Wafer boat bearing platform with angle adjusting structure

Abstract

The utility model relates to the technical field of wafer production auxiliary equipment, in particular to a wafer boat bearing platform with an angle adjusting structure, which comprises a plurality of wafer boat bodies with different sizes, a supporting seat and a bearing plate, and is characterized in that the bearing plate is rotatably mounted at the top end of a vertical section of the supporting seat through two groups of connecting assemblies; two symmetrically arranged limiting plates are arranged at the bottom end of the wafer boat body, two limiting openings are formed in the top end of the bearing plate, the width of the limiting openings is larger than that of the limiting plates, the distances between the two limiting plates at the bottom ends of the wafer boat bodies of different sizes are different, inserting and pulling holes are formed in the side walls of the limiting plates, and inserting and pulling holes are formed in the side walls of the inserting and pulling holes. A limiting structure used for fixing the wafer boat body is arranged at the bottom end of the bearing plate, and a transmission assembly is arranged between the supporting base and the bearing plate. The wafer taking and placing efficiency of the bearing table is improved, a structure for adjusting the inclination degree of the round boat is arranged, and the risks of collision and damage in the round wafer taking and placing process are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer production auxiliary equipment, in particular to a wafer boat bearing platform with an angle adjustment structure. Background Art

[0002] During the whole manufacturing process, wafers are placed in a wafer boat box, one wafer boat for a batch. During the test, the wafer boat is placed on the wafer boat carrier of the needle test machine. This step is manually operated. When the personnel place the wafer boat on the carrier.

[0003] During the semiconductor chip packaging and testing process, manual assistance with limiters is generally required to fix the wafer boat to the carrier, resulting in insufficient efficiency in taking and placing the wafer boat. In addition, the opening of the wafer boat on the carrier is generally vertically upward, and there are blind spots when personnel take and place wafers in the wafer boat, which makes it easy to place the wafer incorrectly or tilted, and may also cause scratches on adjacent wafers. Utility Model Content

[0004] In order to solve the above problems existing in the prior art, the utility model provides a wafer boat supporting platform with an angle adjustment structure.

[0005] The purpose of the utility model can be achieved through the following technical solutions:

[0006] A crystal boat bearing platform with an angle adjustment structure comprises a plurality of crystal boat bodies of different sizes, a support seat and a bearing plate, wherein the bearing plate is rotatably mounted on the top end of the vertical section of the support seat through two sets of connecting components, two symmetrically arranged limit plates are arranged at the bottom end of the crystal boat body, two limit openings are arranged at the top end of the bearing plate, the width of the limit openings is greater than the width of the limit plates, the two limit plates at the bottom end of the crystal boat bodies of different sizes have different spacings, the side walls of the limit plates are arranged with plug-in holes, the bottom end of the bearing plate is arranged with a limit structure for fixing the crystal boat body, and a transmission component for adjusting the inclination angle of the bearing plate is arranged between the support seat and the bearing plate.

[0007] Preferably, the connecting assembly includes a limit pin and a limit block, the limit pin is installed on the top of the vertical section of the support seat through a protrusion, the limit block is fixedly installed on the bottom end of the bearing plate, and the limit block and the limit pin are rotatably connected.

[0008] Preferably, the limiting structure includes two symmetrically arranged plug-in folding plates, the bottom end of the carrying plate is fixedly installed with two supporting shafts through a protrusion, the supporting shafts are located below the limiting plate, the plug-in folding plate is slidably installed between the two supporting shafts, the top end of the horizontal section of the plug-in folding plate is slidingly arranged in close contact with the bottom end of the carrying plate, the limiting plate is slidably connected to the plug-in folding plate through a plug-in hole, and a first hydraulic cylinder is provided at the bottom end of the carrying plate, the first hydraulic cylinder is a bidirectional hydraulic cylinder, and the two movable ends of the first hydraulic cylinder are respectively fixedly connected to the side walls of adjacent plug-in folding plates.

[0009] Preferably, the end of the horizontal section of the plug-in flap is provided with two oblique angles, and the side wall of the vertical section of the plug-in flap is provided with a rubber layer.

