Semiconductor ammonia nitrogen and organic wastewater recycling system

Abstract

The utility model relates to the technical field of semiconductor wastewater recycling, in particular to a semiconductor ammonia nitrogen and organic wastewater recycling system which comprises an ammonia nitrogen wastewater adjusting tank and an organic wastewater adjusting tank, and recycling mechanisms are arranged on the right sides of the ammonia nitrogen wastewater adjusting tank and the organic wastewater adjusting tank; the recycling mechanism comprises a first lifting pump which is fixedly connected to the right side of the inner wall of the ammonia nitrogen wastewater adjusting tank and the right side of the inner wall of the organic wastewater adjusting tank. The problems that an existing wastewater treatment system can respectively collect and treat acid wastewater, alkaline wastewater, fluorine-containing wastewater, arsenic-containing wastewater and organic wastewater, but H2O2 is mixed in ammonia-nitrogen wastewater generated in the etching and cleaning processes, and most treatment systems do not consider H2O2 contained in the ammonia-nitrogen wastewater; the ammonia-nitrogen wastewater and the organic wastewater are not refined or are not deeply treated, so that the wastewater resources are recycled, and the treatment effect is relatively poor.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor wastewater recovery, in particular to a semiconductor ammonia nitrogen and organic wastewater recovery system. Background Art

[0002] With the rapid development of the semiconductor industry, the large amount of wastewater and waste generated in the semiconductor production process has attracted more and more attention from society and enterprises. The wastewater mainly comes from the cleaning, photolithography degumming, etching, stripping and other processes in the production process. The wastewater generated is of many types and large amounts, such as acid and alkali, arsenic-containing, fluorine-containing, organic wastewater, etc. At present, there are wastewater treatment systems that can classify and treat different types of wastewater.

[0003] At present, the wastewater treatment system can collect and treat acidic wastewater, alkaline wastewater, fluorine-containing wastewater, arsenic-containing wastewater and organic wastewater separately. However, the ammonia nitrogen wastewater generated during the etching and cleaning process will be mixed with H2O2. Most treatment systems do not take into account the H2O2 contained in the ammonia nitrogen wastewater, and fail to refine the treatment of ammonia nitrogen wastewater and organic wastewater or fail to deeply treat them, and reuse wastewater resources, resulting in poor treatment effect.

[0004] Therefore, a semiconductor ammonia nitrogen and organic wastewater recycling system is needed to solve the problems raised in the above background technology. Utility Model Content

[0005] The purpose of the utility model is to provide a semiconductor ammonia nitrogen and organic wastewater recycling system to solve the problems raised in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A semiconductor ammonia nitrogen and organic wastewater recycling system, comprising an ammonia nitrogen wastewater regulating tank and an organic wastewater regulating tank, wherein a recycling mechanism is arranged on the right side of the ammonia nitrogen wastewater regulating tank and the organic wastewater regulating tank;

[0008] The reuse mechanism includes a first lifting pump fixedly connected to the right side of the inner wall of the ammonia nitrogen wastewater regulating tank and the organic wastewater regulating tank, a first lifting pipe is fixedly connected to the water outlet of the first lifting pump, and the right side of the ammonia nitrogen wastewater regulating tank is provided with an ammonia nitrogen wastewater pH regulating tank, an ammonia nitrogen wastewater reaction tank and an ammonia nitrogen wastewater intermediate tank from left to right in sequence, and the right side of the organic wastewater regulating tank is provided with a wastewater pH regulating total tank, a hydrolysis acidification tank, an anoxic aerobic tank and an MBR tank in sequence from left to right, a second lifting pump is installed on the front side of the inner wall of the ammonia nitrogen wastewater intermediate tank, and a second lifting pipe is fixedly connected to the water outlet of the second lifting pump, and the ammonia nitrogen wastewater pH regulating tank, the ammonia nitrogen wastewater reaction tank, the ammonia nitrogen wastewater The wastewater intermediate tank, the wastewater pH adjustment total tank, the hydrolysis acidification tank, the anoxic aerobic tank, and the MBR tank are all connected through a connecting port. A water production pump is arranged outside the MBR tank, and a water production pipe is fixedly connected to the water outlet of the water production pump. An intermediate equalizing tank is arranged at the end of the water production pipe away from the water production pump. A third boosting pump, a quartz sand filter, an activated carbon filter, and a security filter are arranged on the right side of the intermediate equalizing tank from left to right. The security filter is connected to the RO equipment through a booster pump. A return water tank is arranged on the right side of the RO equipment. The quartz sand filter, the activated carbon filter, the security filter, the RO equipment, and the return water tank are all connected through a delivery pipe.

