Chemical vapor deposition furnace

Abstract

The embodiment discloses a chemical vapor deposition furnace, and particularly discloses a chemical vapor deposition furnace which comprises a deposition furnace body, a gas inlet bottom plate, a gas distribution part and a gas outlet cover plate, the gas inlet bottom plate is used for being connected with the vapor deposition furnace body, a gas inlet is formed in the gas inlet bottom plate, and a first baffle ring is connected to the gas inlet bottom plate; the gas distribution part is mounted on the gas inlet bottom plate, and a second baffle ring is connected to the gas distribution part; the air outlet cover plate is mounted on the air distribution part, a first air outlet is formed in the air outlet cover plate, and a second air outlet is formed between the air outlet cover plate and the air inlet bottom plate; a preheating flow channel is formed between the gas inlet bottom plate and the gas distribution part, and a plugging assembly used for plugging the second gas outlet is installed on the gas inlet bottom plate in a threaded mode; the gas preheating device can solve the problems that a gas preheating device in the prior art cannot select single-channel or multi-channel preheating according to the change of the actual gas inflow, and the gas preheating effect is affected.

Description

Technical Field

[0001] The utility model relates to the technical field of composite material gas phase equipment, in particular to a chemical gas phase deposition furnace. Background Art

[0002] Chemical vapor deposition (CVI) is the preferred process for manufacturing C / C composite materials. It places the carbon fiber preform in a special CVI furnace, heats it to the required temperature, and introduces the precursor gas (hydrocarbon). After the gas decomposes, it diffuses into the preform containing pores, deposits carbon around the carbon fiber and in the pores, densifies the preform, and finally forms a C / C composite material. In order to ensure the deposition effect and improve the deposition efficiency and quality, the precursor gas (hydrocarbon) needs to be preheated to a certain temperature before entering the deposition area. First, it improves the decomposition effect of the precursor gas; second, it prevents the precursor gas at room temperature or with a low temperature after gasification from entering the deposition area, causing the local temperature of the furnace to drop, affecting the deposition effect.

[0003] In the prior art, a preheater is installed at the bottom of the deposition furnace to preheat the gas at the bottom of the deposition furnace, but the structure of the relevant preheater is complex, the manufacturing cost is high, and the disassembly and assembly are cumbersome. In order to solve the problems existing in the prior art, the utility model with the publication number CN220550222U discloses a gas preheating device and a deposition furnace, which are referred to as: Prior art 1), including a first unit shell, the first unit shell includes a first cover body and a first cylindrical shell, the first cylindrical shell has a receiving space, and the first cover body is provided with a plurality of first through holes to communicate with the receiving space; and at least one second unit shell, the second unit shell includes a second cover body and a second cylindrical shell, the second cover body is fixedly installed on the second cylindrical shell, and the second cylindrical shell and / or the second cover body are provided with a connecting portion; wherein, at least one second unit shell is sequentially nested in the first unit shell from the outside to the inside, and the second unit shell is connected to the receiving space through the connecting portion. Through the above technical scheme, the gas preheating device can improve the preheating effect of the gas to be preheated.

[0004] Although the gas preheating device in the prior art 1 has a simple structure and is easy to disassemble and assemble, the gas preheating device in the prior art 1 cannot select single or multi-channel preheating according to changes in the actual air intake volume, which affects the gas preheating effect. Utility Model Content

[0005] The purpose of the utility model is to provide a chemical vapor deposition furnace, which, in actual use, can solve the problem that the gas preheating device in the prior art cannot select single or multi-channel preheating according to the change of actual air intake volume, thus affecting the gas preheating effect.

[0006] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0007] A chemical vapor deposition furnace, comprising a deposition furnace body, and further comprising:

[0008] An air intake bottom plate, the air intake bottom plate is used to be connected to the meteorological deposition furnace body, an air intake port is arranged on the air intake bottom plate, and a first baffle ring is connected to the air intake bottom plate;

[0009] An air distributor, the air distributor is mounted on the air intake bottom plate, and a second baffle ring is connected to the air distributor;

[0010] An air outlet cover plate, the air outlet cover plate is installed on the air separation part, a first air outlet is arranged on the air outlet cover plate, and a second air outlet is formed between the air outlet cover plate and the air inlet bottom plate;

[0011] A preheating channel is formed between the air intake bottom plate and the air distribution part, and a blocking component for blocking the second air outlet is threadedly mounted on the air intake bottom plate.

[0012] Preferably, the first retaining ring and the second retaining ring are arranged alternately.

[0013] Preferably, a heating portion is provided on the first retaining ring and the second retaining ring.

