Die bonding welding head device

Abstract

The utility model discloses a die bonding welding head device which comprises a base, a die bonding welding head, a transverse movement driving piece, a longitudinal movement driving piece and a lifting driving piece, and the transverse movement driving piece, the longitudinal movement driving piece and the lifting driving piece are used for driving the die bonding welding head to move in the X-axis direction, the Y-axis direction and the Z-axis direction respectively. The transverse moving driving part comprises a first U-shaped linear motor, a magnet assembly of the first U-shaped linear motor is fixed to the base, the longitudinal moving driving part comprises a second U-shaped linear motor, a magnet assembly of the second U-shaped linear motor is connected with a rotor of the first U-shaped linear motor, the lifting driving part comprises a third U-shaped linear motor, and the third U-shaped linear motor is connected with the rotor of the second U-shaped linear motor. The die bonding welding head is connected with a rotor of the second U-shaped linear motor and a rotor of the third U-shaped linear motor. According to the die bonding welding head device, the U-shaped linear motor is used as a driving part for driving the die bonding welding head to move, the structure is compact, the occupied space is small, and the die bonding welding head device is convenient to disassemble, assemble and maintain.

Description

Technical Field

[0001] The utility model relates to the field of crystal bonding equipment, in particular to a crystal bonding welding head device. Background Art

[0002] At present, the die bonding machine generally adopts a die bonding welding head to suck the chip from the film expansion mechanism, and places the sucked chip on the die bonding position of the bracket on the die bonding track to weld the chip and the die bonding position of the bracket together, thereby achieving die bonding.

[0003] In the existing die bonding welding head device of the die bonding machine, both the lateral driving member and the longitudinal driving member adopt a screw motor. However, the screw motor is bulky, occupies a large space, and is inconvenient to disassemble and maintain. Utility Model Content

[0004] In order to overcome the deficiencies of the prior art, the utility model provides a die-bonding welding head device, which adopts a U-shaped linear motor as a driving member for driving the die-bonding welding head to move, has a compact structure, occupies a small space, and is easy to disassemble, assemble and maintain.

[0005] The technical solution adopted by the utility model to solve its technical problems is:

[0006] A die bonding welding head device comprises a base, a die bonding welding head, a transverse driving member, a longitudinal driving member and a lifting driving member, wherein the transverse driving member, the longitudinal driving member and the lifting driving member are respectively used to drive the die bonding welding head to move along the X-axis, Y-axis and Z-axis directions; the transverse driving member comprises a first U-shaped linear motor, the magnet assembly of the first U-shaped linear motor is fixed on the base, the longitudinal driving member comprises a second U-shaped linear motor, the magnet assembly of the second U-shaped linear motor is connected to the mover of the first U-shaped linear motor, the lifting driving member comprises a third U-shaped linear motor, and the die bonding welding head is connected to the mover of the second U-shaped linear motor and the mover of the third U-shaped linear motor.

[0007] As a further improvement of the above technical solution, the magnet assembly of the second U-shaped linear motor is slidably disposed on the base through a first linear guide rail, and the length direction of the first linear guide rail is parallel to the displacement direction of the first U-shaped linear motor mover.

[0008] As a further improvement of the above technical solution, the first linear guide includes a first slide rail arranged on a base, and a slider slidably connected to the first slide rail, and the slider is connected to the magnet assembly of the second U-shaped linear motor.

[0009] As a further improvement of the above technical solution, the magnet assembly of the second U-shaped linear motor is installed on a first fixed plate, the bottom of the first fixed plate is fixedly connected to the slider, and the side wall of the first fixed plate is connected to the mover of the first U-shaped linear motor via a connecting plate.

[0010] As a further improvement of the above technical solution, a support plate is fixedly connected to the side of the first fixed plate away from the first U-shaped linear motor, and the support plate is connected to the second fixed plate through a second linear guide rail. The length direction of the second linear guide rail is parallel to the displacement direction of the mover of the second U-shaped linear motor. The second fixed plate is slidably arranged on the support plate based on the second linear guide rail, and the second fixed plate is connected to the mover of the second U-shaped linear motor, and the die-bonding welding head is arranged on the second fixed plate.

[0011] As a further improvement of the above technical solution, the die-bonding welding head is slidably set on the second fixed plate through a third linear guide rail, the third linear guide rail is vertically set along the Z-axis direction, and the mover of the third U-shaped linear motor is connected to the die-bonding welding head.

[0012] As a further improvement of the above technical solution, the die bonding welding head is fixed on a mounting plate, the mounting plate is connected to the slider of the third linear guide rail, the slide rail of the third linear guide rail is connected to the second fixed plate, and the mover of the third U-shaped linear motor is connected to the mounting plate.