[0009] As a preferred solution of the utility model, aeration pipes are provided in both the ammonia nitrogen wastewater regulating tank and the organic wastewater regulating tank.

[0010] As a preferred solution of the utility model, a stirrer, a pH meter and a dosing pipe are arranged in the ammonia nitrogen wastewater pH adjustment tank, and a H2O2 meter, a stirrer and a H2O2 catalyst dosing pipe are arranged in the ammonia nitrogen wastewater reaction tank.

[0011] As a preferred solution of the utility model, a stirrer, a pH meter, and sulfuric acid and sodium hydroxide dosing pipes are provided in the wastewater pH adjustment total tank, a submersible stirrer and fillers are installed in the hydrolysis acidification tank, and the connection modes of the first riser pipe and the ammonia nitrogen wastewater pH adjustment tank, the first riser pipe and the wastewater pH adjustment total tank, and the second riser pipe and the wastewater pH adjustment total tank are all fixed connections.

[0012] As a preferred solution of the utility model, the anoxic aerobic tank is divided into an aerobic area and an anoxic area, and the two areas are separated by a partition and connected by a connecting port. The anoxic area of ​​the anoxic aerobic tank is provided with a carbon source and a nutrient salt dosing pipe, and a hanging filler, and the aerobic area is laid with an aeration disk and a combined filler, and a nitrification liquid reflux pump is provided.

[0013] As a preferred solution of the utility model, a non-oxidizing bactericide is added before the quartz sand filter, and a scale inhibitor is added before the security filter. The filtration rate of the quartz sand filter is 12m / h, the filtration rate of the activated carbon filter is 10m / h, and the pore size of the security filter is 1μm.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. In the utility model, a semiconductor ammonia nitrogen and organic wastewater recycling system is designed, and the recycling mechanism in the device is used to recycle wastewater. The ammonia nitrogen wastewater enters the ammonia nitrogen wastewater regulating tank to balance the water quality and water quantity. The first lifting pump on the outer wall of the ammonia nitrogen wastewater regulating tank lifts the ammonia nitrogen wastewater to the ammonia nitrogen wastewater pH regulating tank through the first lifting pipe, and sulfuric acid and sodium hydroxide are added to the ammonia nitrogen wastewater pH regulating tank. After the pH value of the ammonia nitrogen wastewater is adjusted to neutral, the ammonia nitrogen wastewater flows into the ammonia nitrogen wastewater reaction tank through the connecting port, and the ammonia nitrogen wastewater is H2O2 catalyst is added to the reaction tank to catalytically decompose the H2O2 in the ammonia nitrogen wastewater. The wastewater after the reaction flows into the ammonia nitrogen wastewater intermediate tank through the flow port for stabilization. The organic wastewater enters the organic wastewater regulating tank to balance the water quality and quantity. The first lifting pump on the outer wall of the organic wastewater regulating tank lifts the organic wastewater to the wastewater pH regulating tank through the first lifting pipe. At the same time, the second lifting pump sends the ammonia nitrogen wastewater in the ammonia nitrogen wastewater intermediate tank into the wastewater pH regulating tank through the second lifting pipe, and adjusts the wastewater in the wastewater pH regulating tank to neutral. The saved wastewater flows into the hydrolysis and acidification tank by gravity, and the hydrolytic bacteria and acidifying bacteria are used to decompose the macromolecular organic matter in the wastewater into small molecules and remove part of the COD in the water. The wastewater after the reaction enters the anoxic aerobic tank to remove the organic matter and ammonia nitrogen in the water. The wastewater in the anoxic aerobic tank is treated and enters the MBR tank to separate the mud and water. The water production pump extracts the water from the MBR tank and pumps it into the intermediate tank to balance the water volume and quality. The balanced water is filtered through the quartz sand filter, activated carbon filter and security filter in turn to remove suspended matter and colloids. The booster pump sends the wastewater to the RO equipment for separation and purification. The purified water is stored in the return water tank, which solves the problem that the current wastewater treatment system can collect and treat acidic wastewater, alkaline wastewater, fluoride-containing wastewater, arsenic-containing wastewater and organic wastewater separately, but the ammonia nitrogen wastewater generated during etching and cleaning will be mixed with H2O2. Most treatment systems do not take into account the H2O2 contained in the ammonia nitrogen wastewater, and fail to refine the treatment of ammonia nitrogen wastewater and organic wastewater or do not deeply treat it, so the wastewater resources are reused and the treatment effect is poor. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0017] Figure 2 This is a three-dimensional structural diagram of the pH regulating tank for ammonia nitrogen wastewater of the utility model;