[0014] Preferably, the heating portion is semicircular.

[0015] Preferably, the first retaining ring and the second retaining ring are wavy ring structures.

[0016] Preferably, the first air outlet and the second air outlet are in a cone shape.

[0017] Preferably, a limiting ring is connected to the air outlet cover plate, and the limiting ring is detachably connected to the air distribution part.

[0018] Preferably, the air intake bottom plate and the air separation portion are detachably connected, and a sealing gasket is provided between the air intake bottom plate and the air separation portion.

[0019] Preferably, the blocking assembly includes a blocking portion and a sealing ring, the sealing ring is fixedly connected to the bottom end of the air outlet cover plate, and the blocking portion is threadedly connected to the bottom end of the air inlet.

[0020] Preferably, one end of the blocking portion located outside the deposition furnace body is fixedly connected to a rotating rod.

[0021] Compared with the prior art, the utility model has the following beneficial effects:

[0022] When preheating the gas, the side surfaces of the gas separation part, the gas inlet bottom plate and the gas outlet cover plate can heat the gas separation part, the gas inlet bottom plate and the gas outlet cover plate to the preheating temperature by directly absorbing the radiation and conduction heat from the deposition furnace body; after the gas separation part, the gas inlet bottom plate and the gas outlet cover plate reach the preheating temperature, the gas to be preheated passes through the preheating flow channel formed between the gas inlet bottom plate and the gas separation part to preheat the gas;

[0023] By providing the first baffle ring and the second baffle ring, the path of the preheating channel formed between the air intake bottom plate and the air distribution part can be extended, and the heating effect of the heated air distribution part and the air intake bottom plate on the gas in the preheating channel can be further improved; and the preheating channel formed between the first baffle ring and the second baffle ring can reduce the occupied space of the device for preheating the gas under the premise of ensuring sufficient preheating of the gas, thereby ensuring the furnace loading capacity;

[0024] When the gas entering the preheating channel is relatively small, the sealing assembly threadedly connected to the air inlet bottom plate is rotated so that the sealing assembly can move upward to seal the second air outlet formed by the air outlet cover plate and the air inlet bottom plate assembly, so that the preheated gas can only be discharged into the furnace body through the first air outlet, thereby avoiding the situation where the gas entering the preheating channel is relatively small and the gas is discharged from the first air outlet and the second air outlet at the same time, which will result in the gas being unable to be fully preheated. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solution of the implementation mode of the utility model, the drawings required for use in the implementation mode will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 It is a three-dimensional diagram of the utility model.

[0027] Figure 2 It is a structural schematic diagram of the utility model.

[0028] Figure 3 For this utility model Figure 1 A partial enlarged view of point A in the middle.

[0029] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0030] 101-deposition furnace body, 102-air inlet bottom plate, 103-air inlet, 104-first baffle ring, 105-second baffle ring, 106-gas distribution part, 107-air outlet cover plate, 108-first air outlet, 109-second air outlet, 110-preheating flow channel, 111-sealing assembly, 112-heating part, 113-rotating rod, 114-sealing ring, 115-sealing part. DETAILED DESCRIPTION

[0031] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the embodiments of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0032] In the description of the embodiments of the present invention, it should be understood that the terms "length", "vertical", "horizontal", "top", "bottom", etc. indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present invention.

[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0034] In the embodiments of the present utility model, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0035] In the embodiments of the present utility model, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them. Moreover, the first feature being "above", "above" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0036] The disclosure below provides many different embodiments or examples for realizing different structures of the embodiments of the present utility model. In order to simplify the disclosure of the embodiments of the present utility model, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the embodiments of the present utility model. In addition, the embodiments of the present utility model can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed.

[0037] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0038] Example

[0039] See also Figure 1-Figure 3 This embodiment discloses a chemical vapor deposition furnace, and specifically discloses a preheating device for a chemical vapor deposition furnace. It includes a deposition furnace body 101, an air intake bottom plate 102, an air splitter 106, and an air outlet cover plate 107. The air intake bottom plate 102 is used to connect with the vapor deposition furnace body 101. The air intake bottom plate 102 is provided with an air intake port 103. The air intake bottom plate 102 is connected with a first baffle ring 104.

[0040] The air splitter 106 is mounted on the air inlet bottom plate 102, and the air splitter 106 is connected to a second baffle ring 105; the air outlet cover plate 107 is mounted on the air splitter 106, and a first air outlet 108 is provided on the air outlet cover plate 107, and a second air outlet 109 is formed between the air outlet cover plate 107 and the air inlet bottom plate 102;

[0041] A preheating channel 110 is formed between the air intake bottom plate 102 and the air distribution portion 106 , and a blocking component 111 for blocking the second air outlet 109 is threadedly mounted on the air intake bottom plate 102 .

