at intervals on the upper side of the workbench (100); An auxiliary cooling pipe (400) is horizontally fixed on the upper sides of the first support seat (200) and the second support seat (300); One end of the auxiliary cooling pipe (400) is connected to an air inlet joint (500), and the other end is provided with a cooling structure (600) for cooling the air in the auxiliary cooling pipe (400); An air outlet (410) is provided on a side of the auxiliary cooling pipe (400) close to the workbench (100).

2. The probe station auxiliary cooling device according to claim 1, characterized in that: The cooling structure (600) comprises a water inlet pipe (610) and a water outlet pipe (620), and an air supply hole (420) is formed in the middle of the auxiliary cooling pipe (400); A cooling interlayer (630) having a "C"-shaped cross section is formed inside the auxiliary cooling pipe (400) and outside the air supply hole (420); The water inlet pipe (610) is connected to the end of the auxiliary cooling pipe (400) and is in communication with the cooling interlayer (630); The water outlet pipe (620) is connected to a side of the auxiliary cooling pipe (400) away from the workbench (100), and is in communication with the cooling interlayer (630).

3. A probe station auxiliary cooling device according to claim 2, characterized in that: A plurality of the air outlet holes (410) are arranged at intervals along the length direction of the auxiliary cooling pipe (400), and the air outlet holes (410) are not connected to the cooling interlayer (630).

4. The probe station auxiliary cooling device according to claim 1, characterized in that: A connecting shaft (210) is fixed to the bottom of the first support seat (200), and the connecting shaft (210) is arranged vertically; the first support seat (200) is rotatably connected to the workbench (100) via the connecting shaft (210); The air inlet joint (500) is located at one end of the auxiliary cooling pipe (400) close to the first support seat (200); the second support seat (300) is slidably connected to the workbench (100).

5. The probe station auxiliary cooling device according to claim 1, characterized in that: A permanent magnet (310) is fixedly arranged on one side of the second support seat (300) close to the workbench (100), and a positioning ring (110) is fixedly arranged on the upper side of the workbench (100) and located on the rotating track of the second support seat (300), wherein the positioning ring (110) is made of ferromagnetic material.

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