[0010] Preferably, the transmission assembly includes a slider, a transmission rod, a support rod and two connecting rods. Two limit rails are provided at the top of the horizontal section of the support seat. The slider is slidably installed between the two limit rails. A driving mechanism for driving the slider to slide is provided at the horizontal top of the support seat. The transmission rod is rotatably installed on the side wall of the slider through a protrusion. The support rod is fixedly installed on the bottom end of the supporting plate through a protrusion. The two ends of the connecting rod are rotatably connected to the transmission rod and the support rod through convex rings.

[0011] Preferably, the cross-section of the limit rail is T-shaped, a slide groove is provided at the bottom end of the slider, and the slider is slidably installed in the slide groove.

[0012] Preferably, the driving mechanism comprises a second hydraulic cylinder, the second hydraulic cylinder is fixedly mounted on the top end of the horizontal section of the support seat, and the movable end of the second hydraulic cylinder is connected to the side wall of the slider.

[0013] The beneficial effects of the utility model are:

[0014] 1. By setting a support seat and a carrying plate, the carrying plate can place the wafer boat bodies of different sizes through two limit openings. According to the size of the wafer boat, the first hydraulic cylinder drives the two plug-in folding plates to move away from each other and insert them into the adjacent plug-in holes of the limit plate respectively, so as to complete the automatic fixation of the wafer boat and improve the efficiency of the carrying platform in taking and placing the wafer boat.

[0015] 2. By setting up a transmission assembly, the second hydraulic cylinder drives the slider to slide between the two limit rails, and the transmission rod slides synchronously, cooperating with the support rod and two connecting rods to drive the carrier plate to rotate around the limit pin, adjusting the opening of the wafer boat toward the eyes of the personnel, and having an adjustment structure for the inclination of the wafer boat, reducing the risk of collision and damage during the wafer placement process. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings.

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 It is an exploded view of the connection assembly in the utility model;

[0019] Figure 3 This is a diagram of the installation structure of the limit plate in the utility model;

[0020] Figure 4 This is an installation structure diagram of the driving mechanism in the utility model;

[0021] Figure 5 This is an installation structure diagram of the limiting structure in the utility model.

[0022] Description of main component symbols:

[0023] In the figure: 1. crystal boat body; 2. support seat; 3. bearing plate; 4. connecting assembly; 401. limit pin; 402. limit block; 5. limit plate; 6. limit opening; 7. support shaft; 8. plug-in folding plate; 9. first hydraulic cylinder; 10. limit rail; 11. slide block; 12. second hydraulic cylinder; 13. transmission rod; 14. support rod; 15. connecting rod. DETAILED DESCRIPTION

[0024] In order to further explain the technical means and effects adopted by the utility model to achieve the predetermined utility model purpose, the specific implementation methods, structures, features and effects of the utility model are clearly and completely described below in combination with the accompanying drawings and preferred embodiments. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] In the description of the present application, it should be understood that the orientation or position relationship indicated by "inside" or "outside" etc. is based on the orientation or position described in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, a specific orientation structure and operation, and therefore cannot be understood as a limitation on the present application.

[0026] Reference Figure 1-Figure 3 and Figure 5, which is a wafer boat bearing platform with an angle adjustment structure disclosed in the utility model, comprising a plurality of wafer boat bodies 1 of different sizes, a support seat 2 and a bearing plate 3, the bearing plate 3 is rotatably mounted on the top of the vertical section of the support seat 2 through two sets of connecting components 4, the connecting component 4 comprises a limit pin 401 and a limit block 402, the limit pin 401 is mounted on the top of the vertical section of the support seat 2 through a protrusion, the limit block 402 is fixedly mounted on the bottom end of the bearing plate 3, the limit block 402 and the limit pin 401 are rotatably connected, It has a connecting function. Two symmetrically arranged limit plates 5 are arranged at the bottom end of the crystal boat body 1. Two limit openings 6 are arranged at the top end of the carrying plate 3. The width of the limit openings 6 is greater than the width of the limit plates 5. The two limit plates 5 at the bottom ends of crystal boat bodies 1 of different sizes have different spacings. All limit plates 5 have the same size. The side walls of the limit plates 5 are provided with plug-in holes. The carrying plate 3 can place crystal boat bodies 1 of different sizes through the two limit openings 6. The limit plates 5 of different spacings can all be inserted into the limit openings 6.