[0042] When preheating the gas, the side surfaces of the gas separation section 106, the gas inlet bottom plate 102 and the gas outlet cover plate 107 can heat the gas separation section 106, the gas inlet bottom plate 102 and the gas outlet cover plate 107 to the preheating temperature by directly absorbing the radiation and conduction heat from the deposition furnace body 101; after the gas separation section 106, the gas inlet bottom plate 102 and the gas outlet cover plate 107 reach the preheating temperature, the gas to be preheated passes through the preheating channel 110 formed between the gas inlet bottom plate 102 and the gas separation section 106 to preheat the gas; by providing the first baffle ring 104 and the second baffle ring 105, the gas inlet bottom plate 102 and the gas separation section 106 can be extended. The path of the preheating channel 110 formed between the first baffle ring 104 and the second baffle ring 105 further improves the heating effect of the heated gas distributor 106 and the air inlet bottom plate 102 on the gas in the preheating channel 110; and the preheating channel 110 formed between the first baffle ring 104 and the second baffle ring 105 can reduce the occupied space of the device for preheating the gas under the premise of ensuring sufficient preheating of the gas, thereby ensuring the furnace loading capacity; when the gas entering the preheating channel 110 is small, the plugging component 111 threadedly connected to the air inlet bottom plate 102 is rotated so that the plugging component 111 can move upward to close the outlet cover The second gas outlet 109 formed by the plate 107 and the air inlet bottom plate 102 assembly is blocked, so that the preheated gas can only be discharged into the furnace body through the first gas outlet 108, which avoids the situation that when the gas entering the preheating channel 110 is small, the gas is discharged from the first gas outlet 108 and the second gas outlet 109 at the same time, which will cause the preheated gas to flow faster and fail to fully preheat the gas; when the gas entering the preheating channel 110 is large, the plugging component 111 threadedly connected to the air inlet bottom plate 102 is rotated so that the plugging component 111 can move downward so that the plugging component 111 no longer blocks the air outlet cover plate The second gas outlet 109 formed by the first gas outlet 108 and the second gas outlet 109 is blocked, and the gas can be discharged from the first gas outlet 108 and the second gas outlet 109 at the same time, ensuring that the gas is fully preheated while ensuring the smoothness of the gas flow. The end of the sealing component 111 away from the gas outlet cover 107 extends through the deposition furnace body 101 and the gas inlet bottom plate 102 to the outside of the deposition furnace body 101, and the deposition furnace body 101 is threadedly connected to the sealing component 111 to prevent the gas in the deposition furnace body 101 from flowing out through the gap between the sealing component 111 and the deposition furnace body 101.

[0043] Specifically, the first baffle ring 104 and the second baffle ring 105 are arranged alternately. By staggering the first baffle ring 104 and the second baffle ring 105, an S-shaped preheating channel 110 can be formed between the air intake bottom plate 102 and the air distribution part 106, which reduces the space occupied by the device for preheating the gas while extending the preheating channel 110, ensures the furnace loading capacity, and further improves the heating effect of the heated air distribution part 106 and the air intake bottom plate 102 on the gas in the preheating channel 110.

[0044] Specifically, the first baffle ring 104 and the second baffle ring 105 are provided with a heating portion 112. The heating portion 112 can further extend the preheating channel 110 and increase the contact surface between the first baffle ring 104, the second baffle ring 105 and the gas to be preheated, so that the gas is preheated uniformly.

[0045] Specifically, the heating portion 112 is semicircular in shape. The semicircular heating portion 112 can concentrate heat on the gas to be preheated, thereby improving the preheating effect on the gas.

[0046] Based on the same utility model concept, the first baffle ring 104 and the second baffle ring 105 are wavy annular structures. The first baffle ring 104 and the second baffle ring 105 arranged in a wavy annular structure are easy to process, and the first baffle ring 104 and the second baffle ring 105 arranged in a wavy annular structure can increase the contact surface between the first baffle ring 104 and the second baffle ring 105 and the gas to be preheated.

[0047] Specifically, the first gas outlet 108 and the second gas outlet 109 are in a cone shape. The preheated gas flows from the large end of the first gas outlet 108 and the second gas outlet 109 to the small end and then is discharged into the furnace; the first gas outlet 108 and the second gas outlet 109 are arranged in a cone shape, which is conducive to increasing the gas flow rate of the first gas outlet 108 and the second gas outlet 109.

