Femtosecond laser drilling equipment

Abstract

The utility model provides femtosecond laser drilling equipment which comprises a machine table, a material receiving platform movably arranged on the machine table in the Y-axis direction and a laser movement module movably arranged on the machine table in the X-axis direction, and the laser movement module is arranged above the material receiving platform in a crossing mode through a rack. The material receiving platform comprises a carrier, a material receiving jacking mechanism and an adsorption platform, the material receiving jacking mechanism is movably arranged in the carrier, the adsorption platform is fixed to the top of the carrier, the material receiving jacking mechanism comprises a lifting seat, a lifting motor and a plurality of positioning columns, through holes are formed in the positions, corresponding to the positioning columns, of the adsorption platform, and the through holes are communicated with the lifting seat. The multiple positioning columns are arranged at the top of the lifting base, the lifting base is arranged on the lifting motor and driven by the lifting motor to ascend and descend, and the positioning columns ascend and descend in the through holes of the adsorption platform. The femtosecond laser drilling equipment is simple in structure, convenient to load and unload and high in positioning precision.

Description

Technical Field

[0001] The utility model relates to the field of laser processing, in particular to a femtosecond laser drilling device. Background Art

[0002] TGV glass through-hole technology is considered to be a key technology for the next generation of three-dimensional integration. Glass is a material that may replace silicon-based adapters. Compared with through-silicon vias (TSVs), TGVs have the characteristics of low cost, easy access to large-size ultra-thin glass substrates, and excellent high-frequency electrical performance. At present, TGV has become a research focus and hotspot in the field of semiconductor 3D packaging. TGV glass through-hole technology uses precise laser induction to process several tiny holes on glass. Existing glass products use a robot to transport materials to the laser drilling equipment. The external robot transfers the product to the top of the laser equipment stage by clamping or adsorption. The self-equipped robot mechanism in the laser drilling equipment then takes the product from the external robot and transfers the product to the stage for processing. In this way, the structure of the laser equipment is complex and large in size. The process of placing and removing materials on the stage by the robot is also prone to cause slight deviation of the product, which is also affected by the precision of laser precision processing, and thus affects the quality of glass drilling.

[0003] Therefore, it is necessary to design a femtosecond laser drilling device that can improve the loading and unloading structure, improve positioning accuracy, and simplify the equipment size. Utility Model Content

[0004] The utility model aims to provide a femtosecond laser drilling device with simple structure, convenient loading and unloading and high positioning accuracy.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a femtosecond laser drilling equipment, including a machine table, a material receiving platform movably arranged on the machine table along the Y-axis direction, and a laser motion module movably arranged on the machine table along the X-axis direction, the laser motion module is cross-arranged above the material receiving platform through a table, the material receiving platform includes a carrier, a material receiving lifting mechanism and an adsorption platform, the material receiving lifting mechanism is movably arranged inside the carrier, the adsorption platform is fixed on the top of the carrier, the material receiving lifting mechanism includes a lifting seat, a lifting motor and a plurality of positioning columns, through holes are opened on the adsorption platform at positions corresponding to the positioning columns, the plurality of positioning columns are arranged on the top of the lifting seat, the lifting seat is arranged on the lifting motor, and is driven by the lifting motor to perform lifting movement, so that the positioning columns are lifted and lowered in the through holes of the adsorption platform.

[0006] As a further improved technical solution of the utility model, the plurality of positioning columns are regularly arranged in at least two rows on the lifting seat, the positioning columns are hollow cylinders, a pad is provided on the top of the positioning column, and an adsorption hole is opened in the center of the pad.

[0007] As a further improved technical solution of the utility model, an air passage is arranged in the lifting seat, and the air passage is communicated with the positioning column.

[0008] As a further improved technical solution of the utility model, guide blocks are arranged at the four end corners of the lifting seat, a guide shaft is movably arranged in the guide block, and the bottom of the guide shaft is fixed to the bottom of the carrier.

