Semiconductor gas leakage detection device

Abstract

The utility model relates to the technical field of gas detection, and discloses a semiconductor gas leakage detection device which comprises a leakage detector body, the outer surface of a straight pipe is movably connected with a connecting pipe, a connecting ring is fixedly installed in the connecting pipe, two sleeve plates are fixedly installed at the bottom of the connecting ring, and a hose is fixedly installed at the top end of the connecting pipe. Two inclined grooves are formed in the top of the straight pipe, two arc-shaped blocks are fixedly installed on the top of the straight pipe, the inclined grooves are formed in the top end of the straight pipe, then the hose is rotated to drive the sleeve plate to rotate, and due to the limiting effect of the rotating assembly, the wedge blocks and the fixing plates move from the inclined grooves to the interiors of the grooves in the surfaces of the arc-shaped plates; and the spring is extruded during movement, after the wedge block reaches the groove, the spring is reset, the wedge block can be clamped in the groove, and the wedge block can be disassembled by rotating again, so that the hose can be quickly disassembled, the equipment is more quickly replaced, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of gas detection, in particular to a semiconductor gas leakage detection device. Background Art

[0002] A semiconductor gas leak detection device is mainly used to detect the leakage of various gases used in the semiconductor manufacturing process. These gases play a key role in the semiconductor manufacturing process, but if they leak, they may pose a threat to the health and safety of workers and cause pollution to the environment. Therefore, it is very important to accurately detect and monitor the leakage of these gases.

[0003] Existing semiconductor gas leak detectors are connected by using hoses. Since the hoses need to be used for a long time and need to be replaced constantly, most of the existing semiconductor gas leak detector hoses are integrally connected to the instrument body and are difficult to disassemble and replace. The hoses are not easy to disassemble, so when it is necessary to replace sensors, repair equipment or perform daily maintenance, it will increase the difficulty and time consumption, which may lead to extended equipment downtime and affect production efficiency. Utility Model Content

[0004] The purpose of the utility model is to provide a semiconductor gas leakage detection device to solve the above problems. By setting the wedge block in the inclined groove and the groove, the hose can be quickly disassembled and engaged, solving the problems mentioned in the background technology.

[0005] In order to solve the above problems, the utility model provides a technical solution:

[0006] A semiconductor gas leakage detection device comprises a leak detector body, a straight tube is fixedly installed on the top of the leak detector body, a rotating assembly is arranged on the outer surface of the straight tube, a connecting tube is movably connected to the outer surface of the straight tube, a connecting ring is fixedly installed inside the connecting tube, two sleeve plates are fixedly installed on the bottom of the connecting ring, a hose is fixedly installed on the top of the connecting tube, a limit assembly is arranged on the outer surface of the hose, a connector is arranged on the surface of the limit assembly, two inclined grooves are opened on the top of the straight tube, and two arc blocks are fixedly installed on the top of the straight tube;

[0007] The interior of the sleeve plate is slidably connected to a fixed plate, two springs are fixedly installed on the top of the inner wall of the sleeve plate, the bottom ends of the two springs are fixedly installed on the top of the fixed plate, a wedge block is fixedly installed on the bottom of the fixed plate, a groove is provided on the top surface of the arc block, the outer surface of the wedge block is slidably connected to the inside of the groove, and the surface of the wedge block is slidably connected to the inside of the inclined groove.

[0008] As a preferred solution of the utility model, the rotating assembly includes two fixing rings, the insides of the two fixing rings are fixedly mounted on the outer surface of the straight pipe, and the bottoms of the two fixing rings are provided with sliding grooves.

[0009] As a preferred solution of the utility model, two straight plates are fixedly installed at the bottom end of the connecting pipe, and sliders are fixedly installed at the bottom of the two straight plates. The interiors of the two sliders are respectively slidably connected to the interiors of the corresponding slide grooves.

[0010] As a preferred solution of the utility model, a display mechanism is fixedly installed inside the leak detector body, a gas sensor is fixedly installed inside the leak detector body, and one end of the straight tube penetrates the surface of the leak detector body and is fixedly installed on the side of the gas sensor.

[0011] As a preferred solution of the utility model, the limit assembly includes a limit ring, the interior of the limit ring is fixedly sleeved on the outer surface of the hose, the surface of the limit ring is provided with a connecting groove, the interior of the connecting groove is slidably connected to a limit block, and the surface of the limit block is fixedly installed inside the connector.

[0012] As a preferred solution of the utility model, a plurality of fixing strips are fixedly installed on both sides of the leak detector body.

