One-way annealing furnace

Abstract

The utility model relates to the technical field of annealing furnaces, and particularly discloses a one-way annealing furnace which comprises a furnace body, a first conveying frame and a second conveying frame which are arranged at two ends of the furnace body and are used for conveying, and a jacking transmission mechanism positioned between the first conveying frame and the second conveying frame. The supporting plate and the conveying mechanism on the supporting plate can be lifted to the height matched with the conveying frame through the jacking conveying mechanism, so that workpieces can be conveniently moved into or out of the annealing furnace in a one-way mode, and meanwhile the jacking conveying mechanism can drive the workpieces on the conveying mechanism to move to the position corresponding to a heating assembly in the annealing furnace. Therefore, the heating effect of the annealing furnace is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of annealing furnaces, in particular to a one-way annealing furnace. Background Art

[0002] Annealing involves heating the crystal ingot at high temperatures to disrupt and rearrange the crystal lattice, eliminating internal defects and releasing internal stress, thus paving the way for subsequent processing. The performance of the wafers cut from the annealed crystal ingot is significantly improved, while also increasing the yield rate. Existing annealing processes typically involve using an annealing furnace.

[0003] Currently, most annealing furnaces use a conveying mechanism to transport workpieces into the furnace body. Therefore, the position of the workpiece placed in the furnace body is generally flush with the conveying mechanism, but the heating components in the annealing furnace body do not completely correspond to the position of the conveying mechanism. Therefore, there is a problem that the workpiece to be annealed is far away from the heating components, resulting in poor heating effect of the annealing furnace and affecting the annealing effect. Utility Model Content

[0004] Purpose of the utility model: The technical problem to be solved by the utility model is to provide a one-way annealing furnace to solve the problems raised in the above background technology.

[0005] Technical solution: The one-way annealing furnace of the utility model comprises a furnace body, a first conveying frame and a second conveying frame for conveying provided at both ends of the furnace body, and a lifting and transmission mechanism located between the first conveying frame and the second conveying frame;

[0006] The lifting transmission mechanism includes a fixed plate, a first motor and a cavity block are respectively provided at the bottom of the fixed plate, a slotted tooth rod is provided in the inner cavity of the cavity block, the driving end of the first motor passes through the outer wall of the cavity block and is connected to a tooth rod engaged with the slotted tooth rod, the top of the slotted tooth rod is fixedly connected to the bottom block, and the top of the bottom block is connected to a support plate;

[0007] The upper surface of the support plate is connected to two oppositely arranged vertical plates, and a transmission mechanism for workpiece transmission is provided on the vertical plates; the transmission mechanism includes driven gears rotatably arranged on both sides of the inner cavity of the plate body, a driving gear meshing with the outer wall of the driven gear, a transmission shaft rotatably connected between the vertical plates for driving the driving gear, and a transmission chain transmission-connected between the driven gears on both sides.

[0008] Furthermore, a heating box for annealing treatment is provided on the top of the annealing furnace and at a corresponding position of the lifting and transmission mechanism.

[0009] Furthermore, the bottom of the heating box of the annealing furnace is provided with an opening matching the lifting and transmission mechanism.

[0010] Furthermore, the lifting and transmission mechanism of the annealing furnace also includes a support leg arranged in the inner cavity of the furnace body, and the fixing plate is arranged on the top of the support leg.

[0011] Furthermore, a sprocket is installed on the outer wall of the transmission shaft of the annealing furnace, and a second motor is installed on the upper surface of the fixed plate. The second motor is connected to the sprocket through a chain.

[0012] Furthermore, sleeves are installed around the supporting end of the fixed plate of the annealing furnace, the inner cavity of the sleeve is slidably connected to the displacement column, and the support plate is fixedly connected to the top of the displacement column.

[0013] Furthermore, the side wall of the annealing furnace is also provided with an inspection window.

[0014] Beneficial effect: Compared with the prior art, the advantages of the present invention are as follows: the annealing furnace places the workpiece on the second conveyor rack for transportation, controls the first motor to operate, and the bottom block connected to the top of the slotted tooth rod is pushed by the slotted tooth rod, which will drive the support plate to vertically displace, thereby moving the lifting transmission mechanism to a height matching the first conveyor rack and the second conveyor rack to achieve the reception of the workpiece, and then the workpiece can be pushed into the annealing furnace at a position corresponding to the position of the heating machine assembly in the furnace for annealing treatment; at the same time, the sleeve connected to the upper surface of the fixed plate cooperates with the displacement column to assist in lifting the support plate upward. After the support plate is lifted upward, the displacement column to which it is connected will be displaced in the inner cavity of the sleeve to improve the stability of the support plate movement, so the structure is more optimized and the design is more reasonable. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a structural schematic diagram of a one-way annealing furnace of the present invention.

[0016] Figure 2 This is a cross-sectional view of the furnace body in the one-way annealing furnace of the utility model.