[0018] Figure 3 This is a schematic diagram of the three-dimensional structure of the wastewater pH adjustment tank of the utility model;

[0019] Figure 4 It is a three-dimensional structural schematic diagram of the quartz sand filter of the utility model.

[0020] In the figure: 1. Ammonia nitrogen wastewater regulating tank; 2. Organic wastewater regulating tank; 3. Recycling mechanism; 301. First lifting pump; 302. First lifting pipe; 303. Ammonia nitrogen wastewater pH regulating tank; 304. Ammonia nitrogen wastewater reaction tank; 305. Ammonia nitrogen wastewater intermediate tank; 306. Wastewater pH regulating tank; 307. Hydrolysis acidification tank; 308. Anoxic aerobic tank; 309. MBR tank; 310. Second lifting pump; 311. Second lifting pipe; 312. Water production pump; 313. Water production pipe; 314. Intermediate equalization tank; 315. Third lifting pump; 316. Quartz sand filter; 317. Activated carbon filter; 318. Security filter; 319. Booster pump; 320. RO equipment; 321. Return water tank; 322. Delivery pipe. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0022] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0023] It should be noted that when an element is referred to as being "fixed on" another element, it may be directly on the other element or there may also be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may also be a central element. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this article are for illustrative purposes only.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used in this article includes any and all combinations of one or more related listed items.

[0025] For examples, see Figure 1-4 , the utility model provides a technical solution:

[0026] A semiconductor ammonia nitrogen and organic wastewater recycling system, comprising an ammonia nitrogen wastewater regulating tank 1 and an organic wastewater regulating tank 2, wherein a recycling mechanism 3 is arranged on the right side of the ammonia nitrogen wastewater regulating tank 1 and the organic wastewater regulating tank 2;

[0027] Aeration pipes are provided in both the ammonia nitrogen wastewater regulating tank 1 and the organic wastewater regulating tank 2;

[0028] In this embodiment, reference Figure 2 , Figure 3 as well as Figure 4 The reuse mechanism 3 includes a first lift pump 301 fixedly connected to the right side of the inner wall of the ammonia nitrogen wastewater regulating tank 1 and the organic wastewater regulating tank 2, and a first lift pipe 302 is fixedly connected to the water outlet of the first lift pump 301. The right side of the ammonia nitrogen wastewater regulating tank 1 is provided with an ammonia nitrogen wastewater pH regulating tank 303, an ammonia nitrogen wastewater reaction tank 304 and an ammonia nitrogen wastewater intermediate tank 305 from left to right. The right side of the organic wastewater regulating tank 2 is provided with a wastewater pH regulating total tank 306, a hydrolysis acidification tank 307, an anoxic aerobic tank 308 and an MBR tank 309 from left to right. A second lift pump 310 is installed on the front of the inner wall of the ammonia nitrogen wastewater intermediate tank 305, and a second lift pipe 311 is fixedly connected to the water outlet of the second lift pump 310. The ammonia nitrogen wastewater pH regulating tank 303, the ammonia nitrogen wastewater reaction tank 304, the ammonia nitrogen wastewater intermediate tank 305 and the wastewater pH regulating tank The main section pool 306, the hydrolysis acidification pool 307, the anoxic aerobic pool 308, and the MBR pool 309 are all connected through the flow port. A water production pump 312 is arranged on the outer wall of the MBR pool 309. A water production pipe 313 is fixedly connected to the water outlet of the water production pump 312. An intermediate equalization pool 314 is arranged at one end of the water production pipe 313 away from the water production pump 312. A third booster pump 315, a quartz sand filter 316, an activated carbon filter 317, and a security filter 318 are arranged on the right side of the intermediate equalization pool 314 from left to right. The security filter 318 is connected to the RO device 320 through a booster pump 319. A return water pool 321 is arranged on the right side of the RO device 320. The quartz sand filter 316, the activated carbon filter 317, the security filter 318, the RO device 320, and the return water pool 321 are all connected through a delivery pipe 322.