[0013] As a further improvement of the above technical solution, an elastic component is arranged on the second fixing plate, and the elastic component is used to provide a buffer force acting on the mover of the third U-shaped linear motor.

[0014] As a further improvement of the above technical solution, the magnet assembly of the third U-shaped linear motor is fixedly connected to the first fixed plate, the U-shaped groove of the magnet assembly of the third U-shaped linear motor extends along the Y-axis direction, and the mover of the third U-shaped linear motor can move along the Y-axis direction in the U-shaped groove.

[0015] As a further improvement of the above technical solution, a counter-attacking component is arranged on the base, and the counter-attacking component is used to buffer the movement of the longitudinal driving member. The counter-attacking component and the longitudinal driving member are respectively arranged on opposite sides of the base.

[0016] The beneficial effect of the utility model is that the position of the die bonding head is precisely adjusted by driving the die bonding head in the X-axis, Y-axis and Z-axis directions through the transverse driving member, the longitudinal driving member and the lifting driving member, so as to facilitate the precise absorption of the chip. Moreover, the transverse driving member, the longitudinal driving member and the lifting driving member all use a U-shaped linear motor as a power source, and the U-shaped linear motor has a simple and compact structure, which is convenient for layout and installation, thereby reducing the installation size of the die bonding head device, achieving a compact structure and a small space occupation effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0018] Figure 1 This is a schematic diagram of the assembly of a die bonding head device according to an embodiment of the utility model. Figure 1 ;

[0019] Figure 2 This is a schematic diagram of the assembly of a die bonding head device according to an embodiment of the utility model. Figure 2 ;

[0020] Figure 3 This is a schematic diagram of the assembly of a die bonding head device according to an embodiment of the utility model. Figure 3 ;

[0021] Figure 4 This is a schematic diagram of the assembly of a die bonding head device according to an embodiment of the utility model. Figure 4 ;

[0022] Figure 5 This is a schematic diagram of the assembly of a die bonding head device according to an embodiment of the utility model. Figure 5 ;

[0023] Figure 6 This is a side view of a die-bonding welding head device according to an embodiment of the utility model;

[0024] Figure 7 It is a rear view of a lifting drive member in a die bonding head device according to an embodiment of the utility model;

[0025] Figure 8 It is a schematic diagram of a third U-shaped linear motor in a die bonding welding head device according to an embodiment of the utility model;

[0026] Fig. 9 yes Figure 8 Bottom view of .

[0027] Figure numerals: 1. base; 2. solid crystal welding head; 3. transverse driving member; 31. first magnet assembly; 32. first mover; 4. longitudinal driving member; 41. second magnet assembly; 42. second mover; 5. lifting driving member; 51. third magnet assembly; 52. third mover; 53. U-shaped groove; 6. hedging assembly; 7. first linear guide rail; 8. first fixed plate; 9. second linear guide rail; 10. support plate; 11. mounting plate; 12. second fixed plate; 13. third linear guide rail; 14. elastic assembly. DETAILED DESCRIPTION

[0028] The following will be combined with the embodiments and drawings to clearly and completely describe the concept, specific structure and technical effects of the utility model, so as to fully understand the purpose, characteristics and effects of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the utility model. In addition, all the connection / connection relationships involved in the patent do not refer to the direct connection of components, but refer to the fact that according to the specific implementation situation, a better connection structure can be formed by adding or reducing connection accessories. For example, fixed connection / fixed installation can be selected according to the needs of screw connection, bolt connection, pin connection, key connection, bonding, mortise and tenon connection, welding, riveting and other methods. For example, detachable connection can be selected according to the needs of screw connection, bolt connection, threaded connection, snap connection, mortise and tenon connection, Velcro connection and other methods. The various technical features in the creation of the utility model can be combined interactively without conflicting with each other.

[0029] Reference Figure 1-Figure 6 An embodiment of the utility model provides a die bonding welding head device, which includes a base 1, a die bonding welding head 2, a transverse driving member 3, a longitudinal driving member 4 and a lifting driving member 5. The transverse driving member 3, the longitudinal driving member 4 and the lifting driving member 5 are respectively used to drive the die bonding welding head 2 to move along the X-axis, Y-axis and Z-axis directions, so as to accurately adjust the position of the die bonding welding head 2 to facilitate accurate chip absorption.

[0030] In some embodiments, reference Figure 3-6The transverse driving member 3 includes a first U-shaped linear motor, which includes a first magnet assembly 31 and a first mover 32, and the first magnet assembly 31 is fixed on the base 1. The longitudinal driving member 4 includes a second U-shaped linear motor, which includes a second magnet assembly 41 and a second mover 42, and the second magnet assembly 41 is connected to the first mover 32. The lifting driving member 5 includes a third U-shaped linear motor, which includes a third magnet assembly 51 and a third mover 52, and the solid crystal welding head 2 is connected to the second mover 42 and the third mover 52.

