Lifting pin clamp and heating base

Abstract

The utility model discloses a lifting pin clamp and a heating base, the lifting pin clamp comprises a body, the body comprises a mounting part and a clamping part which are connected, the mounting part is provided with a pin hole, the clamping part is provided with a plurality of clamping bodies, and the clamping bodies are arranged around the pin hole; the fastening pieces are arranged on the body, the fastening pieces comprise first fastening pieces, the first fastening pieces are arranged on the outer sides of the clamping bodies in a surrounding mode, and the first fastening pieces are used for limiting the external expansion calibers generated by the clamping bodies when the lifting pins are inserted into the pin holes. According to the utility model, the movement of the relative position of the lifting pin caused by the loosening of the clamping body in the wafer conveying process can be avoided, so that the problem of wafer sliding can be avoided, the stability of the process is ensured, and the influence on the running time of equipment due to the need of replacing the lifting pin clamp is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a lifting pin fixture and a heating base. Background Art

[0002] Existing thin film deposition equipment usually uses a heating pedestal to carry wafer products in the process chamber. There are multiple lifting pins on the edge of the heating pedestal, which are used to lift the wafer to be carried and transferred, and to lower the wafer to the heating pedestal to receive the process, and to lift the wafer from the heating pedestal again after the process is completed to transfer it out of the process chamber.

[0003] refer to Figure 1 . An existing lifting pin 12 is installed on a lifting pin support 16 by being clamped by a lifting pin clamp 11. When the lifting pin support 16 is driven, the lifting pin clamp 11 and the lifting pin 12 clamped therein are driven to move up and down relative to the heating base. The existing lifting pin clamp 11 generally adopts a split design. Among them, the lifting pin clamp 11 is provided with a clamping member and a fixing member 14. The clamping member includes a bottom support portion 15 and a plurality of elastic clamping sheets 13 arranged on the support portion 15. The clamping sheet 13 is used to elastically clamp the lifting pin 12 placed in the clamping member 13 from the circumferential side. A pin hole is provided on the support portion 15. The lifting pin 12 is inserted downward from the inlet formed by the top of each clamping sheet 13 and penetrates into the pin hole to form a fit. The fixing member 14 is a cap-shaped structure with an avoidance opening 141 on the top, and a plurality of elastic cards 142 are arranged around the side of the fixing member 14.

[0004] When installing the above-mentioned lifting pin clamp 11, it is necessary to place a certain number of gaskets between the support part 15 and the bottom surface of the installation slot 161 on the lifting pin support 16 according to the installation height of the lifting pin 12, and then insert the fixing part 14 downward from the trumpet-shaped guide port at the top of the clamping piece 13 through the avoidance opening 141 to press the support part 15 against the bottom surface of the slot 161, and fix it by inserting the elastic card 142 on the fixing part 14 into the card opening on the slot 161.

[0005] Every time regular maintenance is performed, the lifting pin 12 needs to be pulled out of the lifting pin fixture 11 for inspection. Repeated plugging and unplugging can easily cause the clamping piece 13 to loosen. After a period of use, this can easily cause the height of the lifting pin 12 to change relative to the lifting pin fixture 11 during the process, causing the problem of sheet slippage during the sheet transfer process, affecting the stability of the process. When the lifting pin fixture 11 needs to be replaced due to the looseness of the elastic clamping piece 13, the heating base needs to be disassembled and assembled, which consumes additional manpower and time; and after disassembling and assembling the heating base, the machine needs to be stopped to readjust the transfer robot, which affects the equipment operation time.

[0006] Furthermore, since a plurality of elastic cards 142 are used to clamp and fix the fixing member 14 and the card slot 161 on the lifting pin support 16, it is difficult to make each elastic card 142 simultaneously clamp into or disengage from the card slot 161 during installation or when the lifting pin fixture 11 is disassembled due to the need to adjust the thickness of the gasket, thereby increasing the difficulty of installation and disassembly.

[0007] In addition, since a certain amount of movable space needs to be reserved for the elastic card 142 to be inserted and removed, the gasket is also prone to deviation in the card slot 161 , thereby affecting the positioning accuracy of the lifting pin 12 . Utility Model Content

[0008] The purpose of the utility model is to overcome the above-mentioned defects in the prior art and provide a lifting pin fixture and a heating base.