[0017] Figure 3 This is a structural diagram of the jacking and transmission mechanism in the one-way annealing furnace of the utility model.

[0018] Figure 4 This is an assembly diagram of the driving gear and the driven gear in the one-way annealing furnace of the utility model;

[0019] Figure 5 This is a schematic diagram of the connection between the rack rod and the grooved rack rod of the utility model;

[0020] Figure 6 This is a structural diagram of the connection between the driven gear and the chain of the utility model.

[0021] In the figure: 1. furnace body; 2. first conveyor frame; 3. inspection window; 4. heating box; 5. second conveyor frame; 6. lifting transmission mechanism; 7. fixing plate; 8. supporting leg; 9. sleeve; 10. displacement column; 11. vertical plate; 12. driving gear; 13. first motor; 14. second motor; 15. transmission shaft; 16. sprocket; 17. transmission chain; 18. support plate; 19. driven gear; 20. gear rod; 21. cavity block; 22. grooved gear rod; 23. bottom block. DETAILED DESCRIPTION

[0022] The technical solution of the present utility model is further described in detail below with reference to the accompanying drawings.

[0023] like Figures 1 to 3 As shown, the one-way annealing furnace of the present invention includes a furnace body 1, a heating box 4 fixedly arranged on the top of the furnace body 1 for heating, and a first conveyor frame 2 and a second conveyor frame 5 fixedly arranged at both ends of the furnace body 1 for conveying, and a lifting and transmission mechanism 6 is provided between the first conveyor frame 2 and the second conveyor frame 5;

[0024] The lifting and conveying mechanism 6 includes a supporting leg 8 provided in the inner cavity of the furnace body 1, a fixing plate 7 fixedly provided on the top of the supporting leg 8, a supporting plate 18 fixedly provided at the supporting end of the fixing plate 7, a vertical plate 11 fixedly provided on the upper surface of the supporting plate 18, and a conveying mechanism provided on the vertical plate 11 for transferring the workpiece;

[0025] like Figure 4 and Figure 6 As shown, the vertical plate 11 includes two oppositely arranged plate bodies, and the transmission mechanism includes a driven gear 19 rotatably arranged on both sides of the plate body cavity, a driving gear 12 meshing with the outer wall of the driven gear 19, a transmission shaft 15 rotatably connected between the vertical plates 11 for driving the driving gear 12, and a transmission chain 17 transmitted and connected between the driven gears 19 on both sides. At the same time, a sprocket 16 is installed on the outer wall of the transmission shaft 15, and a second motor 14 is installed on the upper surface of the fixed plate 7. The motor 14 is connected to the sprocket 16 through a chain. In this way, the sprocket 16 is driven by the second motor 14 to rotate, and the sprocket in turn drives the transmission shaft 15 to rotate. The transmission shaft 15 in turn drives the driving gear 12 to rotate, and the driving gear 12 in turn drives the driven gear 19 to rotate. The driven gear 19 in turn drives the transmission chain 17 to transmit, thereby realizing the transmission of the workpiece transmitted by the first conveyor rack;

[0026] It should be noted that the number of driven gears 19 meshing with the driving gear 12 can be two. In this way, one of the driven gears 19 is meshed with the driving gear 12 so as to be driven to rotate the transmission shaft 15, and the other driven gear 19 is connected to the chain drive to realize the transmission of the chain.

[0027] When in use, after the support plate 18 is pulled down and returned to its position horizontally with the first conveyor frame 2, the second motor 14 is controlled to operate, and the chain connected to the driving end of the second motor 14 is connected to the sprocket 16, that is, the sprocket 16 is driven to rotate, thereby the transmission shaft 15 connected to the axial center of the sprocket 16 rotates, and then the driving gear 12 installed on the transmission shaft 15 rotates, driving the driven gear 19 meshing with the driving gear 12 to rotate, thereby driving the transmission chain 17 to transfer the workpiece to be heated from the first conveyor frame 2 to the transmission chain 17 of the vertical plate 11.

[0028] like Figure 5 As shown, sleeves 9 are installed around the supporting end of the fixed plate 7. The inner cavity of the sleeve 9 is slidably connected to the displacement column 10, and the support plate 18 is fixedly connected to the top of the displacement column 10. The bottom of the fixed plate 7 is respectively provided with a first motor 13 and a cavity block 21. A slotted gear rod 22 is provided in the inner cavity of the cavity block 21. The driving end of the first motor 13 passes through the outer wall of the cavity block 21 and is connected to a gear rod 20 that meshes with the slotted gear rod 22. At the same time, the top of the slotted gear rod 22 is fixedly connected to a bottom block 23, and the top of the bottom block 23 is fixedly connected to the support plate 18. In this way, when the first motor 13 is working, it drives the gear rod 20 to rotate. Since the gear rod is meshed with the slotted gear rod 22, the gear rod will drive the slotted gear rod to move vertically when it rotates, realizing the lifting transmission of the slotted gear rod 22, thereby driving the support plate 18 to move up and down. It should be noted that the outer wall of the grooved toothed rod 22 is provided with tooth openings, and the outer wall of the gear rod 20 is installed with a gear, and the gear on the gear rod 20 is used to drive the grooved toothed rod 22 to move up and down.