[0048] Specifically, a limiting ring is connected to the outlet cover plate 107, and the limiting ring is detachably connected to the air distributor 106. The limiting ring is coaxially fixedly connected to the outlet cover plate 107 and forms an integrated structure with the outlet cover plate 107; the limiting ring can increase the contact area between the outlet cover plate 107 and the air distributor 106 by providing the limiting ring, so as to prevent gas from overflowing through the gap between the limiting ring and the air distributor 106, and the limiting ring is detachably connected to the air distributor 106 by bolts.

[0049] Specifically, the air intake bottom plate 102 and the air divider 106 are detachably connected, and a sealing gasket is provided between the air intake bottom plate 102 and the air divider 106. The air intake bottom plate 102 and the air divider 106 are detachably connected by bolts, so that the air intake bottom plate 102 and the air divider 106 are easy to clean and replace; the sealing gasket is made of rubber material, and is used to seal the gap between the air intake bottom plate 102 and the air divider 106.

[0050] Specifically, the plugging assembly 111 includes a plugging portion 115 and a sealing ring 114. The sealing ring 114 is fixedly connected to the bottom end of the air outlet cover plate 107, and the plugging portion 115 is threadedly connected to the bottom end of the air inlet. When it is necessary to plug the second air outlet 109 formed between the air inlet bottom plate 102 and the air outlet cover plate 107, the plugging portion 115 is rotated so that the plugging portion 115 moves vertically upward to plug the second air outlet 109. After the plugging portion 115 moves to contact the sealing ring 114, the sealing ring 114 is squeezed. The squeezed and deformed sealing ring 114 can further seal the second air outlet 109.

[0051] Specifically, one end of the blocking part 115 located outside the deposition furnace body 101 is fixedly connected to a rotating rod 113. The rotating rod 113 can be used to rotate the blocking part 115 so that the blocking part 115 moves up and down. The rotating rod 113 is covered with a heat insulation sleeve.

[0052] Although the preferred embodiments of the present invention have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present invention.

[0053] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A chemical vapor deposition furnace, comprising a deposition furnace body (101), characterized in that: Also includes: An air intake bottom plate (102), the air intake bottom plate (102) being used to be connected to the atmospheric deposition furnace body (101), an air intake port (103) being provided on the air intake bottom plate (102), and a first baffle ring (104) being connected to the air intake bottom plate (102); An air distributor (106), the air distributor (106) being mounted on the air intake bottom plate (102), and a second baffle ring (105) being connected to the air distributor (106); An air outlet cover plate (107), the air outlet cover plate (107) being mounted on the air separation portion (106), the air outlet cover plate (107) being provided with a first air outlet (108), and a second air outlet (109) being formed between the air outlet cover plate (107) and the air inlet bottom plate (102); A preheating channel (110) is formed between the air intake bottom plate (102) and the air distribution portion (106), and a blocking component (111) for blocking the second air outlet (109) is threadedly mounted on the air intake bottom plate (102).

2. A chemical vapor deposition furnace according to claim 1, characterized in that: The first retaining ring (104) and the second retaining ring (105) are arranged alternately.

3. A chemical vapor deposition furnace according to claim 1, characterized in that: A heating portion (112) is provided on the first retaining ring (104) and the second retaining ring (105).

4. A chemical vapor deposition furnace according to claim 3, characterized in that: The heating portion (112) is semicircular.

5. A chemical vapor deposition furnace according to claim 2, characterized in that: The first retaining ring (104) and the second retaining ring (105) are wavy ring structures.

6. The chemical vapor deposition furnace according to claim 1, characterized in that: The first air outlet (108) and the second air outlet (109) are in a cone shape.

7. The chemical vapor deposition furnace according to claim 1, characterized in that: The air outlet cover plate (107) is connected to a limiting ring, and the limiting ring is detachably connected to the air distribution portion (106).

8. The chemical vapor deposition furnace according to claim 1, characterized in that: The air intake bottom plate (102) and the air distribution portion (106) are detachably connected, and a sealing gasket is provided between the air intake bottom plate (102) and the air distribution portion (106).

9. The chemical vapor deposition furnace according to claim 1, characterized in that: The blocking component (111) comprises a blocking portion (115) and a sealing ring (114); the sealing ring (114) is fixedly connected to the bottom end of the air outlet cover plate (107); and the blocking portion (115) is threadedly connected to the bottom end of the air inlet.

10. A chemical vapor deposition furnace according to claim 9, characterized in that: One end of the blocking portion (115) located outside the deposition furnace body (101) is fixedly connected to a rotating rod (113).

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