[0009] To achieve the above purpose, the technical solution of the utility model is as follows:

[0010] The utility model provides a lifting pin fixture, comprising:

[0011] A body, the body comprising a mounting portion and a clamping portion connected to each other, the mounting portion being provided with a pin hole, the clamping portion being provided with a plurality of clamping bodies, each of the clamping bodies being arranged around the pin hole;

[0012] A fastener is arranged on the main body, and the fastener includes a first fastener, which is arranged around the outer side of each clamping body and is used to limit the outward expansion diameter of each clamping body when the lifting pin is inserted into the pin hole.

[0013] Furthermore, the first fastener includes a hoop, a buckle or an elastic clamp; wherein, the fixed inner diameter formed by the hoop or the buckle, or the tightening effect produced by the clamp, limits the outward expansion diameter of each clamping body when the lifting pin is inserted.

[0014] Furthermore, a positioning groove is provided on the outer side surface of each clamping body, and the first fastener is arranged around each clamping body and positioned in the positioning groove.

[0015] Furthermore, the fastener also includes a plurality of second fasteners, and a plurality of mounting holes are correspondingly provided on the mounting portion outside the clamping portion, and the second fasteners pass through the mounting holes to be fastened and mounted with the lifting pin support.

[0016] Furthermore, a recessed groove is provided on the lifting pin support, and the mounting portion is fastened and installed in the recessed groove. There is a raised space between the bottom surface of the recessed groove and the mounting portion, and the raised space is used to place a gasket. The second fastener is also used to limit the lateral position of the gasket in the raised space.

[0017] Furthermore, the pin hole is arranged through the mounting portion and is exposed from a first surface of the mounting portion facing the clamping portion and a second surface facing the lifting pin support. When the lifting pin is fitted in the pin hole, it contacts the surface of the gasket.

[0018] Furthermore, the second fastener comprises a screw, and a screw hole matching with the screw is provided on the bottom surface of the sink.

[0019] Furthermore, the clamping body comprises elastic clamping plates, each of which is extended on the same side opening of the pin hole to form a clamping channel, and each of which has an outwardly expanded guide end.

[0020] The utility model also provides a heating base using the lifting pin clamp.

[0021] Furthermore, a lifting pin support is provided on the bottom of the heating base, and a plurality of lifting pin clamps are fastened to the lifting pin support and distributed along the circumference of the heating base. Each of the lifting pin clamps clamps a corresponding lifting pin, and an end of the lifting pin extends out from the lifting pin clamp. When the lifting pin support is driven, it drives the lifting pin clamped by the lifting pin clamp to rise above the surface of the heating base, or descend to below the surface of the heating base.

[0022] It can be seen from the above technical scheme that the utility model sets a first fastener around the outer side of the clamping part of the lifting pin clamp, so that when the lifting pin is inserted into the pin hole, the first fastener can be used to restrict the outward expansion diameter of each clamping body of the clamping part, so that each clamping body can maintain effective clamping of the lifting pin, avoiding the movement of the relative position of the lifting pin due to the loosening of the clamping body during the film transmission process, thereby solving the problem of easy slippage in the previous film transmission process, ensuring the stability of the process, and avoiding the need to replace the lifting pin clamp to affect the operating time of the equipment. In addition, by using the second fastener to fasten and install the lifting pin clamp, the difficulty of loading and unloading when multiple elastic card structures are used for clamping and installation is reduced, and the stability is enhanced; at the same time, the second fastener can also limit the gasket, effectively preventing the gasket from running off. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 The figure is a schematic diagram of the installation structure of an existing lifting pin fixture.

[0024] Figure 2 The figure is a schematic structural diagram of a lifting pin fixture according to a preferred embodiment of the utility model.