[0009] As a further improved technical solution of the utility model, the material receiving platform is arranged on the machine platform through a Y-axis linear motion module, two Y-axis slide rails are arranged on the machine platform parallel to the Y-axis linear motion module, and the bottom of the carrier is arranged on the slide of the Y-axis linear motion module.

[0010] As a further improved technical solution of the utility model, the laser motion module includes an X-axis linear motion module, a laser cutting module, a detection and positioning camera and a lifting module. The X-axis linear motion module is arranged on the platform. The laser cutting module includes a laser, a laser galvanometer and a laser cutting head. The laser is fixed on the platform. The laser galvanometer, the laser cutting head and the detection and positioning camera are arranged on the lifting module. The lifting module is arranged on the mobile platform of the X-axis linear motion module.

[0011] As a further improved technical solution of the utility model, an annular light source is installed below the detection and positioning camera.

[0012] As a further improved technical solution of the utility model, strip light sources are arranged around the frame of the object carrier.

[0013] As a further improved technical solution of the utility model, ion air guns are arranged on both sides of the material receiving platform on the machine.

[0014] As a further improved technical solution of the utility model, the table tops of the stand and the machine are made of marble.

[0015] The purpose of the utility model is to provide a femtosecond laser drilling device, which eliminates the manipulator for transferring materials inside the device, improves the material receiving platform structure, uses an adsorption platform and a material receiving lifting mechanism to cooperate, and sets a material receiving lifting mechanism below the adsorption platform. When receiving materials, the material receiving lifting mechanism rises, and the positioning column on it passes through the adsorption platform and rises a distance, so that the external manipulator can translate and support the glass product to the top of the adsorption platform in the device, and the product is positioned and connected by the raised positioning column. After the positioning column catches the product, the external manipulator can withdraw the device from the gap between the product and the adsorption platform. At the same time, the top of the positioning column can also adsorb the product, stably drive the product to land on the adsorption platform and fix it, and then the lifting mechanism retracts below the adsorption platform without occupying additional equipment space. This not only facilitates the product's material collection and discharge, making the overall laser equipment structure more concise and compact, but also prevents the external manipulator from leaving the product when it causes an offset effect on the product position, further ensuring the accuracy of positioning, thereby improving the overall processing accuracy and repeatability of the equipment. In addition, the positioning light source is concentrated around the material receiving platform, and the lighting effect is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the femtosecond laser drilling device of the utility model.

[0017] Figure 2 This is a side view of the material receiving platform.

[0018] Figure 3 This is a top view of the material receiving platform.

[0019] Figure 4 It is a schematic diagram of the material receiving and lifting mechanism. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "setting", "connection" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood through specific circumstances.

[0022] Reference Figure 1-Figure 2A femtosecond laser drilling device of the present embodiment includes a machine platform 1, a material receiving platform 2 movably arranged on the machine platform 1 along the Y-axis direction, and a laser motion module 3 movably arranged on the machine platform 1 along the X-axis direction. The X-axis direction and the Y-axis direction are two mutually perpendicular directions. The laser motion module 3 is arranged across the material receiving platform 2 through a marble stand 4. The material receiving platform 2 includes a carrier 21, a material receiving lifting mechanism 22 and an adsorption platform 23. The material receiving lifting mechanism 22 is movably arranged inside the carrier 21. The adsorption platform 23 is fixed on the top of the carrier 21. The material receiving lifting mechanism 22 includes a lifting seat 221, a lifting motor 222 and a plurality of positioning columns 223. A through hole 231 is opened on the adsorption platform 23 at a position corresponding to the positioning column 223. The plurality of positioning columns 223 are arranged on the top of the lifting seat 221. The lifting seat 221 is arranged on the lifting motor 222 and is driven by the lifting motor 222 to perform lifting movement, so that the positioning column 223 is lifted and lowered in the through hole 231 of the adsorption platform 23. In this embodiment, the lifting motor 222 can be a screw motor, and strip light sources 211 are arranged around the frame of the object carrier 21 to provide sufficient light for the detection positioning camera 32 during positioning.

