Water circulation cooling constant-temperature air conditioner for photoetching machine

Abstract

The utility model discloses a water circulation cooling constant-temperature air conditioner for a photoetching machine, which belongs to the technical field of air conditioners and comprises an air conditioner entity, a ventilation plate is contacted with the front surface of the air conditioner entity, a clamping block is fixedly connected to the bottom surface of the ventilation plate, a quick release mechanism is arranged on the front surface of the ventilation plate, and a clamping sleeve is slidably connected to the outer surface of the clamping block. The front face of the air conditioner entity is fixedly connected with a fixing block, the front face of the ventilation plate is fixedly connected with a second handle, the quick dismounting mechanism comprises a square cylinder fixedly connected to the front face of the ventilation plate, a mounting cavity is formed in the square cylinder, the inner wall of the mounting cavity is fixedly connected with a spring, and the end, away from the second handle, of the spring is fixedly connected with a sliding block; through the arrangement of the quick dismounting mechanism which comprises the square cylinder, the mounting cavity, the spring, the sliding block, the first handle and the limiting rod, the ventilation plate can be quickly and conveniently dismounted and mounted, so that the time and energy for maintaining or replacing parts are reduced, and the maintenance efficiency of the equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of air conditioners, in particular to a constant temperature air conditioner with water circulation cooling for a photolithography machine. Background Art

[0002] With the continuous development of semiconductor manufacturing technology, photolithography machines, as key equipment, play an increasingly important role in the integrated circuit manufacturing process. Photolithography machines generate a lot of heat during operation. If the heat cannot be dissipated in a timely and effective manner, it will have a serious impact on the performance and service life of the photolithography machines. Therefore, how to provide a stable and efficient cooling system for photolithography machines has always been a research hotspot in the field of semiconductor manufacturing.

[0003] At present, there are some cooling devices for lithography machines on the market, such as traditional air-cooled and water-cooled air conditioners. However, these devices often have some problems during long-term use. Whether it is an air-cooled or water-cooled air conditioner, its ventilation plate is often fixed. When the ventilation plate is damaged or needs to be replaced, the entire air conditioner needs to be disassembled, which is cumbersome and time-consuming.

[0004] Therefore, it is necessary to design a water circulation cooling constant temperature air conditioner with the feature of easy replacement of ventilation panels. By optimizing the structure and installation method of the ventilation panels, the ventilation panels can be easily disassembled and replaced when damaged or need to be replaced, thereby improving the maintenance efficiency and service life of the equipment. Utility Model Content

[0005] The utility model aims to solve the problem in the prior art that when a ventilation plate of an air conditioner is damaged or needs to be replaced, the entire air conditioner needs to be disassembled, which is cumbersome and time-consuming.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A constant temperature air conditioner for water circulation cooling of a photolithography machine comprises an air conditioner entity, the front of the air conditioner entity is in contact with a ventilation plate, the bottom of the ventilation plate is fixedly connected with a clamping block, and the front of the ventilation plate is provided with a quick release mechanism.

[0008] Preferably, a sleeve is slidably connected to the outer surface of the clamping block, a fixing block is fixedly connected to the front of the air conditioner entity, and a second handle is fixedly connected to the front of the ventilation plate.

[0009] Preferably, a vibration-damping spring is fixedly connected to the bottom surface of the air-conditioning entity, one end of the vibration-damping spring away from the air-conditioning entity is fixedly connected to a base plate, a damper is installed on the upper surface of the base plate, one end of the damper away from the base plate is fixedly connected to the air-conditioning entity, a universal wheel is installed on the bottom surface of the base plate, the upper surface of the base plate is fixedly connected to a vertical plate, and a push handle is fixedly connected to the left side of the vertical plate.

[0010] Preferably, the quick-release mechanism comprises a square tube fixedly connected to the front side of the ventilation plate, and a mounting cavity is provided inside the square tube.

[0011] Preferably, a spring is fixedly connected to the inner wall of the installation cavity, and a sliding block is fixedly connected to one end of the spring away from the second handle.

[0012] Preferably, the sliding block is slidably connected to the inner wall of the installation cavity, and a first handle is fixedly connected to the outer surface of the sliding block.

[0013] Preferably, the first handle is slidably connected to the inside of the square tube, a side of the slider close to the fixed block is fixedly connected to a limiting rod, the limiting rod is slidably connected to the inside of the square tube, and the limiting rod is slidably connected to the inside of the fixed block.