[0029] The ammonia nitrogen wastewater pH adjustment tank 303 is provided with a stirrer, a pH meter and a dosing pipe, the ammonia nitrogen wastewater reaction tank 304 is provided with an H2O2 meter, a stirrer and an H2O2 catalyst dosing pipe, the wastewater pH adjustment tank 306 is provided with a stirrer, a pH meter and sulfuric acid and sodium hydroxide dosing pipes, the hydrolysis acidification tank 307 is equipped with a submersible stirrer and a biochemical filler, the first riser 302 and the ammonia nitrogen wastewater pH adjustment tank 303, the first riser 302 and the wastewater pH adjustment tank 306, and the second riser 311 and the wastewater pH adjustment tank 306 are all connected in a fixed manner, the anoxic aerobic tank 308 is divided into an aerobic area and an anoxic area, and the two areas are separated by a partition and connected by a connecting port, and the anoxic aerobic tank 308 is divided into an aerobic area and an anoxic area, and the two areas are separated by a partition and connected by a connecting port. In the anoxic area of ​​08, a carbon source and nutrient salt dosing pipelines are set and fillers are suspended. In the aerobic area, aeration plates and combined fillers are laid, and a nitrification liquid reflux pump is set. A non-oxidizing bactericide is added before the quartz sand filter 316, and a scale inhibitor is added before the security filter 318. The filtration rate of the quartz sand filter 316 is 12m / h, the filtration rate of the activated carbon filter 317 is 10m / h, and the pore size of the security filter 318 is 1μm. The ammonia nitrogen wastewater enters the ammonia nitrogen wastewater regulating tank 1 to balance the water quality and water quantity. The first lifting pump 301 on the outer wall of the ammonia nitrogen wastewater regulating tank 1 lifts the ammonia nitrogen wastewater to the ammonia nitrogen wastewater pH regulating tank 303 through the first lifting pipe 302, and sulfuric acid and sodium hydroxide are added to the ammonia nitrogen wastewater pH regulating tank 303 to balance the ammonia nitrogen wastewater. After the pH value of the water is adjusted to neutral, the ammonia nitrogen wastewater flows into the ammonia nitrogen wastewater reaction tank 304 along the connecting port, and H2O2 catalyst is added to the ammonia nitrogen wastewater reaction tank 304 to catalytically decompose the H2O2 in the ammonia nitrogen wastewater. The reacted wastewater flows into the ammonia nitrogen wastewater intermediate tank 305 through the connecting port for stabilization, and the organic wastewater enters the organic wastewater regulating tank 2 to balance the water quality and quantity. The first lifting pump 301 on the outer wall of the organic wastewater regulating tank 2 lifts the organic wastewater to the wastewater pH regulating main tank 306 through the first lifting pipe 302, and the second lifting pump 310 sends the ammonia nitrogen wastewater in the ammonia nitrogen wastewater intermediate tank 305 into the wastewater pH regulating main tank 306 through the second lifting pipe 311, and adjusts the wastewater in the wastewater pH regulating main tank 306 to neutral, and regulates The good wastewater enters the hydrolysis acidification tank 307 through the connecting port, and the macromolecular organic matter in the wastewater is decomposed into small molecules by hydrolytic bacteria and acidifying bacteria and part of the COD in the water is removed. The wastewater after the reaction enters the anoxic aerobic tank 308 to remove organic matter and ammonia nitrogen in the water. After the wastewater in the anoxic aerobic tank 308 is treated, it enters the MBR tank 309 through the circulation port for mud and water separation. After the mud and water are separated, the water production pump 312 extracts the water from the MBR tank 309 and pumps it into the intermediate equalization tank 314 to balance the water quantity and quality. The balanced water is filtered through the quartz sand filter 316, the activated carbon filter 317 and the security filter 318 in turn to remove suspended matter and colloid, and then sent to the RO equipment 320 through the booster pump 319 for separation and purification.The purified water from the RO device 320 enters the return water tank 321 for storage.