[0025] Figure 3 The figure is a schematic structural diagram of a heating base according to a preferred embodiment of the utility model. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0027] For example Figure 1 The existing lifting pin fixture 11 shown, since it only relies on the elastic clamping piece 13 to clamp and fix the lifting pin 12 (LIFTPIN), after a period of use, the clamping piece 13 is easily loosened, causing the lifting pin 12 to change in height relative to the lifting pin fixture 11, resulting in the problem of slippage during the film transmission process, affecting the stability of the process. When the lifting pin fixture 11 needs to be replaced due to the looseness of the elastic clamping piece 13, it is necessary to disassemble the heating base, and it is also necessary to stop the machine to re-calibrate the transmission robot, thereby affecting the operation time of the equipment. In addition, since a plurality of elastic cards 142 are used to clamp and fix the fixing member 14 and the card slot 161 on the lifting pin support 16, when installing and disassembling the lifting pin fixture 11 due to the need to adjust the thickness of the gasket, it is difficult to make each elastic card 142 simultaneously clamp in or out of the card slot 161, thereby increasing the difficulty of installation and disassembly. In addition, since a certain amount of movable space needs to be reserved for the elastic card 142 to be inserted and removed, the gasket is also prone to deviation in the card slot 161 , thereby affecting the positioning accuracy of the lifting pin 12 .

[0028] In view of the above-mentioned deficiencies in the prior art, the utility model provides a lifting pin fixture and a heating base, aiming to overcome at least one of the above-mentioned defects in the prior art.

[0029] The utility model discloses a lifting pin fixture, comprising:

[0030] A body, the body comprising a mounting portion and a clamping portion connected to each other, the mounting portion being provided with a pin hole, the clamping portion being provided with a plurality of clamping bodies, each of the clamping bodies being arranged around the pin hole;

[0031] A fastener is arranged on the main body, and the fastener includes a first fastener, which is arranged around the outer side of each clamping body and is used to limit the outward expansion diameter of each clamping body when the lifting pin is inserted into the pin hole.

[0032] The utility model provides a heating base, which uses the lifting pin fixture.

[0033] The utility model arranges a first fastener around the outer side of the clamping part of the lifting pin clamp, so that when the lifting pin is inserted into the pin hole, the first fastener can limit the outward expansion diameter produced by each clamping body of the clamping part, so that each clamping body can maintain effective clamping on the lifting pin, avoiding the movement of the relative position of the lifting pin due to loosening of the clamping body during the film transmission process, thereby solving the problem of sheet slippage that is easy to occur during the film transmission process in the past, ensuring the stability of the process, and avoiding the need to replace the lifting pin clamp to affect the operating time of the equipment.

[0034] The specific implementation of the utility model is further described in detail below in conjunction with the accompanying drawings.

[0035] refer to Figure 2 The utility model provides a lifting pin fixture 21, which comprises a body 24 and a fastener 23 arranged on the body 24.

[0036] The body 24 includes a mounting portion 26 and a clamping portion 25 connected as one body. The mounting portion 26 is provided with a pin hole 261, and the pin hole 261 is used to cooperate with the inserted lifting pin 22. The clamping portion 25 is provided with a plurality of clamping bodies 251; the lower end of each clamping body 251 is arranged around the pin hole 261 and is located on the first surface ( Figure 2 The upper end of each clamping body 251 is a free end for inserting the lifting pin 22.

[0037] The fastener 23 includes a first fastener 231. The first fastener 231 surrounds the outer side of the clamping portion 25, that is, the first fastener 231 surrounds the outer side of each clamping body 251. The first fastener 231 is used to limit the outer expansion diameter of each clamping body 251 caused by the extrusion of the lifting pin 22 when the lifting pin 22 is inserted into the pin hole 261, so that each clamping body 251 can maintain the effective clamping of the lifting pin 22 under the action of the first fastener 231, and prevent the lifting pin 22 from freely moving up and down in the lifting pin fixture 21. At the same time, it does not prevent the lifting pin 22 from being pulled out of the lifting pin fixture 21 or inserted again under the action of a certain force.

[0038] In some embodiments, the first fastener 231 includes a clamp, a buckle or an elastic clamp. Alternatively, the first fastener 231 can be any other annular fixing member that can limit the outer expansion diameter of each clamping body 251 when the lifting pin 22 is inserted.

[0039] In some embodiments, the first fastener 231 is a clamp. The clamp includes two semicircular ring clamps relatively enclosed on the outside of the clamping portion 25, and the corresponding ends of the two semicircular ring clamps are connected by fastening bolts. The size of the clamping inner diameter between the two semicircular ring clamps is adjusted by adjusting the tightness of the fastening bolts to form a fixed inner diameter, thereby limiting the external expansion diameter of each clamping body 251 when the lifting pin 22 is inserted. Under the fixed inner diameter of this clamp, the lifting pin 22 will not move freely up and down in the lifting pin fixture 21, and can be pulled out of the lifting pin fixture 21 under the action of a certain force, or when it is inserted again, it can still be effectively clamped by each clamping body 251 under the action of the fixed inner diameter of the clamp. Among them, the appropriate fixed inner diameter of the clamp can be determined by experiment.