[0013] The beneficial effect of the utility model is that the inclined groove is opened at the top of the straight tube, and then the hose is rotated to drive the sleeve plate to rotate. Due to the limiting effect of the rotating component, the wedge block and the fixed plate are moved from the inclined groove to the inside of the groove on the surface of the arc plate. The spring is squeezed during the movement. When the wedge block reaches the groove, the spring is reset, and the wedge block can be clamped in the groove. It can be disassembled by rotating again. Therefore, the hose can be quickly disassembled, and the equipment can be replaced more quickly, which increases the work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] For ease of explanation, the present invention is described in detail by the following specific implementations and drawings.

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 yes Figure 1 A schematic diagram of the enlarged structure at A;

[0017] Figure 3 It is a schematic diagram of the cross-sectional structure of the utility model as a whole;

[0018] Figure 4 yes Figure 3 A schematic diagram of the enlarged structure at B;

[0019] Figure 5 yes Figure 3 A schematic diagram of the enlarged structure at C;

[0020] Figure 6 It is a structural schematic diagram of the utility model's inclined groove, arc-shaped block and sleeve plate;

[0021] Figure 7 The utility model is a schematic diagram of the exploded structure of the sleeve plate, spring, fixed plate, wedge block and arc block.

[0022] In the figure: 1. Leak detector body; 2. Connecting pipe; 3. Hose; 4. Connecting head; 5. Straight pipe; 6. Display mechanism; 7. Fixing bar; 8. Rotating assembly; 81. Straight plate; 82. Sliding block; 83. Sliding groove; 84. Fixing ring; 9. Gas sensor; 10. Inclined groove; 11. Connecting ring; 12. Arc block; 13. Limiting assembly; 131. Limiting ring; 132. Limiting block; 133. Connecting groove; 14. Sleeve plate; 15. Spring; 16. Fixing plate; 17. Wedge block; 18. Groove. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0024] Example:

[0025] See also Figure 1-Figure 7 The utility model provides a technical solution: a semiconductor gas leakage detection device, comprising a leak detector body 1, a straight tube 5 is fixedly installed on the top of the leak detector body 1, a rotating assembly 8 is arranged on the outer surface of the straight tube 5, a connecting tube 2 is movably connected to the outer surface of the straight tube 5, a connecting ring 11 is fixedly installed inside the connecting tube 2, two sleeves 14 are fixedly installed on the bottom of the connecting ring 11, a hose 3 is fixedly installed on the top of the connecting tube 2, the soft setting of the hose 3 can be better adjusted, a limiting assembly 13 is arranged on the outer surface of the hose 3, a connector 4 is arranged on the surface of the limiting assembly 13, two inclined grooves 10 are opened on the top of the straight tube 5, and two arc blocks 12 are fixedly installed on the top of the straight tube 5;

[0026] The inside of the sleeve plate 14 is slidably connected to a fixed plate 16, two springs 15 are fixedly installed on the top of the inner wall of the sleeve plate 14, the bottom ends of the two springs 15 are fixedly installed on the top of the fixed plate 16, and a wedge 17 is fixedly installed on the bottom of the fixed plate 16. The wedge 17 and the groove 18 correspond to each other and can be engaged. The top surface of the arc block 12 is provided with a groove 18, the outer surface of the wedge 17 is slidably connected to the inside of the groove 18, and the surface of the wedge 17 is slidably connected to the inside of the inclined groove 10.

[0027] Furthermore, the rotating assembly 8 includes two fixing rings 84, the interiors of the two fixing rings 84 are fixedly mounted on the outer surface of the straight tube 5, and the bottoms of the two fixing rings 84 are provided with sliding grooves 83. The two fixing rings 84 are not fixedly connected, and a gap is provided for the slider 82 to pass through.

[0028] Furthermore, two straight plates 81 are fixedly installed at the bottom end of the connecting pipe 2 , and sliding blocks 82 are fixedly installed at the bottom of the two straight plates 81 . The insides of the two sliding blocks 82 are slidably connected to the insides of the corresponding sliding grooves 83 .

[0029] Furthermore, a display mechanism 6 is fixedly installed inside the leak detector body 1. The display mechanism 6 can display gas data to facilitate people's observation. A gas sensor 9 is fixedly installed inside the leak detector body 1. The gas sensor 9 can detect semiconductor gas. When a leak occurs, it can be quickly detected. One end of the straight tube 5 passes through the surface of the leak detector body 1 and is fixedly installed on the side of the gas sensor 9.