[0030] The work flow of the utility model: When the semiconductor ammonia nitrogen and organic wastewater recycling system designed by the present invention is in operation, the ammonia nitrogen wastewater enters the ammonia nitrogen wastewater regulating tank 1 to balance the water quality and water quantity, the first lifting pump 301 on the outer wall of the ammonia nitrogen wastewater regulating tank 1 lifts the ammonia nitrogen wastewater to the ammonia nitrogen wastewater pH regulating tank 303 through the first lifting pipe 302, sulfuric acid and sodium hydroxide are added to the ammonia nitrogen wastewater pH regulating tank 303, and after the pH value of the ammonia nitrogen wastewater is adjusted to neutral, the ammonia nitrogen wastewater flows along the flow port into the ammonia nitrogen wastewater reaction tank 304 , add H2O2 catalyst to the ammonia nitrogen wastewater reaction tank 304 to catalytically decompose the H2O2 in the ammonia nitrogen wastewater, the wastewater after the reaction flows into the ammonia nitrogen wastewater intermediate tank 305 through the connecting port to stabilize, the organic wastewater enters the organic wastewater regulating tank 2 to balance the water quality and quantity, the first lifting pump 301 on the outer wall of the organic wastewater regulating tank 2 lifts the organic wastewater to the wastewater pH adjustment total tank 306 through the first lifting pipe 302, and the second lifting pump 310 lifts the ammonia nitrogen in the ammonia nitrogen wastewater intermediate tank 305 through the second lifting pipe 311 The wastewater is sent to the wastewater pH adjustment tank 306, and the wastewater in the wastewater pH adjustment tank 306 is adjusted to neutral. The adjusted wastewater enters the hydrolysis acidification tank 307 through the connecting port, and the large molecular organic matter in the wastewater is decomposed into small molecules by hydrolysis bacteria and acidification bacteria and part of the COD in the water is removed. The wastewater after the reaction enters the anoxic aerobic tank 308 to remove organic matter and ammonia nitrogen in the water. After the wastewater in the anoxic aerobic tank 308 is treated, it enters the MBR tank 309 through the connecting port for mud and water separation. After the mud and water are separated, the product The water pump 312 draws the produced water from the MBR tank 309 and pumps it into the intermediate equalizing tank 314 to balance the water quantity and quality. The balanced produced water is filtered through the quartz sand filter 316, the activated carbon filter 317 and the security filter 318 in turn to remove suspended matter and colloids, and then sent to the RO equipment 320 for separation and purification through the booster pump 319. The produced water purified by the RO equipment 320 enters the return water tank 321 for storage, and the return water in the return water tank 321 flows into the intermediate equalizing tank 314 through the return water pipe for reuse.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor ammonia nitrogen and organic wastewater recycling system, comprising an ammonia nitrogen wastewater regulating tank (1) and an organic wastewater regulating tank (2), characterized in that: A recycling mechanism (3) is provided on the right side of the ammonia nitrogen wastewater regulating tank (1) and the organic wastewater regulating tank (2); The recycling mechanism (3) comprises a first lifting pump (301) fixedly connected to the right side of the inner wall of the ammonia nitrogen wastewater regulating tank (1) and the organic wastewater regulating tank (2); a first lifting pipe (302) is fixedly connected to the water outlet of the first lifting pump (301); an ammonia nitrogen wastewater pH regulating tank (303), an ammonia nitrogen wastewater reaction tank (304) and an ammonia nitrogen wastewater intermediate tank (305) are arranged in sequence on the right side of the ammonia nitrogen wastewater regulating tank (1) from left to right; and ammonia nitrogen wastewater pH regulating tank (303), an ammonia nitrogen wastewater reaction tank (304) and an ammonia nitrogen wastewater intermediate tank (305) are arranged in sequence on the right side of the organic wastewater regulating tank (2) from left to right. A wastewater pH adjustment main tank (306), a hydrolysis acidification tank (307), an anoxic aerobic tank (308) and an MBR tank (309) are sequentially arranged. A second lifting pump (310) is installed on the front of the inner wall of the ammonia nitrogen wastewater intermediate tank (305). A second lifting pipe (311) is fixedly connected to the water outlet of the second lifting pump (310). The ammonia nitrogen wastewater pH adjustment tank (303), the ammonia nitrogen wastewater reaction tank (304), the ammonia nitrogen wastewater intermediate tank (305) and the wastewater pH adjustment main tank (306) are sequentially arranged. 06), the hydrolysis acidification tank (307), the anoxic aerobic tank (308), and the MBR tank (309) are connected through a connecting port, a water production pump (312) is arranged on the outer wall of the MBR tank (309), a water production pipe (313) is fixedly connected to the water outlet of the water production pump (312), an intermediate equalization tank (314) is arranged at one end of the water production pipe (313) away from the water production pump (312), and third lifting pumps (315) are arranged on the right side of the intermediate equalization tank (314) from left to right. , a quartz sand filter (316), an activated carbon filter (317) and a security filter (318); the security filter (318) is connected to the RO device (320) via a booster pump (319); a return water tank (321) is provided on the right side of the RO device (320); the quartz sand filter (316), the activated carbon filter (317), the security filter (318), the RO device (320) and the return water tank (321) are all connected via a delivery pipe (322).