[0040] In some embodiments, the first fastener 231 is a buckle. The inner diameter of the buckle can be adjusted through a plurality of gears sequentially arranged on the buckle to form a fixed inner diameter, thereby limiting the outer expansion diameter of each clamping body 251 when the lifting pin 22 is inserted, and effectively preventing each clamping body 251 from loosening after the lifting pin 22 is inserted and pulled out multiple times.

[0041] In some embodiments, the first fastener 231 is an elastic clamp. When the elastic clamp is put on the side of each clamping body 251, the clamping body 251 can be tightened by using the elastic force of the clamp, so that each clamping body 251 can effectively clamp the lifting pin 22 and prevent each clamping body 251 from loosening after the lifting pin 22 is inserted and pulled out multiple times.

[0042] In some embodiments, a positioning groove is provided on the outer surface of each clamping body 251. When the first fastener 231 (such as a hoop, a clamp or a buckle) is arranged around each clamping body 251, the first fastener 231 can be positioned in the positioning groove to prevent the first fastener 231 from sliding on the outer side of the clamping portion 25 (each clamping body 251) when the lifting pin 22 is inserted or removed, thereby preventing the first fastener 231 from failing to restrain each clamping body 251.

[0043] Preferably, the positioning groove is arranged at a position above half of the axial length of the clamping portion 25, that is, close to the upper end of each clamping body 251, so as to facilitate the first fastener 231 positioned in the positioning groove to adjust the size of the outward expansion diameter formed by each clamping body 251, so that it is more labor-saving when using the first fastener 231 to adjust the size of the outward expansion diameter formed by each clamping body 251.

[0044] refer to Figure 2 . In some embodiments, the fastener 23 further includes a plurality of second fasteners 232. Among them, a plurality of mounting holes are correspondingly provided on the mounting portion 26 outside the clamping portion 25, and the second fasteners 232 pass through the mounting holes to be fastened and installed with the lifting pin support 30. Therefore, by providing a new lifting pin fixture 21 with an integrated body 24, when disassembling and assembling the lifting pin fixture 21, only the second fasteners 232 need to be disassembled and assembled, so that the lifting pin fixture 21 can be stably installed on the lifting pin support 30, and the lifting pin fixture 21 can be conveniently removed from the lifting pin support 30. Compared with the existing design that uses an elastic card and a card slot for clamping, this design is easier to disassemble and assemble, and has better stability.

[0045] In some embodiments, a recessed groove 31 is provided on the lifting pin support 30. When the lifting pin fixture 21 is installed, the mounting portion 26 of the body 24 is engaged with the recessed groove 31 to securely install the lifting pin fixture 21.

[0046] In some embodiments, the second fastener 232 includes a screw, and a screw hole matching the screw is provided on the bottom surface of the sink 31. Each screw is inserted into the corresponding mounting hole from the upper side of the mounting portion 26 of the body 24, and is screwed into the screw hole on the bottom surface of the sink 31 through the lower end to form a threaded fastening installation.

[0047] Furthermore, a cap portion 2321 is provided on the upper end of the screw, and the cap portion 2321 can be rotated to screw the screw into or out of the screw hole, so as to install or remove the lifting pin fixture 21.

[0048] refer to Figure 2 In some embodiments, a space is provided between the bottom surface of the sink 31 and the bottom surface of the mounting portion 26. The space is used to place a gasket 28 to adjust the positioning height of the lifting pin 22 clamped on the lifting pin fixture 21, and to adjust the lifting pins 22 clamped on the plurality of lifting pin fixtures 21 installed on the lifting pin support 30 to maintain a consistent positioning height.

[0049] The stacking number (number of layers) of the gasket 28 when placed in the raised space is set according to the setting requirements of the height of the lifting pin 22. By adjusting the matching height between the screw as the second fastener 232 and the screw hole on the bottom surface of the sink 31, the height of the raised space is adjusted to be adapted to the height of the gasket 28 to be placed, and the gasket 28 is pressed against the bottom surface of the sink 31 by the mounting portion 26 in the installed state.