[0014] Compared with the prior art, the utility model provides a constant temperature air conditioner for photolithography machine using water circulation cooling, which has the following beneficial effects.

[0015] 1. The utility model provides a quick-release mechanism, including a square tube, a mounting cavity, a spring, a slider, a first handle and a limit rod, so that the ventilation plate can be quickly and conveniently disassembled and installed, thereby reducing the time and effort for maintenance or replacement of parts and improving the maintenance efficiency of the equipment.

[0016] 2. The utility model can reduce the vibration of the air conditioner entity during operation through the cooperation of the vibration-damping spring and the damper, improve the stability and reliability of the air conditioner entity, and enable the internal parts of the air conditioner entity to maintain a normal working state for a longer period of time, thereby reducing the possibility of failure. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional structural schematic diagram of the utility model.

[0018] Figure 2 It is a schematic diagram of the connection between the clamping sleeve and the clamping block of the utility model.

[0019] Figure 3 It is a three-dimensional structural schematic diagram of the quick-release mechanism of the utility model.

[0020] In the figure:

[0021] 1. Air conditioner entity; 2. Ventilation plate; 3. Clamping sleeve; 4. Clamping block; 5. Quick release mechanism; 501. Square tube; 502. Mounting cavity; 503. Spring; 504. Sliding block; 505. First handle; 506. Limit rod; 6. Fixed block; 7. Second handle; 8. Bottom plate; 9. Universal wheel; 10. Vertical plate; 11. Pushing handle; 12. Damper; 13. Shock-absorbing spring. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0023] Reference Figure 1-Figure 3 A constant temperature air conditioner for water circulation cooling of a photolithography machine includes an air conditioner entity 1, a ventilation plate 2 is in contact with the front of the air conditioner entity 1, a clamping block 4 is fixedly connected to the bottom of the ventilation plate 2, and a quick release mechanism 5 is arranged on the front of the ventilation plate 2.

[0024] The outer surface of the clamping block 4 is slidably connected with the clamping sleeve 3 , the front side of the air conditioner entity 1 is fixedly connected with the fixing block 6 , and the front side of the ventilation plate 2 is fixedly connected with the second handle 7 .

[0025] A damping spring 13 is fixedly connected to the bottom surface of the air conditioner entity 1, and the end of the damping spring 13 away from the air conditioner entity 1 is fixedly connected to the base plate 8, a damper 12 is installed on the upper surface of the base plate 8, and the end of the damper 12 away from the base plate 8 is fixedly connected to the air conditioner entity 1, a universal wheel 9 is installed on the bottom surface of the base plate 8, a vertical plate 10 is fixedly connected to the upper surface of the base plate 8, and a push handle 11 is fixedly connected to the left side of the vertical plate 10.

[0026] The quick-release mechanism 5 comprises a square tube 501 fixedly connected to the front side of the ventilation plate 2 , and a mounting cavity 502 is provided inside the square tube 501 .

[0027] A spring 503 is fixedly connected to the inner wall of the installation cavity 502 , and a slider 504 is fixedly connected to one end of the spring 503 away from the second handle 7 .

[0028] The slider 504 is slidably connected to the inner wall of the installation cavity 502 , and a first handle 505 is fixedly connected to the outer surface of the slider 504 .

[0029] The first handle 505 is slidably connected to the inside of the square tube 501 , and a side of the slider 504 close to the fixed block 6 is fixedly connected to the limiting rod 506 , which is slidably connected to the inside of the square tube 501 and the fixing block 6 .

[0030] There are two clamping blocks 4 and two second handles 7, both of which are arranged on the outer surface of the ventilation plate 2 in a symmetrical state.

[0031] Two of the clamping sleeves 3 and the fixing blocks 6 are provided, and both are arranged on the front side of the air conditioner entity 1 in a symmetrical state.

[0032] When the air conditioner entity 1 is working, the cooperation of the vibration-damping spring 13 and the damper 12 can reduce the vibration of the air conditioner entity 1, improve the stability and reliability of the air conditioner entity 1, and enable the internal parts of the air conditioner entity 1 to maintain a normal working state for a longer time, thereby reducing the possibility of failure.

[0033] There are four universal wheels 9 , all arranged at the four corners of the bottom surface of the base plate 8 . There are four dampers 12 and four damping springs 13 , all arranged at the four corners of the top surface of the base plate 8 .