2. A semiconductor ammonia nitrogen and organic wastewater recycling system according to claim 1, characterized in that: Aeration pipelines are provided in both the ammonia nitrogen wastewater regulating tank (1) and the organic wastewater regulating tank (2).

3. A semiconductor ammonia nitrogen and organic wastewater recycling system according to claim 1, characterized in that: The ammonia nitrogen wastewater pH adjustment tank (303) is provided with a stirrer, a pH meter and a dosing pipe, and the ammonia nitrogen wastewater reaction tank (304) is provided with a H2O2 meter, a stirrer and a H2O2 catalyst dosing pipe.

4. A semiconductor ammonia nitrogen and organic wastewater recycling system according to claim 1, characterized in that: The wastewater pH adjustment main tank (306) is provided with a mixer, a pH meter, and sulfuric acid and sodium hydroxide dosing pipes; the hydrolysis acidification tank (307) is provided with a submersible mixer and fillers; the anoxic zone of the anoxic aerobic tank (308) is provided with a submersible mixer, and the aerobic zone is provided with an aeration device; the first riser (302) and the ammonia nitrogen wastewater pH adjustment tank (303), the first riser (302) and the wastewater pH adjustment main tank (306), and the second riser (311) and the wastewater pH adjustment main tank (306) are all connected in a fixed manner.

5. A semiconductor ammonia nitrogen and organic wastewater recycling system according to claim 1, characterized in that: The anoxic aerobic tank (308) is divided into an aerobic area and an anoxic area, and the two areas are separated by a partition and connected by a connecting port. The anoxic area of ​​the anoxic aerobic tank (308) is provided with a carbon source and nutrient salt dosing pipe, and a hanging filler, and the aerobic area is provided with an aeration plate and a combined filler, and a nitrification liquid reflux pump is provided.

6. A semiconductor ammonia nitrogen and organic wastewater recycling system according to claim 1, characterized in that: A non-oxidizing bactericide is added before the quartz sand filter (316), and a scale inhibitor is added before the security filter (318). The filtration rate of the quartz sand filter (316) is 12 m / h, the filtration rate of the activated carbon filter (317) is 10 m / h, and the pore size of the security filter (318) is 1 μm.

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