[0050] In some embodiments, the second fasteners 232 are also used to limit the lateral position of the gasket 28 in the raised space. Thus, the side walls of the second fasteners 232 form a blocking effect on the edge of the gasket 28, which can prevent the gasket 28 from lateral deviation in the raised space, avoid affecting the height positioning of the lifting pin 22, and ensure the height positioning accuracy of the lifting pin 22.

[0051] refer to Figure 2 In some embodiments, the pin hole 261 is provided through the mounting portion 26 and exposed from the first surface of the mounting portion 26 facing the clamping portion 25 and the second surface facing the lift pin support 30. When the lift pin 22 is fitted in the pin hole 261, it contacts the upper surface of the gasket 28 in the raised space below. When the lift pin 22 is inserted into the pin hole 261 and positioned, the upper end of the lift pin 22 is exposed from the top of the lift pin fixture 21 by a predetermined height, and the upper ends of the lift pins 22 positioned in each lift pin fixture 21 on the lift pin support 30 are on the same horizontal plane.

[0052] In some embodiments, the clamping body 251 includes an elastic clamping piece. Each clamping piece extends upward from the upper end opening of the pin hole 261 and is arranged on the mounting portion 26 to form a clamping channel. The mounting portion 26 and the clamping portion 25 form the body 24 of the lifting pin fixture 21 in an inverted "T" shape. The lifting pin 22 enters the pin hole 261 downward from the upper end of each clamping piece through the clamping channel and is supported by the gasket 28. At the same time, each clamping piece forms an elastic clamp on the side of the lifting pin 22, and under the action of the first fastener 231, the caliber of each clamping piece is limited when it is squeezed outward by the lifting pin 22, thereby ensuring the effectiveness of the clamping effect of each clamping piece on the lifting pin 22, and avoiding the problem of the clamping piece loosening in a free state after multiple plugging and unplugging.

[0053] In some embodiments, there are four clamping plates, each of which has an arc-shaped side wall, so that a circular clamping channel is formed by the four clamping plates. The lifting pin 22 is correspondingly cylindrical.

[0054] In some embodiments, the lift pin fixture 21 is installed by using the second fastener 232, so that the shape of the mounting portion 26 is not limited. For example, the mounting portion 26 includes a truncated cone shape or a polygonal cone shape, or other shapes, and the shape of the recessed groove 31 on the lift pin support 30 does not need to be consistent with the shape of the mounting portion 26, but only needs to be able to accommodate the mounting portion 26, thereby simplifying the design requirements of the lift pin fixture 21.

[0055] In some embodiments, the upper free end of each clamping piece has an outwardly expanded guide end 252 , that is, the upper end of each clamping piece is surrounded by an outwardly inclined trumpet shape to facilitate the insertion of the lifting pin 22 .

[0056] The following is a further detailed description of a heating base of the present invention through specific implementation modes and in combination with the accompanying drawings.

[0057] A heating base of the utility model uses the lifting pin fixture 21 of the utility model.

[0058] refer to Figure 3 and Figure 2 In some embodiments, the heating base 40 is disposed in the process chamber. A lifting pin support 30 is disposed on the bottom of the heating base 40, and a plurality of lifting pin fixtures 21 are fastened and installed on the lifting pin support 30. For example, three lifting pin fixtures 21 are disposed on the lifting pin support 30, but the invention is not limited thereto.

[0059] Furthermore, each lifting pin fixture 21 is evenly distributed along the circumference of the heating base 40. An escape groove (or a through hole) for the lifting pin 22 (lifting pin fixture 21) to pass through is provided on the edge of the heating base 40, and the position of each lifting pin fixture 21 on the lifting pin support 30 corresponds to the position of the escape groove on the heating base 40. Each lifting pin fixture 21 clamps a lifting pin 22, and the end of the lifting pin 22 extends from the upper end of the lifting pin fixture 21. The lifting pin fixture 21 clamping the lifting pin 22 can be moved up and down in the escape groove at the corresponding position under the drive of the lifting pin support 30.

[0060] The lifting pin support 30 and the heating base 40 form an upward and downward movable fit. The lifting pin support 30 is connected to a lifting mechanism, such as a lifting motor. When the lifting pin support 30 is driven by the lifting motor, the lifting pin 22 clamped by the lifting pin fixture 21 is lifted to above the surface of the heating base 40. Figure 3 As shown, the wafer transferred to the heating base 40 is carried by each lifting pin 22, or driven by the lifting pin support 30, and is lowered to the surface of the heating base 40, and the wafer is placed on the surface of the heating base 40 to receive the process, and driven by the lifting pin support 30, the wafer after the process is completed is lifted up from the heating base 40 again to be transferred out of the process chamber.