[0029] The bottom of the heating box 4 is provided with an opening that matches the lifting and conveying mechanism 6, so as to facilitate the annealing treatment of the workpiece after the top end of the lifting and conveying mechanism is lifted.

[0030] In addition, a maintenance window 3 is provided on the side wall of the furnace body 1. The maintenance window 3 facilitates maintenance work on the one-way annealing furnace.

[0031] When in use, the workpiece is placed on the first conveyor frame 2 for transmission, and the first motor 13 is controlled to operate. After the bottom block 23 connected to the top of the slotted tooth rod 22 is pushed by the slotted tooth rod, it will drive the support plate 18 to move vertically, thereby moving the jacking and transmission mechanism to a height matching the first conveyor frame 2 to achieve the acceptance of the workpiece, and then the workpiece can be pushed into the annealing furnace and the position corresponding to the heating machine assembly in the furnace for annealing treatment; at the same time, the sleeve 9 connected to the upper surface of the fixed plate 7 cooperates with the displacement column 10 to assist in the upward lifting of the support plate 18. After the support plate is lifted upward, the displacement column 10 to which it is connected will be displaced in the inner cavity of the sleeve 9 to improve the stability of the support plate movement. After annealing is completed, when the jacking and transmission mechanism moves the workpiece to the position corresponding to the second conveyor frame, the workpiece can be transferred to the second conveyor frame through the transmission of the transmission chain 17 to achieve one-way conveying of the workpiece for annealing treatment.

[0032] Therefore, the present invention can lift the support plate and the conveying mechanism thereon to a height matching the conveying frame through the jacking conveying mechanism, thereby facilitating the one-way movement of the workpiece into or out of the annealing furnace. At the same time, the jacking conveying mechanism can drive the workpiece on the conveying mechanism to move to a position corresponding to the position of the heating component in the annealing furnace, thereby improving the heating effect of the annealing furnace.

Claims

1. A one-way annealing furnace, characterized in that: The one-way annealing furnace comprises a furnace body (1), a first conveying frame (2) and a second conveying frame (5) for conveying, which are arranged at both ends of the furnace body (1), and a lifting and conveying mechanism (6) located between the first conveying frame (2) and the second conveying frame (5); The lifting transmission mechanism (6) comprises a fixed plate (7), a first motor (13) and a cavity block (21) are respectively arranged at the bottom of the fixed plate (7), a slotted toothed rod (22) is arranged in the inner cavity of the cavity block (21), a driving end of the first motor (13) passes through the outer wall of the cavity block (21) and is connected to a toothed rod (20) meshing with the slotted toothed rod (22), a bottom block (23) is fixedly connected to the top of the slotted toothed rod (22), and a support plate (18) is connected to the top of the bottom block (23); The upper surface of the support plate (18) is connected to two oppositely arranged vertical plates (11), and the vertical plates (11) are provided with a transmission mechanism for workpiece transmission; the transmission mechanism comprises driven gears (19) rotatably arranged on both sides of the inner cavity of the plate body, a driving gear (12) meshingly arranged on the outer wall of the driven gear (19), a transmission shaft (15) rotatably connected between the vertical plates (11) for driving the driving gear (12), and a transmission chain (17) transmission-connected between the driven gears (19) on both sides.

2. The one-way annealing furnace according to claim 1, characterized in that: A heating box (4) for annealing treatment is provided at the top of the furnace body (1) and at a position corresponding to the lifting and transmission mechanism (6).

3. The one-way annealing furnace according to claim 2, characterized in that: The bottom of the heating box (4) is provided with an opening matching the lifting and transmission mechanism (6).

4. The one-way annealing furnace according to claim 1, characterized in that: The lifting and transmission mechanism (6) also includes a support leg (8) arranged in the inner cavity of the furnace body (1), and the fixing plate (7) is arranged on the top of the support leg (8).

5. The one-way annealing furnace according to claim 1, characterized in that: A sprocket (16) is installed on the outer wall of the transmission shaft (15), and a second motor (14) is installed on the upper surface of the fixed plate (7). The second motor (14) is connected to the sprocket (16) through a chain.

6. The one-way annealing furnace according to claim 1, characterized in that: Sleeves (9) are installed around the supporting end of the fixed plate (7), the inner cavity of the sleeve (9) is slidably connected to a displacement column (10), and the support plate (18) is fixedly connected to the top of the displacement column (10).

7. The one-way annealing furnace according to claim 1, characterized in that: The side wall of the furnace body (1) is also provided with an inspection window (3).

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