[0023] Specific combination Figure 3 , multiple positioning columns 223 are regularly arranged in at least two rows on the lifting seat 221, in a matrix arrangement. In this embodiment, there are three rows arranged in parallel, and three positioning columns 223 are arranged at equal intervals in each row. The positioning columns 223 are hollow cylinders, and a cushion body 2231 is arranged on the top of the positioning columns 223. The cushion body 2231 is preferably made of rubber material, and an adsorption hole 2232 is opened in the center of the cushion body 2231. An airway is arranged in the lifting seat 221, and the airway is connected to the inside of the positioning column 223. The lifting seat 221 is externally connected to a vacuum pump, which provides adsorption force for the positioning column 223 when vacuuming, adsorbs the product on the cushion body 2231, and improves the stability when connecting the product.

[0024] See also Figure 4 The four corners of the lifting seat 221 are all provided with guide blocks 224, and a guide shaft 225 is movably provided in the guide block 224, and the bottom of the guide shaft 225 is fixed to the bottom of the carrier 21. The guide block 224 can adopt a linear bearing, and when the lifting motor 222 drives the lifting seat 221 to drive the positioning column 223 to rise and fall, the guide block 224 makes a linear motion on the guide shaft 225, and plays a role of stabilizing and guiding in the lifting process.

[0025] Furthermore, the material receiving platform 2 is set on the machine 1 through the Y-axis linear motion module 5, and two Y-axis slide rails 6 are set on the machine 1 parallel to the Y-axis linear motion module 5. The bottom of the carrier 21 is set on the slide of the Y-axis linear motion module 5, and the Y-axis linear motion module 5 drives the material receiving platform 2 to move horizontally in the Y-axis direction on the Y-axis slide rail 6.

[0026] The laser motion module 3 includes an X-axis linear motion module 31, a laser cutting module, a detection and positioning camera 32, and a lifting module 33. The X-axis linear motion module 31 is arranged on the stage 4. The laser cutting module includes a laser 34, a laser galvanometer 35, and a laser cutting head 36. The laser cutting head 36 is a processing objective lens, which is used to focus the outgoing laser of the laser galvanometer 35 to perform laser drilling on the product. The laser 34 is fixed on the stage 4, and the laser galvanometer 35, the laser cutting head 36, and the detection and positioning camera 32 are jointly arranged on the lifting module 33, and are driven by the lifting module 33 to perform vertical lifting and lowering movements on the X-axis linear motion module 31. The lifting module 33 is arranged on the mobile platform of the X-axis linear motion module 31, and is driven by the X-axis linear motion module 31 to perform horizontal lateral movement on the X-axis guide rail 41 of the stage 4.

[0027] In this application, the table tops of the stand 4 and the machine 1 are both made of marble to increase the stability and motion accuracy of the overall equipment. The X-axis linear motion module 31 and the Y-axis linear motion module 5 select high-precision linear motor modules with a repeat positioning accuracy of ≤±1µm, and the lifting module 33 selects a servo motor drive with a stroke of ≥100mm and a repeat positioning accuracy of ≤20 µm.

[0028] At the same time, the detection and positioning camera 32 is not only used for positioning, but also for detecting the punched product. A ring light source is set up below the detection and positioning camera 32 for lighting during detection. Ion air guns are set on both sides of the receiving platform 2 on the machine 1 to blow the product surface and the surface of the adsorption platform after cutting to remove static electricity and cutting dust residues.

[0029] When in use, the lifting motor 222 is started to drive the positioning column 223 to rise and pass through the adsorption platform 23, and position the material to be received above the adsorption platform 23. The mechanical arm supporting the glass product outside the equipment is translated to the top of the adsorption platform 23, and the top of the positioning column adsorbs the product, and the mechanical arm can withdraw from the gap between the product and the adsorption platform 23 without any influence. The lifting motor 222 then drives the positioning column 223 to descend and retract to the adsorption platform 23 until the product completely falls on the adsorption platform 23. The vacuum pump of the adsorption platform 23 is started to adsorb and fix the product, and the detection and positioning camera 32 starts to perform visual positioning. The three axes of the X-axis linear motion module 31, the lifting module 33, and the Y-axis linear motion module 5 cooperate to make the laser cutting head 36 punch a hole at the calibrated position. After the punching is completed, the vacuum of the adsorption platform 23 is closed, and the lifting motor 222 is started to drive the positioning column 223 to rise and pass through the adsorption platform 23 to lift the product. The external supporting manipulator enters the space above the adsorption platform 23 from the space above the adsorption platform 23 to support the product and then take it away, and the positioning column 223 waits for the next material to be received.