[0061] In some embodiments, the process chamber includes a thin film deposition chamber for performing a thin film deposition process on a wafer carried on the heating pedestal 40 .

[0062] In summary, the utility model arranges the first fastener 231 around the outer side of the clamping body 251 of the lifting pin clamp 21, so that when the lifting pin 22 is inserted into the pin hole 261, the outward expansion diameter of each clamping body 251 is limited through the restraining effect of the first fastener 231, so that each clamping body 251 can maintain the effective clamping of the lifting pin 22, and avoid the relative position movement of the lifting pin 22 caused by the loosening of the clamping body 251 during the film transmission process, thereby solving the problem of slippage that is easy to occur during the previous film transmission process, ensuring the stability of the process, and thus eliminating the need to replace the lifting pin clamp 21 due to the loosening of the clamping body 251, thereby avoiding affecting the operating time of the equipment. In addition, by using the second fastener 232 to fasten and install the lifting pin clamp 21, the difficulty of loading and unloading when multiple elastic card structures are used for clamping and installation is reduced, and the stability is enhanced; at the same time, the second fastener 232 can also limit the gasket 28, effectively preventing the gasket 28 from deviating.

[0063] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A lifting pin fixture, characterized in that: include: A body, the body comprising a mounting portion and a clamping portion connected to each other, the mounting portion being provided with a pin hole, the clamping portion being provided with a plurality of clamping bodies, each of the clamping bodies being arranged around the pin hole; A fastener is arranged on the main body, and the fastener includes a first fastener, which is arranged around the outer side of each clamping body and is used to limit the outward expansion diameter of each clamping body when the lifting pin is inserted into the pin hole.

2. The lifting pin fixture according to claim 1, characterized in that: The first fastener includes a hoop, a buckle or an elastic clamp; wherein, the fixed inner diameter formed by the hoop or the buckle, or the tightening effect produced by the clamp, limits the outward expansion diameter of each clamping body when the lifting pin is inserted.

3. The lifting pin fixture according to claim 1, characterized in that: A positioning groove is provided on the outer side surface of each clamping body, and the first fastener is arranged around each clamping body and positioned in the positioning groove.

4. The lifting pin fixture according to claim 1, characterized in that: The fastener also includes a plurality of second fasteners. The mounting portion outside the clamping portion is correspondingly provided with a plurality of mounting holes. The second fasteners pass through the mounting holes to be fastened and mounted with the lifting pin support.

5. The lifting pin fixture according to claim 4, characterized in that: The lifting pin support is provided with a recessed groove, and the mounting portion is fastened and installed in the recessed groove. There is a raised space between the bottom surface of the recessed groove and the mounting portion, and the raised space is used to place a gasket. The second fastener is also used to limit the lateral position of the gasket in the raised space.

6. The lifting pin fixture according to claim 5, characterized in that: The pin hole is set through the mounting portion and exposed from a first surface of the mounting portion facing the clamping portion and a second surface facing the lifting pin support. When the lifting pin is fitted in the pin hole, it contacts the surface of the gasket.

7. The lifting pin fixture according to claim 5, characterized in that: The second fastener comprises a screw, and a screw hole matching with the screw is provided on the bottom surface of the sink.

8. The lifting pin fixture according to claim 1, characterized in that: The clamping body comprises elastic clamping pieces, each of which is extended on the same side opening of the pin hole to form a clamping channel, and each of which has an outwardly expanded guide end.

9. A heating base, characterized in that: Use the lift pin fixture according to any one of claims 1-8.

10. The heating base according to claim 9, characterized in that A lifting pin support is provided on the bottom of the heating base, and a plurality of lifting pin clamps are fastened to the lifting pin support and distributed along the circumference of the heating base. Each of the lifting pin clamps clamps a corresponding lifting pin, and the end of the lifting pin extends out from the lifting pin clamp. When the lifting pin support is driven, it drives the lifting pin clamped by the lifting pin clamp to rise above the surface of the heating base, or descend to below the surface of the heating base.

Images