[0031] In the above embodiment, the third mover 52 drives the bonding welding head 2 to move along the Z-axis direction when it is in operation, that is, to realize the lifting and lowering of the bonding welding head 2. The second mover 42 drives the bonding welding head 2 to move along the Y-axis direction when it is in operation, thereby realizing the left and right movement of the bonding welding head 2. The first mover 32 drives the second magnet assembly 41 to move along the X-axis direction when it is in operation, thereby driving the second mover 42 and the bonding welding head 2 to move along the X-axis direction to realize the forward and backward movement of the bonding welding head 2. Therefore, the position of the bonding welding head 2 is adjusted by controlling the operation of the first, second and third U-shaped linear motors, so as to facilitate the bonding welding head 2 to accurately take and place chips.

[0032] In some embodiments, reference Figure 3 , Figure 4 or Figure 6 , a first linear guide 7 is provided on the base 1, a first fixed plate 8 is provided at the bottom of the magnet assembly, the first fixed plate 8 is slidably provided on the base 1 through the first linear guide 7, and the length direction of the first linear guide 7 is parallel to the displacement direction of the first U-shaped linear motor mover, that is, the first linear guide 7 guides the first fixed plate 8 to move along the X-axis direction. Further, the slide rail of the first linear guide 7 is fixedly installed on the base 1, and the slider of the first linear guide 7 is fixedly installed at the bottom of the first fixed plate 8. Furthermore, the first linear guide 7 has two groups, and the two groups of first linear guides 7 are provided on both sides of the first fixed plate 8. The first fixed plate 8 is supported by the two groups of first linear guides 7, so as to improve the stability of the first fixed plate 8 and the second U-shaped linear motor and the third U-shaped linear motor installed on the first fixed plate 8 during movement.

[0033] In the above embodiment, the side wall of the first fixed plate 8 is connected to the first mover 32 by a connecting plate to improve the installability of the connection between the two. When the first U-shaped linear motor is running, the first mover 32 slides along the X-axis direction, thereby driving the first fixed plate 8 to move along the X-axis direction, and then driving the second U-shaped linear motor, the third U-shaped linear motor and the fixed welding head to move along the X-axis direction.

[0034] In some embodiments, reference Figure 5 and Figure 6 A support plate 10 is fixedly connected to the side of the first fixed plate 8 away from the first U-shaped linear motor. The support plate 10 is perpendicular to the first fixed plate 8, and the support plate 10 and the first fixed plate 8 are integrally formed. An avoidance gap is provided on the base 1 to avoid the movement of the support plate 10.

[0035] Further, see Figure 3 , Figure 5 and Figure 6 A second linear guide 9 is provided on the support plate 10, the slide rail of the second linear guide 9 is fixedly installed on the support plate 10, and the slider of the second linear guide 9 is fixedly installed with a second fixed plate 12. In addition, the length direction of the second linear guide 9 is parallel to the displacement direction of the second mover 42, and the second fixed plate 12 is connected to the second mover 42, and the die-bonding welding head 2 is arranged on the second fixed plate 12.

[0036] In the above embodiment, when the second U-shaped linear motor is running, the second mover 42 moves along the Y-axis direction, driving the second fixed plate 12 to move along the Y-axis direction, wherein the second linear guide rail 9 plays a supporting and guiding role, thereby improving the stability of the second fixed plate 12 during movement, and the crystal bonding welding head 2 moves synchronously with the second fixed plate 12, thereby realizing the displacement adjustment of the crystal bonding welding head 2 in the Y-axis direction.

[0037] In some embodiments, reference Figure 5 , Figure 6 and Figure 7 The die-bonding welding head 2 is fixed on a mounting plate 11, and the mounting plate 11 is slidably set on the second fixed plate 12 through two groups of parallel third linear guides 13. The third linear guide 13 is vertically set along the Z-axis direction. Specifically, the slide rail of the third linear guide 13 is fixedly installed on the second fixed plate 12, the slider of the third linear guide 13 is fixedly connected to the mounting plate 11, and the third mover 52 is connected to the mounting plate 11. The third linear guide 13 supports and guides the mounting plate 11, thereby improving the stability of the mounting plate 11 when moving.

[0038] In the above embodiment, when the third U-shaped linear motor is running, the third mover 52 moves along the Z-axis direction, driving the mounting plate 11 to move along the Z-axis direction, thereby driving the die-bonding welding head 2 fixed on the mounting plate 11 to rise and fall along the Z-axis direction.