[0030] Terms indicating spatial relative positions such as “upper”, “lower”, etc. used herein are for the purpose of convenience of explanation to describe the relationship of one feature relative to another feature as shown in the drawings.

[0031] In addition, the above embodiments are only used to illustrate the present invention and are not intended to limit the technical solutions described in the present invention. The understanding of this specification should be based on the technical personnel in the relevant technical field. Although this specification has described the present invention in detail with reference to the above embodiments, ordinary technical personnel in the field should understand that the technical personnel in the relevant technical field can still modify or make equivalent substitutions to the present invention, and all technical solutions and improvements thereof that do not depart from the spirit and scope of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A femtosecond laser drilling device, characterized in that: It includes a machine platform, a material receiving platform movably arranged on the machine platform along the Y-axis direction, and a laser motion module movably arranged on the machine platform along the X-axis direction. The laser motion module is arranged across the material receiving platform through a platform. The material receiving platform includes a carrier, a material receiving lifting mechanism and an adsorption platform. The material receiving lifting mechanism is movably arranged inside the carrier. The adsorption platform is fixed on the top of the carrier. The material receiving lifting mechanism includes a lifting seat, a lifting motor and a plurality of positioning columns. Through holes are opened on the adsorption platform at positions corresponding to the positioning columns. The plurality of positioning columns are arranged on the top of the lifting seat. The lifting seat is arranged on the lifting motor and is driven by the lifting motor to perform lifting movements, so that the positioning columns are lifted and lowered in the through holes of the adsorption platform.

2. The femtosecond laser drilling device according to claim 1, characterized in that: The plurality of positioning posts are regularly arranged in at least two rows on the lifting seat, the positioning posts are hollow cylinders, a pad body is arranged on the top of the positioning posts, and an adsorption hole is opened in the center of the pad body.

3. The femtosecond laser drilling device according to claim 2, characterized in that: An air passage is arranged in the lifting seat, and the air passage is communicated with the positioning column.

4. The femtosecond laser drilling device according to claim 1, characterized in that: Guide blocks are arranged at the four end corners of the lifting seat, a guide shaft is movably arranged in the guide block, and the bottom of the guide shaft is fixed to the bottom of the carrier.

5. The femtosecond laser drilling device according to claim 1, characterized in that: The material receiving platform is arranged on the machine platform through a Y-axis linear motion module, two Y-axis slide rails are arranged on the machine platform in parallel with the Y-axis linear motion module, and the bottom of the carrier is arranged on the slide platform of the Y-axis linear motion module.

6. The femtosecond laser drilling device according to claim 1, characterized in that: The laser motion module includes an X-axis linear motion module, a laser cutting module, a detection and positioning camera, and a lifting module. The X-axis linear motion module is arranged on the platform. The laser cutting module includes a laser, a laser galvanometer, and a laser cutting head. The laser is fixed on the platform. The laser galvanometer, the laser cutting head, and the detection and positioning camera are arranged on the lifting module. The lifting module is arranged on the mobile platform of the X-axis linear motion module.

7. The femtosecond laser drilling device according to claim 6, characterized in that: An annular light source is arranged below the detection and positioning camera.

8. The femtosecond laser drilling device according to claim 1, characterized in that: Strip light sources are arranged around the frame of the object carrier.

9. The femtosecond laser drilling device according to claim 1, characterized in that: Ion air guns are arranged on both sides of the material receiving platform on the machine.

10. The femtosecond laser drilling device according to claim 1, characterized in that: The table tops of the stand and the machine are made of marble.

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