[0027] Reference Figure 1-Figure 3 and Figure 5 The bottom end of the carrying plate 3 is provided with a limiting structure for fixing the crystal boat body 1. The limiting structure includes two symmetrically arranged plug-in folding plates 8. Two support shafts 7 are fixedly installed at the bottom end of the carrying plate 3 through a protrusion. The support shaft 7 is located below the limiting plate 5 and has a supporting function. The plug-in folding plate 8 is slidably installed between the two support shafts 7. The top of the horizontal section of the plug-in folding plate 8 is fitted and slidably arranged with the bottom end of the carrying plate 3. The limiting plate 5 is slidably connected with the plug-in folding plate 8 through the plug-in hole, which has a limiting function. The end of the horizontal section of the plug-in folding plate 8 is provided with two bevels The vertical section side wall of the plug-in folding plate 8 is provided with a rubber layer, and a first hydraulic cylinder 9 is provided at the bottom end of the bearing plate 3. The first hydraulic cylinder 9 is a bidirectional hydraulic cylinder. The two movable ends of the first hydraulic cylinder 9 are respectively fixedly connected to the side walls of the adjacent plug-in folding plates 8, and have a driving function. The vertical section side wall of the support seat 2 is provided with a PLC controller. According to the size of the crystal boat, the PLC controller issues a command after receiving the model command of the crystal boat body 1. The first hydraulic cylinder 9 drives the two plug-in folding plates 8 to move away from each other and insert them into the plug-in holes of the adjacent limit plate 5 respectively, thereby completing the automatic fixation of the crystal boat.

[0028] Reference Figure 1 and Figure 4-Figure 5A transmission assembly for adjusting the inclination angle of the bearing plate 3 is arranged between the support seat 2 and the bearing plate 3. The transmission assembly includes a slider 11, a transmission rod 13, a support rod 14 and two connecting rods 15. Two limit rails 10 are arranged at the top of the horizontal section of the support seat 2. The slider 11 is slidably installed between the two limit rails 10. The cross section of the limit rail 10 is T-shaped. A slide groove is arranged at the bottom end of the slider 11. The slider 11 is slidably installed in the slide groove, which has a supporting effect. A driving mechanism for driving the slider 11 to slide is arranged at the horizontal top end of the support seat 2. The driving mechanism includes a second hydraulic cylinder 12. The second hydraulic cylinder 12 is driven by the second hydraulic cylinder 12. The cylinder 12 is fixedly installed on the top of the horizontal section of the support seat 2. The movable end of the second hydraulic cylinder 12 is connected to the side wall of the slider 11 and has a driving function. The transmission rod 13 is rotatably installed on the side wall of the slider 11 through the protrusion, and the support rod 14 is fixedly installed on the bottom end of the carrier plate 3 through the protrusion. The two ends of the connecting rod 15 are rotatably connected to the transmission rod 13 and the support rod 14 through the protrusion respectively. The second hydraulic cylinder 12 drives the slider 11 to slide between the two limit rails 10, and the transmission rod 13 slides synchronously, and cooperates with the support rod 14 and the two connecting rods 15 to drive the carrier plate 3 to rotate around the limit pin 401 to adjust the angle of the crystal boat.

[0029] The working principle and use process of the utility model are as follows: the carrying plate 3 is used to place the wafer boat bodies 1 of different sizes through the two limit openings 6, the first hydraulic cylinder 9 drives the two plug-in folding plates 8 to move away from each other and are respectively inserted into the plug-in holes of the adjacent limit plates 5 to complete the automatic fixation of the wafer boat, the second hydraulic cylinder 12 drives the slider 11 to slide between the two limit rails 10, the transmission rod 13 slides synchronously, and cooperates with the support rod 14 and the two connecting rods 15 to drive the carrying plate 3 to rotate around the limit pin 401, and adjust the opening of the wafer boat towards the eyes of the personnel, thereby reducing the risk of collision and damage during the wafer placement process.