[0039] In a preferred embodiment, reference Figure 3 , Figure 8 and Fig. 9The third magnet assembly 51 is fixedly connected to the first fixed plate 8, and the U-shaped groove 53 of the third magnet assembly 51 is extended along the Y-axis direction. The third mover 52 can move along the Y-axis direction in the U-shaped groove 53, that is, when the third U-shaped linear motor is in the off state, the second U-shaped linear motor drives the solid crystal welding head 2 to move along the Y-axis direction. At this time, the third mover 52 can move along the Y-axis direction in the U-shaped groove 53 and keep synchronous movement with the solid crystal welding head 2, thereby avoiding interference between the movement of the second mover 42 and the third mover 52. At the same time, it is avoided that the second mover 42 needs to drive the third U-shaped linear motor to move as a whole, thereby improving the service life of the second mover 42.

[0040] In other embodiments, reference Figure 7 The second fixing plate 12 is provided with an elastic component 14, and the elastic component 14 is used to provide a buffer force acting on the third mover 52, so as to buffer the movement of the die-bonding welding head 2 along the Z-axis direction.

[0041] In other embodiments, reference Figure 1 and Figure 2 A counter-attacking component 6 is provided on the base 1 . The counter-attacking component 6 and the longitudinal driving member 4 are respectively arranged on opposite sides of the base 1 . The counter-attacking component 6 is used to buffer the movement of the longitudinal driving member 4 .

[0042] The above is a specific description of the preferred implementation of the utility model, but the invention of the utility model is not limited to the described embodiments. Technical personnel familiar with the field can also make various equivalent deformations or substitutions without violating the spirit of the utility model. These equivalent deformations or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A die bonding head device, characterized in that: It includes a base, a die-bonding welding head, a transverse driving member, a longitudinal driving member and a lifting driving member, wherein the transverse driving member, the longitudinal driving member and the lifting driving member are respectively used to drive the die-bonding welding head to move along the X-axis, Y-axis and Z-axis directions; the transverse driving member includes a first U-shaped linear motor, the magnet assembly of the first U-shaped linear motor is fixed on the base, the longitudinal driving member includes a second U-shaped linear motor, the magnet assembly of the second U-shaped linear motor is connected to the mover of the first U-shaped linear motor, the lifting driving member includes a third U-shaped linear motor, the die-bonding welding head is connected to the mover of the second U-shaped linear motor and the mover of the third U-shaped linear motor.

2. The die bonding head device according to claim 1, characterized in that: The magnet assembly of the second U-shaped linear motor is slidably disposed on the base via a first linear guide rail, and the length direction of the first linear guide rail is parallel to the displacement direction of the mover of the first U-shaped linear motor.

3. The die bonding head device according to claim 2, characterized in that: The first linear guide rail includes a first slide rail arranged on a base, and a slider slidably connected to the first slide rail, and the slider is connected to the magnet assembly of the second U-shaped linear motor.

4. The die bonding head device according to claim 3, characterized in that: The magnet assembly of the second U-shaped linear motor is mounted on a first fixed plate, the bottom of the first fixed plate is fixedly connected to the slider, and the side wall of the first fixed plate is connected to the mover of the first U-shaped linear motor via a connecting plate.

5. The die bonding head device according to claim 4, characterized in that: A support plate is fixedly connected to the side of the first fixed plate away from the first U-shaped linear motor, and the support plate is connected to the second fixed plate through a second linear guide rail. The length direction of the second linear guide rail is parallel to the displacement direction of the mover of the second U-shaped linear motor. The second fixed plate is slidably arranged on the support plate based on the second linear guide rail, and the second fixed plate is connected to the mover of the second U-shaped linear motor. The die-bonding welding head is arranged on the second fixed plate.

6. The die bonding head device according to claim 5, characterized in that: The die-bonding welding head is slidably arranged on the second fixed plate via a third linear guide rail, the third linear guide rail is vertically arranged along the Z-axis direction, and the mover of the third U-shaped linear motor is connected to the die-bonding welding head.

7. The die bonding head device according to claim 6, characterized in that: The die-bonding welding head is fixed on a mounting plate, the mounting plate is connected to the slider of the third linear guide rail, the slide rail of the third linear guide rail is connected to the second fixed plate, and the mover of the third U-shaped linear motor is connected to the mounting plate.

8. The die bonding head device according to claim 6, characterized in that: The second fixing plate is provided with an elastic component, and the elastic component is used to provide a buffer force acting on the mover of the third U-shaped linear motor.

9. The die bonding head device according to claim 6, characterized in that: The magnet assembly of the third U-shaped linear motor is fixedly connected to the first fixed plate, the U-shaped groove of the magnet assembly of the third U-shaped linear motor extends along the Y-axis direction, and the mover of the third U-shaped linear motor can move along the Y-axis direction in the U-shaped groove.

10. A die bonding head device according to any one of claims 1 to 9, characterized in that: The base is provided with a counter-attacking component, which is used for buffering the movement of the longitudinal driving member. The counter-attacking component and the longitudinal driving member are respectively arranged on opposite sides of the base.

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