[0034] The quick release mechanism 5 is provided at two locations, both of which are provided on the front side of the ventilation plate 2 in a symmetrical state.

[0035] By setting up a quick-release mechanism 5, including a square tube 501, an installation cavity 502, a spring 503, a slider 504, a first handle 505 and a limit rod 506, the ventilation plate 2 can be quickly and conveniently disassembled and installed, thereby reducing the time and effort when maintaining or replacing parts and improving the maintenance efficiency of the equipment.

[0036] By providing the clamping block 4, the clamping sleeve 3 and the fixing block 6, a stable connection between the ventilation plate 2 and the air conditioner entity 1 can be ensured. At the same time, by utilizing the elastic force of the spring 503, the limiting rod 506 can be inserted into the fixing block 6, thereby improving the installation stability of the device.

[0037] When the ventilation plate 2 needs to be removed, the slider 504 can be moved by operating the first handle 505. Since the slider 504 is slidably connected to the inner wall of the installation cavity 502, and the first handle 505 is fixed to the outer surface of the slider 504, the slider 504 can be slid in the installation cavity 502 by pulling the first handle 505. At this time, the spring 503 is compressed, and the limit rod 506 is slidably connected to the inside of the fixed block 6, so that the limit rod 506 moves out of the fixed block 6. When the limit rod 506 is completely moved out of the fixed block 6, the ventilation plate 2 can be separated from the air conditioner entity 1, thereby achieving quick disassembly. Similarly, when the ventilation plate 2 needs to be installed, it is only necessary to place the ventilation plate 2 in the correct position, then align the limit rod 506 with the fixed block 6 and push the first handle 505 so that the limit rod 506 slides back into the fixed block 6 to complete the installation. During the installation process, the spring 503 will help maintain the position of the slider 504 and the limit rod 506 to ensure the stability of the installation.

[0038] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A constant temperature air conditioner for photolithography machine with water circulation cooling, comprising an air conditioner entity (1), characterized in that: The front surface of the air conditioner entity (1) is in contact with a ventilation plate (2), the bottom surface of the ventilation plate (2) is fixedly connected with a clamping block (4), and the front surface of the ventilation plate (2) is provided with a quick-release mechanism (5).

2. A constant temperature air conditioner for photolithography machine with water circulation cooling according to claim 1, characterized in that: The outer surface of the clamping block (4) is slidably connected to a clamping sleeve (3), the front surface of the air conditioner entity (1) is fixedly connected to a fixing block (6), and the front surface of the ventilation plate (2) is fixedly connected to a second handle (7).

3. A constant temperature air conditioner for photolithography machine with water circulation cooling according to claim 1, characterized in that: The bottom surface of the air conditioner entity (1) is fixedly connected to a damping spring (13); one end of the damping spring (13) away from the air conditioner entity (1) is fixedly connected to a base plate (8); a damper (12) is installed on the upper surface of the base plate (8); one end of the damper (12) away from the base plate (8) is fixedly connected to the air conditioner entity (1); a universal wheel (9) is installed on the bottom surface of the base plate (8); the upper surface of the base plate (8) is fixedly connected to a vertical plate (10); and the left side of the vertical plate (10) is fixedly connected to a push handle (11).

4. A constant temperature air conditioner for photolithography machine with water circulation cooling according to claim 1, characterized in that: The quick-release mechanism (5) comprises a square tube (501) fixedly connected to the front side of the ventilation plate (2), and a mounting cavity (502) is provided inside the square tube (501).

5. A constant temperature air conditioner for photolithography machine with water circulation cooling according to claim 4, characterized in that: A spring (503) is fixedly connected to the inner wall of the installation cavity (502), and a sliding block (504) is fixedly connected to one end of the spring (503) away from the second handle (7).

6. A constant temperature air conditioner for photolithography machine with water circulation cooling according to claim 5, characterized in that: The sliding block (504) is slidably connected to the inner wall of the installation cavity (502), and the outer surface of the sliding block (504) is fixedly connected to a first handle (505).

7. A constant temperature air conditioner for photolithography machine with water circulation cooling according to claim 6, characterized in that: The first handle (505) is slidably connected to the inside of the square tube (501); a side of the sliding block (504) close to the fixed block (6) is fixedly connected to a limiting rod (506); the limiting rod (506) is slidably connected to the inside of the square tube (501); and the limiting rod (506) is slidably connected to the inside of the fixed block (6).

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