[0030] Furthermore, the limiting assembly 13 includes a limiting ring 131, the interior of the limiting ring 131 is fixedly sleeved on the outer surface of the hose 3, a connecting groove 133 is opened on the surface of the limiting ring 131, the interior of the connecting groove 133 is slidably connected to a limiting block 132, and the surface of the limiting block 132 is fixedly installed inside the connector 4.

[0031] Furthermore, a plurality of fixing strips 7 are fixedly installed on both sides of the leak detector body 1, and the plurality of fixing strips 7 mainly play an anti-slip role.

[0032] In summary, when using the device, when disassembling the equipment hose 3, first rotate the connecting pipe 2 to drive the straight plate 81 at the bottom to rotate, and the straight plate 81 drives the slider 82 to slide inside the slide groove 83 at the bottom of the fixing ring 84, and at the same time, the connecting pipe 2 drives the connecting ring 11 to rotate, and the connecting ring 11 drives the sleeve plate 14 to rotate, and the sleeve plate 14 drives the internal fixing plate 16 and the wedge block 17 to slide inside the groove 18, and at the same time squeezes the spring 15, and when the wedge block 17 is away from 18, the spring 15 is reset, and the rotation The connecting pipe 2 allows the straight plate 81 and the slider 82 installed at the bottom to reach the gap between the two fixing rings 84, and the hose 3 can be replaced. During installation, the straight plate 81 and the slider 82 are rotated in the gap between the two fixing rings 84, so that the slider 82 slides inside the slide groove 83. At the same time, the connecting pipe 2 is rotated to slide the wedge block 17 and the fixing plate 16 inside the inclined groove 10. The spring 15 is squeezed during rotation, and then when it reaches the inside of the groove 18, the spring is reset, and the wedge block 17 is engaged inside the groove 18.

[0033] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor gas leakage detection device, comprising a leak detector body (1), characterized in that: A straight tube (5) is fixedly mounted on the top of the leak detector body (1), a rotating assembly (8) is arranged on the outer surface of the straight tube (5), a connecting tube (2) is movably connected to the outer surface of the straight tube (5), a connecting ring (11) is fixedly mounted inside the connecting tube (2), two sleeve plates (14) are fixedly mounted on the bottom of the connecting ring (11), a hose (3) is fixedly mounted on the top of the connecting tube (2), a limiting assembly (13) is arranged on the outer surface of the hose (3), a connector (4) is arranged on the surface of the limiting assembly (13), two inclined grooves (10) are provided on the top of the straight tube (5), and two arc blocks (12) are fixedly mounted on the top of the straight tube (5); The sleeve plate (14) is slidably connected to a fixed plate (16) inside, two springs (15) are fixedly installed on the top of the inner wall of the sleeve plate (14), the bottom ends of the two springs (15) are fixedly installed on the top of the fixed plate (16), a wedge block (17) is fixedly installed on the bottom of the fixed plate (16), a groove (18) is provided on the top surface of the arc block (12), the outer surface of the wedge block (17) is slidably connected to the inside of the groove (18), and the surface of the wedge block (17) is slidably connected to the inside of the inclined groove (10).

2. A semiconductor gas leakage detection device according to claim 1, characterized in that: The rotating assembly (8) comprises two fixing rings (84), the interiors of the two fixing rings (84) are fixedly mounted on the outer surface of the straight tube (5), and the bottoms of the two fixing rings (84) are provided with sliding grooves (83).

3. A semiconductor gas leakage detection device according to claim 2, characterized in that: Two straight plates (81) are fixedly mounted on the bottom end of the connecting pipe (2), and sliding blocks (82) are fixedly mounted on the bottoms of the two straight plates (81), and the interiors of the two sliding blocks (82) are respectively slidably connected to the interiors of corresponding sliding grooves (83).

4. A semiconductor gas leakage detection device according to claim 1, characterized in that: A display mechanism (6) is fixedly installed inside the leak detector body (1), a gas sensor (9) is fixedly installed inside the leak detector body (1), and one end of the straight tube (5) passes through the surface of the leak detector body (1) and is fixedly installed on the side of the gas sensor (9).

5. The semiconductor gas leakage detection device according to claim 1, characterized in that: The limiting assembly (13) comprises a limiting ring (131), the interior of the limiting ring (131) is fixedly sleeved on the outer surface of the hose (3), a connecting groove (133) is provided on the surface of the limiting ring (131), the interior of the connecting groove (133) is slidably connected to a limiting block (132), and the surface of the limiting block (132) is fixedly installed inside the connector (4).

6. A semiconductor gas leakage detection device according to claim 1, characterized in that: A plurality of fixing strips (7) are fixedly mounted on both sides of the leak detector body (1).

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