[0030] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A wafer boat carrying platform with an angle adjustment structure, comprising a plurality of wafer boat bodies (1) of different sizes, a support seat (2) and a carrying plate (3), characterized in that: The bearing plate (3) is rotatably mounted on the top of the vertical section of the support seat (2) through two groups of connecting components (4); the bottom end of the crystal boat body (1) is provided with two symmetrically arranged limit plates (5); the top end of the bearing plate (3) is provided with two limit openings (6); the width of the limit openings (6) is greater than the width of the limit plates (5); the two limit plates (5) at the bottom end of the crystal boat body (1) of different sizes have different spacings; the side walls of the limit plates (5) are provided with plug-in holes; the bottom end of the bearing plate (3) is provided with a limit structure for fixing the crystal boat body (1); and a transmission component for adjusting the inclination angle of the bearing plate (3) is provided between the support seat (2) and the bearing plate (3).

2. The wafer boat carrying platform with an angle adjustment structure according to claim 1, characterized in that: The connection assembly (4) comprises a limit pin (401) and a limit block (402); the limit pin (401) is mounted on the top end of the vertical section of the support seat (2) via a protrusion; the limit block (402) is fixedly mounted on the bottom end of the bearing plate (3); and the limit block (402) and the limit pin (401) are rotatably connected.

3. The wafer boat carrying platform with an angle adjustment structure according to claim 1, characterized in that: The limiting structure comprises two symmetrically arranged plug-in folding plates (8), the bottom end of the carrying plate (3) is fixedly mounted with two support shafts (7) via a protrusion, the support shafts (7) are located below the limiting plate (5), the plug-in folding plate (8) is slidably mounted between the two support shafts (7), the top of the horizontal section of the plug-in folding plate (8) is slidably arranged in contact with the bottom end of the carrying plate (3), the limiting plate (5) is slidably connected to the plug-in folding plate (8) via a plug-in hole, and the bottom end of the carrying plate (3) is provided with a first hydraulic cylinder (9), the first hydraulic cylinder (9) is a bidirectional hydraulic cylinder, and the two movable ends of the first hydraulic cylinder (9) are respectively fixedly connected to the side walls of adjacent plug-in folding plates (8).

4. The wafer boat carrying platform with an angle adjustment structure according to claim 3, characterized in that: The end of the horizontal section of the plug-in folding plate (8) is provided with two oblique angles, and the side wall of the vertical section of the plug-in folding plate (8) is provided with a rubber layer.

5. The wafer boat carrying platform with an angle adjustment structure according to claim 1, characterized in that: The transmission assembly comprises a slider (11), a transmission rod (13), a support rod (14) and two connecting rods (15); two limit rails (10) are arranged at the top of the horizontal section of the support seat (2); the slider (11) is slidably mounted between the two limit rails (10); a driving mechanism for driving the slider (11) to slide is arranged at the top of the horizontal section of the support seat (2); the transmission rod (13) is rotatably mounted on the side wall of the slider (11) through a protrusion; the support rod (14) is fixedly mounted on the bottom end of the bearing plate (3) through a protrusion; and both ends of the connecting rod (15) are rotatably connected to the transmission rod (13) and the support rod (14) through protrusions.

6. The wafer boat carrying platform with an angle adjustment structure according to claim 5, characterized in that: The cross section of the limiting rail (10) is T-shaped, and a sliding groove is provided at the bottom end of the sliding block (11), and the sliding block (11) is slidably installed in the sliding groove.

7. The wafer boat carrying platform with an angle adjustment structure according to claim 5, characterized in that: The driving mechanism comprises a second hydraulic cylinder (12), the second hydraulic cylinder (12) being fixedly mounted on the top end of the horizontal section of the support seat (2), and the movable end of the second hydraulic cylinder (12) being connected to the side wall of the slide block (11).

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